COBALT CHEMISTRY FOR SMOOTH TOPOLOGY

    公开(公告)号:US20210180200A1

    公开(公告)日:2021-06-17

    申请号:US16713871

    申请日:2019-12-13

    Abstract: An electroplated cobalt deposit and a method of electrodepositing cobalt on a surface to produce a level deposit across the surface of the substrate. The cobalt electrolyte contains (1) a source of cobalt ions; (2) boric acid; (3) a pH adjuster; and (4) an organic additive, which contains a suppressor. The electroplated cobalt deposit exhibits a level surface such that the thickness difference across substantially the entire surface of the substrate of less than about 200 nm.

    COBALT CHEMISTRY FOR SMOOTH TOPOLOGY

    公开(公告)号:US20220136123A1

    公开(公告)日:2022-05-05

    申请号:US17524450

    申请日:2021-11-11

    Abstract: An electroplated cobalt deposit and a method of electrodepositing cobalt on a surface to produce a level deposit across the surface of the substrate. The cobalt electrolyte contains (1) a source of cobalt ions; (2) boric acid; (3) a pH adjuster; and (4) an organic additive, which contains a suppressor. The electroplated cobalt deposit exhibits a level surface such that the thickness difference across substantially the entire surface of the substrate of less than about 200 nm.

    Cobalt chemistry for smooth topology

    公开(公告)号:US11230778B2

    公开(公告)日:2022-01-25

    申请号:US16713871

    申请日:2019-12-13

    Abstract: An electroplated cobalt deposit and a method of electrodepositing cobalt on a surface to produce a level deposit across the surface of the substrate. The cobalt electrolyte contains (1) a source of cobalt ions; (2) boric acid; (3) a pH adjuster; and (4) an organic additive, which contains a suppressor. The electroplated cobalt deposit exhibits a level surface such that the thickness difference across substantially the entire surface of the substrate of less than about 200 nm.

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