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    IMAGE FORMATION METHOD AND IMAGE FORMATION DEVICE
    1.
    发明申请
    IMAGE FORMATION METHOD AND IMAGE FORMATION DEVICE 审中-公开
    图像形成方法和图像形成装置

    公开(公告)号：US20110286685A1

    公开(公告)日：2011-11-24

    申请号：US13131750

    申请日：2009-10-15

    申请人： Makoto Nishihara ,  Kyoungmo Yang ,  Yoshihiro Oyabu

    发明人： Makoto Nishihara ,  Kyoungmo Yang ,  Yoshihiro Oyabu

    IPC分类号： G06K9/36

    CPC分类号： G01B15/00 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2817

    摘要： Provided are an image formation method and a charged particle beam device which can accurately measure a plurality of objects to be measured and contained in an image by executing a small number of scans. For this, a scan line is set in a direction other than the edge direction of a plurality of objects to be measured and contained in the image view field and the charged particle beam is scanned according to the setting. Provided also are a method and a device for setting a scan line direction in an appropriate direction not affected by the pattern deformation or the like. For this, a direction of disconnection between two patterns to be connected is obtained according to the deformation of the two patterns and a scan line is set in the direction determined according to the one of more directions of disconnection.

    摘要翻译： 提供了一种图像形成方法和带电粒子束装置，其可以通过执行少量扫描来精确地测量待测量的多个物体并包含在图像中。 为此，将扫描线设置在多个被测量物体的边缘方向以外的方向上，并将其包含在图像视野中，并根据该设定对带电粒子束进行扫描。 还提供了用于在不受图案变形等影响的适当方向上设置扫描线方向的方法和装置。 为此，根据两个图案的变形获得要连接的两个图案之间的断开方向，并且根据多个断开方向确定的方向设置扫描线。

    TEMPLATE CREATION METHOD AND IMAGE PROCESSOR THEREFOR
    2.
    发明申请
    TEMPLATE CREATION METHOD AND IMAGE PROCESSOR THEREFOR 有权
    模式创建方法及其图像处理器

    公开(公告)号：US20090304286A1

    公开(公告)日：2009-12-10

    申请号：US12399367

    申请日：2009-03-06

    申请人： Kyoungmo Yang ,  Makoto Nishihara ,  Shunsuke Koshihara

    发明人： Kyoungmo Yang ,  Makoto Nishihara ,  Shunsuke Koshihara

    IPC分类号： G06K9/62

    CPC分类号： G01N21/95607 ,  G01N2021/95615

    摘要： An object of the present invention is to maintain the ease with which a template is created based on design data without acquiring an actual image, which is achieved by providing the template with equivalent information contained by a template used for image recognition that involves same-type image comparison, and to improve image recognition performance by increasing the matching rate between a template and an actual image.To achieve the above object, the present invention provides a method, apparatus, and program for creating based on design data a template that is used for image recognition, wherein luminance information is set for each area in the template based on the material information of the region defined by the template. Specifically, the luminance information is set based on at least one of information from among the above material information, the pattern size information of a pattern arranged in the region defined by the template, the setup conditions of an imaging apparatus, the layer information of the region defined by the template, and the outline information of a pattern.

    摘要翻译： 本发明的目的是基于设计数据来保持创建模板的容易性，而不获取实际图像，该实际图像通过向模板提供包含用于图像识别的模板所包含的相同信息而实现，该模板涉及相同类型 图像比较，并通过增加模板和实际图像之间的匹配率来提高图像识别性能。 为了实现上述目的，本发明提供了一种用于基于设计数据创建用于图像识别的模板的方法，装置和程序，其中基于模板的材料信息为模板中的每个区域设置亮度信息 区域由模板定义。 具体地说，根据上述材料信息中的至少一个信息，布置在由模板定义的区域中的图案的图案尺寸信息，成像装置的设置条件， 由模板定义的区域，以及模式的轮廓信息。

    Template creation method and image processor therefor
    3.
    发明授权
    Template creation method and image processor therefor 有权
    模板创建方法和图像处理器

    公开(公告)号：US08180140B2

    公开(公告)日：2012-05-15

    申请号：US12399367

    申请日：2009-03-06

    申请人： Kyoungmo Yang ,  Makoto Nishihara ,  Shunsuke Koshihara

    发明人： Kyoungmo Yang ,  Makoto Nishihara ,  Shunsuke Koshihara

    IPC分类号： G06K9/00

    CPC分类号： G01N21/95607 ,  G01N2021/95615

    摘要： To create a template for use in image recognition based on design data, luminance information is set for each area in the template based on the information regarding the region defined by the template. The luminance information may be set based on material information, pattern size information of a pattern arranged in the region defined by the template, and layer information of the region defined by the template. Alternatively, luminance information may be set based on material information, setup conditions of the scanning electron microscope, and pattern outline information of a pattern arranged in the region defined by the template.

    摘要翻译： 为了基于设计数据创建用于图像识别的模板，基于关于由模板定义的区域的信息，为模板中的每个区域设置亮度信息。 亮度信息可以基于材料信息，布局在由模板定义的区域中的图案的图案尺寸信息以及由模板定义的区域的层信息来设置。 或者，可以基于材料信息，扫描电子显微镜的设置条件和布置在由模板限定的区域中的图案的图案轮廓信息来设置亮度信息。

    Charged particle beam apparatus for removing charges developed on a region of a sample
    4.
    发明授权
    Charged particle beam apparatus for removing charges developed on a region of a sample 有权
    用于去除在样品区域上产生的电荷的带电粒子束装置

    公开(公告)号：US09202665B2

    公开(公告)日：2015-12-01

    申请号：US13981952

    申请日：2011-11-30

    申请人： Hiroyuki Matsui ,  Osamu Komuro ,  Makoto Nishihara ,  Zhaohui Cheng

    发明人： Hiroyuki Matsui ,  Osamu Komuro ,  Makoto Nishihara ,  Zhaohui Cheng

    IPC分类号： H01J37/28 ,  H01J37/02

    CPC分类号： H01J37/026 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/047

    摘要： Provided is a charged particle beam apparatus adapted so that even when an additional device is not mounted in the charged particle beam apparatus, the apparatus rapidly removes, by neutralizing, a local charge developed on a region of a sample that has been irradiated with a charged particle beam.After charged particle beam irradiation for measurement of the sample, the apparatus controls a retarding voltage or/and an accelerating voltage at a stage previous to a next measurement, and then neutralizes an electric charge by reducing a difference between a value of the retarding voltage and that of the accelerating voltage to a value smaller than during the currently ongoing measurement.The charged particle beam achieves neutralizing without reducing throughput, since the local charge developed on the region of the sample that has been irradiated with the charged particle beam is removed, even without an additional device mounted in the apparatus.

    摘要翻译： 提供一种带电粒子束装置，其适于使得即使附加装置未安装在带电粒子束装置中，该装置通过中和在已经被充电的照射的样品的区域上产生的局部电荷， 粒子束。 在用于测量样品的带电粒子束照射之后，该装置在下一次测量之前的阶段控制延迟电压和/或加速电压，然后通过减小延迟电压的值和 加速电压的值小于当前正在进行的测量中的值。 带电粒子束实现中和而不降低生产量，因为即使没有安装在装置中的附加装置，在被带电粒子束照射的样品区域上产生的局部电荷被去除。

    CHARGED PARTICLE BEAM APPARATUS
    7.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 有权
    充电颗粒光束装置

    公开(公告)号：US20140027635A1

    公开(公告)日：2014-01-30

    申请号：US13981952

    申请日：2011-11-30

    申请人： Hiroyuki Matsui ,  Osamu Komuro ,  Makoto Nishihara ,  Zhaohui Cheng

    发明人： Hiroyuki Matsui ,  Osamu Komuro ,  Makoto Nishihara ,  Zhaohui Cheng

    IPC分类号： H01J37/02

    CPC分类号： H01J37/026 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/047

    摘要： Provided is a charged particle beam apparatus adapted so that even when an additional device is not mounted in the charged particle beam apparatus, the apparatus rapidly removes, by neutralizing, a local charge developed on a region of a sample that has been irradiated with a charged particle beam.After charged particle beam irradiation for measurement of the sample, the apparatus controls a retarding voltage or/and an accelerating voltage at a stage previous to a next measurement, and then neutralizes an electric charge by reducing a difference between a value of the retarding voltage and that of the accelerating voltage to a value smaller than during the currently ongoing measurement.The charged particle beam achieves neutralizing without reducing throughput, since the local charge developed on the region of the sample that has been irradiated with the charged particle beam is removed, even without an additional device mounted in the apparatus.

    摘要翻译： 提供一种带电粒子束装置，其适于使得即使附加装置未安装在带电粒子束装置中，该装置通过中和在已经被充电的照射的样品的区域上产生的局部电荷， 粒子束。 在用于测量样品的带电粒子束照射之后，该装置在下一次测量之前的阶段控制延迟电压和/或加速电压，然后通过减小延迟电压的值和 加速电压的值小于当前正在进行的测量中的值。 带电粒子束实现中和而不降低生产量，因为即使没有安装在装置中的附加装置，在被带电粒子束照射的样品区域上产生的局部电荷被去除。