公开(公告)号：US08426830B2

公开(公告)日：2013-04-23

申请号：US12613107

申请日：2009-11-05

申请人： Makoto Sato ,  Masahiro Kiyohara ,  Junichi Tashiro

发明人： Makoto Sato ,  Masahiro Kiyohara ,  Junichi Tashiro

IPC分类号： G21G4/00

CPC分类号： H01J37/3056 ,  H01J37/222 ,  H01J37/304 ,  H01J2237/221 ,  H01J2237/24507 ,  H01J2237/30416 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A focused ion beam apparatus includes: a focused ion beam irradiating mechanism configured to irradiate a sample with a focused ion beam; a detector configured to detect a secondary charged particle generated by irradiating the sample with the focused beam; an image generating unit configured to generate an sample image of the sample; a processing area setting unit configured to set a processing area image including a plurality of pixels corresponding to positions of irradiation of the focused ion beam on the sample image; a position of irradiation setting unit configured to set coordinates of the pixels included in the processing area image; a beam setting unit configured to set a dose amount of the focused ion beam irradiated from the focused ion beam irradiating mechanism according to intensities; and an interpolating unit configured to perform an interpolating process on the processing area image.

摘要翻译： 聚焦离子束装置包括：聚焦离子束照射机构，被配置为用聚焦离子束照射样品; 检测器，被配置为检测通过用所述聚焦光束照射所述样品而产生的二次带电粒子; 图像生成单元，被配置为生成样本的样本图像; 处理区域设定单元，被配置为将包括与所述聚焦离子束的照射位置对应的多个像素的处理区域图像设置在所述样本图像上; 被配置为设置包括在处理区域图像中的像素的坐标的照射设置单元的位置; 光束设定单元，被配置为根据强度设定从所述聚焦离子束照射机构照射的聚焦离子束的剂量; 以及被配置为对所述处理区域图像执行内插处理的内插单元。

公开(公告)号：US20100155624A1

公开(公告)日：2010-06-24

申请号：US12613107

申请日：2009-11-05

申请人： Makoto Sato ,  Masahiro Kiyohara ,  Junichi Tashiro

发明人： Makoto Sato ,  Masahiro Kiyohara ,  Junichi Tashiro

IPC分类号： H01J37/08 ,  G21K5/04

CPC分类号： H01J37/3056 ,  H01J37/222 ,  H01J37/304 ,  H01J2237/221 ,  H01J2237/24507 ,  H01J2237/30416 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A focused ion beam apparatus includes: a focused ion beam irradiating mechanism configured to irradiate a sample with a focused ion beam; a detector configured to detect a secondary charged particle generated by irradiating the sample with the focused beam; an image generating unit configured to generate an sample image of the sample; a processing area setting unit configured to set a processing area image including a plurality of pixels corresponding to positions of irradiation of the focused ion beam on the sample image; a position of irradiation setting unit configured to set coordinates of the pixels included in the processing area image; a beam setting unit configured to set a dose amount of the focused ion beam irradiated from the focused ion beam irradiating mechanism according to intensities; and an interpolating unit configured to perform an interpolating process on the processing area image.

摘要翻译： 聚焦离子束装置包括：聚焦离子束照射机构，被配置为用聚焦离子束照射样品; 检测器，被配置为检测通过用所述聚焦光束照射所述样品而产生的二次带电粒子; 图像生成单元，被配置为生成样本的样本图像; 处理区域设定单元，被配置为将包括与所述聚焦离子束的照射位置对应的多个像素的处理区域图像设置在所述样本图像上; 被配置为设置包括在处理区域图像中的像素的坐标的照射设置单元的位置; 光束设定单元，被配置为根据强度设定从所述聚焦离子束照射机构照射的聚焦离子束的剂量; 以及被配置为对所述处理区域图像执行内插处理的内插单元。

公开(公告)号：US08542275B2

公开(公告)日：2013-09-24

申请号：US12880626

申请日：2010-09-13

申请人： Masahiro Kiyohara ,  Makoto Sato ,  Haruo Takahashi ,  Junichi Tashiro

发明人： Masahiro Kiyohara ,  Makoto Sato ,  Haruo Takahashi ,  Junichi Tashiro

IPC分类号： H04N7/18

CPC分类号： G01N23/2255

摘要： A cross-section processing and observation method includes: forming a first cross section in a sample by etching processing using a focused ion beam; obtaining image information of the first cross section by irradiating the focused ion beam to the first cross section; forming a second cross section by performing etching processing on the first cross section; obtaining image information of the second cross section by irradiating the focused ion beam to an irradiation region including the second cross section; displaying image information of a part of a display region of the irradiation region from the image information of the second cross section; displaying the image information of the first cross section by superimposing it on the image information being displayed; and moving the display region within the irradiation region. Observation images in which display regions are aligned can be obtained while reducing damage to the sample.

摘要翻译： 截面处理和观察方法包括：通过使用聚焦离子束的蚀刻处理在样品中形成第一横截面; 通过将聚焦的离子束照射到第一横截面来获得第一横截面的图像信息; 通过对所述第一横截面进行蚀刻处理形成第二横截面; 通过将聚焦离子束照射到包括第二横截面的照射区域来获得第二横截面的图像信息; 从第二横截面的图像信息中显示照射区域的显示区域的一部分的图像信息; 通过将第一横截面的图像信息叠加在正在显示的图像信息上来显示图像信息; 并且在照射区域内移动显示区域。 可以获得显示区域对准的观察图像，同时减少对样品的损伤。

公开(公告)号：US20110052044A1

公开(公告)日：2011-03-03

申请号：US12873886

申请日：2010-09-01

申请人： Haruo Takahashi ,  Masahiro Kiyohara ,  Makoto Sato ,  Junichi Tashiro

发明人： Haruo Takahashi ,  Masahiro Kiyohara ,  Makoto Sato ,  Junichi Tashiro

IPC分类号： G06T7/00

CPC分类号： G01N23/2255 ,  H01J2237/221

摘要： A cross-section processing and observation method includes: forming a cross section in a sample by a focused ion beam through etching processing; obtaining a cross-section observation image through cross-section observation by the focused ion beam; and forming a new cross section by performing etching processing in a region including the cross section and obtaining a cross-section observation image of the new cross section. A surface observation image of a region including a mark on the sample and the cross section is obtained. A position of the mark is recognized in the surface observation image and etching processing is performed on the cross section by setting, in reference to the position of the mark, a focused ion beam irradiation region in which to form the new cross section. Cross-section processing and observation is thus enabled continuously and efficiently using a focused ion beam apparatus having no SEM apparatus.

摘要翻译： 截面处理和观察方法包括：通过蚀刻处理通过聚焦离子束在样品中形成横截面; 通过聚焦离子束的横截面观察获得横截面观察图像; 并且通过在包括横截面的区域中进行蚀刻处理并获得新横截面的横截面观察图像来形成新的横截面。 获得包括样品上的标记和横截面的区域的表面观察图像。 在表面观察图像中识别标记的位置，并且通过关于标记的位置设置形成新横截面的聚焦离子束照射区域来对截面进行蚀刻处理。 因此，使用不具有SEM装置的聚焦离子束装置，能够连续有效地进行横截面加工和观察。

公开(公告)号：US20060118733A1

公开(公告)日：2006-06-08

申请号：US11286684

申请日：2005-11-23

申请人： Masahiro Kiyohara ,  Makoto Sato ,  Tatsuya Asahata

发明人： Masahiro Kiyohara ,  Makoto Sato ,  Tatsuya Asahata

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  H01J2237/317

摘要： A laser mark which will be the positioning mark for a secondary charged particle image in the charged particle beam apparatus is applied by moving the sample processing/observation area in the charged particle beam apparatus so as to come into the view field while performing an observation by an infrared microscope, and by a using a laser optical system disposed coaxially with an optical observation system, the mark made at the periphery of the processing/observation object area. Next, by a superposition of an infrared transmission image and a CAD data, the processing/observation object area and the laser mark are registered onto the CAD data. And, by a correlation of the registered data read from the charged particle beam apparatus and the secondary charged particle image, it is possible to accurately and easily determine the processing position.

摘要翻译： 作为带电粒子束装置中的二次带电粒子图像的定位标记的激光标记是通过移动带电粒子束装置中的样品处理/观察区域进行观察的场所，同时进行观察 通过使用与光学观察系统同轴设置的激光光学系统，在处理/观察对象区域的周围形成标记。 接下来，通过红外透射图像和CAD数据的叠加，将处理/观察对象区域和激光标记登记在CAD数据上。 并且，通过从带电粒子束装置读取的登录数据与二次带电粒子图像的相关性，可以准确且容易地确定处理位置。

公开(公告)号：US07459699B2

公开(公告)日：2008-12-02

申请号：US11286684

申请日：2005-11-23

申请人： Masahiro Kiyohara ,  Makoto Sato ,  Tatsuya Asahata

发明人： Masahiro Kiyohara ,  Makoto Sato ,  Tatsuya Asahata

IPC分类号： G01J1/00 ,  G01N21/00 ,  G01N23/00

CPC分类号： G01N23/225 ,  H01J2237/317

摘要： A laser mark which will be the positioning mark for a secondary charged particle image in the charged particle beam apparatus is applied by moving the sample processing/observation area in the charged particle beam apparatus so as to come into the view field while performing an observation by an infrared microscope, and by a using a laser optical system disposed coaxially with an optical observation system, the mark made at the periphery of the processing/observation object area. Next, by a superposition of an infrared transmission image and a CAD data, the processing/observation object area and the laser mark are registered onto the CAD data. And, by a correlation of the registered data read from the charged particle beam apparatus and the secondary charged particle image, it is possible to accurately and easily determine the processing position.

摘要翻译： 作为带电粒子束装置中的二次带电粒子图像的定位标记的激光标记是通过移动带电粒子束装置中的样品处理/观察区域进行观察的场所，同时进行观察 通过使用与光学观察系统同轴设置的激光光学系统，在处理/观察对象区域的周围形成标记。 接下来，通过红外透射图像和CAD数据的叠加，将处理/观察对象区域和激光标记登记在CAD数据上。 并且，通过从带电粒子束装置读取的登录数据与二次带电粒子图像的相关性，可以准确且容易地确定处理位置。

公开(公告)号：US20140028873A1

公开(公告)日：2014-01-30

申请号：US14110679

申请日：2012-04-04

申请人： Mirai Higuchi ,  Masahiro Kiyohara ,  Takeshi Shima ,  Tatsuhiko Monji

发明人： Mirai Higuchi ,  Masahiro Kiyohara ,  Takeshi Shima ,  Tatsuhiko Monji

IPC分类号： H04N5/235

CPC分类号： H04N5/2352 ,  G06K9/2054 ,  G08B13/19647 ,  H04N5/232 ,  H04N5/23229 ,  H04N5/2353

摘要： There is provided an image processing apparatus that can implement image recognition processing on all of objects to be recognized, and can reduce a load of capturing and transferring images. The image processing apparatus includes: an image capturing unit that captures image information picked up by an imaging element; a processing region setting unit that sets a plurality of processing regions for the image information; a processing sequence/frequency determination unit that determines at least any one of a sequence, a frequency, and a timing of capturing the respective image information in a plurality of set processing regions, and at least any one of a sequence, a frequency, and a timing of processing the respective image information; and an image processing unit that captures the image information for each of the processing regions according to the sequence, the frequency, or the timing which has been determined, and processes the captured image information according to the sequence, the frequency, or the timing which has been determined.

摘要翻译： 提供了一种能够对要被识别的所有对象执行图像识别处理的图像处理装置，并且可以减少捕获和传送图像的负担。 该图像处理设备包括：图像捕获单元，其捕获由成像元件拾取的图像信息; 处理区域设定单元，对所述图像信息设定多个处理区域; 处理序列/频率确定单元，其确定在多个集合处理区域中捕获各个图像信息的序列，频率和定时中的至少一个，以及序列，频率和 处理各图像信息的定时; 以及图像处理单元，其根据已经确定的顺序，频率或定时捕获每个处理区域的图像信息，并且根据序列，频率或时间来处理所捕获的图像信息 已经确定

公开(公告)号：US20110074957A1

公开(公告)日：2011-03-31

申请号：US12859020

申请日：2010-08-18

申请人： Masahiro Kiyohara ,  Ryo Yumiba ,  Kota Irie ,  Tatsuhiko Monji

发明人： Masahiro Kiyohara ,  Ryo Yumiba ,  Kota Irie ,  Tatsuhiko Monji

IPC分类号： H04N7/18

CPC分类号： G06T3/4038 ,  G06K9/00798 ,  G06K9/00805 ,  G06K9/342

摘要： There is provided apparatus for vehicle surroundings monitorings that assists so as to make it possible for a driver to check the periphery of the vehicle with ease. Plural images are obtained by capturing the periphery of the vehicle with mutually differing exposure. A process of image recognition is then performed for a target within the thus obtained images. The images are then compared, and images for which the accuracy of image recognition of the target is favorable are selected from among the images. The selected images are joined and composited to generate a host vehicle periphery composite image. Thus, an image with a wide dynamic range and high visibility is generated, thereby making it easier for the driver to check the periphery of the vehicle.

摘要翻译： 提供了用于车辆环境监测的装置，其有助于使驾驶员容易地检查车辆周边。 通过以相互不同的曝光捕获车辆的周边来获得多个图像。 然后对由此获得的图像中的目标执行图像识别的处理。 然后比较图像，从图像中选择目标图像识别的准确性有利的图像。 所选择的图像被连接并合成以产生主车辆周边合成图像。 因此，产生具有宽动态范围和高可见度的图像，从而使驾驶员更容易地检查车辆的周边。

公开(公告)号：US07668345B2

公开(公告)日：2010-02-23

申请号：US11392688

申请日：2006-03-30

申请人： Masahiro Kiyohara ,  Masato Kazui ,  Kazunori Takahashi

发明人： Masahiro Kiyohara ,  Masato Kazui ,  Kazunori Takahashi

IPC分类号： G06K9/00

CPC分类号： G06K9/00281 ,  G06K9/00771 ,  G07C9/00 ,  G07C11/00 ,  G08B13/19671 ,  G08B13/19686

摘要： An image processing apparatus, for example, a multi-camera monitoring system is provided for processing images with the intention of protecting the individuals' privacies in accordance with the type of customers in a store which is equipped with the multi-camera monitoring system, and for deleting or modifying individuals' privacy information to protect the individuals' privacies while permitting the identity of a person to be determined among a plurality of cameras. The image processing apparatus processes an image captured by an imager device to output the resulting image. A processor detects a person from an image, and an image database stores feature information on the person. The processor extracts features from the detected person and the database, processes the extracted feature amount in the stored feature information, and generates an output image based on the processed features.

摘要翻译： 提供图像处理装置，例如多相机监视系统，用于处理图像，目的是根据装备有多摄像机监视系统的商店中的顾客的类型来保护个人的私有，以及 用于删除或修改个人的隐私信息以保护个人的私人，同时允许在多个照相机之间确定人的身份。 图像处理装置处理由成像器装置拍摄的图像以输出所得到的图像。 处理器从图像中检测人物，并且图像数据库存储关于人的特征信息。 处理器从检测到的人和数据库中提取特征，处理所存储的特征信息中提取的特征量，并且基于处理的特征生成输出图像。

公开(公告)号：US08289391B2

公开(公告)日：2012-10-16

申请号：US12859020

申请日：2010-08-18

申请人： Masahiro Kiyohara ,  Ryo Yumiba ,  Kota Irie ,  Tatsuhiko Monji

发明人： Masahiro Kiyohara ,  Ryo Yumiba ,  Kota Irie ,  Tatsuhiko Monji

IPC分类号： H04N9/47

CPC分类号： G06T3/4038 ,  G06K9/00798 ,  G06K9/00805 ,  G06K9/342

摘要： There is provided apparatus for vehicle surroundings monitorings that assists so as to make it possible for a driver to check the periphery of the vehicle with ease. Plural images are obtained by capturing the periphery of the vehicle with mutually differing exposure. A process of image recognition is then performed for a target within the thus obtained images. The images are then compared, and images for which the accuracy of image recognition of the target is favorable are selected from among the images. The selected images are joined and composited to generate a host vehicle periphery composite image. Thus, an image with a wide dynamic range and high visibility is generated, thereby making it easier for the driver to check the periphery of the vehicle.

摘要翻译： 提供了用于车辆环境监测的装置，其有助于使驾驶员容易地检查车辆周边。 通过以相互不同的曝光捕获车辆的周边来获得多个图像。 然后对由此获得的图像中的目标执行图像识别的处理。 然后比较图像，从图像中选择目标图像识别的准确性有利的图像。 所选择的图像被连接并合成以产生主车辆周边合成图像。 因此，产生具有宽动态范围和高可见度的图像，从而使驾驶员更容易地检查车辆的周边。