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公开(公告)号：US4849377A
公开(公告)日：1989-07-18
申请号：US866648
申请日：1986-05-27
IPC分类号： H01L21/318 , H01L21/768
CPC分类号： H01L21/318 , H01L21/76879
摘要： Molybdenum gate electrode material is provided with an upper layer of molybdenum nitride which acts to prevent deposition of source and drain contact metal by selective chemical vapor deposition (CVD). The nitride layer also provides an improved mask for ion implantation process steps. This results in an FET structure exhibiting a high degree of planarity which is desirable for multilevel device fabrication.
摘要翻译： 钼栅极材料设置有上层的氮化钼，其用于通过选择性化学气相沉积（CVD）来防止源极和漏极接触金属的沉积。 氮化物层还提供用于离子注入工艺步骤的改进的掩模。 这导致具有高度平面度的FET结构，这对于多电平器件制造是期望的。
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2.发明授权Method for selective deposition of tungsten by chemical vapor deposition onto metal and semiconductor surfaces 失效通过化学气相沉积在金属和半导体表面上选择性沉积钨的方法
公开(公告)号：US4741928A
公开(公告)日：1988-05-03
申请号：US036956
申请日：1987-04-10
IPC分类号： C23C16/04 , C23C16/48 , H01L21/268 , H01L21/285 , C23C16/06 , C23C16/08
CPC分类号： C23C16/04 , C23C16/481 , H01L21/268 , H01L21/28562
摘要： A method and heating apparatus are provided for selectively depositing metal films, such as tungsten, on the metal and semi-conductor surfaces of a silicon wafer by chemical vapor deposition. The method and heating apparatus serve to isolate the depositing surface of silicon wafers from both infrared radiation and the nucleating species which are vaporized by hot surfaces within the reaction chamber by means of a barrier which reflects or absorbs infrared radiation and condenses vaporized nucleating species before a nucleate metal deposition sites on metal or semiconductor surfaces.
摘要翻译： 提供了一种方法和加热装置，用于通过化学气相沉积在硅晶片的金属和半导体表面上选择性地沉积诸如钨的金属膜。 所述方法和加热装置用于将硅晶片的沉积表面与红外辐射和成核物质隔离，所述成核物质通过反射或吸收红外辐射并在蒸发的成核物质之前冷凝的屏障反应室内的热表面而蒸发 在金属或半导体表面上成核金属沉积点。
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公开(公告)号：US4653428A
公开(公告)日：1987-03-31
申请号：US733445
申请日：1985-05-10
IPC分类号： H01L21/3205 , C23C16/04 , C23C16/48 , H01L21/268 , H01L21/285 , H01L21/31 , C23C16/00
CPC分类号： C23C16/04 , C23C16/481 , H01L21/268 , H01L21/28562
摘要： An apparatus is provided for selectively depositing metal films on metal and semiconductive surfaces of a substrate wherein the depositing surface of the substrate is isolated from undesired impinging radiation, such as infrared radiation.
摘要翻译： 提供了一种用于在衬底的金属和半导体表面上选择性地沉积金属膜的设备，其中衬底的沉积表面与不期望的入射辐射（例如红外辐射）隔离。
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4.发明授权Enhancing the selectivity of tungsten deposition on conductor and semiconductor surfaces 失效增强钨沉积在导体和半导体表面上的选择性
公开(公告)号：US4552783A
公开(公告)日：1985-11-12
申请号：US668454
申请日：1984-11-05
IPC分类号： C23C16/02 , C23C16/04 , C23C16/14 , H01L21/205 , H01L21/28 , H01L21/285 , H01L21/3105 , H01L21/302
CPC分类号： H01L21/3105 , H01L21/28562
摘要： A method is provided for selectively depositing tungsten metal at thicknesses over 1000 angstroms or more on silicon and other conductor and semiconductor surfaces, wherein a substrate containing such surfaces is exposed to a chlorine or bromine containing solution to prevent deposition of tungsten on the insulator surfaces.
摘要翻译： 提供了一种用于在硅和其它导体和半导体表面上选择性地沉积超过1000埃或更多厚度的钨金属的方法，其中含有这些表面的基板暴露于含氯或溴的溶液中以防止钨沉积在绝缘体表面上。
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公开(公告)号：US06170929B2
公开(公告)日：2001-01-09
申请号：US09204814
申请日：1998-12-02
申请人： Ronald H. Wilson , Michael A. Stoy
发明人： Ronald H. Wilson , Michael A. Stoy
IPC分类号： A47B4900
CPC分类号： G07F11/62 , A61B50/13 , A61G12/001 , A61G2205/10 , A61J7/0084 , G07F17/0092
摘要： An automated medication-dispensing cart includes a closed cart housing and a plurality of medication-containing bins which extend for substantially the length of the cart and which are supported within the cart housing. The support structure includes two spaced sets of sprockets positioned at both ends of the cart and endless chains which extend around the sprockets, with one of the sprockets being motor-driven. The bins are connected at opposing ends thereof to the spaced chains. The movement of the bins is controlled such that the bins can be stopped at a preselected position within the cart, in the vicinity of the top front edge of the cart. A plurality of doors is located in the top of the cart, such that when one or more of the doors is opened, a preselected portion of the bin in the preselected position and the medications therein are exposed.
摘要翻译： 自动药物分配车包括封闭的手推车外壳和多个药物容纳箱，其延伸大致长度的推车并且被支撑在推车外壳内。 支撑结构包括定位在推车的两端的两个间隔开的链轮组，以及围绕链轮延伸的环形链，其中一个链轮由电机驱动。 箱体的相对端连接到间隔开的链条上。 控制箱的移动被控制，使得箱可以在推车内的预选位置处停在车的顶部前边缘附近。 多个门位于推车的顶部，使得当一个或多个门打开时，预选位置的仓的预选部分和其中的药物暴露。
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公开(公告)号：US06604019B2
公开(公告)日：2003-08-05
申请号：US09753315
申请日：2000-12-29
IPC分类号： G06F1700
CPC分类号： G07F17/0092 , G06F19/00 , G06F19/3418 , G06F19/3462 , G07F7/069 , G07F9/02 , G07F11/62
摘要： The system for automatically dispensing medications or other medical elements includes several groupings, i.e. vaults, of storage members, each vault containing approximately 100 individual cartridges, which each contain packages of unit-of-use doses of a given medication or other medical supply, such as syringes. Each storage member includes an ejector which ejects selected medications/supplies to a supply trough. The packages in the trough are moved to a central collator, which dispenses them to a bin receptacle which has been moved underneath the collator and which is typically identified with a particular patient. Information concerning medications/supplies for a particular patient is stored in a system database and used to determine the particular medications/supplies dispensed into a given bin. Bar coding is used to maintain control over the bins, and the medications, forming a closed information/control system. Particular medications and/or supplies which are not available in the automatic dispensing system are supplied from a supplemental medications cart which has been previously stocked with the correct additional medications by virtue of information from a control computer. The filled bins are transferred to a medication cart which can only be accessed as a result of a command signal after a particular patient and his/her associated bin have been matched. A nurse, having access to the correct bin and sector thereof, removes the medications from the cart and administers them to the patient.
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7.发明授权Apparatus for securing an amalgam at the apex of an electrodeless fluorescent lamp 失效用于将汞齐固定在无电极荧光灯的顶点的装置
公开(公告)号：US5500567A
公开(公告)日：1996-03-19
申请号：US194549
申请日：1994-02-10
CPC分类号： H01J65/048 , H01J61/28 , H01J61/72
摘要： A glass rod extending through and sealed to the exhaust tube of an electrodeless SEF fluorescent discharge lamp has a metal support member at one end thereof for supporting an amalgam at or near the apex of the lamp envelope. The metal support member may comprise a spiral-shaped wire, a wire screen, or a wire basket. Preferably, the amalgam is maintained in contact with the apex of the lamp envelope. If desired, the metal support member may comprise a magnetic material to allow for magnetic transport of the amalgam assembly during lamp processing. The metal support member restricts spreading of the amalgam when in a liquid state; and the glass rod provides rigid support for the amalgam independent of lamp orientation.
摘要翻译： 延伸穿过并密封到无电极SEF荧光放电灯的排气管的玻璃棒在其一端具有金属支撑构件，用于在灯壳的顶点处或附近支撑汞齐。 金属支撑构件可以包括螺旋形线，丝网或线篮。 优选地，汞齐保持与灯壳的顶点接触。 如果需要，金属支撑构件可以包括磁性材料，以允许汞灯组件在灯处理期间磁性运输。 金属支撑构件在液态时限制汞齐的扩散; 并且玻璃棒提供了独立于灯取向的汞齐的刚性支撑。
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公开(公告)号：US4933742A
公开(公告)日：1990-06-12
申请号：US151045
申请日：1988-02-01
IPC分类号： H01L21/285 , H01L21/768 , H01L23/532
CPC分类号： H01L21/76895 , H01L21/28562 , H01L21/28568 , H01L23/53257 , H01L2924/0002
摘要： A contact metal such as tungsten, platinum silicide or palladium silicide is selectively deposited or formed on the semiconductor substrate portion of an integrated circuit chip. The metallization pattern for the circuit makes contact with the contact metal at the bottom of a contact opening or via, rather than contacting the substrate directly. Thus, the interconnection metal makes contact to the semiconductor surface through an intermediate contact metal so as to provide decreased contact resistance. This permits narrower interconnect metallization patterns so as to facilitate the construction of denser integrated circuits. In the present invention, therefore, metal framing of the contact hole is not employed.
摘要翻译： 在集成电路芯片的半导体衬底部分上选择性地沉积或形成诸如钨，硅化铂或硅化钯的接触金属。 电路的金属化图案与接触开口或通孔的底部的接触金属接触，而不是直接接触衬底。 因此，互连金属通过中间接触金属与半导体表面接触，从而提供降低的接触电阻。 这允许更窄的互连金属化图案，以便于构建更致密的集成电路。 因此，在本发明中，不使用接触孔的金属框架。
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9.发明授权Apparatus for securing an amalgam at the apex of an electrodeless fluorescent lamp 失效用于将汞齐固定在无电极荧光灯的顶点的装置
公开(公告)号：US5559392A
公开(公告)日：1996-09-24
申请号：US258879
申请日：1994-06-13
CPC分类号： H01J65/048 , H01J61/24 , H01J9/395
摘要： A first portion of a spiral wire support for an amalgam is securely fitted into an exhaust tube formed in a re-entrant cavity of an electrodeless fluorescent lamp before attachment and sealing of the re-entrant cavity to the bulb of the lamp. A second portion of the spiral wire support extends into the bulb and holds an amalgam in thermal contact with the apex of the bulb. The second portion has a larger diameter than the first portion to ensure against movement of the spiral wire support into the exhaust tube. The end of the second portion of the spiral wire support is wetted with an alloy capable of forming an amalgam with mercury prior to insertion of the wire support into the exhaust tube. Mercury is added to the bulb after final evacuation of the bulb in preparation for dosing the lamp with its fill. As a result, an amalgam is formed and maintained in thermal contact with the apex of the bulb, regardless of lamp orientation.
摘要翻译： 用于汞齐的螺旋线支撑件的第一部分在将重入腔体附着并密封到灯泡之前牢固地装配到形成在无电极荧光灯的入口腔中的排气管中。 螺旋线支撑件的第二部分延伸到灯泡中并且保持与灯泡的顶点热接触的汞齐。 第二部分具有比第一部分更大的直径，以确保防止螺旋线支撑件移动到排气管中。 在将线支撑件插入排气管之前，螺旋线支撑件的第二部分的端部用能够形成汞合金的合金润湿。 在灯泡最终排空之后，汞被添加到灯泡中，准备为灯泡充满剂量。 结果，不管灯的方向如何，汞齐形成并保持与灯泡的顶点热接触。
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10.发明授权
公开(公告)号：US5389853A
公开(公告)日：1995-02-14
申请号：US955382
申请日：1992-10-01
摘要： The invention refers to a filament having improved emission of visible light. The emissivity of a tungsten filament is improved by depositing a layer of submicron-to-micron crystallites on the filament, the layer having substantially submicron spacing between crystallites. The crystallites being formed from tungsten or a tungsten alloy of up to 1 weight percent thorium, up to 10 weight percent of at least one of rhenium, tantalum, or niobium, and the balance substantially tungsten.
摘要翻译： 本发明涉及具有改善的可见光发射的灯丝。 通过在细丝上沉积亚微米至微米的微晶层来提高钨丝的发射率，该层在微晶之间具有基本上亚微米的间隔。 微晶由钨或钨合金形成，最高达1重量％的钍，至多10重量％的铼，钽或铌中的至少一种，余量基本上为钨。
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