利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

6 条记录 (耗时 0.023 秒)

    Thin film coating and method
    1.
    发明授权
    Thin film coating and method 失效
    薄膜涂层和方法

    公开(公告)号：US5154810A

    公开(公告)日：1992-10-13

    申请号：US647660

    申请日：1991-01-29

    申请人： Marc A. Kamerling ,  William T. Beauchamp ,  Robert E. Klinger ,  John P. Lehan

    发明人： Marc A. Kamerling ,  William T. Beauchamp ,  Robert E. Klinger ,  John P. Lehan

    IPC分类号： C23C14/24 ,  C23C14/08 ,  C23C14/54 ,  C23C14/56 ,  H01L31/0216 ,  H01L31/04

    CPC分类号： C23C14/08 ,  C23C14/54 ,  C23C14/568 ,  H01L31/02167 ,  Y02E10/52 ,  Y10S438/907

    摘要： A system and process for forming optical quality, protective, relatively thick, thin film coatings on workpieces such as detectors or solar cells. The apparatus includes a rotary cylindrical sputtering system which incorporates separate deposition devices and at least one chemical reaction device for simultaneously (1) depositing materials which form tensile and compressive oxides and (2) oxidizing the deposited materials. The system also includes a stressometer system, preferably a cantilevered beam stressometer system which monitors the stress of the depositing film in-situ. The monitored stress levels are used to control the relative amounts of compressive and tensile materials which are deposited and, thus, control stress in the thin film coatings. In a preferred embodiment for forming protective covers on solar cells, the deposition devices are linear magnetron sputter cathode devices having silicon and aluminum targets, and the reaction device is a linear magnetron ion source oxidizer device. Film stress in the thin film coating is controlled by controlling power to the silicon and aluminum targets.

    Telecentric reflection head for optical monitor
    2.
    发明授权
    Telecentric reflection head for optical monitor 失效
    用于光学显示器的远心反射头

    公开(公告)号：US5699164A

    公开(公告)日：1997-12-16

    申请号：US627435

    申请日：1996-04-04

    申请人： John P. Lehan ,  Charles K. Carniglia

    发明人： John P. Lehan ,  Charles K. Carniglia

    IPC分类号： G01M11/00 ,  G01N21/57 ,  G02B13/22 ,  G01N21/55

    CPC分类号： G01N21/57

    摘要： The use of a telecentric system allows for minimizing the changes in the measured radiometric quantity as a result of defocus or tilt of the object under measurement or of the detector. In a preferred embodiment, a telecentric illuminating system is provided, which illuminates an object from a source. A telecentric receiving system receives reflections from the object and relays them to a detector. In another preferred embodiment, a telecentric system is also described that is appropriate for radiance or radiant intensity measurements.

    摘要翻译： 使用远心系统允许由于被测物体或检测器的散焦或倾斜而使测量的辐射量的变化最小化。 在优选实施例中，提供远心照明系统，其从源照射物体。 远心接收系统从物体接收反射并将其转发到检测器。 在另一个优选实施例中，还描述了适用于辐射强度或辐射强度测量的远心系统。