System and methods of laser assisted field induced oxide nanopatterning
    8.
    发明授权
    System and methods of laser assisted field induced oxide nanopatterning 有权
    激光辅助场诱导氧化物纳米图案的系统和方法

    公开(公告)号:US07976765B2

    公开(公告)日:2011-07-12

    申请号:US12180173

    申请日:2008-07-25

    IPC分类号: B29C59/16

    摘要: A method of forming a nanoscale pattern on a substrate surface. In one embodiment, the method includes the steps of providing a substrate having a surface; providing a nanoscale pattern forming device, comprising an elongated cantilever that has a tip portion proximate an end of the elongated cantilever; and controllably illuminating at least the tip portion of the cantilever with a beam of substantially coherent monoenergetic particles when the cantilever moves relative to the substrate to form a nanoscale pattern on the surface, wherein the tip portion of the cantilever is made from lightly doped silicon.

    摘要翻译: 在衬底表面上形成纳米尺度图案的方法。 在一个实施例中,该方法包括提供具有表面的基底的步骤; 提供纳米级图案形成装置,其包括细长悬臂,其具有靠近所述细长悬臂的端部的尖端部分; 并且当所述悬臂相对于所述基底移动以在所述表面上形成纳米尺度图案时,所述悬臂的所述尖端部分由轻掺杂的硅制成,并且可靠地照射所述悬臂的所述尖端部分。