公开(公告)号：US6136141A

公开(公告)日：2000-10-24

申请号：US95293

申请日：1998-06-10

Applicant: Troy Glatfelter ,  Mark Lycette ,  Eric Akkashian

Inventor： Troy Glatfelter ,  Mark Lycette ,  Eric Akkashian

IPC: B32B43/00 ,  H01L21/48 ,  H01L21/68 ,  H01L31/0392 ,  H01L31/18 ,  H01L31/20 ,  B32B31/28 ,  B23K26/00

CPC classification number: B32B43/00 ,  H01L21/481 ,  H01L21/6835 ,  H01L31/03921 ,  H01L31/1896 ,  H01L31/206 ,  B29C65/1632 ,  B29C65/76 ,  B32B2310/0843 ,  Y02E10/50 ,  Y10S156/941 ,  Y10T156/1059 ,  Y10T156/12 ,  Y10T156/19

Abstract: Lightweight semiconductor devices are fabricated upon a relatively thin substrate member by a process wherein the substrate is first bonded to a relatively thick support member. The semiconductor device is then formed on the bonded substrate, and the substrate is subsequently removed from the support member by utilizing a beam of radiant energy to skive the substrate from the support member without damage to the semiconductor device. Also disclosed herein is a system for implementing the invention.

Abstract translation: 轻质半导体器件通过一种工艺制造在相对薄的衬底部件上，其中衬底首先结合到较厚的支撑构件上。 然后在键合的衬底上形成半导体器件，并且随后通过利用辐射能束将衬底从支撑构件上移除，从而从衬底上支撑衬底而不会损坏半导体器件。 本文还公开了一种用于实现本发明的系统。

公开(公告)号：US08061686B2

公开(公告)日：2011-11-22

申请号：US12417967

申请日：2009-04-03

Applicant: Mark Lycette

Inventor： Mark Lycette

IPC: F16K31/122

CPC classification number: B65H20/00 ,  B65H2301/4432 ,  B65H2301/44921 ,  B65H2403/514 ,  B65H2555/10

Abstract: A pinch valve includes a valve body having a slot which is configured to allow a web of substrate material to pass therethrough. The valve body has a sealing surface which includes a first curved portion with a first radius of curvature. A dynamic seal element is configured to engage the valve body and includes a second curved portion having a second radius of curvature which is larger than the first radius of curvature. An actuator is operable to selectively bias the dynamic seal element into and out of engagement with the valve body so that when it is biased into engagement with the valve body the web of substrate material is engaged between the sealing surfaces of the dynamic seal element and the valve body. Also disclosed is a processing system which includes the pinch valve.

Abstract translation: 夹管阀包括具有狭槽的阀体，所述狭槽被构造成允许基材材料通过。 阀体具有密封面，该密封面包括具有第一曲率半径的第一弯曲部分。 动态密封元件构造成接合阀体并且包括具有大于第一曲率半径的第二曲率半径的第二弯曲部分。 致动器可操作以选择性地将动态密封元件偏置到与阀体接合或脱离与阀体的接合，使得当其被偏压成与阀体接合时，基底材料幅材接合在动态密封元件的密封表面和 阀体。 还公开了一种包括夹管阀的处理系统。

公开(公告)号：US20100252605A1

公开(公告)日：2010-10-07

申请号：US12418025

申请日：2009-04-03

Applicant: Mark Lycette ,  Joachim Doehler ,  James Blyth

Inventor： Mark Lycette ,  Joachim Doehler ,  James Blyth

IPC: B65H23/26

CPC classification number: B65H23/16 ,  B65H2402/542

Abstract: A web support assembly for a moving web of substrate material includes a base having a primary support arm pivotally mounted thereto so as to be displaceable from a first position to a second position. The web support assembly includes a first biasing member in mechanical communication with the primary support arm. The first biasing member operates to impart a first biasing force to the primary support arm so as to move it from its first position to its second position. The system includes a dancer arm which is pivotally mounted to the primary support arm so as to be displaceable from a first position to a second position relative primary support arm. The web support assembly further includes a second biasing member in mechanical communication with the dancer arm. The second biasing member operates to impart a second biasing force to the dancer arm so as to move it from its first position to its second position. A roller is rotatably supported on the dancer arm. The roller is configured to engage a portion of the web. The web support assembly operates to maintain continuous contact between the roller and the moving web of substrate material as it passes through a multi-station processing system.

Abstract translation: 用于移动的基材材料的幅材支撑组件包括具有枢转地安装在其上的主支撑臂的基座，以便能够从第一位置移动到第二位置。 腹板支撑组件包括与主支撑臂机械连通的第一偏置构件。 第一偏置构件操作以向主支撑臂施加第一偏压力，以便将其从其第一位置移动到其第二位置。 该系统包括枢转地安装到主支撑臂的浮动臂，以便能够从第一位置移动到相对主支撑臂的第二位置。 腹板支撑组件还包括与舞蹈臂机械连通的第二偏压构件。 第二偏置构件操作以向浮动臂施加第二偏压力，以使其从其第一位置移动到其第二位置。 滚轮可旋转地支撑在舞蹈臂上。 辊被构造成接合网的一部分。 幅材支撑组件在通过多工位处理系统时操作以保持辊和衬底材料的移动幅材之间的连续接触。

公开(公告)号：US20100252602A1

公开(公告)日：2010-10-07

申请号：US12417997

申请日：2009-04-03

Applicant: Mark Lycette

Inventor： Mark Lycette

IPC: F16J15/16 ,  B65H20/00 ,  F16J15/00

CPC classification number: B65H20/00 ,  B65H2301/4432 ,  B65H2301/44921 ,  B65H2403/514 ,  B65H2555/10

Abstract: A pinch valve includes a valve body having a slot which is configured to allow a web of substrate material to pass therethrough. The valve body has a sealing surface which includes a first curved portion with a first radius of curvature. A dynamic seal element is configured to engage the valve body and includes a second curved portion having a second radius of curvature which is larger than the first radius of curvature. An actuator is operable to selectively bias the dynamic seal element into and out of engagement with the valve body so that when it is biased into engagement with the valve body the web of substrate material is engaged between the sealing surfaces of the dynamic seal element and the valve body. Also disclosed is a processing system which includes the pinch valve.

Abstract translation: 夹管阀包括具有狭槽的阀体，所述狭槽被构造成允许基材材料通过。 阀体具有密封面，该密封面包括具有第一曲率半径的第一弯曲部分。 动态密封元件构造成接合阀体并且包括具有大于第一曲率半径的第二曲率半径的第二弯曲部分。 致动器可操作以选择性地将动态密封元件偏置到与阀体接合或脱离与阀体的接合，使得当其被偏压成与阀体接合时，基底材料幅材接合在动态密封元件的密封表面和 阀体。 还公开了一种包括夹管阀的处理系统。

公开(公告)号：US20100252604A1

公开(公告)日：2010-10-07

申请号：US12417967

申请日：2009-04-03

Applicant: Mark Lycette

Inventor： Mark Lycette

IPC: B65H23/02

CPC classification number: B65H20/00 ,  B65H2301/4432 ,  B65H2301/44921 ,  B65H2403/514 ,  B65H2555/10

Abstract: A pinch valve includes a valve body having a slot which is configured to allow a web of substrate material to pass therethrough. The valve body has a sealing surface which includes a first curved portion with a first radius of curvature. A dynamic seal element is configured to engage the valve body and includes a second curved portion having a second radius of curvature which is larger than the first radius of curvature. An actuator is operable to selectively bias the dynamic seal element into and out of engagement with the valve body so that when it is biased into engagement with the valve body the web of substrate material is engaged between the sealing surfaces of the dynamic seal element and the valve body. Also disclosed is a processing system which includes the pinch valve.

Abstract translation: 夹管阀包括具有狭槽的阀体，所述狭槽被构造成允许基材材料通过。 阀体具有密封面，该密封面包括具有第一曲率半径的第一弯曲部分。 动态密封元件构造成接合阀体并且包括具有大于第一曲率半径的第二曲率半径的第二弯曲部分。 致动器可操作以选择性地将动态密封元件偏置到与阀体接合或脱离与阀体的接合，使得当其被偏压成与阀体接合时，基底材料幅材接合在动态密封元件的密封表面和 阀体。 还公开了一种包括夹管阀的处理系统。

公开(公告)号：US20060278163A1

公开(公告)日：2006-12-14

申请号：US11376997

申请日：2006-03-16

Applicant: Stanford Ovshinsky ,  Herbert Ovshinsky ,  Masat Izu ,  Joachim Doehler ,  Kevin Hoffman ,  James Key ,  Mark Lycette

Inventor： Stanford Ovshinsky ,  Herbert Ovshinsky ,  Masat Izu ,  Joachim Doehler ,  Kevin Hoffman ,  James Key ,  Mark Lycette

IPC: C23C16/00

CPC classification number: C23C16/545 ,  C23C14/0078 ,  C23C14/351 ,  C23C14/542 ,  C23C14/562 ,  C23C14/564 ,  C23C16/4401 ,  C23C16/458 ,  C23C16/4586 ,  C23C16/517 ,  C23C16/52

Abstract: A apparatus for depositing one or more thin film layers on one or more continuous web or discrete substrates. The apparatus includes a pay-out unit for dispensing one or a plurality of webs, a deposition unit that deposits a series of one or more thin film layers thereon, and a take-up unit that receives and stores the webs following deposition. In a preferred embodiment, deposition occurs through plasma enhanced chemical vapor deposition in which a plasma region is formed between a cathode in the deposition unit and one or more vertically-oriented webs. The instant deposition apparatus includes a support system for guiding and stabilizing the transport of one or more webs or substrates through the deposition chambers. The support system includes a magnetic guidance assembly and an edge-stabilizing assembly that operate to inhibit perturbations of the motion of a web or substrate in directions other than the direction of transport through the apparatus.

Abstract translation: 一种用于在一个或多个连续幅材或分立衬底上沉积一个或多个薄膜层的装置。 该装置包括用于分配一个或多个网的放出单元，在其上沉积一系列一个或多个薄膜层的沉积单元，以及在沉积之后接收和存储网的卷取单元。 在优选实施例中，通过等离子体增强化学气相沉积发生沉积，其中在沉积单元中的阴极和一个或多个垂直取向的网之间形成等离子体区域。 即时沉积设备包括用于引导和稳定通过沉积室的一个或多个卷材或基底的输送的支撑系统。 所述支撑系统包括磁性引导组件和边缘稳定组件，所述磁性引导组件和边缘稳定组件可操作以抑制幅材或衬底在不同于穿过所述设备的传送方向的方向上的运动的扰动。

公开(公告)号：US6011215A

公开(公告)日：2000-01-04

申请号：US993064

申请日：1997-12-18

Applicant: Troy Glatfelter ,  Eric Akkashian ,  Mark Lycette

Inventor： Troy Glatfelter ,  Eric Akkashian ,  Mark Lycette

IPC: H01L27/142 ,  H01L31/052 ,  H01L31/042

CPC classification number: H01L31/061 ,  H01L31/046 ,  H01L31/0465 ,  H01L31/056 ,  Y02E10/52

Abstract: A large area photovoltaic device includes a plurality of photovoltaic regions electrically interconnected in parallel. The regions are defined by a plurality of conductive channels which establish electrical contact between a top transparent electrode of the device and a monolithic, metal substrate electrode. A second terminal of the device is provided by a bottom, metallic electrode disposed beneath the semiconductor body, and upon an electrically insulating layer which is supported upon the metallic substrate.

Abstract translation: 大面积光电器件包括并联电互连的多个光伏区域。 这些区域由多个导电通道限定，该导电通道在器件的顶部透明电极和单片金属衬底电极之间建立电接触。 设备的第二端子由设置在半导体主体下方的底部金属电极以及被支撑在金属基板上的电绝缘层提供。

公开(公告)号：US20120298033A1

公开(公告)日：2012-11-29

申请号：US13553560

申请日：2012-07-19

Applicant: Mark Lycette

Inventor： Mark Lycette

IPC: B65H23/10 ,  H01L21/20

CPC classification number: B65H20/00 ,  B65H2301/4432 ,  B65H2301/44921 ,  B65H2403/514 ,  B65H2555/10

Abstract: A pinch valve assembly includes a valve body having a slot which is configured to allow a web of substrate material to pass therethrough. The valve body has a sealing surface which includes a first curved portion with a first radius of curvature. A dynamic seal element is configured to engage the valve body and includes a second curved portion having a second radius of curvature which is larger than the first radius of curvature. An actuator is operable to selectively bias the dynamic seal element into and out of engagement with the valve body so that when it is biased into engagement with the valve body the web of substrate material is engaged between the sealing surfaces of the dynamic seal element and the valve body. Also disclosed are deposition systems which include these pinch valves.

Abstract translation: 夹管阀组件包括具有狭槽的阀体，该槽被构造成允许基材材料通过。 阀体具有密封面，该密封面包括具有第一曲率半径的第一弯曲部分。 动态密封元件构造成接合阀体并且包括具有大于第一曲率半径的第二曲率半径的第二弯曲部分。 致动器可操作以选择性地将动态密封元件偏置到与阀体接合或脱离与阀体的接合，使得当其被偏压成与阀体接合时，基底材料幅材接合在动态密封元件的密封表面和 阀体。 还公开了包括这些夹管阀的沉积系统。

公开(公告)号：US20100252606A1

公开(公告)日：2010-10-07

申请号：US12418066

申请日：2009-04-03

Applicant: Mark Lycette ,  Joachim Doehler ,  James Blyth

Inventor： Mark Lycette ,  Joachim Doehler ,  James Blyth

IPC: B65H23/26

CPC classification number: B65H23/16

Abstract: A system for the continuous deposition of a semiconductor material onto one or more webs of substrate material which are advanced therethrough includes a web transport system having a plurality of web support assemblies. Each web support assembly includes a base having a primary support arm pivotally mounted thereto so as to be displaceable from a first position to a second position. The support includes a first biasing member in mechanical communication with the primary support arm. The first biasing member operates to impart a first biasing force to the primary support arm so as to move it from its first position to its second position. The support includes a dancer arm which is pivotally mounted to the primary support arm so as to be displaceable from a first position to a second position relative to the primary support arm. The system further includes a second biasing member in mechanical communication with the dancer arm. The second biasing member operates to impart a second biasing force to the dancer arm so as to move it from its first position to its second position. A roller is rotatably supported on the dancer arm. The roller is configured to engage a portion of the web. The web support assembly operates to maintain continuous contact between the roller and the moving web of substrate material as it passes through the deposition system.

Abstract translation: 用于将半导体材料连续沉积到一个或多个先进的基底材料网上的系统包括具有多个网状物支撑组件的腹板输送系统。 每个腹板支撑组件包括具有枢转地安装在其上的主支撑臂的基座，以便能够从第一位置移动到第二位置。 支撑件包括与主支撑臂机械连通的第一偏置构件。 第一偏置构件操作以向主支撑臂施加第一偏压力，以便将其从其第一位置移动到其第二位置。 该支撑件包括一个浮动臂，该臂可枢转地安装到主支撑臂上，以便能够相对于主支撑臂从第一位置移动到第二位置。 该系统还包括与舞蹈臂机械连通的第二偏置构件。 第二偏置构件操作以向浮动臂施加第二偏压力，以使其从其第一位置移动到其第二位置。 滚轮可旋转地支撑在舞蹈臂上。 辊被构造成接合网的一部分。 幅材支撑组件在通过基底材料通过沉积系统时操作以保持辊和基底材料的移动幅材之间的连续接触。

公开(公告)号：US5468988A

公开(公告)日：1995-11-21

申请号：US206071

申请日：1994-03-04

Applicant: Troy Glatfelter ,  Mark Lycette

Inventor： Troy Glatfelter ,  Mark Lycette

IPC: H01L27/142 ,  H01L31/052 ,  H01L27/14 ,  H01L31/00

CPC classification number: H01L31/056 ,  H01L31/0392 ,  H01L31/046 ,  Y02E10/52

Abstract: A large area photovoltaic device includes a plurality of photovoltaic regions electrically interconnected in parallel. The regions are defined by through hole connections which establish electrical contact between a top transparent electrode and a monolithic metal substrate. A second terminal is provided by a bottom, metallic electrode disposed upon an electrically insulating layer supported on the metallic substrate.

Abstract translation: 大面积光电器件包括并联电互连的多个光伏区域。 这些区域由在顶部透明电极和整体式金属基底之间建立电接触的通孔连接限定。 第二端子由设置在支撑在金属基板上的电绝缘层上的底部金属电极提供。