公开(公告)号：US20130187031A1

公开(公告)日：2013-07-25

申请号：US13355814

申请日：2012-01-23

申请人： Martin Popp ,  Beat De Coi

发明人： Martin Popp ,  Beat De Coi

IPC分类号： H01J40/14 ,  H01L31/18 ,  B82Y20/00

CPC分类号： G01S17/36 ,  G01S7/4863 ,  G01S17/89

摘要： A sensor apparatus including at least one analog and one digital circuit component and an analog/digital converter for converting analog signals of the analog circuit component into digital signals for the digital circuit component, and vice versa, wherein the analog circuit component and the digital circuit components include at least one module for electronically implementing a function, and wherein one of the modules of the analog circuit component is embodied as a sensor device for detecting optical radiation and one of the modules of the digital circuit component is embodied as a signal processing device for processing digital signals. In order to enable improved integration into application-based sensor devices, the circuit components including the analog/digital converter are integrated as an integrated circuit in a chip and the chip is manufactured as a semiconductor structure using 1-poly technology.

摘要翻译： 一种传感器装置，包括至少一个模拟和一个数字电路部件和用于将模拟电路部件的模拟信号转换为数字电路部件的数字信号的模/数转换器，反之亦然，其中模拟电路部件和数字电路 组件包括用于电子地实现功能的至少一个模块，并且其中模拟电路部件的模块之一被实现为用于检测光辐射的传感器装置，并且数字电路部件的模块之一被实现为信号处理装置 用于处理数字信号。 为了能够改进集成到基于应用的传感器装置中，包括模拟/数字转换器的电路部件作为集成电路集成在芯片中，并且该芯片被制造为使用1-聚技术的半导体结构。

公开(公告)号：US08901690B2

公开(公告)日：2014-12-02

申请号：US13551732

申请日：2012-07-18

申请人： Martin Popp ,  Beat De Coi ,  Marco Annese

发明人： Martin Popp ,  Beat De Coi ,  Marco Annese

IPC分类号： H01L27/146 ,  H01L27/148 ,  H01L31/18 ,  H01L31/0216 ,  H01L31/0232 ,  H01L31/101

CPC分类号： H01L27/1463

摘要： A semiconductor structure for photon detection, comprising a substrate composed of a semiconductor material having a first doping, a contact region fitted at the frontside of the substrate, a bias layer composed of a semiconductor material having a second doping, which is arranged on the backside of the substrate at a distance from the contact region, wherein the contact region at least partly lies opposite the bias layer, such that an overlap region is present in a lateral direction, a guard ring, which is arranged at the frontside of the substrate and surrounds the contact region, wherein a reverse voltage can be applied between the contact region and the guard ring. In order to enable more cost-effective production, the overlap region has a lateral extent amounting to at least one quarter of the distance between contact region and bias layer.

摘要翻译： 一种用于光子检测的半导体结构，包括由具有第一掺杂的半导体材料构成的衬底，安装在衬底的前侧的接触区域，由具有第二掺杂的半导体材料组成的偏置层，其布置在背面 所述接触区域至少部分地与所述偏置层相对，使得重叠区域在横向方向上存在，保护环布置在所述基板的前侧，并且所述保护环设置在所述基板的前侧;以及 围绕接触区域，其中可以在接触区域和保护环之间施加反向电压。 为了实现更具成本效益的生产，重叠区域具有等于接触区域和偏置层之间的距离的至少四分之一的横向范围。

公开(公告)号：US08802566B2

公开(公告)日：2014-08-12

申请号：US13593933

申请日：2012-08-24

申请人： Martin Popp ,  Beat De Coi ,  Marco Annese

发明人： Martin Popp ,  Beat De Coi ,  Marco Annese

IPC分类号： G03F7/20 ,  H01L29/96 ,  H01L21/3213 ,  H01L21/033

CPC分类号： H01L21/32139 ,  H01L21/0337 ,  H01L21/0338

摘要： A method for producing semiconductor components on a substrate including photolithographic patterning steps, in which method, on the substrate, a first layer to be patterned is applied and a second layer serving as a mask layer for the first layer to be patterned is applied, wherein a third layer serving as a mask for the second layer is applied, and wherein at least two photolithographic patterning processes are carried out successively for the second layer, wherein, during one of the patterning processes, after the production of a structure made from a photosensitive layer for the provision of a mask layer for a patterning process at the third layer, positive ramp angles α are produced at the patterning edges of the third layer, as a result of which the structures remaining free, given a thickness h of the third layer, decrease in size by a value D=2*h/tan α.

摘要翻译： 一种用于在包括光刻图案步骤的基板上制造半导体部件的方法，其中施加了在基板上形成要构图的第一层的方法，并且施加用作待图案化第一层的掩模层的第二层，其中 施加用作第二层的掩模的第三层，并且其中对于第二层连续执行至少两个光刻图案化工艺，其中在一个图案化工艺期间，在制造由感光材料制成的结构之后 层，用于在第三层提供用于图案化工艺的掩模层，在第三层的图案化边缘处产生正斜面角α，结果，给定第三层的厚度h，结构保持游离 ，尺寸减小值D = 2 * h /tanα。

公开(公告)号：US08836924B2

公开(公告)日：2014-09-16

申请号：US13355814

申请日：2012-01-23

申请人： Martin Popp ,  Beat De Coi

发明人： Martin Popp ,  Beat De Coi

IPC分类号： G01C3/08

CPC分类号： G01S17/36 ,  G01S7/4863 ,  G01S17/89

摘要： A sensor apparatus including at least one analog and one digital circuit component and an analog/digital converter for converting analog signals of the analog circuit component into digital signals for the digital circuit component, and vice versa, wherein the analog circuit component and the digital circuit components include at least one module for electronically implementing a function, and wherein one of the modules of the analog circuit component is embodied as a sensor device for detecting optical radiation and one of the modules of the digital circuit component is embodied as a signal processing device for processing digital signals. In order to enable improved integration into application-based sensor devices, the circuit components including the analog/digital converter are integrated as an integrated circuit in a chip and the chip is manufactured as a semiconductor structure using 1-poly technology.

摘要翻译： 一种传感器装置，包括至少一个模拟和一个数字电路部件和用于将模拟电路部件的模拟信号转换为数字电路部件的数字信号的模/数转换器，反之亦然，其中模拟电路部件和数字电路 组件包括用于电子地实现功能的至少一个模块，并且其中模拟电路部件的模块之一被实现为用于检测光辐射的传感器装置，并且数字电路部件的模块之一被实现为信号处理装置 用于处理数字信号。 为了能够改进集成到基于应用的传感器装置中，包括模拟/数字转换器的电路部件作为集成电路集成在芯片中，并且该芯片被制造为使用1-聚技术的半导体结构。

公开(公告)号：US20130049171A1

公开(公告)日：2013-02-28

申请号：US13593933

申请日：2012-08-24

申请人： Martin POPP ,  Beat De Coi ,  Marco Annese

发明人： Martin POPP ,  Beat De Coi ,  Marco Annese

IPC分类号： G03F7/20 ,  H01L29/06

CPC分类号： H01L21/32139 ,  H01L21/0337 ,  H01L21/0338

摘要： A method for producing semiconductor components on a substrate including photolithographic patterning steps, in which method, on the substrate, a first layer to be patterned is applied and a second layer serving as a mask layer for the first layer to be patterned is applied, wherein a third layer serving as a mask for the second layer is applied, and wherein at least two photolithographic patterning processes are carried out successively for the second layer, wherein, during one of the patterning processes, after the production of a structure made from a photosensitive layer for the provision of a mask layer for a patterning process at the third layer, positive ramp angles α are produced at the patterning edges of the third layer, as a result of which the structures remaining free, given a thickness h of the third layer, decrease in size by a value D=2*h/tan α.

摘要翻译： 一种用于在包括光刻图案步骤的基板上制造半导体部件的方法，其中施加了在基板上形成要构图的第一层的方法，并且施加用作待图案化第一层的掩模层的第二层，其中 施加用作第二层的掩模的第三层，并且其中对于第二层连续执行至少两个光刻图案化工艺，其中在一个图案化工艺期间，在制造由感光材料制成的结构之后 层，用于在第三层提供用于图案化工艺的掩模层，在第三层的图案化边缘处产生正斜面角α，结果，给定第三层的厚度h，结构保持游离 ，尺寸减小值D = 2 * h /tanα。

公开(公告)号：US08868376B2

公开(公告)日：2014-10-21

申请号：US13295624

申请日：2011-11-14

申请人： Beat De Coi

发明人： Beat De Coi

IPC分类号： F16P3/14 ,  G01B21/16 ,  G01C3/00 ,  G01S7/497 ,  E05F15/00 ,  F16M11/06 ,  F16M13/02 ,  G01S7/481 ,  G01S17/02 ,  G01S17/88 ,  E05F15/20

CPC分类号： G01S7/4972 ,  E05F15/43 ,  E05F15/73 ,  E05Y2900/132 ,  F16M11/06 ,  F16M13/02 ,  F16P3/14 ,  F16P3/141 ,  F16P3/142 ,  F16P3/147 ,  G01B21/16 ,  G01C3/00 ,  G01S7/4813 ,  G01S17/026 ,  G01S17/88 ,  G01S17/89

摘要： An apparatus for monitoring a door with a 3D sensor which is able to detect distances to an object in the monitoring area as the third dimension, the 3D sensor being arranged in a housing, and immovably arranged transmission means for transmitting a measurement beam and receiver means for receiving a reflected measurement beam being provided in the housing, characterized in that provision is made of a control unit which is designed to obtain an item of information relating to the position of the apparatus, and in that the control unit evaluates the measurement beam on the basis of an item of position information.

摘要翻译： 一种用于监视具有3D传感器的门的装置，其能够检测距离监视区域中的对象作为第三维度，3D传感器布置在壳体中，以及不可移动地布置的传输装置，用于传送测量光束和接收器装置 用于接收设置在所述壳体中的反射测量光束，其特征在于，提供控制单元，所述控制单元被设计为获得与所述设备的位置相关的信息项，并且所述控制单元对所述测量光束进行评估 位置信息项的基础。

公开(公告)号：US08833524B2

公开(公告)日：2014-09-16

申请号：US13173594

申请日：2011-06-30

申请人： Beat De Coi ,  Tobias Leutenegger

发明人： Beat De Coi ,  Tobias Leutenegger

IPC分类号： B66B13/14 ,  B66B13/26

CPC分类号： B66B13/26

摘要： A monitoring device for safeguarding a driven element against undesired collisions with an object lying on the movement path of the driven element including at least one transmitting element and a multiplicity of receiving elements, wherein the at least one transmitting element is arranged in a horizontal boundary region of an opening to be monitored, where the opening can be at least partially closed by the driven element, and the multiplicity of receiving elements are arranged in a horizontal, opposite boundary region in a distributed fashion along the opening to be monitored, wherein the at least one transmitting element, together with each of the multiplicity of receiving elements forms a light barrier arrangement, which can be evaluated individually.

摘要翻译： 一种用于保护被驱动元件以防止与位于从动元件的移动路径上的物体的不期望的碰撞的监视装置，包括至少一个发送元件和多个接收元件，其中至少一个发送元件布置在水平边界区域 其中开口可以被从动元件至少部分地封闭，并且多个接收元件沿着待监控的开口以分布的方式布置在水平的相对的边界区域中，其中在 至少一个发送元件与多个接收元件中的每一个一起形成光栅布置，其可以单独地评估。

公开(公告)号：US07830532B2

公开(公告)日：2010-11-09

申请号：US12132938

申请日：2008-06-04

申请人： Beat De Coi

发明人： Beat De Coi

IPC分类号： G01B11/14

CPC分类号： G01S17/026 ,  G01S7/023 ,  G01S7/497 ,  G01S17/87 ,  G01V8/20

摘要： The invention proposes a sensor array having a plurality of sensor devices comprising a source of electromagnetic radiation, a receiver for the electromagnetic radiation and a control device, the control device being designed to use the source to emit electromagnetic radiation and being designed to determine a distance covered by electromagnetic radiation, which is emitted by the source, from a reflection surface of an object to the receiver by evaluating the reflected radiation. According to the invention, the sensor devices of the plurality of sensor devices operate at different frequencies or using time-division multiplexing. The invention also proposes a sensor device for a sensor array, the control device being designed to measure the distance at different frequencies or using time-division multiplexing.

摘要翻译： 本发明提出了一种传感器阵列，其具有包括电磁辐射源的多个传感器装置，用于电磁辐射的接收器和控制装置，该控制装置设计成使用该源发射电磁辐射并被设计成确定距离 由源发射的电磁辐射被物体的反射表面覆盖到接收器，通过评估反射的辐射。 根据本发明，多个传感器装置中的传感器装置以不同的频率运行或使用时分多路复用。 本发明还提出了一种用于传感器阵列的传感器装置，该控制装置被设计成测量不同频率处的距离或者使用时分复用。

公开(公告)号：US20080117407A1

公开(公告)日：2008-05-22

申请号：US12019075

申请日：2008-01-24

申请人： Bas ALBERS ,  Beat De Coi ,  Peter Nebiker

发明人： Bas ALBERS ,  Beat De Coi ,  Peter Nebiker

IPC分类号： G01C3/08

CPC分类号： G01S17/026 ,  G08B17/10

摘要： A sensor device including a source for electromagnetic radiation, a plurality of receivers for the electromagnetic radiation, and an electronics unit designed to transmit electromagnetic radiation by means of the source and to determine a distance which the electromagnetic radiation emitted from the source travels from the reflection surface of an object to respective receivers by evaluation of the delay time of the electromagnetic radiation and/or the phase of an oscillation modulated on to the electromagnetic radiation. The electronics unit for the detection of reflective objects, which are like floating parts and are distributed in three dimensions in a medium, is able to determine from the measured distances a first group of distances which fit a predetermined distribution, and, if there is more than one group member, to emit a signal which is associated with the detection of reflective objects which are like floating parts.

摘要翻译： 包括用于电磁辐射源的传感器装置，用于电磁辐射的多个接收器，以及被设计成通过源传输电磁辐射并确定从源极发射的电磁辐射从反射射出的距离的电子单元 通过评估电磁辐射的延迟时间和/或调制到电磁辐射上的振荡的相位，将对象的表面贴到各个接收器。 用于检测反射物体的电子单元，其类似于浮动部分并且在介质中以三维分布，能够从所测量的距离确定适合预定分布的第一组距离，并且如果存在更多 发出与检测像浮动部分的反射物体相关联的信号。

公开(公告)号：US6124586A

公开(公告)日：2000-09-26

申请号：US109304

申请日：1998-06-30

申请人： Beat De Coi

发明人： Beat De Coi

IPC分类号： F16P3/14 ,  G01J1/02 ,  G01V8/20 ,  G08B13/183 ,  C01V9/04 ,  G06M7/00

CPC分类号： F16P3/14 ,  F16P3/144 ,  G01V8/20

摘要： To properly align support elements (17,19), typically support bars or strips of a light curtain formed by a plurality of light beams (21), transmitted between transmitters (13) and receivers (15) on the respective support bars (17,19), a separate alignment light source, typically a laser (29), is provided. The laser (29) projects a light beam (33) to a receiver (35) from one (17) of said bars to the other (19). A counter-directed beam (33') is projected from the other (19) of the bars to the first bar (17). The counter-directed beam (33') spaced from the first direct beam (33), can be generated by a second laser (29'), or by deflecting the received direct beam (33) on or in the second bar (19) by 180.degree. to provide the counter-directed return beam to the first bar (17). This permits rapid alignment of the respective bars, even with respect to five directions of freedom of movement of the respective bars. Preferably, the laser is pulsed at a frequency between 1 and 5 Hz, and a timing circuit is provided to disconnect the laser or lasers after suitable alignment timing intervals, or after a safety interval, so that the lifetime of the laser or lasers will be commensurate with the lifetime of the radiation transmitters (13) and receivers (15) of the light curtain itself.

摘要翻译： 为了适当地对准支撑元件（17,19），通常支撑在由相应的支撑杆（17）上的发射器（13）和接收器（15）之间传输的由多个光束（21）形成的光幕的条或条， 19），提供了单独的对准光源，通常是激光（29）。 激光器（29）将光束（33）从一个（17）的所述杆向另一个（19）投射到接收器（35）。 反向导向梁（33'）从杆的另一个（19）突出到第一杆（17）。 与第一直接光束（33）间隔开的反向指向光束（33'）可以由第二激光器（29'）产生，或者通过使接收到的直接光束（33）偏转在第二条光栅（19）上或第二条光栅 180度以提供反向导向的返回光束到第一条（17）。 这允许各个杆的快速对准，甚至相对于各个杆的五个运动自由方向。 优选地，激光器以1和5Hz之间的频率脉冲，并且提供定时电路以在适当的对准定时间隔之后或在安全间隔之后断开激光器或激光器，使得激光器或激光器的寿命将 与光幕本身的辐射发射器（13）和接收器（15）的寿命相称。