摘要:
An immersion exposure method is disclosed which, while causing a relative movement of an immersion area formed so as to intervene between a substrate to be exposed on an exposure stage and a projection lens to the substrate, exposes an irradiation area of the substrate covered with the immersion area. An exposure stage is moved in a first direction, thereby exposing a first exposure area of the substrate. The exposure stage is moved in a second direction opposite to the first direction, thereby exposing a second exposure area adjoining the first exposure area. In a state where the second exposure area is held inside the immersion boundary of the immersion area, the exposure stage is moved from the movement end position of the exposure stage in a first exposure moving process to the movement start position of the exposure stage in a second exposure moving process.
摘要:
An air-conditioning system includes at least one outdoor unit including a compressor, a four-way valve, and an outdoor heat exchanger, at least one indoor unit including an indoor unit expansion valve and an indoor unit heat exchanger, and at least one humidity control device including a humidity control device expansion valve, a humidity control device heat exchanger, and first and second water adsorption/desorption devices. The compressor, the four-way valve, the outdoor heat exchanger, the indoor unit expansion valve, the indoor unit heat exchanger, the humidity control device expansion valve, and the humidity control device heat exchanger are connected to each other with pipes so as to constitute a refrigerant circuit.
摘要:
A humidity control apparatus and an air-conditioning system are capable of controlling the latent heat processing amount and the sensible heat processing amount in accordance with an indoor heat load without decreasing the operation efficiency. Every time an air route is switched to an air route A or an air route B, the route maintenance time for the switched air route is set on the basis of the heat load within a dehumidification target space, and switching of switching devices is controlled such that the set route maintenance time is ensured.
摘要:
A sheet folding apparatus for forming first folding and second folding in a sheet enables the sheet to be folded in an accurate fold position in second folding, when the front end of the sheet which is first folded in a nip position of a first folding roller pair and transported strikes a stopper member, a guide member guides a fold to undergo second folding of the first-folded sheet to a nip position of a second folding roller pair, and second folding is formed.
摘要:
An electric drive unit (100) of the invention includes the electric motor (1) and the control apparatus (20) that is disposed on an axis line of a rotation shaft (2) of the electric motor (1) and controls the driving of the electric motor (1). The electric motor (1) has a motor terminal (13) extending parallel to an axial direction of the rotation shaft (2) toward the control apparatus (20) and a slit (13a) is provided to the motor terminal (13) at an end on a side of the control apparatus (20). The control apparatus (20) has a motor connection terminal (34) provided on a line extended from the motor terminal (13) and connected to the motor terminal (13). The slit (13a) in the motor terminal (13) is press-fit and fixed to the motor connection terminal (34).
摘要:
A drive system for a vehicle includes an engine, a transmission, a clutch mechanism including first and second clutch portions, the clutch mechanism being switchable between connected and disconnected states, and a clutch operation mechanism switching the clutch mechanism between the connected and disconnected states, the clutch operation mechanism including a clutch drum forming a drum chamber, a piston dividing the drum chamber into a spring chamber and a pressurizing chamber, a control valve, a biasing member arranged in the spring chamber and exerting a biasing force in a direction in which the first and second clutch portions are engaged with each other, and a bore formed in the clutch drum, the bore discharging oil of the spring chamber to an outer side of the spring chamber in a state where a counteracting force against a centrifugal force acting in the pressurizing chamber is generated in the spring chamber.
摘要:
An imprint method includes applying a light curable resin on a substrate to be processed, the substrate including first and second regions on which the light curable resin is applied, contacting an imprint mold with the light curable resin, curing the light curable resin by irradiating the light curable resin with light passing through the imprint mold, generating gas by performing a predetermined process to the light curable resin applied on a region of the substrate, the region including at least the first region, wherein an amount of gas generated from the light curable resin applied on the first region is larger than an amount of gas generated from the light curable resin of the second region, and forming a pattern by separating the imprint mold from the light curable resin after the gas being generated.
摘要:
To provide a signal generating device and a signal generating method capable of correcting the frequency characteristics of the level of a broadband radio-frequency signal. A signal generating device 10 includes a waveform data storage unit 11 that stores waveform data of a baseband signal, a quadrature modulator 20 that generates a modulation signal from the baseband signal, a local oscillator 31 that generates a local oscillation signal, a multiplier 32 that multiplies the modulation signal and the local oscillation signal to generate a radio-frequency signal in a predetermined frequency band, a frequency characteristic correction value determining unit 50 that acquires the frequency characteristics of the signal level of the frequency band on the basis of the center frequency of the radio-frequency signal, and a DF 12 that corrects the frequency characteristics of the level of the baseband signal.
摘要:
A drive system for a vehicle includes an engine, a transmission, a clutch mechanism including first and second clutch portions, the clutch mechanism being switchable between connected and disconnected states, and a clutch operation mechanism switching the clutch mechanism between the connected and disconnected states, the clutch operation mechanism including a clutch drum forming a drum chamber, a piston dividing the drum chamber into a spring chamber and a pressurizing chamber, a control valve, a biasing member arranged in the spring chamber and exerting a biasing force in a direction in which the first and second clutch portions are engaged with each other, and a bore formed in the clutch drum, the bore discharging oil of the spring chamber to an outer side of the spring chamber in a state where a counteracting force against a centrifugal force acting in the pressurizing chamber is generated in the spring chamber.