公开(公告)号：US5517000A

公开(公告)日：1996-05-14

申请号：US229133

申请日：1994-04-18

申请人： Masayuki Nishiwaki ,  Jun Koide

发明人： Masayuki Nishiwaki ,  Jun Koide

IPC分类号： B41J2/135 ,  B23K26/06 ,  B23K26/067 ,  B23K26/073 ,  B41J2/16 ,  G02B27/09 ,  H01S3/00 ,  H01S3/101

CPC分类号： G02B27/0988 ,  B23K26/066 ,  B23K26/067 ,  B41J2/162 ,  B41J2/1634 ,  G02B27/09 ,  G02B27/0905 ,  Y10T29/49401

摘要： A plurality of elongated beams are generated by dividing a laser beam, said plurality of beams being respectively applied to corresponding lens elements of a flyeye lens array. The structure is arranged in such a manner that the diameter of the plurality of the beams in the shorter direction is made smaller than that of each of the lens elements, so that the plurality of beams are further divided into a plurality of elongated secondary beams by the flyeye lens. The plurality of the secondary beams are bundled on a diaphragm in such a manner that their lengthwise directions substantially coincide with each other so that a beam pattern is formed. A row of openings arranged in the lengthwise direction of the beam pattern and formed in the diaphragm member are uniformly and efficiently irradiated with the thus-formed beam pattern. Then, the image of the row of openings is projected onto a plastic plate or the like so that a multiplicity of holes are formed in the plate. As a result, a nozzle plate of an ink jet printer head can be accurately and quickly manufactured.

摘要翻译： 通过分割激光束产生多个细长光束，所述多个光束分别施加到飞眼透镜阵列的相应透镜元件。 该结构以这样的方式排列，使得多个光束在较短方向上的直径小于每个透镜元件的直径，使得多个光束被进一步分成多个细长的次光束 flyeye镜头。 多个次级光束以这样的方式捆在隔膜上，使得它们的长度方向基本上彼此重合，从而形成光束图案。 在光束图案的纵向方向上布置并形成在隔膜部件中的一排开口被均匀且有效地用这样形成的光束图案照射。 然后，将该列开口的图像投影到塑料板等上，使得在该板上形成多个孔。 结果，喷墨打印机头的喷嘴板能够被精确而快速的制造。

公开(公告)号：US5263250A

公开(公告)日：1993-11-23

申请号：US691515

申请日：1991-04-25

申请人： Masayuki Nishiwaki ,  Jun Koide

发明人： Masayuki Nishiwaki ,  Jun Koide

IPC分类号： B41J2/135 ,  B23K26/06 ,  B23K26/067 ,  B23K26/073 ,  B41J2/16 ,  G02B27/09 ,  H01S3/00 ,  H01S3/101

CPC分类号： G02B27/0988 ,  B23K26/066 ,  B23K26/067 ,  B41J2/162 ,  B41J2/1634 ,  G02B27/09 ,  G02B27/0905 ,  Y10T29/49401

摘要： A plurality of elongated beams are generated by dividing a laser beam, said plurality of beams being respectively applied to corresponding lens elements of a flyeye lens array. The structure is arranged in such a manner that the diameter of the plurality of the beams in the shorter direction is made smaller than that of each of the lens elements, so that the plurality of beams are further divided into a plurality of elongated secondary beams by the flyeye lens. The plurality of the secondary beams are bundled on a diaphragm in such a manner that their lengthwise directions substantially coincide with each other so that a beam pattern is formed. A row of openings arranged in the lengthwise direction of the beam pattern and formed in the diaphragm member are uniformly and efficiently irradiated with the thus-formed beam pattern. Then, the image of the row of openings is projected onto a plastic plate or the like so that a multiplicity of holes are formed in the plate. As a result, a nozzle plate of an ink jet printer head can be accurately and quickly manufactured.

公开(公告)号：US20060113287A1

公开(公告)日：2006-06-01

申请号：US11273730

申请日：2005-11-14

申请人： Genji Inada ,  Junichiro Iri ,  Masayuki Nishiwaki ,  Sadayuki Sugama

发明人： Genji Inada ,  Junichiro Iri ,  Masayuki Nishiwaki ,  Sadayuki Sugama

IPC分类号： B23K26/38

CPC分类号： B23K26/38 ,  B23K26/0853 ,  B23K26/364 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50 ,  Y10T29/49401

摘要： At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.

摘要翻译： 至少一个示例性实施例涉及激光切割方法，其中激光束在衬底形成处理区域内部的内部点处被冷凝，并且其中激光沿着切割线扫掠，其中切割线与所述切割线上的凹部相关联 衬底，并且可以在形成处理区域的同时形成凹部。

公开(公告)号：US5946024A

公开(公告)日：1999-08-31

申请号：US576459

申请日：1995-12-21

申请人： Masayuki Nishiwaki

发明人： Masayuki Nishiwaki

IPC分类号： B41J2/135 ,  B23K26/06 ,  B23K26/067 ,  B41J2/16 ,  G02B13/08 ,  G02B27/09 ,  G02B27/12 ,  G03F7/20 ,  B41J2/14 ,  H04N5/225

CPC分类号： B41J2/1634 ,  B23K26/06 ,  B23K26/0608 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/067 ,  B41J2/162 ,  G02B13/08 ,  G02B27/106 ,  G02B27/1073 ,  G02B27/126 ,  G03F7/70083 ,  G03F7/7035

摘要： A laser beam from an excimer laser is split into three beams along a first plane by a pair of prisms and the three beams are caused to intersect each other at the position of the object side focal point of a first cylindrical lens and be incident upon the first cylindrical lens. The three beams are respectively focused independently from each other by the first cylindrical lens. The above focused three beams are then focused along a second plane perpendicular to the first plane by a second cylindrical lens; then, the three beams are caused to superimpose each other on a mask and at the same time are brought to a defocus along the first plane and into focus again along the second plane by an anamorphic optical system containing a third cylindrical lens and a lens having a rotation symmetry, thereby a line-like illumination area extended in the first direction is formed on the mask. The linear illumination area and an area containing a pattern of a series of openings arranged in the first direction or a rectangular pattern extended in the first direction are caused to coincide on the mask to efficiently illuminate the pattern. An image of the illuminated pattern is projected onto a workpiece for an orifice plate by a projection lens system to process the workpiece in accordance with the pattern.

摘要翻译： 来自准分子激光器的激光束通过一对棱镜沿着第一平面被分成三个光束，并且使三个光束在第一柱面透镜的物体侧焦点的位置彼此相交并且入射到 第一柱面透镜。 三个光束分别通过第一柱面透镜彼此独立地聚焦。 然后通过第二柱面透镜将上述聚焦的三个光束沿着垂直于第一平面的第二平面聚焦; 然后使三个光束彼此叠加在掩模上，并且同时沿着第一平面被引入散焦并且再次通过包含第三柱面透镜和透镜的变形光学系统沿第二平面聚焦 旋转对称，从而在掩模上形成沿第一方向延伸的线状照明区域。 线性照明区域和包含在第一方向上排列的一系列开口的图案或沿第一方向延伸的矩形图案的区域的区域在掩模上重合以有效地照亮图案。 通过投影透镜系统将照明图案的图像投影到用于孔板的工件上，以根据图案处理工件。

公开(公告)号：US08108998B2

公开(公告)日：2012-02-07

申请号：US11273730

申请日：2005-11-14

申请人： Genji Inada ,  Junichiro Iri ,  Masayuki Nishiwaki ,  Sadayuki Sugama

发明人： Genji Inada ,  Junichiro Iri ,  Masayuki Nishiwaki ,  Sadayuki Sugama

IPC分类号： H01L21/78 ,  H01L21/30 ,  H01L21/301

CPC分类号： B23K26/38 ,  B23K26/0853 ,  B23K26/364 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50 ,  Y10T29/49401

摘要： At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.

摘要翻译： 至少一个示例性实施例涉及激光切割方法，其中激光束在衬底形成处理区域内部的内部点处被冷凝，并且其中激光沿着切割线扫掠，其中切割线与所述切割线上的凹部相关联 衬底，并且可以在形成处理区域的同时形成凹部。

公开(公告)号：US20050199592A1

公开(公告)日：2005-09-15

申请号：US11058163

申请日：2005-02-16

申请人： Junichiro Iri ,  Genji Inada ,  Sadayuki Sugama ,  Masayuki Nishiwaki ,  Hiroyuki Morimoto

发明人： Junichiro Iri ,  Genji Inada ,  Sadayuki Sugama ,  Masayuki Nishiwaki ,  Hiroyuki Morimoto

IPC分类号： B28D5/00 ,  B23K26/06 ,  B23K26/38 ,  B23K26/40 ,  B23K101/40 ,  H01L21/301 ,  B23K26/00

CPC分类号： B23K26/0676 ,  B23K26/0617 ,  B23K26/40 ,  B23K26/53 ,  B23K2103/50 ,  B28D5/0011 ,  H01L21/67092 ,  H01L21/78

摘要： A laser splitting method for splitting off a segment from an object to be split using a laser beam, includes a surface processing step of processing the object by forming a linear recessed portion in a surface of the object, the linear recessed portion being effective to cause a stress concentration at the surface of the object; an internal processed-region forming step of forming an internal processed-regions at a depth of the object in a line along which a laser beam scans the surface of the object by a relative motion therebetween, the laser beam being converged adjacent the depth, wherein the thus formed internal processed-regions extend in a direction substantially perpendicular to the surface of the object; and an external force applying step of applying an external force to the object to form cracks between the recessed portion and the internal processed-regions.

摘要翻译： 一种激光分割方法，用于使用激光束从待分割的物体上分割出一段，包括：通过在物体表面形成线状的凹陷部分来处理物体的表面处理步骤，该线性凹入部分有效地引起 物体表面的应力集中; 内部处理区域形成步骤，在物体的深度处沿着激光束通过它们之间的相对运动扫描物体的表面的行中形成内部加工区域，激光束在相邻深度处会聚，其中， 因此形成的内部加工区域在基本上垂直于物体表面的方向上延伸; 以及向所述物体施加外力以在所述凹部与所述内部加工区域之间形成裂纹的外力施加工序。

公开(公告)号：US06239914B1

公开(公告)日：2001-05-29

申请号：US09305201

申请日：1999-05-05

申请人： Masayuki Nishiwaki

发明人： Masayuki Nishiwaki

IPC分类号： G02B2710

CPC分类号： B41J2/1634 ,  B23K26/066 ,  B23K26/067 ,  B23K26/389 ,  B41J2/162 ,  Y10T29/49401

摘要： An ink jet printer comprises a nozzle member manufactured by a method including the step of splitting light from a light source by amplitude splitting to form a plurality of illumination beams, and the step of illuminating a plurality of mask patterns formed on a mask with corresponding split illumination beams so as to expose a workpiece via the mask patterns.

摘要翻译： 喷墨打印机包括喷嘴构件，该喷嘴构件通过包括以下步骤制造的喷嘴构件：包括通过振幅分裂来分离来自光源的光以形成多个照明光束的步骤，以及将形成在掩模上的多个掩模图案以相应的分割 照明光束以经由掩模图案曝光工件。

公开(公告)号：US5841101A

公开(公告)日：1998-11-24

申请号：US575679

申请日：1995-12-19

申请人： Masayuki Nishiwaki

发明人： Masayuki Nishiwaki

IPC分类号： B41J2/135 ,  B23K26/06 ,  B23K26/067 ,  B23K26/073 ,  B41J2/16 ,  G02B13/08 ,  G02B27/18

CPC分类号： B41J2/1634 ,  B23K26/066 ,  B23K26/0738 ,  B41J2/162

摘要： A method used in manufacturing a workpiece using a plurality of spaced apart mask patterns includes two dividing steps and two focusing steps. The first step divides a light beam emitted from a light source into a plurality of light beams on a first plane including a first axis. A second step divides each of the plurality of light beams into a plurality of light beams on a second plane perpendicular to the first plane, the second plane including a second axis perpendicular to the first axis. A third step focuses the plurality of light beams produced by the second step only in the first direction. A fourth step focuses the plurality of light beams focused in this third step in the first direction at a position beyond the plurality of mask patterns in the second direction so that the light beams focused in the third step overlap each other to perform a plurality of spaced apart images, each of which illuminate one of the plurality of spaced apart mask patterns.

摘要翻译： 使用多个间隔开的掩模图案来制造工件的方法包括两个分割步骤和两个聚焦步骤。 第一步骤将从光源发射的光束分成包括第一轴线的第一平面上的多个光束。 第二步骤将多个光束中的每个光束分成与第一平面垂直的第二平面上的多个光束，第二平面包括垂直于第一轴线的第二轴线。 第三步骤仅在第一方向上聚焦由第二步骤产生的多个光束。 第四步骤将第三步骤中聚焦在该第三步骤中的多个光束沿着第二方向聚焦在多个掩模图案之外的位置处，使得在第三步骤中聚焦的光束彼此重叠，以执行多个间隔 分开的图像，其中的每一个照亮多个间隔开的掩模图案中的一个。

公开(公告)号：US07791001B2

公开(公告)日：2010-09-07

申请号：US11280886

申请日：2005-11-15

申请人： Masayuki Nishiwaki ,  Junichiro Iri ,  Genji Inada ,  Sadayuki Sugama

发明人： Masayuki Nishiwaki ,  Junichiro Iri ,  Genji Inada ,  Sadayuki Sugama

IPC分类号： B23K26/00 ,  B23K26/04

CPC分类号： H01L21/67092 ,  B23K26/046 ,  B23K26/048 ,  B23K26/361 ,  B23K26/40 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/52

摘要： At least one exemplary embodiment is directed to a laser processing apparatus that can use the shape of a plurality of reflected light fluxes to adjust the position of workpiece relative to an optical system, where the laser processing apparatus facilitates both the viewing of the workpiece and a focusing of a processing laser into the workpiece.

摘要翻译： 至少一个示例性实施例涉及可以使用多个反射光束的形状来调节工件相对于光学系统的位置的激光加工设备，其中激光加工设备有助于工件的观察和 将加工激光聚焦到工件上。

公开(公告)号：US20060109757A1

公开(公告)日：2006-05-25

申请号：US11280886

申请日：2005-11-15

申请人： Masayuki Nishiwaki ,  Junichiro Iri ,  Genji Inada ,  Sadayuki Sugama

发明人： Masayuki Nishiwaki ,  Junichiro Iri ,  Genji Inada ,  Sadayuki Sugama

IPC分类号： G11B7/00

CPC分类号： H01L21/67092 ,  B23K26/046 ,  B23K26/048 ,  B23K26/361 ,  B23K26/40 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/52

摘要： At least one exemplary embodiment is directed to a laser processing apparatus that can use the shape of a plurality of reflected light fluxes to adjust the position of workpiece relative to an optical system, where the laser processing apparatus facilitates both the viewing of the workpiece and a focusing of a processing laser into the workpiece.

摘要翻译： 至少一个示例性实施例涉及可以使用多个反射光束的形状来调节工件相对于光学系统的位置的激光加工设备，其中激光加工设备有助于工件的观察和 将加工激光聚焦到工件上。