摘要:
A method of forming an electrode film using a vacuum deposition apparatus, includes the steps of depositing a refractory metal on a substrate after reaching a back pressure in a deposition chamber at a pressure that is within a range of about 1×10−4 Pa to about 5′10−3 Pa, and annealing the substrate on which the metal is deposited to decrease the electrical resistivity of the electrode film.
摘要:
A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is &agr;-tantalum.
摘要:
A method for manufacturing a surface acoustic wave apparatus decreases a specific resistance of an electrode film by removing hydrogen occluded in the electrode film that is primarily composed of tantalum, so that the device properties are stabilized. An electrode film primarily composed of tantalum is formed on a piezoelectric substrate. Subsequently, this electrode film is heat-treated in a vacuum at a temperature of about 200° C. to about 700° C. for several hours. Thereafter, the electrode film is patterned so as to produce an interdigital electrode transducer.
摘要:
A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is &agr;-tantalum.
摘要:
A solid electrolytic capacitor that includes a laminated body, a solid electrolyte layer, and conductive bases. The laminated body is obtained by laminating a plurality of dielectric-coated valve action metal sheets, each of which includes a valve action metal base and a dielectric coating, and joining together the adjacent valve action metal bases. The valve action metal base has a cathode layer part, and the dielectric coating covers the surface of the valve action metal base at least the cathode layer part. The valve action metal base of at least one of the dielectric-coated valve action metal sheets further has an anode lead part. The solid electrolyte layer is a continuous layer that fills gaps between the dielectric-coated valve action metal sheets and covers the outer surface of the laminated body at the cathode layer parts, and conductive bases are provided in the solid electrolyte layer.
摘要:
A method of forming a dielectric thin film pattern, comprises the steps of: depositing a dielectric thin film on a substrate having a resist pattern thereon by a vapor deposition method, wherein as a material for the dielectric thin film, at least one of CeO.sub.2, Sm.sub.2 O.sub.3, Dy.sub.2 O.sub.3, Y.sub.2 O.sub.3, TiO.sub.2, Al.sub.2 O.sub.3, and MgO is used; and removing the resist pattern whereby the dielectric thin film is patterned.
摘要:
There are provided an electronic component in which two substrates are bonded to each other with a large bonding force and a method for manufacturing electronic components in which two substrates can be bonded to each other with a large bonding force and in which the substrates are not likely to be bent and broken. In an embodiment, a plurality of first connection portions 30 is formed on a first substrate 22, and in addition, a plurality of IDT electrodes 26 and a plurality of second connection portions 32 are formed on a second substrate 24. The first connection portions 30 are engaged in concave parts of the second connection portions 32, so that temporary bonding is performed. Between adjacent first connection portions 30, only the first substrate is cut. By heat application, laser irradiation, pressure application, ultrasonic application, or the like, the first connection portions 30 and the second connection portions 32 are finally bonded to each other. The second substrate 24 is cut along the cut portions of the first substrate 22, so that a plurality of electronic components 20 is formed.
摘要:
A piezoelectric device includes an element substrate having a piezoelectric element and an electrically conductive pattern connected to the piezoelectric element, a supporting layer arranged within the periphery of the piezoelectric element, a cover extending so as to provide a groove inside the external periphery of the element substrate, the groove ranging over the entire external periphery of the element substrate by removing a portion of the cover and/or supporting layer inside the external periphery of the element substrate after the cover is arranged on the supporting layer, an insulating reinforcing material that entirely covers portions of the element substrate ranging from the cover to the periphery of a principal surface of the element substrate, and an electrically conductive member electrically connected to the electrically conductive pattern so as to pass through the cover and the reinforcing material.
摘要:
An ignition element mounting capacitor having an ignition element mounted on a capacitor, includes therein a first capacitor section and a second capacitor section, and first external terminal electrodes electrically connected to the first capacitor section and second external terminal electrodes electrically connected to the second capacitor section. The first capacitor section has a capacity for igniting ignition powder, and the second capacitor section has a function for removing noise which affects external circuits. Further, provided on the surface of the capacitor are third external terminal electrodes electrically connected to the ignition element. In this manner, the invention provides a squib enabling its size to be miniaturized and its quality to be improved, while keeping a high productivity, and hence provides a header assembly and a ignition element mounting capacitor as components of the squib and further provides a gas generator having such a squib installed therein for an air bag and a gas generator having the squib for a seat belt pretensioner.
摘要:
An ignition element mounting capacitor having an ignition element mounted on a capacitor, includes therein a first capacitor section and a second capacitor section, and first external terminal electrodes electrically connected to the first capacitor section and second external terminal electrodes electrically connected to the second capacitor section. The first capacitor section has a capacity for igniting ignition powder, and the second capacitor section has a function for removing noise which affects external circuits. Further, provided on the surface of the capacitor are third external terminal electrodes electrically connected to the ignition element. In this manner, the invention provides a squib enabling its size to be miniaturized and its quality to be improved, while keeping a high productivity, and hence provides a header assembly and a ignition element mounting capacitor as components of the squib and further provides a gas generator having such a squib installed therein for an air bag and a gas generator having the squib for a seat belt pretensioner.