摘要:
A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is &agr;-tantalum.
摘要:
A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is &agr;-tantalum.
摘要:
A method for manufacturing a surface acoustic wave apparatus decreases a specific resistance of an electrode film by removing hydrogen occluded in the electrode film that is primarily composed of tantalum, so that the device properties are stabilized. An electrode film primarily composed of tantalum is formed on a piezoelectric substrate. Subsequently, this electrode film is heat-treated in a vacuum at a temperature of about 200° C. to about 700° C. for several hours. Thereafter, the electrode film is patterned so as to produce an interdigital electrode transducer.
摘要:
A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of &agr;-tantalum.
摘要:
A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of α-tantalum.
摘要:
A method of forming an electrode film using a vacuum deposition apparatus, includes the steps of depositing a refractory metal on a substrate after reaching a back pressure in a deposition chamber at a pressure that is within a range of about 1×10−4 Pa to about 5′10−3 Pa, and annealing the substrate on which the metal is deposited to decrease the electrical resistivity of the electrode film.
摘要:
A photosensitive insulating paste contains a borosilicate glass powder and a crystalline SiO2 powder, wherein the powders are dispersed in a photosensitive organic vehicle and the paste contains the crystalline SiO2 component in an amount of about 3-40 wt. % after sintering. A thick-film multi-layer circuit substrate (e.g., chip inductor) comprising an insulating substrate on which insulating layers are formed, wherein the insulating layers are formed through exposure, development and sintering, after the application of the photosensitive insulating paste.
摘要:
The invention provides an insulating paste, comprising: an organic vehicle containing an organic binder, a photo-polymerization initiator and a photosetting monomer; and a silicate glass powder having a softening point in a range of about 700° C. to 1,050° C. and having an average particle size in a range of about 0.1 to 5.0 &mgr;m, said silicate glass powder being dispersed into said organic vehicle. Preferably, the silicate glass powder of the above insulating paste comprises a composition represented by xSiO2—yB203—zK2O where x+y+z is 100 parts by weight and the values z, y and z are on lines or within a region enclosed by lines passing through four points A(65, 35, 0), B(65, 20, 15), C(85, 0, 15) and D(85, 15, 0) on a ternary diagram thereof.
摘要翻译:本发明提供了一种绝缘膏,其包括:含有有机粘合剂,光聚合引发剂和光固化性单体的有机载体; 和软化点在约700℃至1050℃的平均粒径在约0.1至5.0μm的范围内的硅酸盐玻璃粉末,所述硅酸盐玻璃粉末分散在所述有机载体中。 优选地,上述绝缘膏的硅酸盐玻璃粉末包含由xSiO 2 -yB 2 O 3 -zK 2 O表示的组合物,其中x + y + z为100重量份,并且z,y和z的值在线上或由线包围的区域内 在其三元图上通过四个点A(65,35,0),B(65,20,15),C(85,0,15)和D(85,15,0)。
摘要:
A method for manufacturing a circuit board having a through-hole for defining via hole, which has a sloped inner wall tilted at a desired tilt angle &thgr;, is provided. The through-hole has an inverted-trapezoidal cross-section and is made using a photomask having a via hole pattern including a light-shielding pattern corresponding to the bottom of the through-hole, and pluralities of light-shielding strips and translucent strips which are arranged alternately and substantially parallel to one another, the pluralities of light-shielding strips and translucent strips corresponding to the sloped inner wall of the through-hole. The tilt angle &thgr; is determined using a polynomial approximation of degree n: f ( s ) = θ = φ ∑ k = 0 n C k s k wherein s is the width of the light-shielding strips and &phgr; is a constant relating to the exposure conditions, and is in the range of about 0.17 rad
摘要:
A photosensitive insulating paste including an insulating material containing a borosilicate glass powder. The insulating material is dispersed in a photosensitive organic vehicle, and the borosilicate glass powder contains SiO2, B2O3 and K2O such that the compositional proportions by weight of the three components represented by (SiO2, B2O3, K2O) fall within a region formed by connecting points A (65, 35, 0), B (65, 25, 10), C (85, 5, 10) and D (85, 15, 0) in a ternary diagram thereof. A thick-film multi-layer circuit substrate including the paste is also disclosed.
摘要翻译:一种感光绝缘膏,其包含含有硼硅酸盐玻璃粉末的绝缘材料。 绝缘材料分散在感光性有机载体中,硼硅酸盐玻璃粉末含有SiO 2,B 2 O 3和K 2 O,使得由(SiO 2,B 2 O 3,K 2 O)表示的三种成分的组成比例落在由连接点形成的区域内 A(65,35,0),B(65,25,10),C(85,5,10)和D(85,15,0)。 还公开了包括该糊状物的厚膜多层电路基板。