公开(公告)号：US10914637B2

公开(公告)日：2021-02-09

申请号：US16449410

申请日：2019-06-23

Applicant: Massachusetts Institute of Technology

Inventor： Yuxuan Lin ,  Xiang Ji ,  Tomas Palacios ,  Jing Kong

IPC: G01J5/20 ,  G01B7/16 ,  F16K31/00 ,  G01J5/08

Abstract: A thermo-mechanical bolometer includes a substrate and a sensing component mounted on the substrate. The sensing element comprises (a) at least one thermal-actuation component mounted in parallel with the substrate and (b) a strain sensor mounted on the at least one layer of thermal-actuation component. The at least one thermal-actuation component alone or in combination (a) absorbs electromagnetic waves and converts energy from absorbed electromagnetic waves into a change in temperature and (b) converts the change in temperature into a deformation of the at least one layer. The strain sensor comprises a layer of fragments with a gap space between the fragments, wherein the strain sensor senses the deformation or mechanical movement and exhibits a change in electrical resistance in response to the sensed deformation or mechanical movement.

公开(公告)号：US09812525B2

公开(公告)日：2017-11-07

申请号：US15373687

申请日：2016-12-09

Applicant: Massachusetts Institute of Technology

Inventor： Mildred S. Dresselhaus ,  Jing Kong ,  Tomas A. Palacios ,  Xi Ling ,  Yuxuan Lin

IPC: H01L29/06 ,  H01L29/24 ,  H01L21/02

CPC classification number: H01L29/068 ,  H01L21/02112 ,  H01L21/0242 ,  H01L21/02422 ,  H01L21/02527 ,  H01L21/0254 ,  H01L21/02551 ,  H01L21/02568 ,  H01L21/0259 ,  H01L21/0262 ,  H01L21/02642 ,  H01L21/02645 ,  H01L21/8256 ,  H01L27/0207 ,  H01L27/088 ,  H01L29/0665 ,  H01L29/24 ,  H01L29/267 ,  H01L29/45 ,  H01L29/6603 ,  H01L29/778 ,  H01L29/861

Abstract: A two-dimensional heterostructure is synthesized by producing a patterned first two-dimensional material on a growth substrate. The first two-dimensional material is patterned to define at least one void through which an exposed region of the growth substrate is exposed. Seed molecules are selectively deposited either on the exposed region of the growth substrate or on the patterned first two-dimensional material. A second two-dimensional material that is distinct from the first two-dimensional material is then grown from the deposited seed molecules.

公开(公告)号：US20190390950A1

公开(公告)日：2019-12-26

申请号：US16449410

申请日：2019-06-23

Applicant: Massachusetts Institute of Technology

Inventor： Yuxuan Lin ,  Xiang Ji ,  Tomas Palacios ,  Jing Kong

IPC: G01B7/16 ,  G01J5/20 ,  F16K31/00

Abstract: A thermo-mechanical bolometer includes a substrate and a sensing component mounted on the substrate. The sensing element comprises (a) at least one thermal-actuation component mounted in parallel with the substrate and (b) a strain sensor mounted on the at least one layer of thermal-actuation component. The at least one thermal-actuation component alone or in combination (a) absorbs electromagnetic waves and converts energy from absorbed electromagnetic waves into a change in temperature and (b) converts the change in temperature into a deformation of the at least one layer. The strain sensor comprises a layer of fragments with a gap space between the fragments, wherein the strain sensor senses the deformation or mechanical movement and exhibits a change in electrical resistance in response to the sensed deformation or mechanical movement.

公开(公告)号：US20170170260A1

公开(公告)日：2017-06-15

申请号：US15373687

申请日：2016-12-09

Applicant: Massachusetts Institute of Technology

Inventor： Mildred S. Dresselhaus ,  Jing Kong ,  Tomas A. Palacios ,  Xi Ling ,  Yuxuan Lin

IPC: H01L29/06 ,  H01L21/02 ,  H01L29/24

CPC classification number: H01L29/068 ,  H01L21/02112 ,  H01L21/0242 ,  H01L21/02422 ,  H01L21/02527 ,  H01L21/0254 ,  H01L21/02551 ,  H01L21/02568 ,  H01L21/0259 ,  H01L21/0262 ,  H01L21/02642 ,  H01L21/02645 ,  H01L21/8256 ,  H01L27/0207 ,  H01L27/088 ,  H01L29/0665 ,  H01L29/24 ,  H01L29/267 ,  H01L29/45 ,  H01L29/6603 ,  H01L29/778 ,  H01L29/861

Abstract: A two-dimensional heterostructure is synthesized by producing a patterned first two-dimensional material on a growth substrate. The first two-dimensional material is patterned to define at least one void through which an exposed region of the growth substrate is exposed. Seed molecules are selectively deposited either on the exposed region of the growth substrate or on the patterned first two-dimensional material. A second two-dimensional material that is distinct from the first two-dimensional material is then grown from the deposited seed molecules.