公开(公告)号：US08781070B2

公开(公告)日：2014-07-15

申请号：US13570271

申请日：2012-08-09

申请人： Matthew Wormington ,  Paul Ryan ,  John Leonard Wall

发明人： Matthew Wormington ,  Paul Ryan ,  John Leonard Wall

IPC分类号： G01N23/20

CPC分类号： G01N23/20 ,  G01N2223/6116 ,  G01N2223/646

摘要： Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides. The apparatus includes an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk. An X-ray detector is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode. A motion assembly is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk. A processor is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk.

摘要翻译： 用于检查盘的装置，其包括结晶材料并具有第一和第二侧。 该装置包括X射线源，其被配置为引导X射线束照射在盘的第一侧的区域上。 X射线检测器定位成以反射模式接收和形成从盘的第一侧的区域衍射的X射线的输入图像。 运动组件被配置为使盘相对于X射线源和检测器旋转，使得该区域在靠近盘的边缘的圆周路径上扫描。 处理器被配置为沿着圆周路径处理由X射线检测器形成的输入图像，以便产生指示沿着盘的边缘的缺陷的复合输出图像。

公开(公告)号：US20130039471A1

公开(公告)日：2013-02-14

申请号：US13570271

申请日：2012-08-09

申请人： Matthew Wormington ,  Paul Ryan ,  John Leonard Wall

发明人： Matthew Wormington ,  Paul Ryan ,  John Leonard Wall

IPC分类号： G01N23/207

CPC分类号： G01N23/20 ,  G01N2223/6116 ,  G01N2223/646

摘要： Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides. The apparatus includes an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk. An X-ray detector is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode. A motion assembly is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk. A processor is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk.

摘要翻译： 用于检查盘的装置，其包括结晶材料并具有第一和第二侧。 该装置包括X射线源，其被配置为引导X射线束照射在盘的第一侧的区域上。 X射线检测器定位成以反射模式接收和形成从盘的第一侧的区域衍射的X射线的输入图像。 运动组件被配置为使盘相对于X射线源和检测器旋转，使得该区域在靠近盘的边缘的圆周路径上扫描。 处理器被配置为沿着圆周路径处理由X射线检测器形成的输入图像，以便产生指示沿着盘的边缘的缺陷的复合输出图像。

公开(公告)号：US20120140889A1

公开(公告)日：2012-06-07

申请号：US12958420

申请日：2010-12-02

申请人： John Wall ,  David Jacques ,  Boris Yokhin ,  Alexander Krokhmal ,  Paul Ryan ,  Richard Bytheway ,  David Berman ,  Matthew Wormington

发明人： John Wall ,  David Jacques ,  Boris Yokhin ,  Alexander Krokhmal ,  Paul Ryan ,  Richard Bytheway ,  David Berman ,  Matthew Wormington

IPC分类号： G01N23/207

CPC分类号： G01N23/207

摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.

摘要翻译： 一种用于分析的方法包括将X射线的会聚束指向具有多个单晶层的样品的表面，所述样品具有至少第一层和形成在第一层上并相对于第一层倾斜的第二层。 在将感测到的X射线分解为角度的同时，同时检测从第一和第二层中的每一个衍射的X射线，以便产生至少包括由于第一层的第一衍射峰的衍射光谱，以及 由于第二层造成的第二衍射峰。 分析衍射光谱以识别至少第二层的特征。

公开(公告)号：US08437450B2

公开(公告)日：2013-05-07

申请号：US12958420

申请日：2010-12-02

申请人： John Wall ,  David Jacques ,  Boris Yokhin ,  Alexander Krokhmal ,  Paul Ryan ,  Richard Bytheway ,  David Berman ,  Matthew Wormington

发明人： John Wall ,  David Jacques ,  Boris Yokhin ,  Alexander Krokhmal ,  Paul Ryan ,  Richard Bytheway ,  David Berman ,  Matthew Wormington

IPC分类号： G01N23/207

CPC分类号： G01N23/207

摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.

摘要翻译： 一种用于分析的方法包括将X射线的会聚束指向具有多个单晶层的样品的表面，所述样品具有至少第一层和形成在第一层上并相对于第一层倾斜的第二层。 在将感测到的X射线分解为角度的同时，同时检测从第一和第二层中的每一个衍射的X射线，以便产生至少包括由于第一层的第一衍射峰的衍射光谱，以及 由于第二层造成的第二衍射峰。 分析衍射光谱以识别至少第二层的特征。

公开(公告)号：US20120275568A1

公开(公告)日：2012-11-01

申请号：US13419497

申请日：2012-03-14

申请人： Isaac Mazor ,  Matthew Wormington ,  Ayelet Dag ,  Bagrat Khachatryan

发明人： Isaac Mazor ,  Matthew Wormington ,  Ayelet Dag ,  Bagrat Khachatryan

IPC分类号： G01N23/201

CPC分类号： G01N23/201 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/8422 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8438 ,  G01N2223/1006 ,  G01N2223/61

摘要： Apparatus for inspection of a sample includes an X-ray source, which is configured to irradiate a location on the sample with a beam of X-rays. An X-ray detector is configured to receive the X-rays that are scattered from the sample and to output a first signal indicative of the received X-rays. A VUV source is configured to irradiate the location on the sample with a beam of VUV radiation. A VUV detector is configured to receive the VUV radiation that is reflected from the sample and to output a second signal indicative of the received VUV radiation. A processor is configured to process the first and second signals in order to measure a property of the sample.

摘要翻译： 用于检查样品的装置包括X射线源，其被配置为用X射线照射样品上的位置。 X射线检测器被配置为接收从样本散射的X射线并输出指示所接收的X射线的第一信号。 VUV源配置为用VUV辐射束照射样品上的位置。 VUV检测器被配置为接收从样本反射的VUV辐射并输出指示所接收的VUV辐射的第二信号。 处理器被配置为处理第一和第二信号以便测量样品的性质。

公开(公告)号：US08565379B2

公开(公告)日：2013-10-22

申请号：US13419497

申请日：2012-03-14

申请人： Isaac Mazor ,  Matthew Wormington ,  Ayelet Dag ,  Bagrat Khachatryan

发明人： Isaac Mazor ,  Matthew Wormington ,  Ayelet Dag ,  Bagrat Khachatryan

IPC分类号： G01N23/201

CPC分类号： G01N23/201 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/8422 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8438 ,  G01N2223/1006 ,  G01N2223/61

摘要： Apparatus for inspection of a sample includes an X-ray source, which is configured to irradiate a location on the sample with a beam of X-rays. An X-ray detector is configured to receive the X-rays that are scattered from the sample and to output a first signal indicative of the received X-rays. A VUV source is configured to irradiate the location on the sample with a beam of VUV radiation. A VUV detector is configured to receive the VUV radiation that is reflected from the sample and to output a second signal indicative of the received VUV radiation. A processor is configured to process the first and second signals in order to measure a property of the sample.

摘要翻译： 用于检查样品的装置包括X射线源，其被配置为用X射线照射样品上的位置。 X射线检测器被配置为接收从样本散射的X射线并输出指示所接收的X射线的第一信号。 VUV源配置为用VUV辐射束照射样品上的位置。 VUV检测器被配置为接收从样本反射的VUV辐射并输出指示所接收的VUV辐射的第二信号。 处理器被配置为处理第一和第二信号以便测量样品的性质。

公开(公告)号：US20060159225A1

公开(公告)日：2006-07-20

申请号：US11036592

申请日：2005-01-14

申请人： David Bowen ,  Petra Feichtinger ,  Matthew Wormington

发明人： David Bowen ,  Petra Feichtinger ,  Matthew Wormington

IPC分类号： G01N23/20

CPC分类号： G01N23/201

摘要： An x-ray detection system (400) for detecting a deflected X-ray beam (206) from a sample (204) comprising a detector (402) having an array of pixels enabled to receive the X-ray beam area at the detector (402), a image processing means (404) for reading out a sample image from the detector (402) and a region of interest extraction means (406, 408) for extracting a sub-image of a first area from the sample image. The sub-image is typically a narrow strip of the array of pixels to obtain a “virtual slit” image or a circular area of the array of pixels to obtain a “virtual aperture” image. More than one sub-image may be extracted from the sample image taken from the detector (402).

摘要翻译： 一种用于从样本（204）检测偏转的X射线束（206）的X射线检测系统（400），包括具有能够在检测器处接收X射线束区域的像素阵列的检测器（402） 402），用于从检测器（402）读出样本图像的图像处理装置（404）和用于从样本图像中提取第一区域的子图像的感兴趣区域提取装置（406,408）。 子图像通常是像素阵列的窄条以获得“虚拟狭缝”图像或像素阵列的圆形区域以获得“虚拟光圈”图像。 可以从从检测器（402）获取的样本图像中提取多于一个的子图像。

公开(公告)号：US08731138B2

公开(公告)日：2014-05-20

申请号：US13547073

申请日：2012-07-12

申请人： Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

发明人： Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

IPC分类号： G01N23/20 ,  G01N23/203 ,  G01N23/207

CPC分类号： G01N23/207

摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

摘要翻译： 一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数 从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。 分析边缘的特性以测量外延层的弛豫。

公开(公告)号：US20110164730A1

公开(公告)日：2011-07-07

申请号：US12683436

申请日：2010-01-07

申请人： Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Ofengenden ,  David Berman ,  Matthew Wormington

发明人： Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Ofengenden ,  David Berman ,  Matthew Wormington

IPC分类号： G01N23/207

CPC分类号： G01N23/207

摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

摘要翻译： 一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数 从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。 分析边缘的特性以测量外延层的弛豫。

公开(公告)号：US20060159229A1

公开(公告)日：2006-07-20

申请号：US11036593

申请日：2005-01-14

申请人： David Bowen ,  Perta Feichtinger ,  Matthew Wormington ,  John Spence ,  Kevin Matney

发明人： David Bowen ,  Perta Feichtinger ,  Matthew Wormington ,  John Spence ,  Kevin Matney

IPC分类号： H05G1/02

CPC分类号： G01N23/207

摘要： An X-ray source (24), a detector (26) and a specimen (20) are mutually positioned by an apparatus which includes two spaced, parallel linear actuators (32,36) each movable along a gantry (34). The source (24) and detector (26) can be moved vertically by the actuators (32,36) and rotationally by rotary actuators (28,30). Equivalent arrangements are also described.

摘要翻译： X射线源（24），检测器（26）和样本（20）通过包括两个间隔开的平行的线性致动器（32,36）的装置相互定位，每个可沿架台（34）移动。 源（24）和检测器（26）可以由致动器（32,36）垂直移动，并通过旋转致动器（28,30）旋转移动。 还描述了等同的布置。