公开(公告)号：US20140298909A1

公开(公告)日：2014-10-09

申请号：US13705680

申请日：2012-12-05

Applicant: Maxim Integrated Products, Inc.

Inventor： Barbara Simoni ,  Luca Coronato ,  Gabriele Cazzaniga

IPC: G01P1/00

CPC classification number: G01P1/00 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2203/058 ,  G01P1/006 ,  G01P15/125 ,  G01P2015/0831

Abstract: The invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of compensating the effect of the thermo-mechanical stress by incorporating and adjusting elastic elements that are used to couple a moveable proof mass to anchors. The proof mass responds to acceleration by displacing and tilting with respect to a moveable mass rotational axis. The thermo-mechanical stress is accumulated in the structure during the courses of manufacturing, packaging and assembly or over the structure's lifetime. The stress causes a displacement on the proof mass. A plurality of elastic elements is coupled to support the proof mass. Geometry and configuration of these elastic elements are adjusted to reduce the displacement caused by the thermo-mechanical stress.

Abstract translation: 本发明涉及一种微机电结构，更具体地说，涉及通过结合和调节弹性元件来补偿热机械应力的影响的系统，装置和方法，所述弹性元件用于将可移动的检验质量块连接到锚定件。 证明质量通过相对于可移动的质量旋转轴的移位和倾斜来响应于加速度。 在制造，包装和组装过程中或结构的使用寿命期间，热机械应力累积在结构中。 应力会导致检测质量发生位移。 多个弹性元件被联接以支撑证明物质。 调整这些弹性元件的几何形状和结构，以减少由热机械应力引起的位移。

公开(公告)号：US20140230550A1

公开(公告)日：2014-08-21

申请号：US13770726

申请日：2013-02-19

Applicant: Maxim Integrated Products, Inc.

Inventor： Barbara Simoni ,  Luca Coronato ,  Gabriele Cazzaniga

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0814

Abstract: The invention relates to a microelectro-mechanical structure (MEMS), and more particularly, to systems, devices and methods of compensating effect of thermo-mechanical stress on a micro-machined accelerometer by incorporating and adjusting elastic elements to couple corresponding sensing electrodes. The sensing electrodes comprise moveable electrodes and stationary electrodes that are respectively coupled on a proof mass and a substrate. At least one elastic element is incorporated into a coupling structure that couples two stationary electrodes or couples a stationary electrode to at least one anchor. More than one elastic element may be incorporated. The number, locations, configurations and geometries of the elastic elements are adjusted to compensate an output offset and a sensitivity drift that are induced by the thermo-mechanical stress accumulated in the MEMS device.

Abstract translation: 本发明涉及微电子机械结构（MEMS），更具体地说，涉及通过结合并调整弹性元件以耦合对应的检测电极来补偿热机械应力对微加工加速度计的影响的系统，装置和方法。 感测电极包括分别耦合在检测质量块和基板上的可移动电极和固定电极。 至少一个弹性元件被结合到联接结构中，耦合结构耦合两个固定电极或将固定电极耦合到至少一个锚。 可以并入多于一个的弹性元件。 调整弹性元件的数量，位置，构造和几何形状以补偿由MEMS器件中积累的热机械应力引起的输出偏移和灵敏度漂移。

公开(公告)号：US09207254B2

公开(公告)日：2015-12-08

申请号：US13770726

申请日：2013-02-19

Applicant: Maxim Integrated Products, Inc.

Inventor： Barbara Simoni ,  Luca Coronato ,  Gabriele Cazzaniga

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0814

Abstract: The invention relates to a microelectro-mechanical structure (MEMS), and more particularly, to systems, devices and methods of compensating effect of thermo-mechanical stress on a micro-machined accelerometer by incorporating and adjusting elastic elements to couple corresponding sensing electrodes. The sensing electrodes comprise moveable electrodes and stationary electrodes that are respectively coupled on a proof mass and a substrate. At least one elastic element is incorporated into a coupling structure that couples two stationary electrodes or couples a stationary electrode to at least one anchor. More than one elastic element may be incorporated. The number, locations, configurations and geometries of the elastic elements are adjusted to compensate an output offset and a sensitivity drift that are induced by the thermo-mechanical stress accumulated in the MEMS device.

Abstract translation: 本发明涉及微电子机械结构（MEMS），更具体地说，涉及通过结合并调整弹性元件以耦合对应的检测电极来补偿热机械应力对微加工加速度计的影响的系统，装置和方法。 感测电极包括分别耦合在检测质量块和基板上的可移动电极和固定电极。 至少一个弹性元件被结合到联接结构中，耦合结构耦合两个固定电极或将固定电极耦合到至少一个锚。 可以并入多于一个的弹性元件。 调整弹性元件的数量，位置，构造和几何形状以补偿由MEMS器件中积累的热机械应力引起的输出偏移和灵敏度漂移。

公开(公告)号：US09134337B2

公开(公告)日：2015-09-15

申请号：US13716950

申请日：2012-12-17

Applicant: Maxim Integrated Products, Inc.

Inventor： Barbara Simoni ,  Luca Coronato ,  Gabriele Cazzaniga

IPC: G01P15/125 ,  G01P1/00 ,  B81B3/00 ,  G01P15/08

CPC classification number: G01P1/00 ,  B81B3/001 ,  B81B2201/0235 ,  B81C2203/0118 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0871 ,  Y10T29/49002

Abstract: The present invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of incorporating z-axis out-of-plane stoppers that are controlled to protect the structure from both mechanical shock and electrostatic disturbance. The z-axis out-of plane stoppers include shock stoppers and balance stoppers. The shock stoppers are arranged on a cap substrate that is used to package the structure. These shock stoppers are further aligned to a proof mass in the structure to reduce the impact of the mechanical shock. The balance stoppers are placed underneath the proof mass, and electrically coupled to a balance voltage, such that electrostatic force and torque imposed by the shock stoppers is balanced by that force and torque generated by the balance stoppers. This structure is less susceptible to mechanical shock, and shows a negligible offset that may be induced by electrostatic disturbance caused by the shock stoppers.

Abstract translation: 本发明涉及一种微机电结构，更具体地说，涉及一种结合z轴平面外止动器的系统，装置和方法，其被控制以保护结构免受机械冲击和静电干扰。 z轴的平面外挡块包括减震器和平衡挡块。 冲击止动件布置在用于封装结构的帽基底上。 这些冲击止动器进一步与结构中的检验质量对齐，以减少机械冲击的影响。 平衡止动器放置在检验质量下方，并且电耦合到平衡电压，使得由冲击止动器施加的静电力和扭矩由平衡止动器产生的力和扭矩平衡。 这种结构不易受到机械冲击的影响，并且显示可能由冲击阻塞引起的静电干扰引起的可忽略的偏移。

公开(公告)号：US20140298910A1

公开(公告)日：2014-10-09

申请号：US13716950

申请日：2012-12-17

Applicant: Maxim Integrated Products, Inc.

Inventor： Barbara Simoni ,  Luca Coronato ,  Gabriele Cazzaniga

IPC: G01P1/00 ,  G01P15/125

CPC classification number: G01P1/00 ,  B81B3/001 ,  B81B2201/0235 ,  B81C2203/0118 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0871 ,  Y10T29/49002

Abstract: The present invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of incorporating z-axis out-of-plane stoppers that are controlled to protect the structure from both mechanical shock and electrostatic disturbance. The z-axis out-of plane stoppers include shock stoppers and balance stoppers. The shock stoppers are arranged on a cap substrate that is used to package the structure. These shock stoppers are further aligned to a proof mass in the structure to reduce the impact of the mechanical shock. The balance stoppers are placed underneath the proof mass, and electrically coupled to a balance voltage, such that electrostatic force and torque imposed by the shock stoppers is balanced by that force and torque generated by the balance stoppers. This structure is less susceptible to mechanical shock, and shows a negligible offset that may be induced by electrostatic disturbance caused by the shock stoppers.

Abstract translation: 本发明涉及一种微机电结构，更具体地说，涉及一种结合z轴平面外止动器的系统，装置和方法，其被控制以保护结构免受机械冲击和静电干扰。 z轴的平面外挡块包括减震器和平衡挡块。 冲击止动件布置在用于封装结构的帽基底上。 这些冲击止动器进一步与结构中的检验质量对齐，以减少机械冲击的影响。 平衡止动器放置在检验质量下方，并且电耦合到平衡电压，使得由冲击止动器施加的静电力和扭矩由平衡止动器产生的力和扭矩平衡。 这种结构不易受到机械冲击的影响，并且显示可能由冲击阻塞引起的静电干扰引起的可忽略的偏移。

公开(公告)号：US09517930B2

公开(公告)日：2016-12-13

申请号：US14047944

申请日：2014-01-29

Applicant: Maxim Integrated Products, Inc.

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Barbara Simoni ,  Luciano Prandi

IPC: H01G5/00 ,  B81C1/00 ,  B81B3/00 ,  H01H1/00

CPC classification number: B81C1/00968 ,  B81B3/001 ,  B81B3/0056 ,  B81B2201/016 ,  H01H1/0036

Abstract: Various embodiments of the invention reduce stiction in a wide range of MEMS devices and increase device reliability without negatively impacting performance. In certain embodiments, stiction recover is accomplished by applying electrostatic forces to electrodes via optimized voltage signals that generate a restoring force that aids in overcoming stiction forces between electrodes. The voltage signals used within a stiction recovery procedure may be static or a dynamic, and may be applied directly to existing electrodes within a MEMS device, thereby, eliminating the need for additional components. In some embodiments, the voltage is estimated or calibrated and swept through a range of frequencies that contains one or more resonant frequencies of the mechanical structure that comprises the parts to be detached.

公开(公告)号：US09176157B2

公开(公告)日：2015-11-03

申请号：US13705680

申请日：2012-12-05

Applicant: Maxim Integrated Products, Inc.

Inventor： Barbara Simoni ,  Luca Coronato ,  Gabriele Cazzaniga

IPC: G01P15/125 ,  G01P1/00 ,  B81B7/00 ,  G01P15/08

CPC classification number: G01P1/00 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2203/058 ,  G01P1/006 ,  G01P15/125 ,  G01P2015/0831

Abstract: The invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of compensating the effect of the thermo-mechanical stress by incorporating and adjusting elastic elements that are used to couple a moveable proof mass to anchors. The proof mass responds to acceleration by displacing and tilting with respect to a moveable mass rotational axis. The thermo-mechanical stress is accumulated in the structure during the courses of manufacturing, packaging and assembly or over the structure's lifetime. The stress causes a displacement on the proof mass. A plurality of elastic elements is coupled to support the proof mass. Geometry and configuration of these elastic elements are adjusted to reduce the displacement caused by the thermo-mechanical stress.

Abstract translation: 本发明涉及一种微机电结构，更具体地说，涉及通过结合和调节弹性元件来补偿热机械应力的影响的系统，装置和方法，所述弹性元件用于将可移动的检验质量物料联接到锚定件。 证明质量通过相对于可移动的质量旋转轴的移位和倾斜来响应于加速度。 在制造，包装和组装过程中或结构的使用寿命期间，热机械应力累积在结构中。 应力会导致检测质量发生位移。 多个弹性元件被联接以支撑证明物质。 调整这些弹性元件的几何形状和结构，以减少由热机械应力引起的位移。