摘要:
A method for laser ashing of polyimide for a semiconductor manufacturing process using a structure, the structure comprising a supporting material attached to a semiconductor chip by a polyimide glue, includes releasing the supporting material from the polyimide glue, such that the polyimide glue remains on the semiconductor chip; and ashing the polyimide glue on the semiconductor chip using an ablating laser.
摘要:
A method for laser ashing of polyimide for a semiconductor manufacturing process using a structure, the structure comprising a supporting material attached to a semiconductor chip by a polyimide glue, includes releasing the supporting material from the polyimide glue, such that the polyimide glue remains on the semiconductor chip; and ashing the polyimide glue on the semiconductor chip using an ablating laser.
摘要:
A portable patient cooling apparatus is provided that includes a self-contained refrigerator and on-board power storage supply for stand alone operation. The apparatus is interconnectable to one or more heat exchange devices (e.g. patient contact pads or intravascular catheters) through which a cooled fluid may be circulated for patient cooling. Such fluid may be liquid contained within a reservoir comprising the apparatus during periods of non-use. The apparatus preferably defines a total volume of less than about 0.04 m3, while having a total weight of less than about 15 kg to yield a total circulated fluid cooling capacity of at least 200 watts.