摘要:
A method for forming a top interconnection level and bonding pads for an integrated circuit chip is described. The interconnection level is formed by a damascene type process. Bonding pads are placed above the plane of the wiring channels of the interconnection level. This eliminates the problem of dishing of the relatively large bonding pads which occurs, during chemical mechanical polishing, when the bonding pads are on the same level as the interconnection metallurgy. The interconnection wiring includes a smaller pad base segment upon which the larger bonding pad is then formed. The bonding pad base segments are small enough that dishing during CMP is not a problem. Placing the bonding pads on pad bases provides for a more robust pad. The top level and bonding pad fabrication procedures are applicable with various conductive materials including aluminum, tungsten, and copper.
摘要:
A method for forming a top interconnection level and bonding pads for an integrated circuit chip is described. The interconnection level is formed by a damascene type process. Bonding pads are placed above the plane of the wiring channels of the interconnection level. This eliminates the problem of dishing of the relatively large bonding pads which occurs, during chemical mechanical polishing, when the bonding pads are on the same level as the interconnection metallurgy. The interconnection wiring includes a smaller pad base segment upon which the larger bonding pad is then formed. The bonding pad base segments are small enough that dishing during CMP is not a problem. Placing the bonding pads on pad bases provides for a more robust pad. The top level and bonding pad fabrication procedures are applicable with various conductive materials including aluminum, tungsten, and copper.
摘要:
An exemplary method of creating a target storage layout table referenced for partitioning a storage space of a storage device includes following steps: identifying defective storage areas in the storage space of the storage device, and accordingly generating an identification result; and creating the target storage layout table according to the identification result.
摘要:
Methods and apparatuses supporting an electrical connection in a manner that eliminates or reduces a danger of electrical sparking are disclosed. A sparkless electrical connector has a conductor, configured to provide flow of electricity between an electrical source and a load, and a resistive element, operatively coupled to the conductor, to resist flow of electricity during a state of partial connection with the electrical source or the load. The resistive element may be not in contact with a terminal of the source or load during a state of full connection. The resistive element may be a coating of an anodized material on a pin of the conductor. The coating provides a resistance sufficient to prevent sparking during connection of the conductor and at least one of the electrical source and the load. Techniques disclosed herein benefit users and manufacturers in the areas of safety, cost, simplicity, and reliability.
摘要:
A method of manufacturing a double gate oxide layer. A substrate has trenches that divide the substrate into a memory circuit region and a logic circuit region. A dielectric layer is formed on the substrate to fill the trenches. The dielectric layer of the logic region is removed, thereby exposing the substrate. An ion implantation step is performed on the substrate of the logic circuit region using a reverse tone mask. A conformal barrier layer is formed over the substrate. A spin-on layer is formed over the barrier layer. A chemical mechanical polishing step is performed to remove the in-on layer, the barrier layer, and dielectric layer outside the trenches, thereby exposing the substrate. A thermal oxidation step is performed to form a double gate oxide layer that is thicker in the logic circuit region than it is in the memory circuit region.
摘要:
A process for producing a self-aligned contact comprises the steps of forming leads on a substrate, forming an etching stop layer on the leads by depositing, then forming a sacrificed oxide layer; after the structure of the leads is defined, a spacer is formed on both sides of the structure; a sacrificed oxide layer is formed, allowing the spacer to protrude in the form of horn. Next, a dielectric layer having a flat upper surface is deposited on the substrate and the structure of leads, a contact hole being formed between the leads so as to connect the substrate, a conductive material being filled in the contact hole to form a plug.