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公开(公告)号：US6005335A
公开(公告)日：1999-12-21
申请号：US990624
申请日：1997-12-15
Applicant: Michael D Potter
Inventor： Michael D Potter
CPC classification number: H01J29/94 , H01J2201/30423 , H01J2329/00
Abstract: A self-gettering electron field emitter has a first portion formed of a low-work-function material for emitting electrons, and it has an integral second portion that acts both as a low-resistance electrical conductor and as a gettering surface. The self-gettering emitter is formed by disposing a thin film of the low-work-function material parallel to a substrate and by disposing a thin film of the low-resistance gettering material parallel to the substrate and in contact with the thin film of the low-work-function material. The self-gettering emitter is particularly suitable for use in lateral field emission devices. The preferred emitter structure has a tapered edge, with a salient portion of the low-work-function material extending a small distance beyond an edge of the gettering and low resistance material. A fabrication process specially adapted for in situ formation of the self-gettering electron field emitters while fabricating microelectronic field emission devices is also disclosed.
Abstract translation: 自吸电子场发射器具有由用于发射电子的低功函数材料形成的第一部分，并且其具有作为低电阻电导体和吸气表面的整体第二部分。 自吸收发射体通过将低功函数材料的薄膜平行于衬底设置并且将低电阻吸气材料的薄膜平行于衬底设置并与薄膜接触而形成 低功能材料。 自吸式发射器特别适用于横向场发射装置。 优选的发射极结构具有锥形边缘，低功函数材料的显着部分在吸气和低电阻材料的边缘之外延伸一小段距离。 还公开了专门用于在制造微电子场发射器件的同时形成自吸电子场发射体的制造工艺。
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2.发明授权Electron field-emission display cell device having opening depth defined by etch stop 失效具有由蚀刻停止限定的开口深度的电子场致发射显示单元装置公开(公告)号：US06169357A
公开(公告)日：2001-01-02
申请号：US08901505
申请日：1997-07-28
Applicant: Michael D Potter
Inventor： Michael D Potter
IPC: H01J162
CPC classification number: C09K11/682 , C09K11/672 , C09K11/693 , C09K11/7702 , C09K11/7708 , H01J9/227
Abstract: An electron field-emission display comprises one or more display cell structures, each having a field-emission cathode and an anode comprising at least one of several cathodoluminescent phosphors disclosed. The display cell structures may also have one or more gate elements for controlling electron current flowing from cathode to anode when suitable electrical bias voltages are applied. A cell may have more than one phosphor, and in particular may have red, green, and blue phosphors selectively arranged. Each pixel site may have one anode of each color phosphor. The phosphors are preferably prepared in situ in an electrically-conductive thin-film or surface-layer form during fabrication of the display. A preferred fabrication process integrates an etch stop with the in situ phosphor process, the etch stop precisely defining the depth of an opening in the display cell structure. Metal oxides or mixed-metal oxides of zinc, copper, tin, or indium are heated in the presence of a refractory metal such as titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, or combinations thereof to make phosphors of various chromaticities, which may also include dopants, such as a lanthanide rare earth element, manganese, chromium, or stoichiometrically excess zinc, copper, tin, or indium. The display is operable when its phosphor is excited by electrons of very low energy.
Abstract translation: 电子场发射显示器包括一个或多个显示单元结构，每个显示单元结构具有场致发射阴极和包含公开的多个阴极发光荧光体中的至少一个的阳极。 当施加适当的电偏压时，显示单元结构还可以具有一个或多个栅极元件，用于控制从阴极流向阳极的电子电流。 单元可以具有多于一个的磷光体，并且特别地可以具有选择性地布置的红色，绿色和蓝色磷光体。 每个像素位置可以具有每个彩色荧光体的一个阳极。 荧光体优选在制造显示器期间以导电薄膜或表面层形式原位制备。 优选的制造工艺将蚀刻停止与原位磷光体处理集成，蚀刻停止精确地限定显示单元结构中的开口的深度。 金属氧化物或锌，铜，锡或铟的混合金属氧化物在难熔金属如钛，锆，铪，钒，铌，钽，铬，钼，钨或其组合的存在下加热， 各种色度的荧光体，其还可以包括掺杂剂，例如镧系元素稀土元素，锰，铬或化学计量过量的锌，铜，锡或铟。 当其荧光体被非常低能量的电子激发时，显示器是可操作的。
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Patent Agency Ranking
公开(公告)号：US6071633A
公开(公告)日：2000-06-06
申请号：US901403
申请日：1997-07-28
Applicant: Michael D Potter
Inventor： Michael D Potter
CPC classification number: C09K11/7702 , C09K11/672 , C09K11/682 , C09K11/693 , C09K11/7708 , H01J9/227
Abstract: A phosphor comprises, in atomic percentages, 90% to 100% of a mixed metal oxide MxTyOz, wherein M is a metal selected from Zn, Sn, In, Cu, and combinations thereof, T is a refractory metal selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and combinations thereof, and O is Oxygen, x, y, and z being chosen such that z is at most stoichiometric for MxTyOz; and 0% to 10% of a dopant comprising a substance selected from a rare earth element of the lanthanide series, Mn, Cr, and combinations thereof, or stoichiometrically excess zinc, copper, tin, or indium. Cathodoluminescent phosphor compositions stimulable by electrons of very low energy are prepared from metal oxides treated with refractory metals in various processes disclosed. Metal oxides or mixed-metal oxides of zinc, copper, tin, or indium are heated in the presence of a refractory metal such as titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, or combinations or alloys thereof to make phosphors of various chromaticities. In a simple embodiment, a quantity of Ta.sub.2 O.sub.5 is added to a quantity of ZnO and heated at an effective temperature and time to form Ta.sub.2 Zn.sub.3 O,, which is useful in various forms as a blue-light-emitting phosphor. In preferred embodiments, the phosphors are prepared in situ in an electrically-conductive thin-film or surface-layer form during fabrication of displays.
Abstract translation: 磷光体以原子百分比包含90％至100％的混合金属氧化物M x T y O z，其中M是选自Zn，Sn，In，Cu及其组合的金属，T是选自Ti，Zr， Hf，V，Nb，Ta，Cr，Mo，W及其组合，O是氧，x，y和z，使得z对于M x T y O z为至多化学计量; 以及含有选自镧系元素稀土元素，Mn，Cr及其组合的化合物或化学计量过量的锌，铜，锡或铟的物质的0〜10％的掺杂剂。 由非常低能量的电子刺激的阴极发光荧光体组合物由公开的各种方法由用难熔金属处理的金属氧化物制备。 锌，铜，锡或铟的金属氧化物或混合金属氧化物在钛，锆，铪，钒，铌，钽，铬，钼，钨等难熔金属的存在下被加热，或其组合或合金 以制造各种色度的荧光体。 在一个简单的实施例中，将一定数量的Ta 2 O 5添加到一定量的ZnO中并在有效温度和时间加热以形成Ta 2 Zn 3 O 3，其可用作各种形式作为蓝色发光荧光体。 在优选的实施方案中，在制造显示器期间，以导电薄膜或表面层形式原位制备荧光体。
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公开(公告)号：US6017257A
公开(公告)日：2000-01-25
申请号：US990887
申请日：1997-12-15
Applicant: Michael D Potter
Inventor： Michael D Potter
CPC classification number: H01J29/94 , H01J2201/30423 , H01J2329/00
Abstract: A self-gettering electron field emitter has a first portion formed of a low-work-function material for emitting electrons, and it has an integral second portion that acts both as a low-resistance electrical conductor and as a gettering surface. The self-gettering emitter is formed by disposing a thin film of the low-work-function material parallel to a substrate and by disposing a thin film of the low-resistance gettering material parallel to the substrate and in contact with the thin film of the low-work-function material. The self-gettering emitter is particularly suitable for use in lateral field emission devices. The preferred emitter structure has a tapered edge, with a salient portion of the low-work-function material extending a small distance beyond an edge of the gettering and low resistance material. A fabrication process specially adapted for in situ formation of the self-gettering electron field emitters while fabricating microelectronic field emission devices is also disclosed.
Abstract translation: 自吸电子场发射器具有由用于发射电子的低功函数材料形成的第一部分，并且其具有作为低电阻电导体和吸气表面的整体第二部分。 自吸收发射体通过将低功函数材料的薄膜平行于衬底设置并且将低电阻吸气材料的薄膜平行于衬底设置并与薄膜接触而形成 低功能材料。 自吸式发射器特别适用于横向场发射装置。 优选的发射极结构具有锥形边缘，低功函数材料的显着部分在吸气和低电阻材料的边缘之外延伸一小段距离。 还公开了专门用于在制造微电子场发射器件的同时形成自吸电子场发射体的制造工艺。
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公开(公告)号：US6015326A
公开(公告)日：2000-01-18
申请号：US900915
申请日：1997-07-28
Applicant: Michael D Potter
Inventor： Michael D Potter
CPC classification number: H01J9/227 , C09K11/672 , C09K11/682 , C09K11/693 , C09K11/7702 , C09K11/7708
Abstract: An electron field-emission display comprises one or more display cell structures, each having a field-emission cathode and an anode comprising at least one of several cathodoluminescent phosphors disclosed which are stimulable by electrons of very low energy. The display cell structures may also have gate elements for controlling electron current flowing from cathode to anode when suitable electrical bias voltages are applied. A preferred fabrication process integrates an etch stop with an in situ phosphor formation process. The etch stop precisely defines the depth of an opening in the display cell structure. Metal oxides or mixed-metal oxides of zinc, copper, tin, or indium are heated in the presence of a refractory metal such as titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, or combinations thereof to make phosphors of various chromaticities, which may also include dopants, such as a lanthanide rare earth element, manganese, chromium, or stoichiometrically excess zinc, copper, tin, or indium. A blue-light-emitting phosphor embodiment is based on ZnO treated with refractory metals, e.g. Ta, to prepare cathodoluminescent phosphor compositions, e.g. Ta.sub.2 Zn.sub.3 O.sub.8. Selective arrangement of various color phosphors may be made by selective deposition of suitable dopants. The selective deposition may be done, e.g. by chemical vapor deposition with appropriate masking, or by selective ion implantation.
Abstract translation: 电子场致发射显示器包括一个或多个显示单元结构，每个显示单元结构都具有场发射阴极和阳极，其包括可被非常低能量的电子刺激的几种阴极发光荧光体中的至少一种。 当施加适当的电偏压时，显示单元结构还可以具有用于控制从阴极流向阳极的电子电流的栅极元件。 优选的制造工艺将蚀刻停止与原位磷光体形成工艺相结合。 蚀刻停止件精确地限定显示单元结构中的开口的深度。 金属氧化物或锌，铜，锡或铟的混合金属氧化物在难熔金属如钛，锆，铪，钒，铌，钽，铬，钼，钨或其组合的存在下加热， 各种色度的荧光体，其还可以包括掺杂剂，例如镧系元素稀土元素，锰，铬或化学计量过量的锌，铜，锡或铟。 蓝色发光荧光体实施方案基于用难熔金属处理的ZnO，例如， Ta，以制备阴极发光荧光体组合物，例如 Ta2Zn3O8。 可以通过选择性沉积合适的掺杂剂来进行各种彩色荧光体的选择性布置。 可以进行选择性沉积，例如 通过适当掩蔽的化学气相沉积，或通过选择性离子注入。
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6.发明授权
公开(公告)号：US6015324A
公开(公告)日：2000-01-18
申请号：US964987
申请日：1997-11-05
Applicant: Michael D Potter
Inventor： Michael D Potter
Abstract: A device useful as a display element has an electron emitter and an anode disposed to receive electrons emitted from the emitter. The anode has surface portions differing in resistivity, providing an electron sink portion at the surface portion of lowest resistivity. A preferred embodiment has a lateral field-emission electron emitter and has an anode formed by processes specially adapted to provide anode portions of differing resistivity, including the electron sink portion. The electron sink portion is preferably disposed at a position laterally spaced apart from the emitting tip of the device's electron emitter. In a particularly preferred fabrication process, the anode is formed by depositing a base layer, depositing and patterning an etch-stop layer with an opening to define the electron-sink portion, forming an opening by etching overlying layers down to the etch-stop layer, and heating the base layer and etch-stop layer to form an anode surface that includes both an integral electron-sink portion and a cathodoluminescent phosphor for emitting light. The fabrication process provides for fabricating a plurality of display element devices to make a flat panel display.
Abstract translation: 用作显示元件的器件具有设置成接收从发射极发射的电子的电子发射器和阳极。 阳极具有电阻率不同的表面部分，在最低电阻率的表面部分提供电子吸收部分。 优选实施例具有横向场发射电子发射器，并且具有通过特别适于提供包括电子吸收部分的不同电阻率的阳极部分的工艺形成的阳极。 电子吸收部优选设置在与器件的电子发射体的发射端横向间隔开的位置。 在特别优选的制造工艺中，阳极通过沉积基底层，沉积和图案化具有开口的蚀刻停止层以形成电子吸收部分而形成，通过将覆盖层向下蚀刻到蚀刻停止层 并且加热基底层和蚀刻停止层以形成包括用于发光的整体电子吸收部分和阴极发光荧光体的阳极表面。 制造工艺提供制造多个显示元件装置以制作平板显示器。
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公开(公告)号：US5872421A
公开(公告)日：1999-02-16
申请号：US964483
申请日：1997-11-05
Applicant: Michael D Potter
Inventor： Michael D Potter
Abstract: A device useful as a display element has an electron emitter and an anode disposed to receive electrons emitted from the emitter. The anode has surface portions differing in resistivity, providing an electron sink portion at the surface portion of lowest resistivity. A preferred embodiment has a lateral field-emission electron emitter and has an anode formed by processes specially adapted to provide anode portions of differing resistivity, including the electron sink portion. The electron sink portion is preferably disposed at a position laterally spaced apart from the emitting tip of the device's electron emitter. In a particularly preferred fabrication process, the anode is formed by depositing a base layer, depositing and patterning an etch-stop layer with an opening to define the electron-sink portion, forming an opening by etching overlying layers down to the etch-stop layer, and heating the base layer and etch-stop layer to form an anode surface that includes both an integral electron-sink portion and a cathodoluminescent phosphor for emitting light. The fabrication process provides for fabricating a plurality of display element devices to make a flat panel display.
Abstract translation: 用作显示元件的器件具有设置成接收从发射极发射的电子的电子发射器和阳极。 阳极具有电阻率不同的表面部分，在最低电阻率的表面部分提供电子吸收部分。 优选实施例具有横向场发射电子发射器，并且具有通过特别适于提供包括电子吸收部分的不同电阻率的阳极部分的工艺形成的阳极。 电子吸收部优选设置在与器件的电子发射体的发射端横向间隔开的位置。 在特别优选的制造工艺中，阳极通过沉积基底层，沉积和图案化具有开口的蚀刻停止层以形成电子吸收部分而形成，通过将覆盖层向下蚀刻到蚀刻停止层 并且加热基底层和蚀刻停止层以形成包括用于发光的整体电子吸收部分和阴极发光荧光体的阳极表面。 制造工艺提供制造多个显示元件装置以制作平板显示器。
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