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1.发明授权Process for integrating dielectric optical coatings into micro-electromechanical devices 有权将介电光学涂层集成到微机电装置中的工艺公开(公告)号：US06790698B2
公开(公告)日：2004-09-14
申请号：US09954861
申请日：2001-09-18
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81B2201/047 , B81C1/0038 , B81C2201/0159 , B81C2201/053 , B81C2201/056 , G02B26/001
摘要： A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress. Competing techniques such as shadow masking yield lower quality features and are difficult to align. Further, the minimum feature size that can be obtained with shadow masks is limited to ˜100 &mgr;m, depending on the coating system geometry, and they require hard contact with the surface of the wafer, which can lead to damage and/or particulate contamination.
摘要翻译： 公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。 电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。 在一个实例中，使用掩模层作为保护层来蚀刻涂层。 在另一示例中，示出了剥离过程。 光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。 诸如阴影掩蔽的竞争技术产生较低的质量特征并且难以对准。 此外，根据涂层系统的几何形状，使用荫罩可获得的最小特征尺寸限制在〜100μm，并且它们需要与晶片的表面硬接触，这可能导致损坏和/或微粒污染。
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2.发明授权Process for integrating dielectric optical coatings into micro-electromechanical devices 有权将介电光学涂层集成到微机电装置中的工艺公开(公告)号：US06271052B1
公开(公告)日：2001-08-07
申请号：US09692639
申请日：2000-10-19
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81C1/00476 , B81C1/00666 , B81C2201/0109 , B81C2201/053 , G02B26/001
摘要： A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.
摘要翻译： 从多晶硅制造光学膜的方法包括首先在处理晶片上形成牺牲层。 凹陷蚀刻到牺牲层中。 然后在牺牲层上形成多晶硅膜层。 随后抛光多晶膜层以实现预定的膜厚度和表面光滑度，退火，然后图案化。 最后，去除牺牲层以释放膜。 牺牲层中的凹部产生多晶硅层中的凸起以防止对手柄晶片的粘附。 在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。
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公开(公告)号：US07875457B2
公开(公告)日：2011-01-25
申请号：US11129660
申请日：2005-05-12
IPC分类号： G01N37/00
CPC分类号： G01N21/65 , G01N21/6428 , G01N21/75 , G01N2021/656 , G06K19/14 , Y10T436/13
摘要： To address counterfeit problems, for example, we propose a secure, flexible, and cost-effective authentication solution that can be integrated into conventional distribution logistic systems. The proposed solution for product authentication and distribution channel validation comprises three major components: 1) machine-readable Raman-active chemical taggant; 2) a taggant reader; and 3) a taggant eraser. The proposed solution is to control and validate the distribution channel by authenticating the origin of products. Authentication is accomplished by verification of distinct taggants associated with the articles, such as on its label, along with other product distribution information in optical, spatial-encoding indicia, such as a barcode. The taggant information is used to identify, validate, and distinguish the origin of the source of the articles, such as goods or products. The taggant material is thereafter rendered unreadable by modifying the taggants to make obtaining the information unfeasible, thereby controlling the taggants' lifecycle.
摘要翻译： 例如，为了解决假冒问题，我们提出一种可以集成到传统分销物流系统中的安全，灵活，经济有效的认证解决方案。 提出的产品认证和分销渠道验证解决方案包括三个主要组成部分：1）机器可读拉曼活性化学品标签; 2）一个标记的读者; 和3）标签橡皮擦。 提出的解决方案是通过认证产品的来源来控制和验证分销渠道。 验证是通过与诸如条形码之类的光学，空间编码标记中的其他产品分发信息一起核实与诸如其标签上的物品相关联的不同标签来实现的。 标签信息用于识别，验证和区分物品的来源，例如货物或产品。 然后，通过修改标签，使标签材料变得不可读，从而获得信息不可行，从而控制标签的生命周期。
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公开(公告)号：US08675293B2
公开(公告)日：2014-03-18
申请号：US12693186
申请日：2010-01-25
IPC分类号： G02B7/02
CPC分类号： B29D11/0073 , G02B6/32 , G02B23/2423
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for a forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并且沿着复合晶片材料的背面通过复合晶片材料的背面形成光学端口 折射透镜的光轴。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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公开(公告)号：US20110181966A1
公开(公告)日：2011-07-28
申请号：US12693186
申请日：2010-01-25
CPC分类号： B29D11/0073 , G02B6/32 , G02B23/2423
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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公开(公告)号：US06692850B2
公开(公告)日：2004-02-17
申请号：US09801376
申请日：2001-03-07
申请人： Christopher C. Cook
发明人： Christopher C. Cook
IPC分类号： B32B702
CPC分类号： C23C14/22 , C23C14/546 , Y10T428/24942
摘要： A thin membrane having a thin film optical coating thereon is formed from multiple layers of different materials in which the overall stress of the thin film is not more than 15 MPa. Such films can be formed through thermal evaporation with ion assist, by directing an electron beam on a source and evaporating material from the source onto a thin flexible membrane while directing an ion stream onto the membrane. The current of the source of the ion stream should be sufficient to provide a thin film coating that has substantially no porosity. Successive applications at constant current can be deposited, while varying the voltage of the ion stream. The stress of the thin films deposited under each different voltage can be evaluated and the voltage at which the stress is acceptably low can be determined.
摘要翻译： 其上具有薄膜光学涂层的薄膜由多层不同材料形成，其中薄膜的总应力不超过15MPa。 这样的膜可以通过离子辅助的热蒸发形成，通过将电子束引导到源上并将材料从源蒸发到薄的柔性膜上，同时将离子流引导到膜上。 离子流源的电流应足以提供基本上没有孔隙率的薄膜涂层。 恒定电流的连续应用可以沉积，同时改变离子流的电压。 可以评估在每个不同电压下沉积的薄膜的应力，并且可以确定应力可接受的低电压。
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公开(公告)号：US06618199B2
公开(公告)日：2003-09-09
申请号：US09874760
申请日：2001-06-05
申请人： Christopher C. Cook
发明人： Christopher C. Cook
IPC分类号： G02B528
CPC分类号： G02B6/29358 , G01J3/26 , G02B6/29389 , G02B6/29395 , G02B26/001 , G02B26/02
摘要： A Fabry-Perot filter has at least two mirror structures defining a resonant cavity. This filter is tunable by modulating an optical distance between the mirror structures. To accommodate a wide bandwidth of operation or accommodate two spectral bands, the mirror structures are made from two stacked, single-band mirrors. In more detail, the mirror structures comprise a substrate; a first mirror is deposited on the substrate, with an index matching coating between the substrate and the first mirror. The second mirror is stacked on the first mirror. The mirrors are symmetric relative to each other, such that the index of a first mirror in the second spectral band has an effective index of about one. In contrast, the second mirror has an effective index of about one in the first spectral band.
摘要翻译： 法布里 - 珀罗滤波器具有至少两个限定谐振腔的镜结构。 该滤光器可通过调制镜面结构之间的光学距离来调节。 为了适应宽带宽的操作或容纳两个光谱带，镜像结构由两个堆叠的单频带镜组成。 更详细地，镜结构包括基底; 在基板上沉积第一反射镜，在基板和第一反射镜之间具有折射率匹配涂层。 第二个镜子堆叠在第一个镜子上。 反射镜相对于彼此对称，使得第二光谱带中的第一反射镜的索引具有约1的有效索引。 相反，第二反射镜在第一光谱带中具有大约一个的有效折射率。
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公开(公告)号：US09120443B2
公开(公告)日：2015-09-01
申请号：US14020235
申请日：2013-09-06
申请人： James M. Townson , Derek L. Patterson , Mark L. Felzien , Duane T. Vanpamel , Christopher C. Cook
发明人： James M. Townson , Derek L. Patterson , Mark L. Felzien , Duane T. Vanpamel , Christopher C. Cook
CPC分类号： B60R19/18 , B60R19/023 , B62D25/12 , E05F5/022
摘要： A hood bumper is provided and includes a first end including a body defining a longitudinal axis and a surface having an angular edge oriented along the longitudinal axis, a second end opposite the first end and including a skirt portion and a bumper portion protruding from a longitudinal end of the skirt portion in a protrusion direction defined along the longitudinal axis and an intermediate section interposed between the first and second ends. The intermediate section includes reverse-drive helical threading.
摘要翻译： 提供了一种罩保险杠，其包括：第一端，其包括限定纵向轴线的主体和具有沿着纵向轴线定向的角边缘的表面;与第一端相对的第二端，包括裙部部分和从纵向方向突出的保险杠部分 裙部的端部沿着纵向轴线限定的突出方向和插入在第一和第二端之间的中间部分。 中间部分包括反向驱动螺旋螺纹。
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公开(公告)号：US20140070570A1
公开(公告)日：2014-03-13
申请号：US14020235
申请日：2013-09-06
申请人： James M. Townson , Derek L. Patterson , Mark L. Felzien , Duane T. Vanpamel , Christopher C. Cook
发明人： James M. Townson , Derek L. Patterson , Mark L. Felzien , Duane T. Vanpamel , Christopher C. Cook
IPC分类号： B60R19/18
CPC分类号： B60R19/18 , B60R19/023 , B62D25/12 , E05F5/022
摘要： A hood bumper is provided and includes a first end including a body defining a longitudinal axis and a surface having an angular edge oriented along the longitudinal axis, a second end opposite the first end and including a skirt portion and a bumper portion protruding from a longitudinal end of the skirt portion in a protrusion direction defined along the longitudinal axis and an intermediate section interposed between the first and second ends. The intermediate section includes reverse-helical threading.
摘要翻译： 提供了一种罩保险杠，其包括：第一端，其包括限定纵向轴线的主体和具有沿着纵向轴线定向的角边缘的表面;与第一端相对的第二端，包括裙部部分和从纵向方向突出的保险杠部分 裙部的端部沿着纵向轴线限定的突出方向和插入在第一和第二端之间的中间部分。 中间部分包括反向螺旋螺纹。
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公开(公告)号：US07929140B2
公开(公告)日：2011-04-19
申请号：US11419193
申请日：2006-05-18
CPC分类号： G01J3/108 , G01J3/02 , G01J3/0208 , G01J3/0286 , G01J3/0291 , G01J3/4338
摘要： A process monitoring system determines a spectral response of a process material. This system has a tunable laser for generating an optical signal that is wavelength tuned over a scan band and an optical probe for conveying the optical signal to the process material and detecting the spectral response of the process material. The optical probe expands a beam of the optical signal to a diameter of greater than 10 millimeters. This avoids one of the difficulties with monitoring these process applications by ensuring that the spectroscopy measurements are accurate and repeatable. It is desirable to sample a relatively large area of the processed material since it can be heterogeneous. Additionally the large area mitigates spectral noise such as from speckle.
摘要翻译： 过程监控系统确定过程材料的光谱响应。 该系统具有用于产生在扫描带上波长调谐的光信号的可调谐激光器和用于将光信号传送到处理材料并检测处理材料的光谱响应的光学探针。 光学探头将光信号的光束扩展到大于10毫米的直径。 通过确保光谱测量是准确和可重复的，这避免了监控这些过程应用的困难之一。 由于可以是异质的，所以对于相对较大面积的处理材料进行采样是理想的。 此外，大面积减轻光谱噪声，如斑点。
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