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12 条记录 (耗时 0.016 秒)

    Microvalve of multilayer silicon construction
    1.
    发明授权
    Microvalve of multilayer silicon construction 失效
    多层硅结构微观尺度

    公开(公告)号：US5216273A

    公开(公告)日：1993-06-01

    申请号：US762940

    申请日：1991-09-19

    申请人： Christian Doering ,  Thomas Grauer ,  Michael Mettner ,  Armin Schuelke ,  Jiri Marek ,  Hans-Peter Trah ,  Joerg Muchow ,  Martin Willmann

    发明人： Christian Doering ,  Thomas Grauer ,  Michael Mettner ,  Armin Schuelke ,  Jiri Marek ,  Hans-Peter Trah ,  Joerg Muchow ,  Martin Willmann

    IPC分类号： F16K31/02 ,  F15C5/00 ,  F16K99/00

    CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0015 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008

    摘要： A microwave is made of a stack of layers. A sculptured silicon substrate is held between two covers each consisting of one or more layers. The inlet and the outlet of the microvalve are formed by perforations in the respective covers. A central valve plate is sculptured out of the silicon substrate with surfaces respectively facing the two covers in the region of the inlet and outlet in a symmetrical fashion. The valve plate is connected to the outer frame portion of the silicon substrate by one or more silicon strips. The valve plate is also shaped as a closure member near the inlet and/or the outlet. Electrodes are provided on the covers opposite the valve plate so that the valve can be electrostatically actuated with the valve plate serving as counterelectrode for these electrodes on the covers.

    摘要翻译： 微波由一叠层组成。 雕刻的硅衬底保持在两个盖之间，每个盖由一层或多层组成。 微型阀的入口和出口由相应盖子中的穿孔形成。 中心阀板从硅衬底雕刻出来，其表面分别以对称的方式在入口和出口的区域中面对两个盖。 阀板通过一个或多个硅带连接到硅衬底的外框部分。 阀板也在入口和/或出口附近形成为封闭构件。 电极设置在与阀板相对的盖上，使得阀可以被静电驱动，阀板用作反射电极，用于盖上的这些电极。

    Microvalve
    2.
    发明授权
    Microvalve 失效
    微型阀门

    公开(公告)号：US5400824A

    公开(公告)日：1995-03-28

    申请号：US174753

    申请日：1993-12-29

    申请人： Horst Gschwendtner ,  Jiri Marek ,  Michael Mettner ,  Gerhard Stokmaier ,  Thomas Grauer

    发明人： Horst Gschwendtner ,  Jiri Marek ,  Michael Mettner ,  Gerhard Stokmaier ,  Thomas Grauer

    IPC分类号： F15C5/00 ,  F16K99/00 ,  F16K31/02

    CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0013 ,  F16K99/0048 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/0096 ,  Y10T137/2278 ,  Y10T137/86718 ,  Y10T137/86759

    摘要： A microminiature valve in multi-layered structure for switching or controlling fluid flows is proposed, having an inlet and a closing element. The inlet is embodied in a first layer in the form of at least one through-opening. The closing element is structured out of a second layer which is applied on the first layer. This second layer has at least one further through-opening in the area of the closing element. The closing element is displaceable by actuation means, in particular electrical ones, essentially parallel to the first layer and the second layer, so that in at least one first position of the closing element the at least one through-opening of the inlet, together with the at least one further through-opening in the second layer, forms at least one flow-through opening. The cross section of the at least one flow-through opening can be varied by actuating the closing element.

    摘要翻译： 提出了一种用于切换或控制流体流动的多层结构的微型阀，具有入口和闭合元件。 入口以至少一个通孔的形式体现在第一层中。 闭合元件由施加在第一层上的第二层构成。 该第二层在封闭元件的区域中具有至少一个进一步的通孔。 闭合元件可通过致动装置，特别是电气元件基本上平行于第一层和第二层来移动，使得在封闭元件的至少一个第一位置中，入口的至少一个通孔与 第二层中的至少一个另外的通孔形成至少一个流通开口。 可以通过致动闭合元件来改变至少一个流通开口的横截面。

    Method of making a microvalve
    3.
    发明授权
    Method of making a microvalve 失效
    制造微型阀的方法

    公开(公告)号：US5238223A

    公开(公告)日：1993-08-24

    申请号：US899260

    申请日：1992-06-16

    申请人： Michael Mettner ,  Martin A. Schmidt ,  Theresa Lober ,  Michael A. Huff

    发明人： Michael Mettner ,  Martin A. Schmidt ,  Theresa Lober ,  Michael A. Huff

    IPC分类号： F15C5/00 ,  F16K99/00

    CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0005 ,  F16K99/0046 ,  F16K99/0048 ,  F16K99/0055 ,  F16K99/0061 ,  F16K2099/0069 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0096 ,  F16K99/0034

    摘要： A microvalve composed of multiple layers bonded together is distinguished by the fact that all layers are structured only from one side. Prior to bonding of a new layer to the preceding layer, the new layer is homogeneous or unstructured. Only after bonding of the new layer to the preceding layers or wafers is the newly-applied layer provided with a structure, by etching or other profiling method. This simplifies construction, and reduces manufacturing cost, of the microvalve. The valve can be used for either liquid or gaseous media. It is adapted for use, inter alia, as a fuel injection valve or as a pilot control stage of servo-valves used in anti-lock braking systems (ABS). A method of producing a sealed cavity with a residual gas pressure therein, which may have applications other than valve manufacture, is also disclosed.

    摘要翻译： 由多层结合在一起的微型阀的特征在于所有层仅由一侧构成。 在将新层与前一层结合之前，新层是均匀的或非结构化的。 只有在新层与前述层或晶片结合之后，才能通过蚀刻或其它成像方法提供具有结构的新应用层。 这简化了微型阀的结构，降低了制造成本。 阀门可用于液体或气体介质。 它适用于特别是作为燃料喷射阀或用作防抱死制动系统（ABS）中使用的伺服阀的先导控制级。 还公开了一种制造其中具有残留气体压力的密封腔的方法，其可以具有除阀制造之外的应用。

    Microvalve
    4.
    发明授权
    Microvalve 失效
    MICROVALVE

    公开(公告)号：US5178190A

    公开(公告)日：1993-01-12

    申请号：US800491

    申请日：1991-11-29

    申请人： Michael Mettner

    发明人： Michael Mettner

    IPC分类号： F15B13/044 ,  F15C5/00 ,  F16K11/065 ,  F16K31/02

    CPC分类号： F15C5/00 ,  Y10T137/86622

    摘要： A microvalve with a multi-layer structure for regulating or controlling fluid flows is proposed. In a first layer at least one feed connector, a first return connector, at least two working connectors and at least a second return connector are structured. The microvalve has a second layer which is connected via an at least first structured intermediate layer with the first layer. Means are structured in the second layer which are electrostatically operable and by means of which the degree of opening of the at least one feed connector can be changed. The microvalve is constructed symmetrically in respect to the second layer, in that a third layer, structured mirror-reversed in respect to the first layer, is applied to the second layer via a further structured intermediate layer. Thus the third layer has at least two further working connectors, at least one further feed connector and at least two further return connectors, where each two of the connectors located opposite each other in the first layer and the third layer form a pair. At least one flat slider with at least two flow-through openings is structured in the second layer to form an electrostatically operable means.

    摘要翻译： 提出了一种用于调节或控制流体流动的多层结构的微型阀。 在第一层中，至少一个馈送连接器，第一返回连接器，至少两个工作连接器和至少第二返回连接器被构造。 微型阀具有经由至少第一结构化中间层与第一层连接的第二层。 装置构造在第二层中，其可静电操作，并且可以改变至少一个进料连接器的打开程度。 相对于第二层对称地构造微型阀，通过另外构造的中间层将第三层施加到第二层，第三层相对于第一层被镜面反射。 因此，第三层具有至少两个另外的工作连接器，至少一个另外的馈送连接器和至少两个另外的返回连接器，其中在第一层和第三层中彼此相对设置的每个连接器中的每一个形成一对。 具有至少两个流通开口的至少一个扁平滑块被构造在第二层中以形成静电可操作的装置。

    Electro-fluid converter for controlling a fluid-operated adjusting member
    5.
    发明授权
    Electro-fluid converter for controlling a fluid-operated adjusting member 失效
    用于控制流体操作的调节构件的电流转换器

    公开(公告)号：US5076327A

    公开(公告)日：1991-12-31

    申请号：US712131

    申请日：1991-06-06

    申请人： Michael Mettner

    发明人： Michael Mettner

    IPC分类号： F15B13/043 ,  F15C1/04

    CPC分类号： F15B13/043 ,  F15C1/04 ,  Y10T137/2093 ,  Y10T137/2098 ,  Y10T137/2115

    摘要： An electro-fluid converter for controlling a fluid actuating an adjusting element, such as a main control slider of a servo valve, comprises at least one displaceable throttle arranged in a fluid-rich circuit. The throttle has at least one throttle element with a central inlet passage and a plurality of flow-mechanical identical base elements arranged around the central inlet passage in a star-like manner. Each of the base elements includes a bipolar wall stream element connected with the inlet passage and a whirling chamber element connected with the wall stream element, each of the wall stream elements being thermoelectrically controllable.

    摘要翻译： 用于控制致动诸如伺服阀的主控制滑块的调节元件的流体的电流体转换器包括设置在富流体回路中的至少一个可移位的节气门。 节气门具有至少一个具有中心入口通道的节流元件和以星状方式布置在中央入口通道周围的多个流动机械相同的基座元件。 每个基本元件包括与入口通道连接的双极壁流元件和与壁流元件连接的旋转室元件，每个壁流元件是热电控制的。

    Fuel injection device
    6.
    发明授权
    Fuel injection device 失效
    燃油喷射装置

    公开(公告)号：US5662277A

    公开(公告)日：1997-09-02

    申请号：US538065

    申请日：1995-10-02

    申请人： Bernd Taubitz ,  Michael Mettner ,  Thanh-Hung Nguyen-Schaefer

    发明人： Bernd Taubitz ,  Michael Mettner ,  Thanh-Hung Nguyen-Schaefer

    IPC分类号： F02M51/06 ,  F02M61/18 ,  F02M69/00 ,  F02M69/04 ,  F02M69/08 ,  B05B1/30 ,  F02M51/00

    CPC分类号： F02M69/08 ,  F02M51/061 ,  F02M61/1853

    摘要： A fuel injection device having an injection valve on which an atomizing grid is arranged. The disk-shaped atomizing grid is arranged downstream of a valve seat face and is equipped with an atomizing structure which at least partially possesses variations in cross section in the axial direction, over the thickness of the atomizing grid. As a result of the geometry of the atomizing grid, the fuel is atomized particularly finely into very small droplets without auxiliary energy. The fuel injection device is particularly suitable for use in fuel injection systems of mixture-compressing spark-ignition internal combustion engines.

    摘要翻译： 一种具有喷射阀的燃料喷射装置，雾化栅格布置在该喷射阀上。 盘状雾化栅格布置在阀座面的下游，并且配备有雾化结构，该雾化结构在雾化栅格的厚度上至少部分地具有沿轴向方向的横截面的变化。 由于雾化栅格的几何结构，燃料特别细致地雾化成非常小的液滴而没有辅助能量。 燃料喷射装置特别适用于混合压缩火花点火式内燃机的燃料喷射系统。

    Microvalve
    8.
    发明授权
    Microvalve 失效
    MICROVALVE

    公开(公告)号：US5161774A

    公开(公告)日：1992-11-10

    申请号：US773900

    申请日：1991-10-29

    申请人： Kurt Engelsdorf ,  Michael Mettner

    发明人： Kurt Engelsdorf ,  Michael Mettner

    IPC分类号： F16K31/126 ,  F15C5/00 ,  F16K31/02 ,  F16K99/00

    CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0005 ,  F16K99/0015 ,  F16K99/0051 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0096

    摘要： A microvalve has at least two pressurized-medium connections means forming a valve seat between the connections, a closure member cooperating with the valve seat, an electrical actuating unit deflecting the closure member, and a membrane which moves the closure member in opposition to he electrical actuating unit and adjoins a space which can be loaded with pressurized medium. The membrane has an area which is substantially reduced relative to the valve seat and is firmly joined to the membrane and also has a pressure-loaded area. The closure member has a ring-shaped pressure-compensation area which is opposite to the membrane and extends radially outwardly of the reduced surface of the membrane and counteracts the pressure loaded area of the membrane, the pressure-loaded area of the membrane and the pressure-compensation area of the closure member are essentially equally large.

    摘要翻译： PCT No.PCT / DE90 / 00366 Sec。 371日期1991年10月29日 102（e）1991年10月29日PCT PCT 1990年5月17日PCT公布。 第WO90 / 15933号公报 日期为1990年12月27日。微型阀具有至少两个加压介质连接装置，在连接件之间形成阀座，与阀座配合的封闭件，偏转封闭件的电致动单元和使封闭件偏移的膜 闭合构件与电驱动单元相对并且邻接可装载加压介质的空间。 膜具有相对于阀座基本上减小的区域并且牢固地连接到膜并且还具有压力加载区域。 封闭构件具有环形压力补偿区域，其与膜相对并且在膜的减小的表面的径向向外延伸并且抵消膜的压力加载区域，膜的压力负载区域和压力 - 封闭构件的 - 补偿区域基本相同地大。

    Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer
    10.
    发明授权
    Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer 失效
    具有整体闭合的多层微型阀，形成中间层的膜和压力补偿表面

    公开(公告)号：US5647574A

    公开(公告)日：1997-07-15

    申请号：US360652

    申请日：1994-12-16

    申请人： Michael Mettner ,  Armin Schuelke ,  Christian Doering ,  Thomas Schittny

    发明人： Michael Mettner ,  Armin Schuelke ,  Christian Doering ,  Thomas Schittny

    IPC分类号： F16K31/02 ,  F15C5/00 ,  F16K31/06 ,  F16K99/00

    CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0005 ,  F16K99/0051 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0096 ,  F16K99/0034 ,  H01F2007/068

    摘要： The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.

    摘要翻译： PCT No.PCT / DE93 / 00493 Sec。 371日期1994年12月16日第 102（e）日期1994年12月16日PCT提交1993年6月8日PCT公布。 出版物WO94 / 00696 日期1994年1月6日根据本发明的微型阀以分层方式组成至少一个底部部分（11），一个中间部分（12）和一个顶部部件（13）。 密封环31（封闭构件），阀板29（压力补偿面）和膜26一体化在中间部分12中，该整体构件通过塑性模制工艺制造。 阀的致动使用电动操作装置进行，例如通过静电驱动，电磁或压电驱动。 特别是在静电驱动的情况下，将两个电极（17,22）分层地施加到中间部分（12）或底部部分（11）。 底部，中间部分和顶部部分被连接在一起并且连接在一起，例如被连接或焊接在一起。