公开(公告)号：US5923166A

公开(公告)日：1999-07-13

申请号：US980123

申请日：1997-11-26

Applicant: Michael Naughton ,  Murali Chaparala

Inventor： Michael Naughton ,  Murali Chaparala

IPC: G01H11/06 ,  G01R33/038 ,  G01R33/12 ,  G01V1/18 ,  G01R33/02 ,  G01R27/28

CPC classification number: G01H11/06 ,  G01R33/038 ,  G01R33/1215 ,  G01V1/18

Abstract: A high sensitivity torque and force cantilever magnetometer having a cantilever with isolated capacitance detection and nulling circuits which provides increased sensitivity and accuracy to measurements of a magnetic moment of a sample placed on the cantilever and exposed to a magnetic field. Magnetic detection is by electrical capacitance between a metallized plate and the cantilever. Alternatively, magnetic detection is by electrical resistance of a piezoactive circuit deposited on the surface of the cantilever. The cantilever can be used to measure both isotropic and anisotropic magnetism and is capable of simultaneously measuring the electrical conductivity of the sample using an integrated electrically isolated circuit. The cantilever is constructed of multiple layers of conducting and insulating materials to eliminate leakage current. The magnetometer measures the magnitude of a current through a null detection circuit having at least one nulling loop deposited on the cantilever required to maintain a constant capacitance between the cantilever and a metallized plate to determine the magnetization of the sample. The null detection circuit eliminates capacitance drift and improves the accuracy of the magnetometer.

Abstract translation: 具有具有隔离电容检测和零陷电路的悬臂的高灵敏度扭矩和力悬臂磁强计，其提供放置在悬臂上并暴露于磁场的样品的磁矩的测量的增加的灵敏度和精度。 磁检测是通过金属化板和悬臂之间的电容。 或者，通过沉积在悬臂表面上的压电电路的电阻来进行磁检测。 悬臂可用于测量各向同性和各向异性磁性，并且能够使用集成的电隔离电路同时测量样品的导电性。 悬臂由多层导电和绝缘材料构成，以消除漏电流。 磁力计测量电流的大小，该零电流检测电路具有沉积在悬臂上的至少一个归零回路，以维持悬臂与金属化板之间的恒定电容，以确定样品的磁化。 零检测电路消除电容漂移并提高磁力计的精度。

公开(公告)号：US07760197B2

公开(公告)日：2010-07-20

申请号：US11263313

申请日：2005-10-31

Applicant: Kenneth J. Faase ,  James McKinnell ,  Arthur R. Piehl ,  Murali Chaparala ,  James R. Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

Inventor： Kenneth J. Faase ,  James McKinnell ,  Arthur R. Piehl ,  Murali Chaparala ,  James R. Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

IPC: G06F3/038 ,  G02B26/10

CPC classification number: G02B26/001 ,  G01J3/26

Abstract: Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.

Abstract translation: 描述了与微机电系统（MEMS）法布里 - 珀罗干涉仪（FPID）相关联的系统，方法和其它实施例。 制造MEMS FPID可以包括制造像素板和反射板，从而在其间限定法布里 - 珀罗腔。 制造可以包括制造有助于静电移动像素板的电容器板。 制造可以包括在板之间产生电连接并产生电路以控制板电压以便于在板之间产生静电力。 MEMS FPID可以包括由导电材料制成的止动件和用于将止动器和板保持在将产生零电场接触事件的电势的电路。

公开(公告)号：US07183633B2

公开(公告)日：2007-02-27

申请号：US10469516

申请日：2002-03-01

Applicant: Michael J. Daneman ,  Franklin Wall ,  Behrang Behin ,  Murali Chaparala ,  Mark W. Chang ,  Scott Dalton ,  Timothy Beerling ,  Stephen Panyko ,  Meng-Hsiung Kiang ,  Boris Kobrin ,  Chuang-Chia Lin

Inventor： Michael J. Daneman ,  Franklin Wall ,  Behrang Behin ,  Murali Chaparala ,  Mark W. Chang ,  Scott Dalton ,  Timothy Beerling ,  Stephen Panyko ,  Meng-Hsiung Kiang ,  Boris Kobrin ,  Chuang-Chia Lin

IPC: H01L23/02 ,  G02B26/08 ,  G02B6/42

CPC classification number: G02B6/3518 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0841

Abstract: An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.

Abstract translation: 光学交叉连接开关包括底座（216），翼片（211）和连接到翼片（211）的一个或多个导电着陆垫（222）。 翼片（211）具有可移动地联接到基部（216）的底部部分，使得翼片（211）能够相对于基部（216）的平面从第一方向移动到第二方向。 一个或多个着陆垫（222）与翼片（211）电隔离并且电耦合以与着陆表面等电位。

公开(公告)号：US20050225223A1

公开(公告)日：2005-10-13

申请号：US10819158

申请日：2004-04-07

Applicant: Chien-Hua Chen ,  Murali Chaparala ,  Robert Bicknell

Inventor： Chien-Hua Chen ,  Murali Chaparala ,  Robert Bicknell

IPC: G02B6/10 ,  G02B6/122 ,  G02F1/13357 ,  H01J5/16

CPC classification number: G02B6/105 ,  B82Y20/00 ,  G02B6/1225 ,  G02F1/13362

Abstract: A polarizing photonic band gap system has a photonic crystal emitter. The photonic crystal emitter has a crystal end surface. The photonic crystal emitter is configured to generate electromagnetic energy having a wavelength λ. The system has a polarizer. The polarizer is connected to the photonic crystal emitter. The polarizer has a polarizer surface. The polarizer surface is located within a distance of said crystal end surface. The distance is sufficient to quantum mechanically couple the polarizer surface with said crystal end surface at the wavelength λ.

Abstract translation: 偏振光子带隙系统具有光子晶体发射极。 光子晶体发射器具有晶体端面。 光子晶体发射器被配置为产生具有波长λ的电磁能。 该系统具有偏振器。 偏振器连接到光子晶体发射器。 偏振器具有偏振器表面。 偏振器表面位于所述晶体端面的一定距离内。 该距离足以量子力学地将偏振器表面与波长λ的所述晶体端面结合。

公开(公告)号：US5977767A

公开(公告)日：1999-11-02

申请号：US39723

申请日：1998-03-16

Applicant: Murali Chaparala

Inventor： Murali Chaparala

IPC: G01H11/06 ,  G01R33/038 ,  G01R33/12 ,  G01V1/18 ,  G01R33/02 ,  G01R27/28

CPC classification number: G01H11/06 ,  G01R33/038 ,  G01R33/1215 ,  G01V1/18

Abstract: A high sensitivity torque and force cantilever magnetometer has a cantilever with isolated capacitance detection and nulling circuits which provides increased sensitivity and accuracy to measurements of a magnetic moment of a sample placed on the cantilever and exposed to a magnetic field. Magnetic detection is by electrical capacitance between a metallized plate and the cantilever. The cantilever can be used to measure both isotropic and anisotropic magnetism. The cantilever is constructed of multiple layers of conducting and insulating materials to eliminate leakage current. The magnetometer measures the magnitude of a current through a null detection circuit having at least one nulling loop deposited on the cantilever required to maintain a constant capacitance between the cantilever and a metallized plate to determine the magnetization of the sample. The null detection circuit eliminates capacitance drift and improves the accuracy of the magnetometer. Nulling loop configurations for separately and accurately balancing force and torque terms generated by interaction between the nulling loops and the magnetic field on the cantilever further enhance the sensitivity of the cantilever.

Abstract translation: 高灵敏度扭矩和力悬臂磁力计具有悬臂，具有隔离电容检测和零位电路，可提供放置在悬臂上并暴露于磁场的样品的磁矩测量的灵敏度和精度。 磁检测是通过金属化板和悬臂之间的电容。 悬臂可用于测量各向同性和各向异性磁性。 悬臂由多层导电和绝缘材料构成，以消除漏电流。 磁力计测量电流的大小，该零电流检测电路具有沉积在悬臂上的至少一个归零回路，以维持悬臂与金属化板之间的恒定电容，以确定样品的磁化。 零检测电路消除电容漂移并提高磁力计的精度。 用于单独和精确地平衡力和力矩之间的空转回路配置，用于通过悬空回路与悬臂之间的磁场相互作用产生的力和力矩进一步提高了悬臂的灵敏度。

公开(公告)号：US20110206839A1

公开(公告)日：2011-08-25

申请号：US12746044

申请日：2009-01-05

Applicant: Vladimir Bulovic ,  Murali Chaparala ,  Jianglong Chen ,  Eric Wing -Jing Lam ,  Valerie Leblanc ,  Martin A. Schmidt

Inventor： Vladimir Bulovic ,  Murali Chaparala ,  Jianglong Chen ,  Eric Wing -Jing Lam ,  Valerie Leblanc ,  Martin A. Schmidt

IPC: B05D5/06 ,  B05C11/00

CPC classification number: G02B6/138 ,  B05D3/04 ,  B05D3/0453 ,  B05D3/107 ,  G02B2006/12071 ,  G03F7/168

Abstract: The disclosure relates to providing printed structures of polymer that have substantially flat printed surfaces. In one embodiment, the disclosure relates to a post-printing treatment apparatus for receiving a substrate supporting a polymer printing thereon. The polymer can be PMMA or other suitable polymer. In a related embodiment, the polymer defines a thermoplastic polymer having a glass transition temperature. The apparatus can comprise of a chamber, and input manifold, an exhaust manifold, a solvent reservoir and a gas reservoir. The solvent reservoir provides one or more solvent systems adapted to chemically bind, and potentially react, with the polymer. The gas reservoir provides one or more gases for drying the substrate and printed polymer after the solvent treatment step. In one application, a substrate having printed surface thereon is placed in the chamber and exposed to the solvent system for sufficient period of time to provide substantially flat print surfaces.

Abstract translation: 本公开涉及提供具有基本平坦的印刷表面的聚合物的印刷结构。 在一个实施例中，本公开涉及一种用于接收支撑其上的聚合物印刷的基板的后印刷处理设备。 聚合物可以是PMMA或其它合适的聚合物。 在相关实施方案中，聚合物限定了具有玻璃化转变温度的热塑性聚合物。 该装置可以包括腔室，输入歧管，排气歧管，溶剂储存器和气体储存器。 溶剂储存器提供一种或多种溶剂体系，其适于与聚合物化学结合并潜在地与聚合物反应。 在溶剂处理步骤之后，气体储存器提供用于干燥基底和印刷聚合物的一种或多种气体。 在一个应用中，其上具有印刷表面的基板放置在室中并暴露于溶剂系统足够的时间以提供基本平坦的印刷表面。

公开(公告)号：US20070097694A1

公开(公告)日：2007-05-03

申请号：US11263313

申请日：2005-10-31

Applicant: Kenneth Faase ,  James McKinnell ,  Arthur Piehl ,  Murali Chaparala ,  James Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

Inventor： Kenneth Faase ,  James McKinnell ,  Arthur Piehl ,  Murali Chaparala ,  James Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

IPC: F21V17/02

CPC classification number: G02B26/001 ,  G01J3/26

Abstract: Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.

Abstract translation: 描述了与微机电系统（MEMS）法布里 - 珀罗干涉仪（FPID）相关联的系统，方法和其它实施例。 制造MEMS FPID可以包括制造像素板和反射板，从而在其间限定法布里 - 珀罗腔。 制造可以包括制造有助于静电移动像素板的电容器板。 制造可以包括在板之间产生电连接并产生电路以控制板电压以便于在板之间产生静电力。 MEMS FPID可以包括由导电材料制成的止动件和用于将止动器和板保持在将产生零电场接触事件的电势的电路。

公开(公告)号：US20060049826A1

公开(公告)日：2006-03-09

申请号：US10469516

申请日：2002-03-01

Applicant: Michael Daneman ,  Franklin Wall ,  Behrang Behin ,  Murali Chaparala ,  Mark Chang ,  Scott Dalton ,  Timothy Beerling ,  Stephen Panyko ,  Meng-Hsiung Kiang ,  Boris Kobrin ,  Chuang-Chia Lin

Inventor： Michael Daneman ,  Franklin Wall ,  Behrang Behin ,  Murali Chaparala ,  Mark Chang ,  Scott Dalton ,  Timothy Beerling ,  Stephen Panyko ,  Meng-Hsiung Kiang ,  Boris Kobrin ,  Chuang-Chia Lin

IPC: G01B7/14

CPC classification number: G02B6/3518 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0841

Abstract: An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.

Abstract translation: 光学交叉连接开关包括底座（216），翼片（211）和连接到翼片（211）的一个或多个导电着陆垫（222）。 翼片（211）具有可移动地联接到基部（216）的底部部分，使得翼片（211）能够相对于基部（216）的平面从第一方向移动到第二方向。 一个或多个着陆垫（222）与翼片（211）电隔离并且电耦合以与着陆表面等电位。

公开(公告)号：US06906511B2

公开(公告)日：2005-06-14

申请号：US09851587

申请日：2001-05-08

Applicant: Murali Chaparala

Inventor： Murali Chaparala

IPC: G02B26/08 ,  G01B7/14 ,  G01R33/06

CPC classification number: G02B26/0841

Abstract: A property of a magnetic sensor, deployed on a micro machined optical element and exposed to a magnetic field, changes as the position of the micro machined optical element changes with respect to a magnetic field or, alternatively, when the magnetic field changes with respect to the micro machined optical element. The electrical, optical and/or mechanical change in sensor property varies according to the position, and a measurement of the property change tracks the change in orientation of a moveable portion of the optical element.

Abstract translation: 部署在微加工光学元件上并暴露于磁场的磁传感器的特性随着微加工光学元件的位置相对于磁场而变化，或者当磁场相对于 微加工光学元件。 传感器性能的电，光学和/或机械变化根据位置而变化，并且性质变化的测量跟踪光学元件的可移动部分的取向的变化。

公开(公告)号：US06888979B2

公开(公告)日：2005-05-03

申请号：US09834744

申请日：2001-04-12

Applicant: Behrang Behin ,  Michael J. Daneman ,  Chuang-Chia Lin ,  Boris Kobrin ,  Murali Chaparala ,  Gary Zalewski

Inventor： Behrang Behin ,  Michael J. Daneman ,  Chuang-Chia Lin ,  Boris Kobrin ,  Murali Chaparala ,  Gary Zalewski

IPC: B81B3/00 ,  B81C99/00 ,  G02B6/12 ,  G02B6/32 ,  G02B6/35 ,  G02B26/08 ,  G02B6/26

CPC classification number: G02B26/0841 ,  B81B3/0008 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/32 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12104

Abstract: A microelectromechanical (MEMS) apparatus has a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.

Abstract translation: 微机电（MEMS）装置具有底座和翼片，其中一部分联接到基座，使得翼片可在第一和第二位置之间移动离开基座的平面。 底座可以具有一个具有很大垂直侧壁的空腔，当翼片处于第二位置时，电极可以被放置在垂直侧壁上并与基座电隔离以提供瓣片向侧壁的静电夹持。 基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。 翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。 可以使用一个或多个这样的结构的阵列来形成光学开关。