RF plasma source for material processing
    1.
    发明授权
    RF plasma source for material processing 有权
    RF等离子体源进行材料加工

    公开(公告)号:US06239553B1

    公开(公告)日:2001-05-29

    申请号:US09296934

    申请日:1999-04-22

    IPC分类号: H01J724

    CPC分类号: H01J37/321 H05H1/46

    摘要: The present invention provides a plasma source that maintains a low coil voltage in the vicinity of the plasma tube, thereby reducing the capacitive coupling between the coil and the plasma and significantly reducing the erosion from the internal surfaces of the plasma tube. The plasma source generally comprises a coil having a first coil segment and a second coil segment, an RF power source connected to the coil and an enclosure disposed between the first coil segment and the second coil segment. The invention also provides a method for generating a plasma, comprising: disposing an enclosure between a first coil segment and a second coil segment; introducing a gas into the enclosure; and supplying an RF power to the coil segments to excite the gas into a plasma state. The invention provides a variety of coil operations, including symmetrical coil configuration, asymmetrical coil configuration with the matching networks adjusted to provide a low voltage near the plasma chamber, self-resonant configuration, grounded coil center configuration having coil segments driven in parallel and physically grounded near the plasma chamber, and pairs configurations having a plurality of coil segment pairs driven in series or parallel.

    摘要翻译: 本发明提供了一种在等离子体管附近保持低线圈电压的等离子体源,从而减小了线圈与等离子体之间的电容耦合,并显着减少了等离子体管内表面的侵蚀。 等离子体源通常包括具有第一线圈段和第二线圈段的线圈,连接到线圈的RF电源和设置在第一线圈段和第二线圈段之间的外壳。 本发明还提供了一种用于产生等离子体的方法,包括:在第一线圈段和第二线圈段之间设置外壳; 将气体引入外壳; 并且向线圈段提供RF功率以将气体激发成等离子体状态。 本发明提供了各种线圈操作,包括对称线圈配置,不对称线圈配置,匹配网络被调整以在等离子体室附近提供低电压,自谐振配置,具有线圈段并联驱动并接地的线圈中心配置 并且具有串联或并联驱动的多个线圈段对的配置配置。

    High-permeability magnetic shield for improved process uniformity in nonmagnetized plasma process chambers
    2.
    发明授权
    High-permeability magnetic shield for improved process uniformity in nonmagnetized plasma process chambers 有权
    高磁导率磁屏蔽,用于改善非磁化等离子体处理室中的工艺均匀性

    公开(公告)号:US06447651B1

    公开(公告)日:2002-09-10

    申请号:US09800798

    申请日:2001-03-07

    IPC分类号: C23C1435

    摘要: A method and apparatus for forming a layer on a substrate in a process chamber during a plasma deposition process are provided. A plasma is formed in a process chamber, a process gas with precursor gases suitable for depositing the layer are flowed into the process chamber, and a magnetic field having a strength less than about 0.5 gauss is attenuated within the process chamber. Attenuation of such a magnetic field results in an improvement in the degree of process uniformity achieved during the deposition.

    摘要翻译: 提供了一种用于在等离子体沉积工艺期间在处理室中在衬底上形成层的方法和装置。 在处理室中形成等离子体,具有适于沉积层的前体气体的工艺气体流入处理室,并且具有小于约0.5高斯的强度的磁场在处理室内衰减。 这种磁场的衰减导致在沉积期间实现的工艺均匀度的改善。

    Non-Transitory Computer Readable Medium Storing Instructions for Update Management, Update Management Device, and Image Processing System
    4.
    发明申请
    Non-Transitory Computer Readable Medium Storing Instructions for Update Management, Update Management Device, and Image Processing System 有权
    非瞬时计算机可读介质存储更新管理指令,更新管理设备和图像处理系统

    公开(公告)号:US20140245283A1

    公开(公告)日:2014-08-28

    申请号:US14191948

    申请日:2014-02-27

    申请人: Tsutomu Tanaka

    发明人: Tsutomu Tanaka

    IPC分类号: G06F9/445

    CPC分类号: G06F8/65

    摘要: A non-transitory computer readable medium stores an update management program for causing an update on control program, which is installed on each of image processing devices. The update management program, when executed by a processor, causes the computer to: acquire an update program and update function information regarding functions to be updated by the update program from a firmware distribution server; acquire device function information regarding functions of each image processing device from the each image processing device; transmit the update program to the each image processing device; determine an update sequence of timing for causing the each image processing device to update its control program, based on the acquired update function information and the acquired device function information; and cause the each image processing device to update its control program by executing the transmitted update program in accordance with the determined update sequence of timing.

    摘要翻译: 非暂时性计算机可读介质存储用于对安装在每个图像处理装置上的控制程序进行更新的更新管理程序。 更新管理程序在由处理器执行时使计算机从固件分发服务器获取更新程序并更新关于由更新程序更新的功能的功能信息; 从每个图像处理装置获取关于每个图像处理装置的功能的装置功能信息; 将更新程序发送到每个图像处理装置; 基于所获取的更新功能信息和所获取的设备功能信息,确定使每个图像处理设备更新其控制程序的定时更新顺序; 并且通过根据确定的定时更新顺序执行所发送的更新程序,使每个图像处理装置更新其控制程序。

    Ion implanting apparatus
    5.
    发明授权
    Ion implanting apparatus 有权
    离子注入装置

    公开(公告)号:US08791433B2

    公开(公告)日:2014-07-29

    申请号:US13096280

    申请日:2011-04-28

    IPC分类号: G21G1/00

    摘要: An ion implanting apparatus is provided, which can accurately measure a quantity of atoms that are implanted. The ion implanting apparatus according to the present invention has an object to be measured, and the object to be measured is arranged in an irradiating range in which ions are irradiated. When atoms are implanted into an object to be processed by irradiating ions of a processing gas and neutralized particles thereof, the object to be measured is heated through the irradiation with the processing gas ions and the neutralized particles. A control unit determines a quantity of the atoms that are implanted into the object to be processed from the temperature of the object to be measured.

    摘要翻译: 提供离子注入装置,其可以精确地测量植入的原子的量。 根据本发明的离子注入装置具有待测量的目的,并且被测量对象被布置在照射离子的照射范围内。 当通过照射处理气体的离子和其中和颗粒将原子注入待处理物体时,通过用处理气体离子和中和的颗粒的照射来加热被测量物体。 控制单元根据被测量物体的温度确定被植入物体的原子数量。

    Display apparatus, display apparatus driving method, and electronic device
    6.
    发明授权
    Display apparatus, display apparatus driving method, and electronic device 有权
    显示装置,显示装置驱动方法和电子装置

    公开(公告)号:US08754857B2

    公开(公告)日:2014-06-17

    申请号:US12650679

    申请日:2009-12-31

    IPC分类号: G06F3/041

    摘要: Disclosed herein is a display apparatus including: a display block configured to have a plurality of picture elements; a switch arranged inside the display block and configured to be closed by an external pressure; a detection block configured to detect whether the switch is closed based on a comparison between a signal supplied from the switch and a reference signal; a precharge block configured to give a precharge potential to a wire conducting with one of electrodes of the switch before detection is executed in the detection block; and a detection block potential supply block configured to give a predetermined potential to a wire conducting with the other electrode of the switch before detection is executed in the detection block.

    摘要翻译: 这里公开了一种显示装置,包括:显示块,被配置为具有多个图像元素; 布置在所述显示块内部并被构造成由外部压力关闭的开关; 检测块,被配置为基于从所述开关提供的信号与参考信号之间的比较来检测所述开关是否闭合; 在所述检测块中执行预充电块,所述预充电块被配置为在检测之前对所述开关的电极之一进行导线的预充电电位; 以及检测块电位供给块,被配置为在检测块中执行检测之前对与开关的另一个电极导通的导线给予预定电位。

    Connector
    7.
    发明授权
    Connector 有权
    连接器

    公开(公告)号:US08568159B2

    公开(公告)日:2013-10-29

    申请号:US13405440

    申请日:2012-02-27

    IPC分类号: H01R13/58

    CPC分类号: H01R13/5812 H01R13/562

    摘要: Areas at outer edge sides of a draw-out area for wires (13) out of a rear end surface (10R) of a housing (10) serve as operation surfaces (14) used to push the housing (10) forward. Areas of the outer periphery of a rear end portion of the housing (10) corresponding to and before the operation surfaces (14) are recessed to form outward forming grooves (15). The housing (10) is formed with bores (18) by further recessing parts of groove bottom surfaces (17) of the outward facing grooves (15). Inward facing projections (26) engageable with the outward facing grooves (15) are formed on the inner surface of a wire cover (20). Each locking projection (26) is formed with restricting projections (27) engageable with the bores (18).

    摘要翻译: 在壳体(10)的后端面(10R)之外的用于电线(13)的拉出区域的外边缘侧的区域用作用于向前推动壳体(10)的操作表面(14)。 对应于操作表面(14)之前和之前的壳体(10)的后端部分的外周的区域被凹入以形成向外的形成槽(15)。 壳体(10)通过进一步凹入面向外的凹槽(15)的槽底表面(17)的部分而形成有孔(18)。 在电线罩(20)的内表面上形成有与面向外的槽(15)接合的向内的突起(26)。 每个锁定突起(26)形成有可与孔(18)接合的限制突起(27)。

    Liquid-crystal display panel and chopper-type comparator
    8.
    发明授权
    Liquid-crystal display panel and chopper-type comparator 失效
    液晶显示面板和斩波式比较器

    公开(公告)号:US08466886B2

    公开(公告)日:2013-06-18

    申请号:US12585316

    申请日:2009-09-11

    IPC分类号: G06F3/041

    CPC分类号: G06F3/0412

    摘要: A liquid-crystal display panel includes: gate lines each serving as a row-direction line which is one of the rows of a two-dimensional matrix; data signal lines each serving as a column-direction line which is one of the columns of the two-dimensional matrix; a plurality of liquid-crystal pixel sections which are laid out to form the two-dimensional matrix and each placed at the intersection of one of the gate lines and one of the data signal lines; chopper-type comparators each connected to one of the data signal lines and each used for converting the value of a sensor signal read out from one of the liquid-crystal pixel sections connected to the data signal lines into a binary value; and a shift register for converting outputs of the chopper-type comparators from parallel data into serial data and outputting the serial data.

    摘要翻译: 液晶显示面板包括:各自用作行方向线的栅极线,其为二维矩阵的行之一; 数据信号线各自用作作为二维矩阵的列之一的列方向线; 多个液晶像素部分,布置成形成二维矩阵,并且各自放置在一条栅极线和一条数据信号线之间的交叉处; 斩波器型比较器,每个连接到数据信号线之一,每个用于将连接到数据信号线的液晶像素部分中读出的传感器信号的值转换为二进制值; 以及用于将斩波型比较器的输出从并行数据转换为串行数据并输出串行数据的移位寄存器。

    Light sensor and display
    9.
    发明授权
    Light sensor and display 有权
    光传感器和显示屏

    公开(公告)号:US08426937B2

    公开(公告)日:2013-04-23

    申请号:US12324520

    申请日:2008-11-26

    IPC分类号: H01L27/146

    摘要: A light sensor includes a control electrode formed on a substrate and having two edges, and a semiconductor film formed opposite the control electrode with an insulating film interposed therebetween, and including a photoactive layer and electrode regions located in a pair on opposite sides of the photoactive layer. The photoactive layer is arranged in an area that overlaps the control electrode. At least one of the paired electrode regions overlaps proximal one of the edges of the control electrode, and on and along the proximal edge, the at least one electrode region has a length shorter than that of the photoactive layer in a direction along the proximal edge of the control electrode.

    摘要翻译: 光传感器包括形成在基板上并具有两个边缘的控制电极,以及与控制电极相对设置的绝缘膜形成的半导体膜,并且包括光敏层和位于光活性相对侧的一对电极区域 层。 光敏层设置在与控制电极重叠的区域中。 所述成对电极区域中的至少一个与所述控制电极的边缘中的一个重叠,并且在所述近侧边缘上并且沿着所述近侧边缘重叠,所述至少一个电极区域的长度比沿着所述近端边缘的方向的所述光活性层的长度短 的控制电极。

    Radiation Therapy Agent
    10.
    发明申请
    Radiation Therapy Agent 有权
    放射治疗剂

    公开(公告)号:US20130017266A1

    公开(公告)日:2013-01-17

    申请号:US13578836

    申请日:2011-02-17

    摘要: Provided is a radiotherapeutic agent, including a composite particle, which is obtained by binding a molecule that specifically recognizes a target to a substrate particle including titanium peroxide, and which generates reactive oxygen through irradiation with a radiation. Further, because the radiotherapeutic agent contains the molecule that specifically recognizes a target, the radiotherapeutic agent has a function of accumulating in the target. The radiotherapeutic agent is capable of enhancing effects of radiotherapy, and is capable of reducing side effects on a living body to efficiently attack the target.

    摘要翻译: 本发明提供一种放射治疗剂,包括复合颗粒,其通过将特异性识别靶标的分子与包含过氧化钛的底物颗粒结合而获得,并且通过辐射照射产生活性氧。 此外,由于放射治疗剂含有特异性识别靶标的分子,所以放射治疗剂具有累积在靶内的功能。 放射治疗剂能够增强放射疗法的作用,并且能够减少对活体的副作用以有效地攻击靶。