摘要:
The present invention provides a plasma source that maintains a low coil voltage in the vicinity of the plasma tube, thereby reducing the capacitive coupling between the coil and the plasma and significantly reducing the erosion from the internal surfaces of the plasma tube. The plasma source generally comprises a coil having a first coil segment and a second coil segment, an RF power source connected to the coil and an enclosure disposed between the first coil segment and the second coil segment. The invention also provides a method for generating a plasma, comprising: disposing an enclosure between a first coil segment and a second coil segment; introducing a gas into the enclosure; and supplying an RF power to the coil segments to excite the gas into a plasma state. The invention provides a variety of coil operations, including symmetrical coil configuration, asymmetrical coil configuration with the matching networks adjusted to provide a low voltage near the plasma chamber, self-resonant configuration, grounded coil center configuration having coil segments driven in parallel and physically grounded near the plasma chamber, and pairs configurations having a plurality of coil segment pairs driven in series or parallel.
摘要:
A method and apparatus for forming a layer on a substrate in a process chamber during a plasma deposition process are provided. A plasma is formed in a process chamber, a process gas with precursor gases suitable for depositing the layer are flowed into the process chamber, and a magnetic field having a strength less than about 0.5 gauss is attenuated within the process chamber. Attenuation of such a magnetic field results in an improvement in the degree of process uniformity achieved during the deposition.
摘要:
A stereoscopic image displaying device includes an outer surface that a detection target object approaches; a stereoscopic image generating unit that generates a three-dimensional stereoscopic image based on an input video signal, and a proximity sensor unit that is disposed on a side of the outer surface that is opposite to a side that the detection target object approaches and detects proximity of the detection target object to the outer surface based on a height that is a distance from the outer surface and is set based on parallax information included in the video signal.
摘要:
A non-transitory computer readable medium stores an update management program for causing an update on control program, which is installed on each of image processing devices. The update management program, when executed by a processor, causes the computer to: acquire an update program and update function information regarding functions to be updated by the update program from a firmware distribution server; acquire device function information regarding functions of each image processing device from the each image processing device; transmit the update program to the each image processing device; determine an update sequence of timing for causing the each image processing device to update its control program, based on the acquired update function information and the acquired device function information; and cause the each image processing device to update its control program by executing the transmitted update program in accordance with the determined update sequence of timing.
摘要:
An ion implanting apparatus is provided, which can accurately measure a quantity of atoms that are implanted. The ion implanting apparatus according to the present invention has an object to be measured, and the object to be measured is arranged in an irradiating range in which ions are irradiated. When atoms are implanted into an object to be processed by irradiating ions of a processing gas and neutralized particles thereof, the object to be measured is heated through the irradiation with the processing gas ions and the neutralized particles. A control unit determines a quantity of the atoms that are implanted into the object to be processed from the temperature of the object to be measured.
摘要:
Disclosed herein is a display apparatus including: a display block configured to have a plurality of picture elements; a switch arranged inside the display block and configured to be closed by an external pressure; a detection block configured to detect whether the switch is closed based on a comparison between a signal supplied from the switch and a reference signal; a precharge block configured to give a precharge potential to a wire conducting with one of electrodes of the switch before detection is executed in the detection block; and a detection block potential supply block configured to give a predetermined potential to a wire conducting with the other electrode of the switch before detection is executed in the detection block.
摘要:
Areas at outer edge sides of a draw-out area for wires (13) out of a rear end surface (10R) of a housing (10) serve as operation surfaces (14) used to push the housing (10) forward. Areas of the outer periphery of a rear end portion of the housing (10) corresponding to and before the operation surfaces (14) are recessed to form outward forming grooves (15). The housing (10) is formed with bores (18) by further recessing parts of groove bottom surfaces (17) of the outward facing grooves (15). Inward facing projections (26) engageable with the outward facing grooves (15) are formed on the inner surface of a wire cover (20). Each locking projection (26) is formed with restricting projections (27) engageable with the bores (18).
摘要:
A liquid-crystal display panel includes: gate lines each serving as a row-direction line which is one of the rows of a two-dimensional matrix; data signal lines each serving as a column-direction line which is one of the columns of the two-dimensional matrix; a plurality of liquid-crystal pixel sections which are laid out to form the two-dimensional matrix and each placed at the intersection of one of the gate lines and one of the data signal lines; chopper-type comparators each connected to one of the data signal lines and each used for converting the value of a sensor signal read out from one of the liquid-crystal pixel sections connected to the data signal lines into a binary value; and a shift register for converting outputs of the chopper-type comparators from parallel data into serial data and outputting the serial data.
摘要:
A light sensor includes a control electrode formed on a substrate and having two edges, and a semiconductor film formed opposite the control electrode with an insulating film interposed therebetween, and including a photoactive layer and electrode regions located in a pair on opposite sides of the photoactive layer. The photoactive layer is arranged in an area that overlaps the control electrode. At least one of the paired electrode regions overlaps proximal one of the edges of the control electrode, and on and along the proximal edge, the at least one electrode region has a length shorter than that of the photoactive layer in a direction along the proximal edge of the control electrode.
摘要:
Provided is a radiotherapeutic agent, including a composite particle, which is obtained by binding a molecule that specifically recognizes a target to a substrate particle including titanium peroxide, and which generates reactive oxygen through irradiation with a radiation. Further, because the radiotherapeutic agent contains the molecule that specifically recognizes a target, the radiotherapeutic agent has a function of accumulating in the target. The radiotherapeutic agent is capable of enhancing effects of radiotherapy, and is capable of reducing side effects on a living body to efficiently attack the target.