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12 条记录 (耗时 0.034 秒)

    RF plasma source for material processing
    1.
    发明授权
    RF plasma source for material processing 有权
    RF等离子体源进行材料加工

    公开(公告)号：US06239553B1

    公开(公告)日：2001-05-29

    申请号：US09296934

    申请日：1999-04-22

    申请人： Mike Barnes ,  Tetsuya Ishikawa ,  Kaveh Niazi ,  Tsutomu Tanaka

    发明人： Mike Barnes ,  Tetsuya Ishikawa ,  Kaveh Niazi ,  Tsutomu Tanaka

    IPC分类号： H01J724

    CPC分类号： H01J37/321 ,  H05H1/46

    摘要： The present invention provides a plasma source that maintains a low coil voltage in the vicinity of the plasma tube, thereby reducing the capacitive coupling between the coil and the plasma and significantly reducing the erosion from the internal surfaces of the plasma tube. The plasma source generally comprises a coil having a first coil segment and a second coil segment, an RF power source connected to the coil and an enclosure disposed between the first coil segment and the second coil segment. The invention also provides a method for generating a plasma, comprising: disposing an enclosure between a first coil segment and a second coil segment; introducing a gas into the enclosure; and supplying an RF power to the coil segments to excite the gas into a plasma state. The invention provides a variety of coil operations, including symmetrical coil configuration, asymmetrical coil configuration with the matching networks adjusted to provide a low voltage near the plasma chamber, self-resonant configuration, grounded coil center configuration having coil segments driven in parallel and physically grounded near the plasma chamber, and pairs configurations having a plurality of coil segment pairs driven in series or parallel.

    摘要翻译： 本发明提供了一种在等离子体管附近保持低线圈电压的等离子体源，从而减小了线圈与等离子体之间的电容耦合，并显着减少了等离子体管内表面的侵蚀。 等离子体源通常包括具有第一线圈段和第二线圈段的线圈，连接到线圈的RF电源和设置在第一线圈段和第二线圈段之间的外壳。 本发明还提供了一种用于产生等离子体的方法，包括：在第一线圈段和第二线圈段之间设置外壳; 将气体引入外壳; 并且向线圈段提供RF功率以将气体激发成等离子体状态。 本发明提供了各种线圈操作，包括对称线圈配置，不对称线圈配置，匹配网络被调整以在等离子体室附近提供低电压，自谐振配置，具有线圈段并联驱动并接地的线圈中心配置 并且具有串联或并联驱动的多个线圈段对的配置配置。

    Method for porogen removal and mechanical strength enhancement of low-k carbon doped silicon oxide using low thermal budget microwave curing
    3.
    发明授权
    Method for porogen removal and mechanical strength enhancement of low-k carbon doped silicon oxide using low thermal budget microwave curing 有权
    使用低热预算微波固化的低k碳掺杂氧化硅致孔剂去除和机械强度增强方法

    公开(公告)号：US07892985B1

    公开(公告)日：2011-02-22

    申请号：US11280113

    申请日：2005-11-15

    申请人： Seon-Mee Cho ,  George D. Papasouliotis ,  Mike Barnes

    发明人： Seon-Mee Cho ,  George D. Papasouliotis ,  Mike Barnes

    IPC分类号： H01L21/4757

    CPC分类号： H01L21/76825 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02274 ,  H01L21/02337 ,  H01L21/02345 ,  H01L2221/1047

    摘要： Improved methods for preparing a low-k dielectric material on a substrate using microwave radiation are provided. The use of microwave radiation allows the preparation of low-k films to be accomplished at low temperatures. According to various embodiments, microwave radiation is used to remove porogen from a precursor film and/or to increase the strength of the resulting porous dielectric layer. In a preferred embodiment, methods involve (a) forming a precursor film that contains a porogen and a structure former on a substrate, (b) exposing the precursor film to microwave radiation to remove the porogen from the precursor film to thereby create voids within the dielectric material and form the porous low-k dielectric layer and (c) exposing the dielectric material to microwave radiation in a manner that increases the mechanical strength of the porous low-k dielectric layer.

    摘要翻译： 提供了使用微波辐射在衬底上制备低k电介质材料的改进方法。 使用微波辐射可以使低k膜的制备在低温下完成。 根据各种实施例，使用微波辐射来从前体膜去除造孔剂和/或增加所得到的多孔介电层的强度。 在优选的实施方案中，方法包括（a）在基底上形成含有致孔剂和结构形成剂的前体膜，（b）将前体膜暴露于微波辐射以从前体膜去除致孔剂，从而在 介电材料并形成多孔低k电介质层，和（c）以提高多孔低k电介质层的机械强度的方式将电介质材料暴露于微波辐射。

    Switched reluctance electric machine system
    6.
    发明授权
    Switched reluctance electric machine system 失效
    开关磁阻电机系统

    公开(公告)号：US6037740A

    公开(公告)日：2000-03-14

    申请号：US981465

    申请日：1998-02-23

    申请人： Charles Pollock ,  Mike Barnes

    发明人： Charles Pollock ,  Mike Barnes

    IPC分类号： B60L11/18 ,  H02J7/02 ,  H02P25/08 ,  H02P1/46

    CPC分类号： B60L11/1803 ,  B60L11/1801 ,  B60L11/1811 ,  B60L11/1814 ,  B60L11/1816 ,  B60L15/007 ,  H02J7/025 ,  H02P25/08 ,  B60L2200/12 ,  B60L2200/34 ,  B60L2220/18 ,  B60L2220/54 ,  Y02T10/641 ,  Y02T10/644 ,  Y02T10/645 ,  Y02T10/7005 ,  Y02T10/7072 ,  Y02T10/92 ,  Y02T90/127 ,  Y02T90/14

    摘要： A switched reluctance electrical machine system including a switched reluctance machine, a rechargeable DC energy store and principle voltage terminals connectable to an external power source. The switched reluctance machine comprises a rotor, a stator and windings wherein the windings include at least two closely-coupled coils and a power converter for controlling current flow in the windings. The power converter has first and second circuits. The first circuit contains one of the closely-coupled coils and the principle voltage terminals while the second circuit contains the other of the closely-coupled coils and the energy store. A first switching arrangement is connected in series with the coils in the first circuit and a second switching arrangement is connected in series with the coils in the second circuit. An electronic controller controls the switching arrangements so that, in a first operational mode, current flows in one direction in the coils during normal machine operation and, in a second operational mode, current flows in the coils in the opposite direction to charge the energy store from an external power source.

    摘要翻译： PCT No.PCT / GB96 / 01597第 371日期1998年2月23日 102（e）1998年2月23日PCT PCT 1996年7月4日PCT公布。 出版物WO97 / 02649 日期1997年1月23日一种开关磁阻电机系统，包括开关磁阻电机，可再充电直流能量存储器和可连接到外部电源的主电压端子。 开关磁阻电机包括转子，定子和绕组，其中绕组包括至少两个紧密耦合的线圈和用于控制绕组中的电流的功率转换器。 电源转换器具有第一和第二电路。 第一电路包含紧密耦合的线圈和主电压端子之一，而第二电路包含紧密耦合的线圈和能量存储器中的另一个。 第一开关装置与第一电路中的线圈串联连接，第二开关装置与第二电路中的线圈串联连接。 电子控制器控制开关装置，使得在第一操作模式中，在正常机器操作期间，电流在线圈中沿一个方向流动，并且在第二操作模式中，电流沿相反方向在线圈中流动以对能量存储器充电 来自外部电源。

    Electrical machines
    8.
    发明授权
    Electrical machines 失效
    电机

    公开(公告)号：US6140729A

    公开(公告)日：2000-10-31

    申请号：US230680

    申请日：1999-03-29

    申请人： Charles Pollock ,  John David Wale ,  Mike Barnes

    发明人： Charles Pollock ,  John David Wale ,  Mike Barnes

    IPC分类号： H02K19/06 ,  H02P25/08 ,  H02K17/00

    CPC分类号： H02K19/06 ,  H02P25/08

    摘要： An electrical machine comprises a four-pole stator 2 provided with a field winding 10 and an armature winding 11, each of the windings 10, 11 being split into two coils 22, 23 or 24, 25 closely coupled and wound so that diametrically opposite portions of both coils are disposed within diametrically opposite stator slots. A two-pole rotor (not shown) without windings is rotatable within the stator 2, and a circuit is provided for energising the armature coils 24 and 25 when direct current is supplied to terminals 26 and 27 of the circuit. Switches 28 and 29 in series with the coils 24 and 25 are switched alternately to effect alternate energisation of the coils 24 and 25 so as to generate, as a result of the opposite winding of the coils, magnetomotive forces in opposite directions. Since each of the closely coupled coil 24 and 25 generates a magnetomotive force in a respective direction, each coil needs to be energised with current in only one direction so that a relatively simple excitation circuit can be used.

    摘要翻译： PCT No.PCT / GB97 / 02019 Sec。 371 1999年3月29日第 102（e）1999年3月29日PCT PCT 1997年7月28日PCT公布。 第WO98 / 05112号公报 日期1998年2月5日电机包括设有励磁绕组10和电枢绕组11的四极定子2，每个绕组10,11分成两个紧密耦合和缠绕的线圈22,23或24,25 使得两个线圈的径向相对的部分设置在直径相对的定子槽内。 没有绕组的两极转子（未示出）可在定子2内旋转，并且当向电路的端子26和27提供直流电流时，设置电路用于对电枢线圈24和25通电。 与线圈24和25串联的开关28和29交替地切换以实现线圈24和25的交替激励，以便由于线圈的相反绕组而产生相反方向的磁动势。 由于紧密耦合的线圈24和25中的每一个在相应的方向上产生磁动势，所以每个线圈需要仅在一个方向上被电流激励，使得可以使用相对简单的激励电路。