公开(公告)号：US5315092A

公开(公告)日：1994-05-24

申请号：US774943

申请日：1991-10-11

申请人： Mitsukazu Takahashi ,  Takatoshi Chiba ,  Kiyofumi Nishii

发明人： Mitsukazu Takahashi ,  Takatoshi Chiba ,  Kiyofumi Nishii

IPC分类号： H01L21/66 ,  H01L21/00 ,  H01L21/26 ,  H05B1/02 ,  H01L21/02

CPC分类号： H01L21/67115

摘要： A temperature measuring device for measuring the temperature of a wafer heated by light irradiation includes: a sheath thermocouple for detecting the temperature of a wafer to be measured by contacting the wafer to be measured; and a covering member for covering the surface of the sheath thermocouple. The surface of the covering member is flat in a predetermined region, and the part in the region can plane-contact the surface of the wafer. Thus, the temperature of the wafer can be measured accurately and in a stable manner, and the wafer surface is free from contamination with adhesives or the metal of the thermocouple.

摘要翻译： 用于测量通过光照射加热的晶片的温度的温度测量装置包括：鞘热电偶，用于通过接触被测量的晶片来检测要测量的晶片的温度; 以及用于覆盖护套热电偶的表面的覆盖部件。 覆盖部件的表面在预定区域中是平坦的，并且该区域中的部分可以与晶片的表面平面接触。 因此，能够以稳定的方式精确地测量晶片的温度，并且晶片表面没有被粘合剂或热电偶的金属污染。

公开(公告)号：US5405446A

公开(公告)日：1995-04-11

申请号：US272486

申请日：1994-07-11

申请人： Toshihiro Nakajima ,  Takatoshi Chiba ,  Kiyofumi Nishii ,  Toru Sato

发明人： Toshihiro Nakajima ,  Takatoshi Chiba ,  Kiyofumi Nishii ,  Toru Sato

IPC分类号： H01L21/26 ,  C23C16/44 ,  C23C16/455 ,  C30B25/14 ,  C30B31/16 ,  H01L21/00 ,  H01L21/205 ,  H01L21/22 ,  H01L21/31 ,  H01L21/324 ,  C23C16/00

CPC分类号： C23C16/45504 ,  C23C16/45512 ,  C23C16/4558 ,  C30B25/14 ,  C30B31/16 ,  H01L21/67109

摘要： An apparatus for heat processing a substrate includes a heat processing furnace, which has a flat inner space for accommodating the substrate, and a gas introduction unit which introduces gas supplied via a piping into the inner space of the heat processing furnace via a gas supply inlet of the heat processing furnace. The apparatus effects the heat processing on the substrate placed within a gas flow formed in the inner space. The gas introduction unit includes a first gas introduction chamber, which receives the gas supplied via the piping for reducing a flow velocity of the gas, and a second gas introduction chamber, which is in communication with the first gas introduction chamber, is formed over at least one of outer surfaces of the top furnace wall and the bottom furnace wall at the one end of the heat processing furnace, and extends in a belt-like form through an entire width of the heat processing furnace. A portion of the top furnace wall and/or bottom furnace wall, over which the second gas introduction chamber is formed, has a nozzle opening, which covers the entire width of the heat processing furnace for flowing the gas from the second gas introduction chamber into the inner space in a direction perpendicular to the top furnace wall and/or bottom furnace wall. The gas supply port and the first gas introduction chamber are preferably separated from each other by a partition which forms a portion of a cylindrical or spherical surface and has a plurality of through-holes.

摘要翻译： 一种用于加热基板的设备包括：热处理炉，其具有用于容纳基板的平坦内部空间;以及气体引入单元，其经由管道供给的气体经由气体供给入口引入到热处理炉的内部空间 的热处理炉。 该装置对放置在内部空间中形成的气流内的基板进行热处理。 气体引入单元包括：第一气体导入室，其接收经由管道供给的气体，用于降低气体的流速;以及与第一气体导入室连通的第二气体导入室，形成在 在热处理炉的一端的顶炉壁和底炉壁的至少一个外表面，并且以带状形式延伸通过热处理炉的整个宽度。 顶部炉壁和/或底部炉壁的形成有第二气体导入室的部分具有喷嘴开口，该喷嘴开口覆盖用于使气体从第二气体导入室流出的热处理炉的整个宽度进入 在垂直于顶部炉壁和/或底部炉壁的方向上的内部空间。 气体供给口和第一气体导入室优选通过形成圆筒状或球面的一部分并具有多个通孔的隔壁相互分离。

公开(公告)号：US5611685A

公开(公告)日：1997-03-18

申请号：US450758

申请日：1995-05-25

申请人： Toshihiro Nakajima ,  Takatoshi Chiba ,  Kiyofumi Nishii ,  Toru Sato

发明人： Toshihiro Nakajima ,  Takatoshi Chiba ,  Kiyofumi Nishii ,  Toru Sato

IPC分类号： C23C16/44 ,  C23C16/455 ,  C30B25/10 ,  C30B25/12 ,  C30B25/14 ,  H01L21/00 ,  H01L21/205 ,  H01L21/26 ,  H01L21/324 ,  F27B5/04

CPC分类号： H01L21/67109 ,  C23C16/4401 ,  C23C16/4412 ,  C30B25/10 ,  C30B25/12 ,  C30B25/14

摘要： A substrate heat treatment apparatus includes a heat treatment furnace of a flat configuration, and having a cavity in which a substrate is accommodated. The heat treatment furnace includes a gas supply unit at one side end face, an opening for communication between the cavity and the outside world, and a gas discharge unit in the vicinity of the opening for discharging gas from the cavity at the other side end face. The heat treatment furnace further includes a cover for shutting the opening allowing opening/closing thereof. In the gas exhaust unit, an exhaust chamber is formed on the other side end face along the opening with a partition wall between the opening and the exhaust chamber. An exhaust portion is formed in communication with the outside world in the exhaust chamber. The partition wall is formed so that the edge of the partition wall is displaced away from the inside surface of the cover, whereby a slit-like vent passage extending in the direction of the width of the cavity is formed between the cover and the edge of the partition wall when the opening is shut. The gas flow is uniform in the vicinity of the vent passage when a substrate is loaded/unloaded into and/from the heat treatment furnace, and also during heat treatment. The outside air will not enter the furnace, and no stagnation of the process gas occurs in the furnace.

摘要翻译： 基板热处理装置包括平坦构造的热处理炉，并且具有容纳基板的空腔。 所述热处理炉包括在一侧端面处的气体供给单元，所述空腔与所述外界之间连通的开口以及所述开口附近的气体排出单元，用于从所述另一侧端面处的所述空腔排出气体 。 热处理炉还包括用于关闭允许其打开/关闭的开口的盖。 在排气单元中，在开口与排气室之间具有分隔壁的沿着开口的另一侧端面形成有排气室。 在排气室中形成与外界连通的排气部。 分隔壁形成为使得隔壁的边缘远离盖的内表面移开，从而在盖和盖的边缘之间形成沿空腔宽度方向延伸的狭缝状通气通道 打开关闭时的隔墙。 当将基板装载/卸载到热处理炉中时，以及在热处理期间，气流在通气通道附近均匀。 外部空气不会进入炉内，炉内不会发生停滞。

公开(公告)号：US5539855A

公开(公告)日：1996-07-23

申请号：US197784

申请日：1994-02-16

申请人： Mitsukazu Takahashi ,  Takatoshi Chiba ,  Katsuichi Akiyoshi

发明人： Mitsukazu Takahashi ,  Takatoshi Chiba ,  Katsuichi Akiyoshi

IPC分类号： G01K7/00 ,  G01K1/16 ,  H01L21/324 ,  H01L21/66 ,  H05B3/00 ,  A21B2/00 ,  F26B19/00

CPC分类号： G01K1/16

摘要： A substrate temperature measuring apparatus includes a temperature signal generating device provided in contact with a substrate for generating a signal indicating its own temperature which follows the temperature of the substrate by thermal conduction, a device connected and responsive to the output of the temperature signal generating device for determining whether contact between the substrate and the temperature signal generating device is appropriate or not, and a device for carrying out a predetermined process according to a determination result of the determining device. It is possible to apply heat treatment to the substrate, to prevent the substrate from being subjected to heat treatment, or to give a necessary alarm according to the determination result. Since the next substrate is at room temperature when it first comes into contact with the temperature signal generating device after heat treatment, the temperature signal generating device lowers its temperature rapidly in such a manner that reflects a state of contact between the substrate and the temperature signal generating device. Based on change of the output of the temperature signal generating device at this time, it is possible to detect an undesired state of contact between the substrate and the temperature signal generating device, and to prevent inaccurate measurement of the temperature of the substrate.

摘要翻译： 基板温度测量装置包括：温度信号发生装置，与温度信号发生装置接触，用于通过热传导产生表示其本身温度跟随基板温度的信号;连接的装置，并响应温度信号发生装置的输出 用于确定基板和温度信号发生装置之间的接触是否适当;以及根据确定装置的确定结果执行预定处理的装置。 可以对基板进行热处理，以防止基板受到热处理，或者根据确定结果进行必要的报警。 由于下一个基板在热处理后首先与温度信号发生装置接触时处于室温，所以温度信号发生装置以反映基板和温度信号之间的接触状态的方式快速降低其温度 生成装置。 基于此时的温度信号发生装置的输出变化，可以检测基板和温度信号发生装置之间的不期望的接触状态，并且防止基板的温度的不准确的测量。

公开(公告)号：US07684745B2

公开(公告)日：2010-03-23

申请号：US12202578

申请日：2008-09-02

申请人： Hiromitsu Uchida ,  Masahiko Yokota ,  Kazuhisa Okuda ,  Michiaki Endo ,  Takatoshi Chiba ,  Shinsuke Ubayashi ,  Hiromasa Katayama

发明人： Hiromitsu Uchida ,  Masahiko Yokota ,  Kazuhisa Okuda ,  Michiaki Endo ,  Takatoshi Chiba ,  Shinsuke Ubayashi ,  Hiromasa Katayama

IPC分类号： G03G15/20

CPC分类号： G03G15/2064 ,  G03G2215/2016 ,  G03G2215/2032

摘要： An image heating apparatus including an endless belt for heating an image on a recording material; a supporting member for supporting the belt; a coil for induction heat generation in the belt; control means for controlling a position of the belt in a widthwise direction by inclining the supporting member so as to maintain the position of the belt in the widthwise direction within a predetermined target range; and suppressing means for suppressing a variation of a distance between the belt and the coil with a variation of inclination of the supporting member.

摘要翻译： 一种图像加热装置，包括用于加热记录材料上的图像的环形带; 用于支撑所述带的支撑构件; 皮带感应发热线圈; 控制装置，用于通过使所述支撑构件倾斜来控制所述带在宽度方向上的位置，以便将所述带在宽度方向上的位置保持在预定目标范围内; 以及抑制装置，用于随着支撑构件的倾斜度的变化来抑制带和线圈之间的距离的变化。

公开(公告)号：US07424261B2

公开(公告)日：2008-09-09

申请号：US11470456

申请日：2006-09-06

申请人： Hiromitsu Uchida ,  Masahiko Yokota ,  Kazuhisa Okuda ,  Michiaki Endo ,  Takatoshi Chiba ,  Shinsuke Ubayashi ,  Hiromasa Katayama

发明人： Hiromitsu Uchida ,  Masahiko Yokota ,  Kazuhisa Okuda ,  Michiaki Endo ,  Takatoshi Chiba ,  Shinsuke Ubayashi ,  Hiromasa Katayama

IPC分类号： G03G15/20

CPC分类号： G03G15/2064 ,  G03G2215/2016 ,  G03G2215/2032

摘要： An image heating apparatus including an endless belt for heating an image on a recording material; a supporting member for supporting the belt; a coil for induction heat generation in the belt; control means for controlling a position of the belt in a widthwise direction by inclining the supporting member so as to maintain the position of the belt in the widthwise direction within a predetermined target range; and suppressing means for suppressing a variation of a distance between the belt and the coil with a variation of inclination of the supporting member.

摘要翻译： 一种图像加热装置，包括用于加热记录材料上的图像的环形带; 用于支撑所述带的支撑构件; 皮带感应发热线圈; 控制装置，用于通过使所述支撑构件倾斜来控制所述带在宽度方向上的位置，以便将所述带在宽度方向上的位置保持在预定目标范围内; 以及抑制装置，用于随着支撑构件的倾斜度的变化来抑制带和线圈之间的距离的变化。

公开(公告)号：US5454859A

公开(公告)日：1995-10-03

申请号：US325519

申请日：1994-10-19

申请人： Takatoshi Chiba ,  Shigeru Kobayashi

发明人： Takatoshi Chiba ,  Shigeru Kobayashi

IPC分类号： B60H3/06 ,  B62D25/08 ,  B03C3/36

CPC分类号： B62D25/081 ,  B03C3/363 ,  B60H3/0078 ,  B60H3/06 ,  B60H3/0641

摘要： Various types of air cleaning devices for cleaning air fed to a passenger compartment of a motor vehicle are described. These air cleaning devices are arranged to incorporate with a cowl top structure of the vehicle. In one type, an air filter is disposed in an external air introduction passage led to the passenger compartment, and when the air filter is blocked with arrested dusts, a bypass passage is established to keep the feeding of atmospheric air to the passenger compartment. In a modified type, the bypass passage is instantly blocked and an internal air circulation mode is established. In one type, an electrostatic air collecting unit is used for arresting very fine particles in the atmospheric air fed to the passenger compartment. In order to achieve a smoothed air flow in the electrostatic air collecting unit, smoothly curved air guide passages are defined between positive and negative electrode plates. In one type, two hood ridge reinforcing hollowed structures are used for feeding the air box and thus the passenger compartment with a satisfied amount of atmospheric air. In order to facilitate the maintenance of the air filter in the air box, an inspection aperture is provided in the cowl top. Usually, the inspection aperture is covered by a lid.

摘要翻译： 描述了用于清洁供给到机动车辆的乘客室的空气的各种类型的空气净化装置。 这些空气净化装置被布置成与车辆的整流罩顶部结构相结合。 在一种类型中，空气过滤器设置在引导到乘客室的外部空气引入通道中，并且当空气过滤器被阻塞的灰尘堵塞时，建立旁路通道以保持向乘客室供应大气。 在改型中，旁路通道立即被阻塞并建立内部空气循环模式。 在一种类型中，静电空气收集单元用于阻止供给到乘客舱的大气中的非常细小的颗粒。 为了在静电收集单元中实现平滑的气流，在正极板和负极板之间限定平滑弯曲的空气引导通道。 在一种类型中，使用两个罩脊加强中空结构来供给空气箱，从而使乘客室具有满足的大气空气量。 为了便于维护空气过滤器，在整流罩顶部设有检查孔。 通常，检查孔被盖子覆盖。

公开(公告)号：US20070212133A1

公开(公告)日：2007-09-13

申请号：US11470456

申请日：2006-09-06

申请人： Hiromitsu Uchida ,  Masahiko Yokota ,  Kazuhisa Okuda ,  Michiaki Endo ,  Takatoshi Chiba ,  Shinsuke Ubayashi ,  Hiromasa Katayama

发明人： Hiromitsu Uchida ,  Masahiko Yokota ,  Kazuhisa Okuda ,  Michiaki Endo ,  Takatoshi Chiba ,  Shinsuke Ubayashi ,  Hiromasa Katayama

IPC分类号： G03G15/20

CPC分类号： G03G15/2064 ,  G03G2215/2016 ,  G03G2215/2032

摘要： An image heating apparatus including an endless belt for heating an image on a recording material; a supporting member for supporting the belt; a coil for induction heat generation in the belt; control means for controlling a position of the belt in a widthwise direction by inclining the supporting member so as to maintain the position of the belt in the widthwise direction within a predetermined target range; and suppressing means for suppressing a variation of a distance between the belt and the coil with a variation of inclination of the supporting member.

摘要翻译： 一种图像加热装置，包括用于加热记录材料上的图像的环形带; 用于支撑所述带的支撑构件; 皮带感应发热线圈; 控制装置，用于通过使所述支撑构件倾斜来控制所述带在宽度方向上的位置，以便将所述带在宽度方向上的位置保持在预定目标范围内; 以及抑制装置，用于随着支撑构件的倾斜度的变化来抑制带和线圈之间的距离的变化。

公开(公告)号：US20070059061A1

公开(公告)日：2007-03-15

申请号：US11461133

申请日：2006-07-31

申请人： Hiromasa Katayama ,  Kazuhisa Okuda ,  Michiaki Endo ,  Masahiko Yokota ,  Shinsuke Ubayashi ,  Takatoshi Chiba ,  Hiromitsu Uchida

发明人： Hiromasa Katayama ,  Kazuhisa Okuda ,  Michiaki Endo ,  Masahiko Yokota ,  Shinsuke Ubayashi ,  Takatoshi Chiba ,  Hiromitsu Uchida

IPC分类号： G03G15/20

CPC分类号： G03G15/206 ,  G03G2215/2009

摘要： An apparatus for inclining a roller on which a pressure belt is suspended to perform a deviation control of the pressure belt, which can well perform the deviation control of the pressure belt even when the pressure belt has been spaced apart from a fixing roller. A fixing device is provided with a pressure belt suspended on rollers, a deviation control device adjusting the deviation of the pressure belt, and a pressure unit bringing the pressure belt into pressure contact with a fixing roller to form a nip portion. The deviation control device is designed to be moved with the pressure unit.

摘要翻译： 一种用于倾斜辊子的装置，其上悬挂有压力带，以执行压力带的偏差控制，即使当压力带与定影辊间隔开时，也能很好地执行压力带的偏差控制。 固定装置设置有悬挂在辊上的压力带，调节压力带的偏差的偏差控制装置和使压力带与定影辊压力接触以形成压合部的压力单元。 偏差控制装置设计成与压力单元一起移动。

公开(公告)号：US20050271432A1

公开(公告)日：2005-12-08

申请号：US11143723

申请日：2005-06-03

申请人： Takatoshi Chiba

发明人： Takatoshi Chiba

IPC分类号： G03G15/20

CPC分类号： G03G15/2064

摘要： It is an object of the present invention to delay wear caused by contact between an end of a recording material and a fixing roller and a pressure roller at a constant position, to elongate lifetime of the rollers, and to reduce running cost. In a fixing apparatus T having a fixing roller 1 and a pressure roller 2 which heat an image on a recording material P while nipping and conveying the recording material P, the fixing apparatus T comprises moving means 15 and 17 which move the fixing roller 1 and the pressure roller 2 in a widthwise direction of the recording material P.

摘要翻译： 本发明的目的是延迟由记录材料的端部与定影辊之间的接触造成的磨损，并且在恒定的位置延长加压辊的寿命，并且降低运行成本。 在具有定影辊1和加压辊2的定影装置T中，定影装置T包括移动装置15和17，移动装置15和17使定影辊1和 压力辊2在记录材料P的宽度方向上。