公开(公告)号：US07531103B2

公开(公告)日：2009-05-12

申请号：US10947289

申请日：2004-09-23

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Katsuyuki Nakada ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Katsuyuki Nakada ,  Mitsuru Takai

IPC分类号： B44C1/22

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/855 ,  Y10T428/24802

摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.

摘要翻译： 掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案 通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模 使用B掩模蚀刻形成A掩模的功能层。 通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。

公开(公告)号：US07480924B2

公开(公告)日：2009-01-20

申请号：US11056976

申请日：2005-02-14

申请人： Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai ,  Shuichi Okawa

发明人： Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai ,  Shuichi Okawa

IPC分类号： G11B7/09

CPC分类号： B82Y10/00 ,  G11B5/012 ,  G11B5/65 ,  G11B5/74 ,  G11B5/743 ,  G11B5/855 ,  G11B2005/0002 ,  G11B2005/0005 ,  G11B2005/001 ,  G11B2005/0021 ,  G11B2005/0029

摘要： A magnetic recording and reproducing device includes: a magnetic recording medium in which a magnetic recording layer is formed in a concavo-convex pattern so that tracks are formed by convex portions of a predetermined track width and arranged in parallel in the track width direction; a heating head for heating the magnetic recording medium to partially reduce coercivity of the tracks; a recording head for applying a recording magnetic field to a heated portion of the magnetic recording medium to record magnetic data on the tracks; and a reproducing head for detecting a reproducing magnetic field of the tracks. In this configuration, an effective recording area has an effective recording width that is equal to or more than the track width, and equal to or less than a sum of the track width and a doubled value of width of concave portions between the tracks.

摘要翻译： 磁记录和再现装置包括：磁记录介质，其中磁记录层形成为凹凸图案，使得轨道由预定轨道宽度的凸部形成并沿轨道宽度方向平行布置; 用于加热磁记录介质以部分地降低轨道的矫顽力的加热头; 记录头，用于将记录磁场施加到磁记录介质的加热部分，以将磁数据记录在轨道上; 以及用于检测轨道的再现磁场的再现头。 在该配置中，有效记录区域具有等于或大于轨道宽度的有效记录宽度，并且等于或小于轨道宽度和轨迹之间的凹部宽度的双倍值之和。

公开(公告)号：US07413819B2

公开(公告)日：2008-08-19

申请号：US11059532

申请日：2005-02-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai

发明人： Kazuhiro Hattori ,  Mitsuru Takai

IPC分类号： G11B5/66

CPC分类号： B82Y10/00 ,  G11B5/65 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： A magnetic recording medium is provided, which has a recording layer formed in a concavo-convex pattern and makes it possible to obtain the stable flying characteristics of a head. In the magnetic recording medium, concave portions between recording elements are filled with a non-magnetic material. Thus, the surface of the magnetic recording medium takes a concavo-convex shape which is different from the concavo-convex pattern of the recording layer. Also, the arithmetical mean deviation of the assessed profile of the concavo-convex shape in the surface is restricted to 1 nm or less.

摘要翻译： 提供一种磁记录介质，其具有以凹凸图案形成的记录层，并且可以获得头部的稳定的飞行特性。 在磁记录介质中，记录元件之间的凹部填充有非磁性材料。 因此，磁记录介质的表面呈现与记录层的凹凸图案不同的凹凸形状。 此外，将表面中的凹凸形状的评估轮廓的算术平均偏差限制在1nm以下。

公开(公告)号：US20080087631A1

公开(公告)日：2008-04-17

申请号：US11907269

申请日：2007-10-10

申请人： Kazuhiro Hattori ,  Kazuya Shimakawa ,  Mitsuru Takai

发明人： Kazuhiro Hattori ,  Kazuya Shimakawa ,  Mitsuru Takai

IPC分类号： H01J27/02 ,  B44C1/22

CPC分类号： H01J27/024 ,  H01J37/08 ,  H01J37/3053 ,  H01J2237/24528

摘要： A compact ion gun capable of flattening both sides of a substrate, an ion beam etching apparatus provided with the ion gun, an ion beam etching facility, an etching method using them, and a method for manufacturing a magnetic recording medium are provided. The ion gun includes a plasma generation source and an extraction electrode unit. The extraction electrode unit has: a first electrode unit including a portion of a plurality of electrode plates on a first side of a reference plane intersecting the electrode plates, the portion being inclined with respect to the reference plane so as to face an irradiation target area along the reference plane; and a second electrode unit including a portion of the electrode plates on a second side of the reference plane, the portion being inclined with respect to the reference plane so as to face the irradiation target area along the reference plane.

摘要翻译： 提供能够使基板的两面变平的紧凑型离子枪，设置有离子枪的离子束蚀刻装置，离子束蚀刻装置，使用它们的蚀刻方法和制造磁记录介质的方法。 离子枪包括等离子体产生源和引出电极单元。 提取电极单元具有：第一电极单元，其包括在与电极板相交的参考平面的第一侧上的多个电极板的一部分，该部分相对于参考平面倾斜以面对照射目标区域 沿着参考平面; 以及第二电极单元，其包括在所述参考平面的第二侧上的所述电极板的一部分，所述部分相对于所述参考平面倾斜，以便沿着所述参考平面面对所述照射目标区域。

公开(公告)号：US20060063042A1

公开(公告)日：2006-03-23

申请号：US11206874

申请日：2005-08-19

申请人： Mitsuru Takai ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Shuichi Okawa

发明人： Mitsuru Takai ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Shuichi Okawa

IPC分类号： G11B5/706

CPC分类号： G11B5/855

摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.

摘要翻译： 提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料， 形成在非磁性材料的凹部的底面的非磁性材料形成的磁性层16形成在凹凸图案的凸部上，凸部和凹部的表面基本平坦化 ，非磁性层16的厚度为1nm以下。

公开(公告)号：US20050263915A1

公开(公告)日：2005-12-01

申请号：US11087608

申请日：2005-03-24

申请人： Minoru Fujita ,  Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai

发明人： Minoru Fujita ,  Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai

IPC分类号： G11B5/84 ,  B29C43/02 ,  B29D17/00 ,  G03F7/00 ,  G11B5/855 ,  G11B7/26 ,  H01L21/027

CPC分类号： B29C43/021 ,  B29C43/003 ,  B29C43/52 ,  B29C2043/025 ,  B29D17/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/855 ,  G11B7/263

摘要： An imprinting method which is capable of forming a concave/convex pattern in a short time without causing deformation or incompleteness of the pattern. In the imprinting method, a stamper-pressing step of pressing a stamper against a resin layer formed by applying a resin material to a surface of a substrate, in a state of the resin layer being heated to a predetermined temperature, and a stamper-removing step of removing the stamper from the resin layer while maintaining either of the state of the resin layer being heated and a state of the temperature of the heated resin layer being held, are performed in the mentioned order, whereby shapes of recesses/protrusions of the stamper are transferred to the resin layer to form a concave/convex pattern on the substrate.

摘要翻译： 一种能够在短时间内形成凹凸图案而不引起图案变形或不完整的压印方法。 在压印方法中，在树脂层被加热到预定温度的状态下，将压模压在通过将树脂材料施加到基板的表面上而形成的树脂层上的压模加工步骤， 在保持加热树脂层的状态和保持加热树脂层的温度的状态之一的同时从树脂层除去压模的步骤按照上述顺序进行，由此形成凹部 压模转移到树脂层，以在基板上形成凹凸图案。

公开(公告)号：US07225528B2

公开(公告)日：2007-06-05

申请号：US10972325

申请日：2004-10-26

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/127 ,  H01R31/00

CPC分类号： G11B5/855 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.

摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。

公开(公告)号：US20070059562A1

公开(公告)日：2007-03-15

申请号：US11600725

申请日：2006-11-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

发明人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

IPC分类号： G11B5/65

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/74 ,  G11B5/743 ,  G11B5/851 ,  G11B11/10582

摘要： A magnetic recording medium which is prevented from deterioration of the partitioned recording elements is provided. A magnetic recording medium has partitioned recording elements, a non-magnetic body filled in grooves between the partitioned recording elements, and a barrier film formed between the partitioned recording elements and the non-magnetic body.

摘要翻译： 提供防止划分的记录元件劣化的磁记录介质。 磁记录介质具有划分的记录元件，填充在分隔的记录元件之间的凹槽中的非磁性体以及形成在分隔的记录元件和非磁性体之间的阻挡膜。

公开(公告)号：US20060115584A1

公开(公告)日：2006-06-01

申请号：US10544895

申请日：2004-08-03

申请人： Kazuhiro Hattori ,  Mitsuru Takai

发明人： Kazuhiro Hattori ,  Mitsuru Takai

IPC分类号： B05D5/12 ,  G11B5/84

CPC分类号： G11B5/855

摘要： A manufacturing method and a manufacturing apparatus of a magnetic recording medium are provided, which can efficiently manufacture a magnetic recording medium having good magnetic characteristics while suppressing warpage of the medium, magnetic degradation of divided recording elements, and misalignment of the processed shape of the divided recording elements. In the manufacturing method and the manufacturing apparatus, both surfaces of an object to be processed 10 are simultaneously processed. As a dry etching technique for a continuous recording layer 20, ion beam etching is employed. A resist layer 26 is removed before dry etching of the continuous recording layer 20.

摘要翻译： 提供一种磁记录介质的制造方法和制造装置，其能够有效地制造具有良好磁特性的磁记录介质，同时抑制介质的翘曲，划分的记录元件的磁性劣化，以及分割的记录元件的加工形状的未对准 录音元素 在制造方法和制造装置中，同时处理被处理物体10的两面。 作为连续记录层20的干蚀刻技术，采用离子束蚀刻。 在连续记录层20的干蚀刻之前去除抗蚀剂层26。

公开(公告)号：US20050284842A1

公开(公告)日：2005-12-29

申请号：US11156469

申请日：2005-06-21

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  C23F4/00 ,  G11B5/65 ,  G11B5/73 ,  G11B5/74 ,  G11B5/82 ,  G11B5/855

CPC分类号： B82Y10/00 ,  C23F4/00 ,  G11B5/732 ,  G11B5/7325 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.

摘要翻译： 在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。 接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。 通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。 主掩模层主要由碳制成。 在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。