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公开(公告)号：US20110026548A1
公开(公告)日：2011-02-03
申请号：US12921822
申请日：2008-03-18
申请人： Motoaki Tamaya , Chise Nanba , Akira Nakamura , Keiichi Fukuda , Koji Funaoka , Manabu Kawakami , Masamitsu Okamura
发明人： Motoaki Tamaya , Chise Nanba , Akira Nakamura , Keiichi Fukuda , Koji Funaoka , Manabu Kawakami , Masamitsu Okamura
CPC分类号： H01S3/025 , G02F1/37 , H01S3/0092 , H01S3/042 , H01S3/09415
摘要： When a laser light source module includes a heat sink in which a solid laser element, an excitation light source, and a wavelength conversion element are arranged and a stem that supports the heat sink, wherein the heat sink is separated into three blocks, namely a first block including a laser oscillating unit for the solid laser element is arranged, a second block including a semiconductor laser element that emits excitation light for the laser oscillating unit and a first temperature sensor are arranged and on a specific surface of which the first heater is arranged, and a third block including the wavelength conversion element that converts the wavelength of the fundamental laser beam and a second temperature sensor are arranged and on a specific surface of which a second heater is arranged, enabling thus downsizing of the module and improvement of the positioning accuracy of the elements.
摘要翻译： 当激光光源模块包括其中布置有固体激光元件，激发光源和波长转换元件的散热器和支撑散热器的灯杆时，其中散热器被分成三块，即 布置包括用于固体激光元件的激光振荡单元的第一块，布置包括发射用于激光振荡单元的激发光的半导体激光元件的第二块和第一温度传感器，并且其特定表面上的第一加热器 并且配置有包括转换基波激光束的波长的波长转换元件和第二温度传感器的第三块，并且在其特定表面上布置有第二加热器，从而能够实现模块的小型化和改进 元素的定位精度。
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公开(公告)号：US08265111B2
公开(公告)日：2012-09-11
申请号：US12921822
申请日：2008-03-18
申请人： Motoaki Tamaya , Chise Nanba , Akira Nakamura , Keiichi Fukuda , Koji Funaoka , Manabu Kawakami , Masamitsu Okamura
发明人： Motoaki Tamaya , Chise Nanba , Akira Nakamura , Keiichi Fukuda , Koji Funaoka , Manabu Kawakami , Masamitsu Okamura
IPC分类号： H01S3/04
CPC分类号： H01S3/025 , G02F1/37 , H01S3/0092 , H01S3/042 , H01S3/09415
摘要： When a laser light source module includes a heat sink in which a solid laser element, an excitation light source, and a wavelength conversion element are arranged and a stem that supports the heat sink, wherein the heat sink is separated into three blocks, namely a first block including a laser oscillating unit for the solid laser element is arranged, a second block including a semiconductor laser element that emits excitation light for the laser oscillating unit and a first temperature sensor are arranged and on a specific surface of which the first heater is arranged, and a third block including the wavelength conversion element that converts the wavelength of the fundamental laser beam and a second temperature sensor are arranged and on a specific surface of which a second heater is arranged, enabling thus downsizing of the module and improvement of the positioning accuracy of the elements.
摘要翻译： 当激光光源模块包括其中布置有固体激光元件，激发光源和波长转换元件的散热器和支撑散热器的灯杆时，其中散热器被分成三块，即 布置包括用于固体激光元件的激光振荡单元的第一块，布置包括发射用于激光振荡单元的激发光的半导体激光元件的第二块和第一温度传感器，并且其特定表面上的第一加热器 并且配置有包括转换基波激光束的波长的波长转换元件和第二温度传感器的第三块，并且在其特定表面上布置有第二加热器，从而能够实现模块的小型化和改进 元素的定位精度。
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公开(公告)号：US08774241B2
公开(公告)日：2014-07-08
申请号：US12864694
申请日：2008-03-18
IPC分类号： H01S3/04
CPC分类号： H01S3/025 , H01S3/0092 , H01S3/042 , H01S3/094053 , H01S3/09415 , H01S3/1611 , H01S3/1673
摘要： To constitute an optical module comprising a mount and a board that supports the mount, wherein a solid-state laser device that oscillates fundamental laser light, a pump light source that pumps the solid-state laser device, and a wavelength converting device that converts a wavelength of the fundamental laser light oscillated by the solid-state laser device are mounted on the mount, the mount is divided into three blocks, that is, a first block on which a laser medium is mounted, a second block on which the pump light source is mounted, and a third block on which the wavelength converting device is mounted. A side surface or a bottom surface of only the second block is fixed to the board, the first block is fixed to the other side surface of the second block, and the third block is fixed to a side surface of the first block.
摘要翻译： 为了构成一种光学模块，其包括支撑所述支架的支架和板，其中振荡基本激光的固态激光装置，泵浦所述固态激光装置的泵浦光源以及转换器 由固体激光装置振荡的基本激光的波长安装在安装座上，将安装件分成三块，即安装有激光介质的第一块，第二块，泵浦光 源安装，并且安装波长转换装置的第三块。 仅第二块的侧表面或底表面固定到板，第一块固定到第二块的另一侧表面，并且第三块固定到第一块的侧表面。
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公开(公告)号：US20100309946A1
公开(公告)日：2010-12-09
申请号：US12864694
申请日：2008-03-18
IPC分类号： H01S3/042 , H01S3/0941
CPC分类号： H01S3/025 , H01S3/0092 , H01S3/042 , H01S3/094053 , H01S3/09415 , H01S3/1611 , H01S3/1673
摘要： To constitute an optical module comprising a mount and a board that supports the mount, wherein a solid-state laser device that oscillates fundamental laser light, a pump light source that pumps the solid-state laser device, and a wavelength converting device that converts a wavelength of the fundamental laser light oscillated by the solid-state laser device are mounted on the mount, the mount is divided into three blocks, that is, a first block on which a laser medium is mounted, a second block on which the pump light source is mounted, and a third block on which the wavelength converting device is mounted. A side surface or a bottom surface of only the second block is fixed to the board, the first block is fixed to the other side surface of the second block, and the third block is fixed to a side surface of the first block.
摘要翻译： 为了构成一种光学模块，其包括支撑所述支架的支架和板，其中振荡基本激光的固态激光装置，泵浦所述固态激光装置的泵浦光源以及转换器 由固体激光装置振荡的基本激光的波长安装在安装座上，将安装件分成三块，即安装有激光介质的第一块，第二块，泵浦光 源安装，并且安装波长转换装置的第三块。 仅第二块的侧表面或底表面固定到板，第一块固定到第二块的另一侧表面，并且第三块固定到第一块的侧表面。
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公开(公告)号：US5749760A
公开(公告)日：1998-05-12
申请号：US686402
申请日：1996-07-25
CPC分类号： H01J9/18 , H01J2209/185
摘要： An electron gun assembling apparatus has a cathode driving mechanism (12,13) for moving a cathode (1), a laser displacement gage (14) to measure a height of a surface of the cathode (1) in a non-contact manner at a cathode surface measuring position outside an electron gun assembly (24), an electric micrometer (11) to measure a height of an upper surface of a first electrode (3) in the electron gun assembly (24), and an electric micrometer (8) to measure a height of a lower surface of a second electrode (4) in the electron gun assembly (24).
摘要翻译： 电子枪装配装置具有用于移动阴极（1）的阴极驱动机构（12,13），激光位移计（14），以非接触方式测量阴极（1）的表面的高度 电子枪组件（24）外的阴极表面测量位置，用于测量电子枪组件（24）中第一电极（3）的上表面的高度的电测微计（11）和电测微计（8） ）以测量电子枪组件（24）中的第二电极（4）的下表面的高度。
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公开(公告)号：US06497082B1
公开(公告)日：2002-12-24
申请号：US09524008
申请日：2000-03-13
IPC分类号： E04C254
CPC分类号： B29C70/865 , F16B5/01 , Y10T29/49885 , Y10T29/49945
摘要： A sandwich panel is manufactured-by providing: a first step (a), (b) of attaching another end portion of an insert 1 whose one end portion is made sharp to an inner side of a facing member 2 in which a hole is cut in advance; a second step (c) of pressing the insert 1 into the core member 4 such that the one end portion of the insert 1 force-cuts a core member 4; and a third step (d) of attaching another facing member 2 to a side of the core member 4 opposing the insert-inserting side thereof.
摘要翻译： 通过提供以下方式制造夹芯板：第一步骤（a），（b）将一个端部形成为尖的插入件1的另一个端部附接到其中切割有孔的面对构件2的内侧 提前; 将插入件1压入芯构件4的第二步骤（c），使得插入件1的一端部切割芯构件4; 以及将另一个面对构件2附接到与所述芯构件4的插入插入侧相对的一侧的第三步骤（d）。
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公开(公告)号：US5879840A
公开(公告)日：1999-03-09
申请号：US904185
申请日：1997-08-01
申请人： Hideki Yabe , Kaeko Kitamura , Masao Kouhashi , Masamitsu Okamura , Kei Sasaki
发明人： Hideki Yabe , Kaeko Kitamura , Masao Kouhashi , Masamitsu Okamura , Kei Sasaki
IPC分类号： C23C14/50 , C23C14/54 , G03F1/22 , H01L21/027 , G03F9/00
CPC分类号： G03F1/22 , C23C14/505 , C23C14/545
摘要： A film-forming method and an apparatus for a X-ray mask and a film-forming apparatus which are able to diminish stress unevenness in the X-ray mask to zero when a X-ray absorber is formed on a mask substrate by sputtering a target 3 during rotation of the mask substrate. Firstly, a dummy mask substrate is prepared instead of a mask substrate. A dummy X-ray absorber 6 is formed on this dummy X-ray substrate 5 within a sputtering range. Secondly, a stress distribution is measured at every position along a straight line passing through a center of the dummy X-ray absorber 6 and then a desirable stress distribution range X is selected at such a location so as to have a good linear characteristic in a portion of a compressive stress curve which decreases toward an outer periphery of the dummy X-ray absorber 6 in the stress distribution. A center of the desirable stress distribution range X is selected as a rotation center, the mask substrate is placed within the desirable stress distribution range X, and the X-ray absorber is formed by this film-forming technology.
摘要翻译： 当通过溅射在掩模基板上形成X射线吸收体时，能够将X射线掩模中的应力不均匀性降低到零的X射线掩模和成膜装置的成膜方法和装置 在掩模基板旋转期间的目标3。 首先，准备虚设掩模基板来代替掩模基板。 在该虚拟X射线基板5上，在溅射范围内形成虚拟X射线吸收体6。 其次，在通过虚拟X射线吸收体6的中心的直线的每个位置处测量应力分布，然后在这样的位置选择期望的应力分布范围X，使得在 在应力分布中朝向虚拟X射线吸收体6的外周减小的压缩应力曲线的一部分。 选择期望的应力分布范围X的中心作为旋转中心，将掩模基板置于期望的应力分布范围X内，并且通过该成膜技术形成X射线吸收体。
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