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公开(公告)号：US5749760A
公开(公告)日：1998-05-12
申请号：US686402
申请日：1996-07-25
CPC分类号： H01J9/18 , H01J2209/185
摘要： An electron gun assembling apparatus has a cathode driving mechanism (12,13) for moving a cathode (1), a laser displacement gage (14) to measure a height of a surface of the cathode (1) in a non-contact manner at a cathode surface measuring position outside an electron gun assembly (24), an electric micrometer (11) to measure a height of an upper surface of a first electrode (3) in the electron gun assembly (24), and an electric micrometer (8) to measure a height of a lower surface of a second electrode (4) in the electron gun assembly (24).
摘要翻译： 电子枪装配装置具有用于移动阴极（1）的阴极驱动机构（12,13），激光位移计（14），以非接触方式测量阴极（1）的表面的高度 电子枪组件（24）外的阴极表面测量位置，用于测量电子枪组件（24）中第一电极（3）的上表面的高度的电测微计（11）和电测微计（8） ）以测量电子枪组件（24）中的第二电极（4）的下表面的高度。
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2.发明授权公开(公告)号：US07575692B2
公开(公告)日：2009-08-18
申请号：US10529152
申请日：2004-04-06
申请人： Yasuki Kimura
发明人： Yasuki Kimura
IPC分类号： C23F1/00
摘要： An object to be processed has a chromium-based thin film made of a material containing chromium. The thin film is etched using a resist pattern as a mask. The thin film is etched by the use of a chemical species produced by preparing a dry etching gas containing a halogen-containing gas and an oxygen-containing gas and supplying a plasma excitation power to the dry etching gas to thereby excite plasma. The thin film is etched using, as the plasma excitation power, a power lower than a plasma excitation power at which plasma density jump occurs.
摘要翻译： 待处理的物体具有由含有铬的材料制成的铬基薄膜。 使用抗蚀剂图案作为掩模蚀刻薄膜。 通过使用通过制备含有含卤素气体和含氧气体的干蚀刻气体产生的化学物质来蚀刻薄膜，并向干蚀刻气体供给等离子体激发能量，从而激发等离子体。 作为等离子体激发功率，使用低于发生等离子体密度跳跃的等离子体激发功率的功率来蚀刻薄膜。
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公开(公告)号：US06569578B2
公开(公告)日：2003-05-27
申请号：US09795148
申请日：2001-03-01
申请人： Yuji Nozaki , Yasuki Kimura
发明人： Yuji Nozaki , Yasuki Kimura
IPC分类号： G03F900
CPC分类号： G03F7/40 , G03F1/00 , G03F1/78 , G03F7/325 , Y10S430/143
摘要： A method for forming a photo-mask includes forming a light-shielding layer on a substrate, coating a resist film on the light-shielding layer, exposing the resist film with low dosage, and inclining a resist profile after developing the exposed resist film. Accordingly, an opening dimension of the light-shielding layer can be designed without depending on the location of the region with respect to the formed resist pattern of the photo-mask.
摘要翻译： 形成光掩模的方法包括在基板上形成遮光层，在遮光层上涂覆抗蚀剂膜，以低剂量曝光抗蚀剂膜，并在显影曝光的抗蚀剂膜之后倾斜抗蚀剂轮廓。 因此，可以设计遮光层的开口尺寸而不依赖于相对于光掩模形成的抗蚀剂图案的区域的位置。
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公开(公告)号：US20060102587A1
公开(公告)日：2006-05-18
申请号：US10529152
申请日：2004-04-06
申请人： Yasuki Kimura
发明人： Yasuki Kimura
IPC分类号： C23F1/00
摘要： An object to be processed has a chromium-based thin film made of a material containing chromium. The thin film is etched using a resist pattern as a mask. The thin film is etched by the use of a chemical species produced by preparing a dry etching gas containing a halogen-containing gas and an oxygen-containing gas and supplying a plasma excitation power to the dry etching gas to thereby excite plasma. The thin film is etched using, as the plasma excitation power, a power lower than a plasma excitation power at which plasma density jump occurs.
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公开(公告)号：US07019433B2
公开(公告)日：2006-03-28
申请号：US10798381
申请日：2004-03-12
申请人： Akira Hashimoto , Yasuki Kimura , Satoshi Yamashiro , Yuji Nakahara , Kouki Naka , Hidetoshi Teruyama , Manabu Kobayashi
发明人： Akira Hashimoto , Yasuki Kimura , Satoshi Yamashiro , Yuji Nakahara , Kouki Naka , Hidetoshi Teruyama , Manabu Kobayashi
摘要： An armature of a rotating electric machine has a plurality of first magnetic teeth arranged side by side along a circumferential direction of the rotating electric machine and a plurality of second magnetic teeth joined to the first magnetic teeth. A pair of joint portions is formed at both end surfaces of a yoke portion of each first magnetic tooth, the joint portions formed at the facing end surfaces of the yoke portions of each successive pair of adjacent first magnetic teeth together forming a connecting part, whereas a mating part is formed at an outer end surface of each second magnetic tooth. Each second magnetic tooth is inserted between the adjacent first magnetic teeth along an axial direction of the rotating electric machine with the mating part fitted on the connecting part to interconnect the adjacent first magnetic teeth.
摘要翻译： 旋转电机的电枢具有沿着旋转电机的圆周方向并排布置的多个第一磁齿和与第一磁齿接合的多个第二磁齿。 在每个第一磁齿的轭部的两个端面上形成有一对接合部，每个连续的一对相邻的第一磁性齿的轭部的相对的端面形成的接合部一起形成连接部， 在每个第二磁齿的外端面处形成配合部。 每个第二磁齿沿着旋转电机的轴向方向插入在相邻的第一磁性齿之间，其中配合部分装配在连接部分上以互连相邻的第一磁性齿。
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公开(公告)号：US06879066B2
公开(公告)日：2005-04-12
申请号：US10774467
申请日：2004-02-10
摘要： A linear motor comprises a stator including a stator yoke and a plurality of permanent magnets arranged side by side on the stator yoke along a motor running direction in alternately reversed directions to produce alternating polarities, and a moving part including a plurality of magnetic teeth arranged along the motor running direction and coils wound around the individual magnetic teeth. Cutouts formed in end surfaces of yoke portions of the individual magnetic teeth opposite to their side facing the stator line up to form a groove-shaped channel running through the yoke portions of the successive magnetic teeth, and the multiple magnetic teeth are joined together into a single structure by fitting a connecting bar in the groove-shaped channel.
摘要翻译： 线性电动机包括：定子，其包括定子磁轭和多个永久磁铁，沿着电动机行进方向并排布置在定子磁轭上，以产生交替的极性，以及包括沿着 电机运行方向和线圈缠绕在单个磁齿上。 形成在与定向线相对的各个磁性齿的轭部的端面上形成的切口，以形成穿过连续的磁性齿的轭部的槽状的通道，并且多个磁性齿被连接在一起 通过在槽形通道中安装连接杆来实现单一结构。
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公开(公告)号：US06747376B2
公开(公告)日：2004-06-08
申请号：US10410135
申请日：2003-04-10
IPC分类号： H20K4100
摘要： A linear motor comprises a stator including a stator yoke and a plurality of permanent magnets arranged side by side on the stator yoke along a motor running direction in alternately reversed directions to produce alternating polarities, and a moving part including a plurality of magnetic teeth arranged along the motor running direction and coils wound around the individual magnetic teeth. Cutouts formed in end surfaces of yoke portions of the individual magnetic teeth opposite to their side facing the stator line up to form a groove-shaped channel running through the yoke portions of the successive magnetic teeth, and the multiple magnetic teeth are joined together into a single structure by fitting a connecting bar in the groove-shaped channel.
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公开(公告)号：US20090026021A1
公开(公告)日：2009-01-29
申请号：US12016076
申请日：2008-01-17
申请人： Yasuki Kimura , Naoki Hashiguchi , Satoshi Suzuki
发明人： Yasuki Kimura , Naoki Hashiguchi , Satoshi Suzuki
IPC分类号： B66B1/28
CPC分类号： B66B9/00 , B66B11/008
摘要： An elevator control device for controllably driving multiple traction units includes position sensors and current supplies. Each of the current supplies includes a position controller for generating a speed command for the corresponding traction unit based on input difference between a common position command for the traction units and a feedback signal derived from an output of the pertinent position sensor, a speed controller for generating a current command for the corresponding traction unit based on an input difference between the speed command generated by the position controller and a feedback signal obtained by differentiating the output of the pertinent position sensor, and a current controller for supplying an electric current to the corresponding traction unit based on the current command generated by the speed controller.
摘要翻译： 用于可控地驱动多个牵引单元的电梯控制装置包括位置传感器和电流供应。 每个电流供应包括位置控制器，用于根据用于牵引单元的公共位置命令和从相关位置传感器的输出得到的反馈信号之间的输入差产生对应的牵引单元的速度指令;位置控制器，用于 基于由位置控制器产生的速度指令与通过对相关位置传感器的输出进行微分而获得的反馈信号之间的输入差异，产生对应的牵引单元的电流指令;以及电流控制器，用于向相应的牵引单元提供电流 牵引单元基于由速度控制器产生的当前指令。
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公开(公告)号：US07199492B2
公开(公告)日：2007-04-03
申请号：US10870146
申请日：2004-06-18
申请人： Akira Hashimoto , Yasuki Kimura , Satoshi Yamashiro , Yuji Nakahara , Akira Watarai , Michio Nakamoto
发明人： Akira Hashimoto , Yasuki Kimura , Satoshi Yamashiro , Yuji Nakahara , Akira Watarai , Michio Nakamoto
摘要： An armature of a linear motor includes a plurality of first magnetic teeth and a plurality of second magnetic teeth, each of the magnetic teeth being formed by laminating multiple tooth elements made of electromagnetic steel sheets. The first magnetic teeth are arranged side by side in a linear form while the second magnetic teeth are located one each between the successive first magnetic teeth. Each of the second magnetic teeth interconnects the two adjacent first magnetic teeth located on both sides.
摘要翻译： 线性电动机的电枢包括多个第一磁齿和多个第二磁齿，每个磁齿通过层叠由电磁钢板制成的多个齿元件而形成。 第一磁齿以线性形式并排布置，而第二磁齿位于连续的第一磁齿之间。 每个第二磁齿将位于两侧的两个相邻的第一磁性齿相互连接。
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公开(公告)号：US07592103B2
公开(公告)日：2009-09-22
申请号：US11094306
申请日：2005-03-31
申请人： Yasuki Kimura
发明人： Yasuki Kimura
IPC分类号： G03F9/00
CPC分类号： H01J37/3026 , G03F1/78 , H01J2237/31769 , Y10S430/143
摘要： A writing pattern to be a correcting object is divided by a rough mesh for a Foggy effect correction and a fine mesh for a proximity effect correction, a rate of an area occupied by the pattern to be written for each of the meshes is obtained, a stored energy based on a Foggy effect and a proximity effect in execution of exposure in a state in which a correction for a calculating object mesh is not carried out at all is calculated, an dose in the fine mesh for a proximity effect correction is obtained by a first calculation in such a manner that an influence of the Foggy effect and the proximity effect is reduced and a pattern and a dimension which can disregard the influence of the Foggy effect and the proximity effect are coincident with each other by the stored energy which is calculated, are calculation is carried out in such a manner that the pattern and the dimension which can disregard the influence of the Foggy effect and the proximity effect are coincident with each other with the influence of the Foggy effect and the proximity effect fixed, and the recalculation is repeated until desirable precision in a dimension is reached.
摘要翻译： 作为校正对象的写入图案被用于Foggy效果校正的粗糙网格和用于邻近效应校正的精细网格划分，获得要为每个网格写入的图案所占据的面积的比率， 计算出根据Foggy效应的存储能量和在执行计算对象网格的校正完全不执行的状态下执行曝光的接近效应，用于邻近效应校正的细网格中的剂量通过 以这样的方式进行第一次计算，使得雾效应和邻近效应的影响减小，并且可以忽略雾效应和邻近效应的影响的图案和尺寸彼此一致，存储的能量是 进行计算时，以能够忽视雾效应和邻近效应的影响的图案和尺寸相互一致的方式进行计算， 雾效应和邻近效应的影响被固定，并且重新计算重复直到达到所需尺寸的理想精度。
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