公开(公告)号：US12000737B2

公开(公告)日：2024-06-04

申请号：US17590780

申请日：2022-02-01

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya Kida ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: G01K7/06 ,  G01K7/14 ,  H10N10/00 ,  H10N10/10 ,  H10N10/80 ,  G05D23/22

CPC classification number: G01K7/06 ,  H10N10/00 ,  H10N10/10 ,  H10N10/80 ,  G01K7/14 ,  G05D23/22

Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.

公开(公告)号：US20240178049A1

公开(公告)日：2024-05-30

申请号：US18284928

申请日：2022-02-04

Applicant: NHK Spring Co., Ltd.

Inventor： Naoya Kida ,  Jun Futakutiya ,  Daisuke Fujino ,  Naoya Aikawa ,  Keiko Wada ,  Aya Nakajima

IPC: H01L21/687 ,  H05B3/18 ,  H05B3/30

CPC classification number: H01L21/68785 ,  H05B3/18 ,  H05B3/30 ,  H05B2203/002 ,  H05B2213/07

Abstract: A placement board includes: a main body unit configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. A temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20° C. or more in a state where the medium has been caused to circulate through the flow channel.

公开(公告)号：US20220157579A1

公开(公告)日：2022-05-19

申请号：US17592766

申请日：2022-02-04

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya Kida ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: H01J37/32 ,  C23C16/46 ,  C23C16/458 ,  C23C16/44 ,  C23C14/34 ,  C23C14/50 ,  C23C14/24 ,  H05B3/28 ,  H05B1/02

Abstract: Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.