CLEANING SHEET, CARRYING MEMBER WITH A CLEANING FUNCTION AND METHOD OF CLEANING SUBSTRATE PROCESSING EQUIPMENT
    5.
    发明申请
    CLEANING SHEET, CARRYING MEMBER WITH A CLEANING FUNCTION AND METHOD OF CLEANING SUBSTRATE PROCESSING EQUIPMENT 审中-公开
    用清洁功能携带会员的清洁用纸和清洗基板处理设备的方法

    公开(公告)号:US20140090199A1

    公开(公告)日:2014-04-03

    申请号:US14038836

    申请日:2013-09-27

    Abstract: A cleaning sheet comprising a cleaning layer and a releasable protective film laminated on the cleaning layer, wherein each of the relative intensities of the fragment ions of CH3Si+, C3H9Si+, C5H15Si2O+, C5H15Si3O3+, C7H21Si3O2+, CH3SiO−, CH3SiO2− and Si+ in the cleaning layer, when the protective film is peeled off the cleaning layer, is 0.1 or less according to time-of-flight secondary ion mass spectrometry, relative to C2H3+ in the case of positive ion or O− in the case of negative ion.

    Abstract translation: 一种清洁片,其包括层压在所述清洁层上的清洁层和可释放保护膜,其中所述清洁层中的CH 3 Si +,C 3 H 9 Si +,C 5 H 15 Si 2 O +,C 5 H 15 Si 3 O 3 +,C 7 H 21 Si 3 O 2 +,CH 3 SiO - ,CH 3 SiO 2 - 和Si +的碎片离子的相对强度 当保护膜从清洁层剥离时,根据飞行时间二次离子质谱法,在负离子情况下相对于C2H3 +为0.1或更小,在负离子的情况下为0.1。

    CLEANING SHEET, CARRYING MEMBER WITH A CLEANING FUNCTION AND METHOD OF CLEANING SUBSTRATE PROCESSING EQUIPMENT
    6.
    发明申请
    CLEANING SHEET, CARRYING MEMBER WITH A CLEANING FUNCTION AND METHOD OF CLEANING SUBSTRATE PROCESSING EQUIPMENT 审中-公开
    用清洁功能携带会员的清洁用纸和清洗基板处理设备的方法

    公开(公告)号:US20140090196A1

    公开(公告)日:2014-04-03

    申请号:US14039286

    申请日:2013-09-27

    Abstract: A cleaning sheet comprising a cleaning layer and a releasable protective film laminated on the cleaning layer, wherein each of the relative intensities of the fragment ions Of CH3Si+, C3H9Si+, C5H15Si2O+, C5H15Si3O3+, CH3SiO−, CH3SiO2− and Si+ in the cleaning layer, when the protective film is peeled off the cleaning layer, is 0.1 or less according to time-of-flight secondary ion mass spectrometry, relative to C2H3+ in the case of positive ion or O− in the case of negative ion.

    Abstract translation: 一种清洁片,其包括层压在所述清洁层上的清洁层和可释放保护膜,其中所述清洁层中的CH 3 Si +,C 3 H 9 Si +,C 5 H 15 Si 2 O +,C 5 H 15 Si 3 O 3 +,CH 3 SiO - ,CH 3 SiO 2 - 和Si +的碎片离子的每个相对强度 根据飞行时间二次离子质谱法,保护膜从清洁层剥离,相对于C2H3 +,在负离子的情况下,为0.1以下,在负离子的情况下为O。

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