公开(公告)号：US20180024160A1

公开(公告)日：2018-01-25

申请号：US15547312

申请日：2016-01-27

Applicant: NORTHROP GRUMMAN LITEF GMBH

Inventor： STEFAN KOENIG ,  PETER LEINFELDER

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0054 ,  B81B3/0059 ,  B81B2201/0235 ,  B81B2203/0163 ,  B81B2203/04 ,  B81B2203/051 ,  G01P15/131 ,  G01P2015/0814 ,  G01P2015/0862 ,  G01P2015/0882

Abstract: The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, au electrostatic three acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).