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公开(公告)号：US5271026A
公开(公告)日：1993-12-14
申请号：US809180
申请日：1991-12-18
IPC分类号： H01S3/097 , H01S3/0971 , H01S3/0977 , H01S3/00
CPC分类号： H01S3/09775 , H01S3/097 , H01S3/0971 , H01S3/09713 , H01S3/09716 , H01S3/0977
摘要： In a discharge excitation gas laser device such as an excimer laser device provided with laser medium gas and a pair of electrodes opposite to each other in a gas-tight vessel, the laser medium gas is discharge-excited while inverting the polarity of a DC pulse voltage applied to the pair of electrodes opposite to each other for every pulse. In this way distribution of atoms and ions constituting the laser medium gas in the discharge region including the neighborhood of the main electrodes is made uniform even at a high repetition rate oscillation. Thus it is possible to realize a discharge excitation gas laser device having a good stability of DC pulse discharge without increasing unnecessarily the flow speed of the laser medium gas and no lowering in the pulse energy owing to a high efficiency operation.
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公开(公告)号：US5050174A
公开(公告)日：1991-09-17
申请号：US480152
申请日：1990-02-14
CPC分类号： G03F7/70858 , H01S3/0811 , H01S3/106
摘要： A laser device includes an optical resonator comprising a laser medium and two totally reflecting mirrors disposed on respective sides of the laser medium. The laser device also has a wavelength selection element disposed between one of the totally reflecting mirrors and the laser medium. A partially reflecting mirror is disposed between the wavelength selection element and the laser medium. Any distortion and deterioration of the wavelength selection device are greatly reduced.
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3.发明授权Control of output energy of a pulsed light source comprising a gas discharge laser 失效控制包括气体放电激光器的脉冲光源的输出能量
公开(公告)号：US5134273A
公开(公告)日：1992-07-28
申请号：US583940
申请日：1990-09-18
申请人： Koichi Wani , Mutsumi Mimasu , Tadaaki Miki , Yasuhiro Shimada
发明人： Koichi Wani , Mutsumi Mimasu , Tadaaki Miki , Yasuhiro Shimada
CPC分类号： H01S3/134 , B23K26/702 , H01S3/131
摘要： A pulsed light source comprising a laser for emitting light in pulse form in response to an electric power from a power supply which is changeable in accordance with a control signal from an external circuit and a photodetector responsive to the light from the laser so as to produce an electric signal corresponding to the intensity of the reception light. The output signal of the photodetector is supplied to a comparator so as to compare the electric signal therefrom with a reference signal to output a signal proportional to the difference between the electric signal and the reference signal. In response to the output signal of the comparator, a control circuit produces the control signal to be supplied to the power supply by adding the output signal of the comparator to a predetermined signal to control the electric power outputted from the power supply to the laser.
摘要翻译： 一种脉冲光源，包括用于响应来自电源的电力发射脉冲形式的激光，所述电源可根据来自外部电路的控制信号而变化，以及响应于来自激光的光的光检测器，以产生 对应于接收光的强度的电信号。 光电检测器的输出信号被提供给比较器，以将其电信号与参考信号进行比较，以输出与电信号和参考信号之差成比例的信号。 响应于比较器的输出信号，控制电路通过将比较器的输出信号与预定信号相加来产生提供给电源的控制信号，以控制从激光器的电源输出的电力。
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公开(公告)号：US4991178A
公开(公告)日：1991-02-05
申请号：US499206
申请日：1990-03-19
CPC分类号： H01S3/137 , H01S3/1062 , H01S3/225
摘要： A laser apparatus includes an optical resonator having a laser medium and generating a laser light. A wavelength selection element selects a given wavelength of the laser light. The selected wavelength resides within a gain bandwidth of the laser medium. A sealed container houses the wavelength selection element. The sealed container may be filled with a gas. A density of the gas within the sealed container may be changed to vary the selected wavelength.
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