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公开(公告)号：US06323616B1
公开(公告)日：2001-11-27
申请号：US09564300
申请日：2000-05-03
IPC分类号： B25J918
CPC分类号： H01L21/67265 , B25J9/1692 , G05B2219/37275 , G05B2219/39024 , G05B2219/39048 , G05B2219/39056 , G05B2219/40623 , G05B2219/45031 , H01L21/67766
摘要： A wafer handling apparatus having input and output robotic systems directed by a programmed controller. Each system has components including a robot, a twist and rotate, and a carrier and automated carrier rail. The input system is for removing wafers from their wafer pod, placing them in the carrier and transporting them via the rail to a wafer processing area. The output system performs the reverse operation, taking wafers from a carrier following processing and placing them in a pod. Each robot includes a plurality of interconnected, articulated cantilevered arms. The last one of the arms has a wand on one end and a laser emitter detector on the other end, and operates in cooperation with the controller to provide location detection of system components. The controller also includes circuitry for sensing contact of the wand with an object by measuring the increased robot motor torque occurring upon contact. The controller is pre-programmed with approximate physical dimensions of the system components and their relative positions. The controller is additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data. The process of precision teaching/calibration begins by placing a pod calibration fixture on a pedestal. The controller then directs the input robot to sense the fixture position, which gives the controller precise data relating to the position of a pod on the pedestal. The robot then senses the position of the twist and rotate components. The process begins by sensing the height of two arms of the twist and rotate, and the controller adjusts the arm heights until they are level. The controller then directs the robot to sense the R and &thgr; dimensions of the twist and rotate, and these precise dimensions are saved in the controller.
摘要翻译： 具有由编程控制器引导的输入和输出机器人系统的晶片处理装置。 每个系统具有包括机器人，扭转和旋转以及载体和自动化载体轨道的部件。 输入系统用于从晶片盒中移除晶片，将它们放置在载体中并通过导轨传送到晶片处理区域。 输出系统执行反向操作，从处理后的载体中取出晶片并将其放入容器中。 每个机器人包括多个互连的铰接悬臂。 最后一个臂在一端具有一个魔杖，另一端具有激光发射器检测器，并与控制器协同工作，以提供系统组件的位置检测。 控制器还包括用于通过测量接触时发生的增加的机器人马达扭矩来感测魔杖与物体的接触的电路。 控制器预编程有系统组件的近似物理尺寸及其相对位置。 控制器还被编程为自动执行精密校准/教学程序以收集更精确的位置数据。 精确教学/校准的过程开始于将荚式校准夹具放置在基座上。 然后，控制器引导输入机器人感测夹具位置，这为控制器提供与基座上的荚的位置有关的精确数据。 机器人然后感测扭转的位置并旋转部件。 该过程通过感测扭转和旋转的两个臂的高度开始，并且控制器调整臂高度直到它们平坦。 然后，控制器引导机器人感测扭转的R和θ尺寸并旋转，并将这些精确的尺寸保存在控制器中。
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公开(公告)号：US07325579B2
公开(公告)日：2008-02-05
申请号：US10937209
申请日：2004-09-09
申请人： Nathan H. Harding
发明人： Nathan H. Harding
IPC分类号： B65B1/04
CPC分类号： A01G25/145
摘要： A watering can includes a pump and a snorkel which can be used to draw water out of a vessel and into the watering can. The snorkel device is put into a vessel from which water is to be evacuated and the pump is cranked in order to start the flow of water from the vessel and into the reservoir of the watering can. In some embodiments, the pump is a peristaltic pump which includes a mode where the pump is fully disengaged and fluid may flow freely from the snorkel, through the pump, and into the reservoir of the watering can. This allows the operator to use the pump to start a siphoning process which evacuates the remainder of the water from the vessel without further pumping. When not being used to draw water out of a vessel, the watering can may be used in the ordinary manner.
摘要翻译： 一个浇水罐可以包括一个泵和一个可以用来从容器中抽出水进入浇水罐的通气管。 将通气管装置放入要从其中排出水的容器中，并且泵起动以便使水从容器流出并进入浇水罐的储存器。 在一些实施例中，泵是蠕动泵，其包括泵完全脱开的模式，并且流体可以从通气管，通过泵自由流动并进入浇水罐的储存器。 这允许操作者使用泵来启动虹吸过程，从而将剩余的水从容器排出而不进一步泵送。 当不用于从容器中抽出水时，浇水罐可以以普通的方式使用。
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公开(公告)号：US07883546B2
公开(公告)日：2011-02-08
申请号：US11716135
申请日：2007-03-09
IPC分类号： A61F2/74
CPC分类号： A61F2/68 , A61F2002/608 , A61F2002/701 , A61F2002/704 , A61F2002/708 , A61F2002/741 , A61F2002/745 , A61F2002/748 , A61F2002/7625 , A61F2002/7635 , A61H1/024 , A61H3/00 , A61H3/008 , A61H2201/1215 , A61H2201/1238 , A61H2201/1409 , A61H2201/1623 , A61H2201/1642 , A61H2201/165 , A61H2201/1676
摘要： A power generating leg, configurable to be coupled to a person's lower limb, comprising a thigh link, a shank link, a knee mechanism, a torque generator, and a power unit. The knee mechanism is connected to said thigh link and said shank link, and configured to allow flexion and extension movements of said thigh link and said shank link relative to each other. The torque generator is configured to generate torque between said shank link and said thigh link. The power unit is coupled to said torque generator, and configured to cause said torque generator to generate torque. When said power unit is in a power regeneration mode, said power unit causes said torque generator to generate a torque that opposes the angular velocity of said thigh link and said shank link relative to each other and said power unit converts a portion of the power associated with the product of said torque and said angular velocity of said shank link and thigh link relative to each other into electrical power to be stored in a storage device.
摘要翻译： 可配置为联接到人的下肢的发电腿，包括大腿连杆，柄连杆，膝盖机构，扭矩发生器和动力单元。 膝盖机构连接到所述大腿连杆和所述柄连杆，并且构造成允许所述大腿连杆和所述柄连杆相对于彼此的弯曲和伸展运动。 扭矩发生器构造成在所述柄连杆和所述大腿连杆之间产生扭矩。 动力单元联接到所述扭矩发生器，并且构造成使所述扭矩发生器产生扭矩。 当所述动力单元处于动力再生模式时，所述动力单元使所述扭矩发生器产生与所述大腿连杆和所述柄连杆相对于彼此的角速度相对的转矩，并且所述动力单元将一部分相关联的动力 其中所述扭矩和所述柄连杆和大腿连杆的所述角速度的乘积相对于彼此成为要被存储在存储装置中的电力的乘积。
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公开(公告)号：US06929210B2
公开(公告)日：2005-08-16
申请号：US10665977
申请日：2003-09-19
申请人： Reuben Sandler , Jon Burns , Alexander Charles White , Bjorn Monteen , Jesse Thomas , Nathan H. Harding
发明人： Reuben Sandler , Jon Burns , Alexander Charles White , Bjorn Monteen , Jesse Thomas , Nathan H. Harding
摘要： A follower apparatus mounted on a track running parallel to an axis of rotation of a spool. The apparatus has a base with a roller mounted thereon and having an axis of rotation parallel to the rotational axis of the spool, the roller providing support and guidance to the material being wound. A pulley is rotatably mounted to receive material from the roller and redirect the direction of material traveled. Light beams and detection apparatus are positioned to detect material excursions to pre-determined off center portions of the roller. The follower positioning apparatus responds to signals detecting the material by repositioning the follower to place the material back on to a center zone of the roller.
摘要翻译： 一个跟随装置，安装在平行于阀芯旋转轴线的轨道上。 该装置具有安装在其上并具有平行于卷轴的旋转轴线的旋转轴线的基座，该滚子为被卷绕的材料提供支撑和引导。 滑轮被可旋转地安装以从辊接收材料并且重定向行进的材料的方向。 定位光束和检测装置以检测到辊的预定偏心部分的材料偏移。 跟随器定位装置通过重新定位跟随器来回应检测材料的信号，以将材料放回到辊的中心区域。
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公开(公告)号：US08057410B2
公开(公告)日：2011-11-15
申请号：US11404719
申请日：2006-04-13
IPC分类号： A61H3/00
CPC分类号： A61H3/00 , A61B5/1038 , A61B5/4528 , A61F5/0102 , A61H1/0237 , A61H1/024 , A61H3/008 , A61H2201/1238 , A61H2201/1614 , A61H2201/1616 , A61H2201/1621 , A61H2201/1623 , A61H2201/1628 , A61H2201/163 , A61H2201/1635 , A61H2201/164 , A61H2201/1642 , A61H2201/165 , A61H2201/1676 , A61H2201/5061 , B25J9/0006
摘要： The lower extremity exoskeleton comprises two leg supports connectable to person's lower limbs and configured to rest on the ground during their stance phase. Each leg support comprises a thigh link and a shank link; a knee joint configured to allow flexion and extension between the shank link and the thigh link. The lower extremity exoskeleton further comprises an exoskeleton trunk connectable to the person'supper body. The exoskeleton trunk is connectable to the thigh links of the leg supports allowing for the flexion and extension between the leg supports and the exoskeleton trunk. Two torque generators are coupled to each of the knee joints. A power unit, capable of providing power, is coupled to the torque generators. In operation when a leg support is in a stance phase and climbing a slope or stairs, the power unit injects power into the respective torque generator thereby extending the respective knee angle. When a leg support is in stance phase and not climbing a slope or stairs, the power unit does not inject any power to the respective torque generator, but without dissipating any stored power in said power unit, it forces the torque generator to resist flexion of the respective knee joint. When a leg support is in a swing phase, the power unit does not inject any power to the respective torque generator, but without dissipating any stored power in said power unit, it forces the torque generator to minimize its resistance to knee flexion and extension.
摘要翻译： 下肢外骨骼包括可连接到人的下肢并配置为在其姿态阶段休息在地面上的两个腿部支撑。 每个腿支撑件包括大腿连杆和小腿连杆; 膝关节，其构造成允许柄连杆和大腿连杆之间的屈曲和伸展。 下肢外骨骼还包括可连接到人的身体的外骨骼躯干。 外骨骼躯干可连接到腿部支撑的大腿连接部，允许脚部支撑件和外骨骼躯干之间的弯曲和伸展。 两个扭矩发生器联接到每个膝关节。 能够提供动力的动力单元联接到扭矩发生器。 在腿部支撑处于阶梯状态并爬坡或爬坡的情况下，动力单元将动力喷射到相应的扭矩发生器中，从而延伸相应的拐角。 当腿部支架处于阶梯状态而不爬坡或斜坡时，动力单元不向相应的扭矩发生器注入任何动力，但是在不消耗所述动力单元中的任何存储动力的情况下，迫使扭矩发生器抵抗屈曲 相应的膝关节。 当腿部支撑件处于摆动阶段时，动力单元不向相应的扭矩发生器注入任何动力，但是在不消耗所述动力单元中的任何存储的功率的情况下，迫使扭矩发生器将其抵抗膝盖的屈曲和伸展最小化。
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公开(公告)号：US07947004B2
公开(公告)日：2011-05-24
申请号：US11335392
申请日：2006-01-18
IPC分类号： A61F5/00
CPC分类号： A61B5/1038 , A61B5/4528 , A61B5/6829 , A61B2562/0219 , A61F5/0102 , B25J9/0006
摘要： A lower extremity exoskeleton, configurable to be coupled to a person, comprises two leg supports configurable to be coupled to the person's lower limbs and configured to rest on the ground during their stance phases. Each leg support comprises a thigh link, a shank link, and two knee joints. Each knee joint is configured to allow flexion and extension between the respective shank link and the respective thigh link. The lower extremity exoskeleton also comprises an exoskeleton trunk configurable to be coupled to the person's upper body. The exoskeleton trunk is rotatably connectable to the thigh links of the leg supports allowing for the flexion and extension between the leg supports and the exoskeleton trunk. In this exemplary embodiment, the energy required for flexion and extension movement between the shank link and the respective thigh link of a leg support over a cyclic knee motion is provided by the person.
摘要翻译： 可配置为耦合到人的下肢外骨骼包括可配置为联接到人的下肢并被配置为在其姿态阶段期间搁置在地面上的两个腿部支撑件。 每个腿部支撑件包括大腿连杆，小腿连杆和两个膝关节。 每个膝关节被构造成允许在相应的小腿连杆和相应的大腿连杆之间弯曲和伸展。 下肢外骨骼还包括可配置成与人的上身联接的外骨骼躯干。 外骨骼躯干可旋转地连接到腿部支撑件的大腿连接部，允许脚部支撑件和外骨骼躯干之间的弯曲和伸展。 在该示例性实施例中，由腿部支撑件和腿部支撑件的相应大腿连接件之间的弯曲和伸展运动所需的能量在循环膝盖运动上提供。
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公开(公告)号：US06304051B1
公开(公告)日：2001-10-16
申请号：US09592314
申请日：2000-06-13
IPC分类号： B25J918
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Briefly, a preferred embodiment of the present invention includes a wafer carrier buffer for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer has a sliding carrier first input apparatus for taking a carrier from outside the buffer through a buffer input door and into the buffer interior. A buffer controller is included for directing robotic apparatus to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for delivery of wafers to processing. The robotic apparatus also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need of calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.
摘要翻译： 简而言之，本发明的优选实施例包括晶片载体缓冲器，用于存储多个载体，所述载体包含等待在相邻的晶片处理系统中进行处理的晶片，或等待从处理后的缓冲器中取出。 缓冲器具有滑动载体第一输入装置，用于通过缓冲器输入门将缓冲器外部的载体从缓冲器中取出并进入缓冲器内部。 包括一个缓冲控制器，用于引导机器人装置从输入装置中取出载体，并将其放置在多个载体存储位置中的所选择的一个，并从载体存储位置到第一输出，以将晶片传送到处理。 机器人装置还将空载体输送到用于从处理区域接收晶片的第二输入装置，以及用于将具有经处理的晶片的载体输送到第二滑动输出装置，以通过缓冲器输出门从缓冲器移除。 控制器被编程为引导所有载波存储位置和输入和输出位置的自动校准。 机器人装置包括用于检测由机器人在载体存放位置放置的校准夹具上的凸缘的位置的传感器。 凸缘精确地定位在固定装置上，以对应于每个载体上的类似凸缘，其用于与机器人装置上的用于移动载体的工具接合。 优选地通过引导机器人装置将校准夹具放置在需要校准的位置，然后用传感器装置感测夹具法兰的精确位置来进行校准。 然后，控制器计算将载波准确放置在该位置所需的坐标。 对于每个载波存储位置和输入和输出位置重复该过程。
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