公开(公告)号：US5929723A

公开(公告)日：1999-07-27

申请号：US836437

申请日：1997-05-07

申请人： Noritoshi Kimura ,  Masahiro Nakano ,  Michiyuki Nakazawa ,  Katsuo Sato

发明人： Noritoshi Kimura ,  Masahiro Nakano ,  Michiyuki Nakazawa ,  Katsuo Sato

IPC分类号： H03H3/08 ,  H03H9/145 ,  H03H9/64

CPC分类号： H03H3/08

摘要： In the electrode of a surface acoustic wave apparatus, the element concentration of copper in the aluminum alloy film is higher in the neighbors of grain boundary than the concentration within the crystal grain, and segregates to the neighbors of crystal grain boundary. In the electrode of this surface acoustic wave apparatus, the concentration of copper existing in the form of copper element, rather than in the form of intermetallic compound of copper and aluminum precipitated to the crystal grain boundary, is higher in the crystal grain boundary than the concentration within the crystal grain, and is in the segregation state. A ratio of a copper concentration in the neighbors of grain boundary to a copper concentration within the crystal grain in an aluminum alloy film forming an electrode of a surface acoustic wave apparatus is greater than 1.6. It is preferable that an electrode formed on a surface of the piezoelectric substrate is made of an aluminum alloy film doped with a copper in a range from 0.5 wt % to 2 wt %.

摘要翻译： PCT No.PCT / JP96 / 02623 Sec。 371日期1997年5月7日 102（e）日期1997年5月7日PCT提交1996年9月13日PCT公布。 公开号WO97 / 11526 日期1997年3月27日在表面声波装置的电极中，铝合金膜中的铜元素浓度在晶界的相邻位置比晶粒内的浓度高，并且分离成晶界的邻近 。 在该声表面波装置的电极中，以铜元素形式存在的铜的浓度，而不是沉淀在晶界的铜和铝的金属间化合物的形式，在晶界上比在 并且处于分离状态。 在形成声表面波装置的电极的铝合金膜中，晶界相邻的铜浓度与晶粒内的铜浓度的比例大于1.6。 形成在压电基板的表面上的电极优选由掺杂有0.5重量％〜2重量％的铜的铝合金膜构成。

公开(公告)号：US06407486B1

公开(公告)日：2002-06-18

申请号：US09696281

申请日：2000-10-26

申请人： Noritoshi Kimura ,  Masahiro Nakano ,  Katsuo Sato

发明人： Noritoshi Kimura ,  Masahiro Nakano ,  Katsuo Sato

IPC分类号： H03H925

CPC分类号： H03H3/08 ,  H03H9/02543 ,  H03H9/02559 ,  H03H9/145

摘要： An object of the invention is to provide a SAW device having an electrode film on a lithium tantalate substrate having a cut angle approximate to 36 degree rotated Y cut, the electrode film including an aluminum single crystal film having improved power durability. The SAW device has interdigital electrodes on a substrate. The substrate is constructed of a 38 to 44 degree rotated Y cut lithium tantalate single crystal, each interdigital electrode includes a titanium film and an aluminum film formed thereon, and the aluminum film is a single crystal film which develops only spots on selected area electron diffraction analysis.

摘要翻译： 本发明的目的是提供一种具有在钽酸锂基片上的电极膜的SAW器件，其具有大约36度旋转Y切割的切割角度，该电极膜包括具有改善的功率耐久性的铝单晶膜.SMA器件具有 叉指电极在基底上。 基板由38至44度旋转的Y切割钽酸锂单晶构成，每个叉指电极包括钛膜和形成在其上的铝膜，并且铝膜是仅在所选择的面积电子衍射上形成斑点的单晶膜 分析。

公开(公告)号：US06316860B1

公开(公告)日：2001-11-13

申请号：US09317199

申请日：1999-05-24

申请人： Noritoshi Kimura ,  Masahiro Nakano ,  Katsuo Sato

发明人： Noritoshi Kimura ,  Masahiro Nakano ,  Katsuo Sato

IPC分类号： H01L4108

CPC分类号： H03H9/02559

摘要： The surface acoustic wave device of the invention comprises a piezoelectric substrate made up of 64° rotated Y-cut lithium niobate (64LN) or 36° rotated Y-cut lithium tantalate (36LT) and an interdigital electrode formed thereon. The interdigital electrode comprises a titanium buffer metal film and an aluminum film formed thereon. On the 64LN substrate, both the titanium buffer metal film and the aluminum film are converted into a single-crystal film that manifests itself in a spot form alone upon selected-area electron diffraction. By forming the aluminum film on the 36LT substrate with the titanium buffer metal film located therebetween, it is possible to obtain a high-orientation, polycrystalline aluminum film oriented in the (111) direction. The aluminum film is made up of a single-crystal film or a high-orientation polycrystalline film oriented in the (111) direction, whereby migration of aluminum atoms is inhibited, resulting in a power-durability improvement.

摘要翻译： 本发明的声表面波装置包括由64°旋转的Y形铌酸锂（64LN）或36°旋转的Y形切割的钽酸锂（36LT）构成的压电基板和形成在其上的叉指电极。 叉指电极包括钛缓冲金属膜和在其上形成的铝膜。 在64LN衬底上，钛缓冲金属膜和铝膜都被转换为单晶膜，其在选择的面积电子衍射下单独以斑点形式表现出来。 通过在其上设置有钛缓冲金属膜的36LT基板上形成铝膜，可以得到沿（111）方向取向的高取向多晶铝膜。 铝膜由沿（111）方向取向的单晶膜或高取向多晶膜构成，因此铝原子的迁移被抑制，从而提高了电力耐久性。

公开(公告)号：US06255759B1

公开(公告)日：2001-07-03

申请号：US09258816

申请日：1999-02-26

申请人： Masao Takeuchi ,  Noritoshi Kimura

发明人： Masao Takeuchi ,  Noritoshi Kimura

IPC分类号： H03H964

CPC分类号： H03H9/6423 ,  H03H9/14505

摘要： A method for manufacturing a surface acoustic wave device including forming a single-phase unidirectional transducer based on calculating frequency responses of the positive and negative conversion losses along a surface acoustic wave propagation direction by coupling-of-modes equations, where A+(x) and A−(x) are the mode amplitudes of the surface acoustic waves propagated respectively in the positive direction (forward direction) and negative direction (backward direction) of the x axis and where boundary conditions of the initial and final analytical points are respectively expressed by A+(0)=0 and A−(L)=0. The method includes setting A+(0)=0 (or A−(L)=0) as a boundary condition, setting A−(0) (or A+(L)) to an arbitrary value as an initial value of A−(0) (or A+(L)), and calculating coupling-mode-equations while repeatedly altering A−(0) (or A+(L)) until A−(L)=0 (or until A+(0)=0).

摘要翻译： 一种用于制造表面声波装置的方法，包括：通过耦合模式方程式，基于计算沿着表面声波传播方向的正和负转换损耗的频率响应，形成单相单向换能器，其中A +（x）和 A-（x）是分别在x轴的正方向（正方向）和负方向（向后方向）上传播的表面声波的模振幅，并且初始和最终分析点的边界条件分别由 A +（0）= 0和A-（L）= 0。 该方法包括将A +（0）= 0（或A-（L）= 0）设置为边界条件，将A-（0）（或A +（L））设置为任意值作为初始值A- （或A +（L）），并且在重复改变A-（0）（或A +（L））的同时计算耦合模式方程，直到A-（L）= 0（或直到A +（0）= 0） 。

公开(公告)号：US20130134837A1

公开(公告)日：2013-05-30

申请号：US13814738

申请日：2011-06-13

申请人： Takefumi Saito ,  Noritoshi Kimura

发明人： Takefumi Saito ,  Noritoshi Kimura

IPC分类号： H01L41/047

CPC分类号： H01L41/047 ,  B81B2201/0271 ,  B81C1/00476 ,  H03H3/0072 ,  H03H9/2436 ,  H03H2009/02503

摘要： In order to provide complete removal of a sacrificial layer on a bottom surface of a disk during an etching process, without leaving residue, a disk type resonator of an electrostatic drive type includes a disk type resonator structure; a pair of drive electrodes at a predetermined gap from an outer peripheral portion of the disk type resonator structure and disposed at both sides of the resonator structure so as to face each other; a unit for applying an alternating current bias voltage with a same phase to the drive electrodes; and a detection unit that obtains an output corresponding to an electrostatic capacitance between the disk type resonator structure and the drive electrodes. The disk type resonator structure has a through hole in the center of the disk and is vibrated in a wineglass mode.

摘要翻译： 为了在蚀刻工艺期间在盘的底表面上完全去除牺牲层而不留下残留物，静电驱动型的盘式谐振器包括盘型谐振器结构; 一对驱动电极，与盘式谐振器结构的外周部隔开规定的间隔配置在谐振器结构的两侧，以彼此面对; 用于向驱动电极施加具有相同相位的交流偏置电压的单元; 以及检测单元，其获得与盘型谐振器结构和驱动电极之间的静电电容相对应的输出。 盘型谐振器结构在盘的中心具有通孔，并以葡萄酒杯模式振动。

公开(公告)号：US08907549B2

公开(公告)日：2014-12-09

申请号：US13603429

申请日：2012-09-05

申请人： Takefumi Saito ,  Noritoshi Kimura

发明人： Takefumi Saito ,  Noritoshi Kimura

IPC分类号： H03H9/21 ,  H03H3/02 ,  H03H9/02 ,  H03H9/24

CPC分类号： H03H3/02 ,  H03H9/21 ,  H03H2009/02503 ,  H03H2009/241 ,  Y10T29/42

摘要： A vibrator includes a base substrate, a tuning fork type vibrating body, a first vibrating body, a second vibrating body, a first extraction electrode at the one vibration arm portion, a second extraction electrode at the other vibration arm portion, and an input/output port at the base portion. The input/output port is configured to input/output an electric signal to/from each of the first extraction electrode, the second extraction electrode, and the excitation electrodes of the vibration arm portions. The tuning fork type vibrating body is configured to generate a flexural vibration in reverse phase to the contour vibration of the first and second vibrating bodies, so as to absorb the contour vibration of the first and second vibrating bodies.

摘要翻译： 振动器包括基底基板，音叉型振动体，第一振动体，第二振动体，一个振动臂部分的第一引出电极，另一振动臂部分处的第二引出电极，以及输入/ 输出端口。 输入/输出端口被配置为向/从每个第一引出电极，第二引出电极和振动臂部分的激励电极输入/输出电信号。 音叉式振动体被配置为产生与第一和第二振动体的轮廓振动相反的弯曲振动，以便吸收第一和第二振动体的轮廓振动。

公开(公告)号：US20130134829A1

公开(公告)日：2013-05-30

申请号：US13814736

申请日：2011-06-13

申请人： Takefumi Saito ,  Noritoshi Kimura

发明人： Takefumi Saito ,  Noritoshi Kimura

IPC分类号： H02N1/00

CPC分类号： H02N1/008 ,  H03H3/0072 ,  H03H9/02338 ,  H03H9/2436

摘要： A variation in a resonance frequency due to variation in dimension accuracy of the supporting structure of the vibrating unit is reduced, and energy loss leaked from the supporting structure is reduced as much as possible. The electrostatic drive disk-type MEMS vibrator includes: a disk type vibrating unit; drive electrodes disposed at a prescribed gap g from the peripheral portion of the disk type vibrating unit and disposed at both sides of the vibrating unit so as to face each other; a unit for applying alternating current bias voltages of the same phase to the drive electrodes; and detection units that obtain outputs corresponding to the capacitance between the disk type vibrating unit and the drive electrodes. The disk type vibrating unit is supported by a pillar-shaped supporting structure disposed upright at the center of the disk and a transverse cross-sectional shape of the supporting structure is non-circular.

摘要翻译： 由于振动单元的支撑结构的尺寸精度的变化导致的共振频率的变化减小，并且从支撑结构泄漏的能量损失尽可能地减小。 静电驱动盘型MEMS振子包括：盘式振动单元; 驱动电极与盘式振动单元的周边部分配置成规定的间隙g，并设置在振动单元的两侧，以便彼此面对; 用于将相同相位的交流偏压施加到驱动电极的单元; 以及检测单元，其获得与盘型振动单元和驱动电极之间的电容相对应的输出。 圆盘型振动单元由直立设置在圆盘中心的柱状支撑结构支撑，支撑结构的横截面形状为非圆形。