公开(公告)号：US08968045B2

公开(公告)日：2015-03-03

申请号：US14064520

申请日：2013-10-28

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Saito

IPC: H01J9/42 ,  H01J1/13

CPC classification number: H01J1/13

Abstract: A cathode selection method includes measuring, by using a cathode having an electron emission surface which is a flat surface and a emission area which is limited, a total emission emitted from the cathode; calculating, using a measured total emission value, work function by a Richardson Dash Man's formula; and determining whether or not the cathode has the work function equal to or under an acceptable value.

Abstract translation: 阴极选择方法包括通过使用具有平坦表面的电子发射表面和限制的发射区域的阴极来测量从阴极发射的总发射; 计算，使用测量的总排放值，工作功能由理查森·达什曼公式; 以及确定阴极是否具有等于或低于可接受值的功函数。

公开(公告)号：US09455123B2

公开(公告)日：2016-09-27

申请号：US14199110

申请日：2014-03-06

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Saito

IPC: H01J3/14 ,  H01J37/317 ,  H01J37/06 ,  H01J37/304

CPC classification number: H01J37/3177 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/06308 ,  H01J2237/0653 ,  H01J2237/24535 ,  H01J2237/24542 ,  H01J2237/30477

Abstract: A current regulation method of multiple beams includes acquiring a current density distribution; selecting at least one beam whose current density is equal to or more than a threshold; measuring a current value of the at least one beam respectively by varying a voltage applied to the Wehnelt electrode and acquiring a correlation between the voltage and the current value; moving a stage to a position where the at least one beam is allowed to enter a current detector each time writing of a stripe region is completed; measuring, after moving the stage, a current value of the at least one beam while beams of the multiple beams whose current density is less than the threshold are blocked; operating a target voltage value applied to the Wehnelt electrode to cause the current value measured to be a target current value; and applying the target voltage value to the Wehnelt electrode.

Abstract translation: 多光束的电流调节方法包括获取电流密度分布; 选择电流密度等于或大于阈值的至少一个光束; 通过改变施加到Wehnelt电极的电压并获得电压和电流值之间的相关性，分别测量至少一个光束的电流值; 每次完成条纹区域的写入时，将舞台移动到允许至少一个光束进入电流检测器的位置; 在移动所述台后，测量所述至少一个光束的电流值，同时阻止所述多个光束的电流密度小于所述阈值的光束; 操作施加到所述Wehnelt电极的目标电压值，以将所测量的电流值作为目标电流值; 并将目标电压值施加到Wehnelt电极。

公开(公告)号：US09412551B2

公开(公告)日：2016-08-09

申请号：US14721380

申请日：2015-05-26

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Saito ,  Ryoei Kobayashi

IPC: H01J9/42 ,  H01J1/13 ,  H01J9/02 ,  H01J37/06 ,  H01J37/317

CPC classification number: H01J9/022 ,  H01J3/022 ,  H01J9/025 ,  H01J37/06 ,  H01J37/3174 ,  H01J2237/061 ,  H01J2237/06308

Abstract: A cathode obtaining method includes producing a plurality of cathodes each including an electron emission member and a cover part, provided with a gap, which covers a side surface of the electron emission member, measuring an outer dimension of the upper surface of the electron emission member, for each of a plurality of cathodes, measuring an outer dimension of the gap at the same surface as the upper surface of the electron emission member, for each of a plurality of cathodes, calculating an area ratio by dividing the area of the gap, for each of a plurality of cathodes, obtaining an upper limit of the area ratio corresponding to a desired brightness by using a correlation between brightness and the area ratio, and selecting a cathode having the area ratio less than or equal to the upper limit from a plurality of cathodes that have been produced.

Abstract translation: 一种阴极获得方法包括制造多个阴极，每个阴极包括电子发射部件和覆盖部分，盖子部分覆盖电子发射部件的侧表面，间隙测量电子发射部件的上表面的外部尺寸 对于多个阴极中的每一个，对于多个阴极中的每一个，测量与电子发射构件的上表面相同的表面处的间隙的外部尺寸，通过划分间隙的面积来计算面积比， 对于多个阴极中的每一个，通过使用亮度和面积比之间的相关性来获得对应于期望亮度的面积比的上限，并且从a中选择具有小于或等于上限的面积比​​的阴极 已经生产的多个阴极。