公开(公告)号：US20140340854A1

公开(公告)日：2014-11-20

申请号：US14278085

申请日：2014-05-15

申请人： Yoshikazu Akiyama ,  Akira Shimofuku ,  Atsushi Takeuchi ,  Osamu Machida

发明人： Yoshikazu Akiyama ,  Akira Shimofuku ,  Atsushi Takeuchi ,  Osamu Machida

IPC分类号： H05K1/18 ,  H05K3/46

CPC分类号： B05D1/322 ,  B05D1/02 ,  B05D3/007 ,  H01L21/02623 ,  H01L27/11568 ,  H01L27/20 ,  H01L28/40 ,  H01L41/0973 ,  H01L41/113 ,  H01L41/1132 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319 ,  H01L41/332 ,  H05K1/16 ,  H05K3/1241

摘要： An electronic device includes a substrate; and a plurality of thin-film elements formed on the substrate. Further, the thin-film element includes a thin-film section having a function selected from a group including piezoelectric effect, inverse piezoelectric effect, charge storage, semiconductivity, and conductivity, and the plurality of thin-film elements includes the thin-film sections having two or more different functions.

摘要翻译： 电子装置包括：基板; 以及形成在所述基板上的多个薄膜元件。 此外，薄膜元件包括具有选自包括压电效应，反压电效应，电荷存储，半导电性和导电性的组的功能的薄膜部分，并且多个薄膜元件包括薄膜部分 具有两个或多个不同的功能。

公开(公告)号：US20130176364A1

公开(公告)日：2013-07-11

申请号：US13737128

申请日：2013-01-09

申请人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

发明人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

IPC分类号： B41J2/045 ,  H01L41/08

CPC分类号： B41J2/045 ,  B41J2/14233 ,  H01L41/0805 ,  H01L41/318 ,  H01L41/331

摘要： Disclosed is an electromechanical transducer element including a first electrode disposed on a substrate; an electromechanical transducer film disposed on a first portion of the first electrode; and a second electrode disposed on a second portion of the electromechanical transducer film, wherein an actuator portion formed by laminating the substrate, the first electrode, the electromechanical transducer film, and the second electrode has a stiffness such that, in a cross section of the actuator portion, the stiffness gradually increases from an end portion of the actuator portion to a center portion of the actuator portion.

摘要翻译： 公开了一种机电换能器元件，包括设置在基板上的第一电极; 设置在所述第一电极的第一部分上的机电换能器膜; 以及设置在所述机电换能器膜的第二部分上的第二电极，其中通过层叠所述基板，所述第一电极，所述机电换能器膜和所述第二电极而形成的致动器部分具有刚度，使得在所述 致动器部分的刚度从致动器部分的端部逐渐增加到致动器部分的中心部分。

公开(公告)号：US20110205307A1

公开(公告)日：2011-08-25

申请号：US12968630

申请日：2010-12-15

申请人： Keiji UEDA ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

发明人： Keiji UEDA ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

IPC分类号： B41J2/045 ,  H01L41/18 ,  H01L41/187

CPC分类号： H01L41/0805 ,  B41J2/14233 ,  B41J2202/03 ,  C23C18/06 ,  C23C18/1216 ,  C23C18/1254 ,  H01L41/1876 ,  H01L41/318

摘要： A sol-gel liquid for use in forming an individualized electromechanical conversion film of an electromechanical conversion element by inkjet methods, including a lead zirconate titanate (PZT) or the PZT and other metal complex oxides; and an organic solvent having properties surrounded by A, B, C, D, E and F in triangular composition diagram of FIG. 3, and having a viscosity of from 3 to 13 mPa·s, a surface tension of 30±5 mN/m and a dehydration rate of from 70 to 80% relative to pure water.

摘要翻译： 一种用于通过喷墨法形成机电转换元件的单独机电转换膜的溶胶凝胶液体，包括锆钛酸铅（PZT）或PZT等金属络合物氧化物; 和在图3的三角形组成图中具有被A，B，C，D，E和F包围的性质的有机溶剂。 3，粘度为3〜13mPa·s，表面张力为30±5mN / m，脱水率为70〜80％。

公开(公告)号：US08690297B2

公开(公告)日：2014-04-08

申请号：US12968630

申请日：2010-12-15

申请人： Keiji Ueda ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

发明人： Keiji Ueda ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

IPC分类号： B41J2/045 ,  H01L41/18 ,  H01L41/187

CPC分类号： H01L41/0805 ,  B41J2/14233 ,  B41J2202/03 ,  C23C18/06 ,  C23C18/1216 ,  C23C18/1254 ,  H01L41/1876 ,  H01L41/318

摘要： A sol-gel liquid for use in forming an individualized electromechanical conversion film of an electromechanical conversion element by inkjet methods, including a lead zirconate titanate (PZT) or the PZT and other metal complex oxides; and an organic solvent having properties surrounded by A, B, C, D, E and F in triangular composition diagram of FIG. 3, and having a viscosity of from 3 to 13 mPa·s, a surface tension of 30±5 mN/m and a dehydration rate of from 70 to 80% relative to pure water.

摘要翻译： 一种用于通过喷墨法形成机电转换元件的单独机电转换膜的溶胶凝胶液体，包括锆钛酸铅（PZT）或PZT等金属络合物氧化物; 和在图3的三角形组成图中具有被A，B，C，D，E和F包围的性质的有机溶剂。 3，粘度为3〜13mPa·s，表面张力为30±5mN / m，脱水率为70〜80％。

公开(公告)号：US08960866B2

公开(公告)日：2015-02-24

申请号：US13737128

申请日：2013-01-09

申请人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

发明人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

IPC分类号： B41J2/045 ,  H01L41/08 ,  H01L41/318 ,  H01L41/331 ,  B41J2/14

CPC分类号： B41J2/045 ,  B41J2/14233 ,  H01L41/0805 ,  H01L41/318 ,  H01L41/331

摘要： Disclosed is an electromechanical transducer element including a first electrode disposed on a substrate; an electromechanical transducer film disposed on a first portion of the first electrode; and a second electrode disposed on a second portion of the electromechanical transducer film, wherein an actuator portion formed by laminating the substrate, the first electrode, the electromechanical transducer film, and the second electrode has a stiffness such that, in a cross section of the actuator portion, the stiffness gradually increases from an end portion of the actuator portion to a center portion of the actuator portion.

摘要翻译： 公开了一种机电换能器元件，包括设置在基板上的第一电极; 设置在所述第一电极的第一部分上的机电换能器膜; 以及设置在所述机电换能器膜的第二部分上的第二电极，其中通过层叠所述基板，所述第一电极，所述机电换能器膜和所述第二电极而形成的致动器部分具有刚度，使得在所述 致动器部分的刚度从致动器部分的端部逐渐增加到致动器部分的中心部分。

公开(公告)号：US08646180B2

公开(公告)日：2014-02-11

申请号：US13265192

申请日：2010-05-27

申请人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

发明人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

IPC分类号： B21D53/76 ,  B23P17/00 ,  B41J2/015

CPC分类号： H01L41/0973 ,  H01L41/318

摘要： A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film, wherein the drying includes a heat-treatment at 120° C., the decomposition includes thermal decomposition performed at 500° C., and the crystallization includes heat treatment for crystallization at 700° C.; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

摘要翻译： 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤，其中所述干燥包括在120℃下的热处理，所述分解包括在500℃下进行的热分解 ，结晶包括在700℃下结晶的热处理。 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

公开(公告)号：US08425026B2

公开(公告)日：2013-04-23

申请号：US13004203

申请日：2011-01-11

申请人： Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

发明人： Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

IPC分类号： B41J2/04 ,  B41J2/17

CPC分类号： B41J2/14233 ,  H01L41/0805 ,  H01L41/0926 ,  H01L41/318

摘要： A method for manufacturing an electromechanical transducer film including a lower electrode and plural layers of a sol-gel solution film formed on the lower electrode by an inkjet method, the method including the steps of a) modifying a surface of the lower electrode, b) forming a first sol-gel solution film on the surface of the lower electrode by ejecting droplets of a sol-gel solution to the surface of the lower electrode, and c) forming a second sol-gel solution film on the first sol-gel solution film by ejecting droplets of the sol-gel solution to a surface of the first sol-gel solution film. Adjacent dots formed on the surface of the lower electrode by the droplets ejected in step b) overlap each other. Adjacent dots formed on the surface of the first sol-gel solution film by the droplets ejected in step c) do not overlap each other.

摘要翻译： 一种制造机电换能器薄膜的方法，所述机电换能器薄膜包括下电极和通过喷墨方法形成在下电极上的多层溶胶 - 凝胶溶液膜，所述方法包括以下步骤：a）修改下电极的表面，b） 通过将溶胶 - 凝胶溶液的液滴喷射到下电极的表面，在下电极的表面上形成第一溶胶 - 凝胶溶液膜，以及c）在第一溶胶 - 凝胶溶液上形成第二溶胶 - 凝胶溶液膜 通过将溶胶 - 凝胶溶液的液滴喷射到第一溶胶 - 凝胶溶液膜的表面上。 在步骤b）中喷射的液滴在下电极的表面上形成的相邻点彼此重叠。 在步骤c）中喷射的液滴在第一溶胶 - 凝胶溶液膜的表面上形成的相邻点彼此不重叠。

公开(公告)号：US20120038712A1

公开(公告)日：2012-02-16

申请号：US13265192

申请日：2010-05-27

申请人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

发明人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

IPC分类号： B41J2/04 ,  H02K15/00

CPC分类号： H01L41/0973 ,  H01L41/318

摘要： A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

摘要翻译： 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤; 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

公开(公告)号：US09834853B2

公开(公告)日：2017-12-05

申请号：US15382952

申请日：2016-12-19

申请人： Yoshikazu Akiyama ,  Akira Shimofuku ,  Keiji Ueda

发明人： Yoshikazu Akiyama ,  Akira Shimofuku ,  Keiji Ueda

IPC分类号： H01L21/00 ,  C30B1/02 ,  C30B29/32 ,  C23C14/24 ,  C23C14/34 ,  B41J2/16 ,  H01L41/187 ,  H01L41/39 ,  H01L41/113 ,  H01L41/29 ,  H01L41/318

CPC分类号： C30B1/023 ,  B41J2/161 ,  B41J2/162 ,  B41J2/1645 ,  B41J2/1646 ,  C23C14/24 ,  C23C14/34 ,  C23C18/1216 ,  C30B29/32 ,  H01L41/0973 ,  H01L41/113 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/318 ,  H01L41/39

摘要： A PZT precursor solution is used for forming a PZT film by a sol-gel method. The PZT precursor solution includes a solvent; a component that forms a crystal of PZT by crystallization, the component being dissolved in the solvent; and an element that inhibits crystal growth of PZT, the element being dissolved in the solvent.

公开(公告)号：US20120026249A1

公开(公告)日：2012-02-02

申请号：US13194230

申请日：2011-07-29

申请人： Takakazu KIHIRA ,  Yoshikazu Akiyama ,  Osamu Machida ,  Masahiro Yagi ,  Ryoh Tashiro

发明人： Takakazu KIHIRA ,  Yoshikazu Akiyama ,  Osamu Machida ,  Masahiro Yagi ,  Ryoh Tashiro

IPC分类号： B41J2/045 ,  B05D5/12 ,  B32B38/14 ,  B05C5/00

CPC分类号： B41J11/002 ,  B41J3/407 ,  B41J11/0015

摘要： A thin-film forming apparatus for forming a thin film on a substrate by using an ink-jet method includes an ink applying unit that applies an ink drop for thin-film formation to a predetermined area on a surface of the substrate; at least one laser light source for heating the ink drop thereby forming a thin film; and a laser-light irradiating unit that irradiates, with a laser light from the laser light source, a first spot positioned on a back side of the predetermined area of the substrate to which the ink drop has been applied.

摘要翻译： 通过使用喷墨方法在基板上形成薄膜的薄膜形成装置包括将涂膜用于薄膜形成的墨滴施加到基板表面上的规定区域; 至少一个用于加热墨滴的激光源，从而形成薄膜; 以及激光照射单元，其用来自激光光源的激光照射位于已经施加有墨滴的基板的预定区域的背面上的第一光点。