公开(公告)号：US07345761B1

公开(公告)日：2008-03-18

申请号：US10945166

申请日：2004-09-20

申请人： Paul Aoyagi ,  Philip D. Flanner, III ,  Leonid Poslavsky

发明人： Paul Aoyagi ,  Philip D. Flanner, III ,  Leonid Poslavsky

IPC分类号： G01J4/00

CPC分类号： G01N21/8422 ,  G01B11/0625 ,  G01N21/211

摘要： A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The mathematical model is solved using at least one of a modified T matrix algorithm and a Z matrix algorithm. The theoretical properties of the reflected beam of light are compared to the actual properties of the reflected beam of light to yield a cost function. The estimated properties of the layered media are iteratively adjusted and the mathematical model is iteratively solved until the cost function is within a desired tolerance. The estimated properties of the layered media are reported as the actual properties of the layered media.

摘要翻译： 确定分层介质实际属性的方法。 入射光束被引向分层介质，使得入射光束作为反射光束从分层介质反射。 测量反射光束的实际特性，估算分层介质的性质。 分层介质的数学模型通过分层介质的估计性质来解决，以产生反射光束的理论特性。 使用修改的T矩阵算法和Z矩阵算法中的至少一个来解决数学模型。 将反射光束的理论性质与反射光束的实际特性进行比较，以产生成本函数。 迭代地调整分层介质的估计性质，并且迭代地求解数学模型，直到成本函数在期望的公差内。 分层介质的估计性质被报告为分层介质的实际性质。

公开(公告)号：US07190453B1

公开(公告)日：2007-03-13

申请号：US10945167

申请日：2004-09-20

申请人： Paul Aoyagi ,  Philip D. Flanner, III ,  Leonid Poslavsky

发明人： Paul Aoyagi ,  Philip D. Flanner, III ,  Leonid Poslavsky

IPC分类号： G01J4/00 ,  G01B11/28

CPC分类号： G01N21/211 ,  G01B11/0641

摘要： A method of determining the actual properties of a film stack. An incident beam of light is directed towards the film stack, such that the incident beam of light is reflected from the film stack as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the film stack are estimated. A mathematical model of the film stack is solved with the estimated properties of the film stack to yield theoretical properties of the reflected beam of light. The theoretical properties of the reflected beam of light are compared to the actual properties of the reflected beam of light to yield a cost function. The estimated properties of the film stack are iteratively adjusted and the mathematical model is iteratively solved until the cost function is within a desired tolerance. The estimated properties of the film stack are reported as the actual properties of the film stack. A method based on analytical derivatives, and not numerically computed derivatives, of solutions to Maxwell's equations that are at least partially expressible as complex exponential matrices is used to iteratively adjust the estimated properties of the film stack.

摘要翻译： 确定薄膜叠层的实际特性的方法。 入射光束被引向胶片堆叠，使得入射光束作为反射光束从胶片堆叠反射。 测量反射光束的实际性质，并估计膜堆的性质。 利用膜堆的估计性质来解决膜堆的数学模型，以产生反射光束的理论性质。 将反射光束的理论性质与反射光束的实际特性进行比较，以产生成本函数。 迭代地调整膜堆的估计性质，并且迭代地求解数学模型，直到成本函数在期望的公差内。 膜叠层的估计性质被报告为薄膜叠层的实际特性。 使用基于分析导数而不是数值计算的导数，将至少部分地表示为复指数矩阵的麦克斯韦方程的解的方法迭代地调整膜堆的估计性质。

公开(公告)号：US09127927B2

公开(公告)日：2015-09-08

申请号：US13712734

申请日：2012-12-12

申请人： Jonathan Iloreta ,  Paul Aoyagi ,  Hanyou Chu ,  Jeffrey Chard ,  Peilin Jiang ,  Mikhail Sushchik ,  Leonid Poslavsky ,  Philip D. Flanner, III

发明人： Jonathan Iloreta ,  Paul Aoyagi ,  Hanyou Chu ,  Jeffrey Chard ,  Peilin Jiang ,  Mikhail Sushchik ,  Leonid Poslavsky ,  Philip D. Flanner, III

IPC分类号： G06F17/16 ,  G01B11/30 ,  G06F7/00 ,  G06F17/40 ,  G06F19/00 ,  G01B11/00 ,  H01L21/66 ,  G01B11/24 ,  G03F7/20

CPC分类号： G01B11/00 ,  G01B11/24 ,  G01B11/30 ,  G01B2210/56 ,  G03F7/70625 ,  G06F7/00 ,  G06F17/16 ,  G06F17/40 ,  G06F19/00 ,  H01L22/12

摘要： Provided are optimized scatterometry techniques for evaluating a diffracting structure. In one embodiment, a method includes computing a finite-difference derivative of a field matrix with respect to first parameters (including a geometric parameter of the diffracting structure), computing an analytic derivative of the Jones matrix with respect to the field matrix, computing a derivative of the Jones matrix with respect to the first parameters, and computing a finite-difference derivative of the Jones matrix with respect to second parameters (including a non-geometric parameter). In one embodiment, a method includes generating a transfer matrix having Taylor Series approximations for elements, and decomposing the field matrix into two or more smaller matrices based on symmetry between the incident light and the diffracting structure.

摘要翻译： 提供了用于评估衍射结构的优化散射测量技术。 在一个实施例中，一种方法包括相对于第一参数（包括衍射结构的几何参数）计算场矩阵的有限差分导数，计算相对于场矩阵的Jones矩阵的分析导数，计算 相对于第一参数的Jones矩阵的导数，以及相对于第二参数（包括非几何参数）计算Jones矩阵的有限差分导数。 在一个实施例中，一种方法包括生成对于元素具有泰勒级数逼近的传递矩阵，并且基于入射光和衍射结构之间的对称性将场矩阵分解为两个或更多个较小的矩阵。

公开(公告)号：US07362686B1

公开(公告)日：2008-04-22

申请号：US11000771

申请日：2004-12-01

申请人： Paul Aoyagi ,  Philip D. Flanner, III ,  Leonid Poslavsky

发明人： Paul Aoyagi ,  Philip D. Flanner, III ,  Leonid Poslavsky

IPC分类号： G11B7/00 ,  B32B9/00

CPC分类号： G01B11/06

摘要： A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The mathematical model is solved using a diagonal T matrix algorithm. The theoretical properties of the reflected beam of light are compared to the actual properties of the reflected beam of light to yield a cost function. The estimated properties of the layered media are iteratively adjusted and the mathematical model is iteratively solved until the cost function is within a desired tolerance. The estimated properties of the layered media are reported as the actual properties of the layered media.

摘要翻译： 确定分层介质实际属性的方法。 入射光束被引向分层介质，使得入射光束作为反射光束从分层介质反射。 测量反射光束的实际特性，估算分层介质的性质。 分层介质的数学模型通过分层介质的估计性质来解决，以产生反射光束的理论特性。 使用对角T矩阵算法求解数学模型。 将反射光束的理论性质与反射光束的实际特性进行比较，以产生成本函数。 迭代地调整分层介质的估计性质，并且迭代地求解数学模型，直到成本函数在期望的公差内。 分层介质的估计性质被报告为分层介质的实际性质。

公开(公告)号：US5581350A

公开(公告)日：1996-12-03

申请号：US471997

申请日：1995-06-06

申请人： Xing Chen ,  Philip D. Flanner, III ,  Kiron B. Malwankar ,  Jennming Chen

发明人： Xing Chen ,  Philip D. Flanner, III ,  Kiron B. Malwankar ,  Jennming Chen

IPC分类号： G01N21/21 ,  G01J4/00

CPC分类号： G01N21/211 ,  G01N21/274 ,  G01N2021/213

摘要： A method for calibrating an ellipsometer, and an ellipsometer including a processor programmed to control the analyzer, polarizer, and other ellipsometer components, and to process the data measured by the ellipsometer to perform the calibration method automatically. Where the ellipsometer's polarizer rotates and the analyzer remains fixed during measurement, the method determines coarse approximations of values A.sub.0 and P.sub.0, and then processes reflectivity data obtained at two or more analyzer angles to determine refined approximations of the values A.sub.0 and P.sub.0, where P.sub.0 is the angle of the polarizer's optical axis at an initial time, and A.sub.0 is the offset of the actual orientation angle of the analyzer from a nominal analyzer angle. Preferably the ellipsometer is a spectroscopic ellipsometer, the reflectivity data determine a tan.psi. spectrum and a cos.DELTA. spectrum for each of the analyzer angles, and the coarse approximations of A.sub.0 and P.sub.0 are refined by processing the reflectivity data by performing regression on A.sub.0 and P.sub.0 until the differences among the tan.psi. and cos.DELTA. spectra for several analyzer angles are minimized. Where the ellipsometer's analyzer rotates and the polarizer remains fixed during measurement, the method coarsely determines values A'.sub.0 and P'.sub.0, and then processes reflectivity data obtained at two or more polarizer angles to determine refined approximations of the values A'.sub.0 and P'.sub.0, where P'.sub.0 is the angle of the analyzer's optical axis at an initial time, and A'.sub.0 is the offset of the actual orientation angle of the polarizer from a nominal polarizer angle.

摘要翻译： 用于校准椭偏仪的方法以及椭圆计，其包括被编程为控制分析仪，偏振器和其它椭偏仪组件的处理器，并且处理由椭偏仪测量的数据以自动执行校准方法。 在测量期间，椭偏仪偏振器旋转并且分析仪保持固定，该方法确定值A0和P0的粗近似值，然后处理在两个或更多分析器角度获得的反射率数据，以确定值A0和P0的精确近似，其中P0为 偏振器的光轴在初始时的角度，A0是分析仪的实际取向角与标称分析仪角度的偏移。 优选地，椭偏仪是分光椭偏仪，反射率数据确定每个分析器角度的tan psi光谱和cosDDTA光谱，并且通过在A0和P0上进行回归处理反射率数据来改善A0和P0的粗略近似 直到几个分析仪角度的tan psi和cos DELTA光谱之间的差异最小化。 在椭偏仪的分析仪旋转和偏振器在测量期间保持固定的情况下，该方法粗略地确定值A'0和P'0，然后处理在两个或多个偏振器角度处获得的反射率数据，以确定值A'0和P的精确近似 '0，其中P'0是初始时分析仪的光轴的角度，A'0是偏振器与标称偏振器角度的实际定向角的偏移。