公开(公告)号：US20090039280A1

公开(公告)日：2009-02-12

申请号：US12181199

申请日：2008-07-28

申请人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

发明人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC分类号： H01J3/26 ,  H01F7/06

CPC分类号： H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

摘要： A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

摘要翻译： 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US20090026384A1

公开(公告)日：2009-01-29

申请号：US12181171

申请日：2008-07-28

申请人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

发明人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC分类号： H01J3/18 ,  H01J3/20

CPC分类号： H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

摘要翻译： 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US20100200748A1

公开(公告)日：2010-08-12

申请号：US12701463

申请日：2010-02-05

申请人： Pavel ADAMEC ,  Helmut BANZHOF ,  Ivo LISKA

发明人： Pavel ADAMEC ,  Helmut BANZHOF ,  Ivo LISKA

IPC分类号： G01N23/22

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2446

摘要： It is provided a charged particle beam device for inspecting a specimen, comprising a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; and a detector device comprising one or more charged particle detectors adapted to detect a secondary charged particle beam generated by the primary charged particle beam at the specimen and passing through the objective lens device, the secondary charged particle beam comprising a first group of secondary charged particles starting from the specimen with high starting angles and a second group of secondary charged particles starting from the specimen with low starting angles; wherein at least one of the charged particle detectors is adapted to detect depending on the starting angles one group of the first and the second groups of secondary charged particles.

摘要翻译： 提供了一种用于检查样本的带电粒子束装置，包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 以及检测器装置，其包括一个或多个带电粒子检测器，其适于检测在所述样本处由所述初级带电粒子束产生的并通过所述物镜装置的次级带电粒子束，所述次级带电粒子束包括第一组次级带电粒子 从具有较高起始角度的样品开始，第二组二次带电粒子从起始角低的样品开始; 其中所述带电粒子检测器中的至少一个适于根据起始角度检测一组第一和第二组次级带电粒子。

公开(公告)号：US20110084219A1

公开(公告)日：2011-04-14

申请号：US12888978

申请日：2010-09-23

申请人： Pavel ADAMEC ,  Ivo LISKA ,  Gennadij GLUCHMAN ,  Milan SNABL

发明人： Pavel ADAMEC ,  Ivo LISKA ,  Gennadij GLUCHMAN ,  Milan SNABL

IPC分类号： G21K5/00

CPC分类号： H01J37/06 ,  H01J2237/022 ,  H01J2237/06316 ,  H01J2237/06341

摘要： A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.

摘要翻译： 提供了一种通过离子刺激解吸预处理超高真空带电粒子枪室的方法。 该方法包括产生用于提供等离子体离子源的等离子体，以及向枪室中的至少一个表面施加负电位，其中负电位适于将离子通量从等离子体离子源提取到至少一个表面 用于通过撞击在至少一个表面上的离子通量从至少一个表面解吸污染颗粒。