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12 条记录 (耗时 0.031 秒)

    Method for Concurrently Employing Differing Materials to Form a Layer on a Substrate
    6.
    发明申请
    Method for Concurrently Employing Differing Materials to Form a Layer on a Substrate 审中-公开
    同时采用不同材料在基体上形成层的方法

    公开(公告)号：US20090011139A1

    公开(公告)日：2009-01-08

    申请号：US12044063

    申请日：2008-03-07

    申请人： Sidlgata V. Sreenivasan ,  Van N. Truskett

    发明人： Sidlgata V. Sreenivasan ,  Van N. Truskett

    IPC分类号： B05D3/12 ,  B29C71/04

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G06Q30/0601

    摘要： The present invention is directed to a method of forming a layer on a substrate, comprising forming a plurality of flowable regions on the substrate, with a first subset of the plurality of flowable regions comprising a first composition and a second subset of the plurality of flowable regions including a second composition differing from the first composition. A surface of the first and second subsets is provided with a desired shape and/or each of the areas of the substrate covered by the flowable regions may be provided with a desired shape. Thereafter, the desired shaped is recorded by solidifying the first and second subsets of the plurality of flowable regions.

    摘要翻译： 本发明涉及在衬底上形成层的方法，包括在衬底上形成多个可流动区域，多个可流动区域的第一子集包括第一组合物和多个可流动区域的第二子集 区域包括不同于第一组合物的第二组合物。 第一和第二子集的表面设置有期望的形状，并且/或由可流动区域覆盖的基底的每个区域可以设置有期望的形状。 此后，通过固化多个可流动区域的第一和第二子集来记录期望的形状。

    Method for fast filling of templates for imprint lithography using on template dispense
    8.
    发明授权
    Method for fast filling of templates for imprint lithography using on template dispense 有权
    使用模板分配快速填充压印光刻模板的方法

    公开(公告)号：US07811505B2

    公开(公告)日：2010-10-12

    申请号：US11101140

    申请日：2005-04-07

    申请人： Ian M. McMackin ,  Pankaj B. Lad ,  Van N. Truskett

    发明人： Ian M. McMackin ,  Pankaj B. Lad ,  Van N. Truskett

    IPC分类号： B28B3/00 ,  B28B17/00 ,  H01L25/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/887

    摘要： A method of depositing material upon a substrate features filling recesses of a substrate with liquid and removing material present on the substrate, outside of the recesses using fluid, i.e., apply a vacuum of a jet of fluid. To that end, one method of the present invention includes depositing a measure of liquid upon a surface of a substrate having a recess formed therein to ingress into a volume of the recess with a portion of the liquid. A quantity of the liquid is disposed upon regions of the surface proximate to the recess. Thereafter, the quantity of liquid is removed while maintaining the portion within the volume. In this manner, the portion may be transferred onto an additional substrate. More specifically, the portion may be placed in contact with a layer of flowable material and cross-linking therewith by exposing the liquid and the flowable material to actinic radiation.

    摘要翻译： 在衬底上沉积材料的方法特征在于，用液体填充衬底的凹槽，并且使用流体在凹槽外部除去存在于衬底上的材料，即施加流体射流的真空。 为此，本发明的一种方法包括在其中形成有凹部的基材的表面上沉积液体的量，以一部分液体进入凹部的体积。 液体的数量被设置在靠近凹部的表面的区域上。 此后，在将该部分保持在体积内的同时除去液体的量。 以这种方式，该部分可以被转移到另外的基底上。 更具体地说，该部分可以与一层可流动的材料接触并与之交联，通过将液体和可流动材料暴露于光化辐射。

    Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer
    9.
    发明授权
    Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer 有权
    降低可聚合层与使用含氟层的基板之间的粘附性的方法

    公开(公告)号：US07452574B2

    公开(公告)日：2008-11-18

    申请号：US10375817

    申请日：2003-02-27

    申请人： Van N. Truskett ,  Christopher J. Mackay ,  B. Jin Choi

    发明人： Van N. Truskett ,  Christopher J. Mackay ,  B. Jin Choi

    IPC分类号： B05D3/02

    CPC分类号： B82Y10/00 ,  B05D5/083 ,  B81C99/008 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0755 ,  G03F7/11 ,  G03F7/165

    摘要： The present invention provides a method to reduce adhesion between a polymerizable layer and a substrate surface that selectively comes into contact with the polymerizable layer. The method features disposing a coating upon the surface from a composition having a perfluoro silane containing molecule. The perfluoro silane molecule is connected to bonding regions on the surface forming covalent bonding groups, as well as contact regions. The contact regions include fluorinated chains of molecules. The covalent bonding groups are positioned between the surface and the contact regions. The perfluoro silane containing molecule may be applied to the surface as a monomolecular layer from a di-functional perfluoro silane molecule. Exemplary molecules that may be employed as the perfluoro silane containing molecule includes molecules sold under the trade-names FLUOROSYL™ FSD 2500 and FLUOROSYL™ FSD 4500.

    摘要翻译： 本发明提供一种降低可聚合层与选择性地与可聚合层接触的基材表面之间粘合的方法。 该方法的特征是从具有全氟硅烷分子的组合物在表面上设置涂层。 全氟硅烷分子与形成共价键合基团的表面上的结合区以及接触区连接。 接触区域包括分子的氟化链。 共价键合基团位于表面和接触区域之间。 含全氟硅烷的分子可以作为单官能全氟硅烷分子的单分子层施加到表面。 可用作全氟硅烷分子的示例性分子包括以商品名FLUOROSYL TM FSD 2500和FLUOROSYL TM FSD 4500出售的分子。

    System for controlling a volume of material on a mold
    10.
    发明授权
    System for controlling a volume of material on a mold 有权
    用于控制模具上的材料体积的系统

    公开(公告)号：US07281919B2

    公开(公告)日：2007-10-16

    申请号：US11101139

    申请日：2005-04-07

    申请人： Steven C. Shackleton ,  Ian M. McMackin ,  Pankaj B. Lad ,  Van N. Truskett

    发明人： Steven C. Shackleton ,  Ian M. McMackin ,  Pankaj B. Lad ,  Van N. Truskett

    IPC分类号： B29C31/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/887

    摘要： A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.

    摘要翻译： 一种用于控制模具上的液体体积的系统，其特征在于，具有限定体积的主体，所述体积具有形成在所述主体中并且定位成靠近所述模具的孔。 泵系统与主体流体连通，并且孔和泵系统被建立以产生在模具和体积之间移动的流体流。 以这种方式，除去一定量的流体，同时保留在模具上是流体的期望部分以进行压印光刻工艺。