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    Removable pellicle for immersion lithography
    1.
    发明申请
    Removable pellicle for immersion lithography 有权
    浸没光刻用可拆卸防护薄膜

    公开(公告)号：US20070064215A1

    公开(公告)日：2007-03-22

    申请号：US10596647

    申请日：2004-12-22

    申请人： Peter Dirksen ,  Robert Morton ,  Peter Zandbergen ,  David Van Steelwinckel ,  Yuri Aksenov ,  Jeroen Lammers ,  Johannes Van Wingerden ,  Laurent Marinier

    发明人： Peter Dirksen ,  Robert Morton ,  Peter Zandbergen ,  David Van Steelwinckel ,  Yuri Aksenov ,  Jeroen Lammers ,  Johannes Van Wingerden ,  Laurent Marinier

    IPC分类号： G03B27/32

    CPC分类号： G03F7/70341 ,  G03F7/70983

    摘要： A method of irradiating to pattern a photosensitive layer such as a resist (L2) immersed in a fluid (L3), involves applying a removable transparent layer (L4, L5), projecting the radiation onto the resist through the immersion fluid and through the transparent layer, such that imperfections in the fluid are out of focus as projected on the surface, and subsequently removing the transparent layer. The transparent layer can help distance such imperfections from the focus of the radiation on the surface and so can reduce or eliminate shadowing. Hence the irradiation can be more complete, and defects reduced. It can be particularly effective for imperfections in the form of small bubbles or particles in the immersion fluid especially at the fluid/surface interface for example. The radiation can be for any purpose including inspection, processing, patterning and so on. The removal of the transparent layer can be combined with a step of developing the resist layer.

    摘要翻译： 一种照射方法来照射浸入流体（L 3）中的抗蚀剂（L 2）等感光层，包括涂敷可移除的透明层（L 4，L 5），通过浸渍流体将辐射投射到抗蚀剂上 并且通过透明层，使得流体中的缺陷如投影在表面上而失焦，并随后去除透明层。 透明层可以帮助将这种缺陷从辐射的焦点远离在表面上，因此可以减少或消除阴影。 因此，照射可以更完整，并且缺陷减少。 对于浸入液体中的小气泡或颗粒形式的缺陷，特别是在流体/表面界面处的缺陷可能特别有效。 辐射可以用于任何目的，包括检查，加工，图案化等。 可以将透明层的去除与显影抗蚀剂层的步骤组合。

    Electronic device diagnostic methods and systems
    3.
    发明申请
    Electronic device diagnostic methods and systems 有权
    电子设备诊断方法和系统

    公开(公告)号：US20050278147A1

    公开(公告)日：2005-12-15

    申请号：US10857826

    申请日：2004-06-01

    申请人： Robert Morton ,  Harold Levesque

    发明人： Robert Morton ,  Harold Levesque

    IPC分类号： G01R31/3187 ,  G06F11/22 ,  G06F7/00

    CPC分类号： G06F11/2273

    摘要： Diagnostic methods and systems for electronic devices are disclosed. Separate dedicated diagnostic software code and operating code are respectively executed in a diagnostic mode and an operating mode of an electronic device. A determination may be made as to whether the electronic device is to be operated in the diagnostic mode or the operating mode when the electronic device is started, for example. A transition to the diagnostic mode from the operating mode may also be made in response to errors detected by online diagnostic tests performed in the operating mode. Results of diagnostic tests are preferably stored in a non-volatile memory for subsequent access, independent of the operating software code.

    摘要翻译： 公开了用于电子设备的诊断方法和系统。 独立的专用诊断软件代码和操作代码分别在电子设备的诊断模式和操作模式下执行。 例如，可以确定电子设备是否在电子设备启动时在诊断模式或操作模式下操作。 响应于在操作模式下执行的在线诊断测试检测到的错误，也可以从操作模式转换到诊断模式。 诊断测试的结果优选地存储在非易失性存储器中用于随后的访问，而与操作软件代码无关。

    LASER OPTICAL FIBER STORAGE
    7.
    发明申请
    LASER OPTICAL FIBER STORAGE 有权
    激光光纤存储

    公开(公告)号：US20130129297A1

    公开(公告)日：2013-05-23

    申请号：US13577781

    申请日：2011-08-10

    申请人： Allen D. Seftel ,  Andrew Robinson ,  Robert Morton ,  Christopher Floury ,  Ronald George Litke, JR. ,  Spencer William Shore

    发明人： Allen D. Seftel ,  Andrew Robinson ,  Robert Morton ,  Christopher Floury ,  Ronald George Litke, JR. ,  Spencer William Shore

    IPC分类号： G02B6/44

    CPC分类号： G02B6/444 ,  A61B18/22 ,  A61B50/30 ,  A61B90/57 ,  A61B2018/2205 ,  A61B2090/049 ,  A61N2005/063

    摘要： A laser optical fiber storage device (10,100) for temporarily storing a free end (12a) of an elongated flexible laser optical fiber (12). A storage housing (14,114) with an open end (116) has an elongated flexible tube (28,128) disposed therein to receive the elongated flexible laser optical fiber so as to prevent laser light from escaping the storage housing. A restrictor (32, 117a, 117b) within the storage housing reduces the inner diameter of the elongated flexible tube. Further, a laser optical fiber storage device (40,100) for temporarily storing a free end (12a) of an elongated flexible laser optical fiber (12) is provided with a clamp (42,123). The storage housing (41,114) has an open end (41a, 116) and an elongated flexible tube (28,128) disposed within the storage housing to receive the elongated flexible laser optical fiber so as to prevent laser light from escaping the storage housing. A laser fiber clamp (42,123) is mounted to the open end to secure the laser optical fiber.

    摘要翻译： 一种用于临时存储细长柔性激光光纤（12）的自由端（12a）的激光光纤存储装置（10,100）。 具有开口端（116）的存储壳体（14,114）具有设置在其中的细长柔性管（28,128），以容纳细长的柔性激光光纤，以防止激光从存储壳体逸出。 存储壳体内的节流器（32,117a，117b）减小了细长柔性管的内径。 此外，用于临时存储细长柔性激光光纤（12）的自由端（12a）的激光光纤存储装置（40,100）设置有夹具（42,123）。 存储壳体（41,114）具有设置在存储壳体内的开口端（41a，116）和细长柔性管（28,128），以容纳细长的柔性激光光纤，以防止激光从存储壳体逸出。 激光光纤夹具（42,123）安装在开口端以固定激光光纤。

    Indicating device with warning dosage indicator
    8.
    发明授权
    Indicating device with warning dosage indicator 有权
    带警告剂量指示器的指示装置

    公开(公告)号：US07621273B2

    公开(公告)日：2009-11-24

    申请号：US10968815

    申请日：2004-10-18

    申请人： Robert Morton ,  Winston Z. Lu

    发明人： Robert Morton ,  Winston Z. Lu

    IPC分类号： A62B11/00 ,  A61M11/00 ,  B67D5/08 ,  B67D5/22

    CPC分类号： A61M15/0076 ,  A61M15/0065 ,  A61M15/0073 ,  A61M15/0075 ,  A61M15/009

    摘要： An indicating device suitable for indicating the number of dosages of a substance that have been dispensed from or remain in a container includes at least one first indicator member incrementally moveable to a plurality of positions and a second indicator member moveable in response to a predetermined number of movements of the at least one first indicator member. The at least one first indicator member includes primary dosage indicia adapted to indicate the number of dosages of substance that have been dispensed from or remain in the container. The second indicator member includes secondary dosage indicia adapted to indicate that less than a minimum predetermined number of dosages of substance remain in the container. In one preferred embodiment, the primary dosage indicia are configured as numerical indicia and the secondary dosage indicia are configured as color indicia. In another aspect, a device for dispensing dosages of a substance includes a dispenser housing and a container disposed in the dispenser housing. The indicating device is located adjacent to and is actuated by one or the other of the top or bottom of the container. A method for indicating the number of metered dosages of medicaments dispensed from or remaining in the container is also provided.

    摘要翻译： 适于指示从容器中分配或保留在容器中的物质的剂量数量的指示装置包括至少一个第一指示器构件，其可递增地移动到多个位置，第二指示器构件可响应于预定数量的 所述至少一个第一指示器构件的运动。 所述至少一个第一指示器构件包括主要剂量标记，其适于指示已从或从容器分配的物质的剂量数。 第二指示器构件包括适于指示小于预定数量的物质的物质残留在容器中的次级剂量标记。 在一个优选的实施方案中，主要剂量标记被配置为数字标记，次级剂量标记被配置为颜色标记。 在另一方面，用于分配物质的剂量的装置包括分配器壳体和设置在分配器壳体中的容器。 指示装置位于容器的顶部或底部中的一个或另一个附近并被致动。 还提供了用于指示从容器中分配或保留在容器中的计量剂量的计量剂量的方法。

    LAYERED IMAGE ASSEMBLY
    10.
    发明申请
    LAYERED IMAGE ASSEMBLY 有权
    层叠图像组件

    公开(公告)号：US20080028646A1

    公开(公告)日：2008-02-07

    申请号：US11834898

    申请日：2007-08-07

    申请人： John Sullivan ,  Jeffrey Samson ,  Robert Morton

    发明人： John Sullivan ,  Jeffrey Samson ,  Robert Morton

    IPC分类号： G09F1/00 ,  G09F3/00

    CPC分类号： G09F3/0292 ,  G09F3/0289 ,  G09F3/10 ,  G09F2003/0205 ,  G09F2003/022 ,  G09F2003/0222 ,  G09F2003/0252 ,  G09F2003/0277 ,  G09F2003/0285

    摘要： A layered assembly includes a first adhesive layer and a protective top layer affixed permanently on all sides to the first adhesive layer. The assembly also includes a first image layer onserted between the first adhesive layer and the protective top layer, wherein the protective top layer is provided over the first image layer and at least a portion of the protective top layer can be removed to reveal the first image layer.

    摘要翻译： 分层组件包括第一粘合剂层和永久地固定在第一粘合剂层的所有侧面上的保护顶层。 组件还包括插在第一粘合剂层和保护顶层之间的第一图像层，其中保护顶层设置在第一图像层之上，并且可以去除保护顶层的至少一部分以露出第一图像 层。