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8 条记录 (耗时 0.027 秒)

    Optical measuring head
    1.
    发明授权
    Optical measuring head 有权
    光学测头

    公开(公告)号：US07486394B2

    公开(公告)日：2009-02-03

    申请号：US11514538

    申请日：2006-09-02

    申请人： Peter Lehmann ,  Peter Lücke ,  Jürgen Mohr ,  Carlos Javier Moran-Iglesias ,  Wolfgang Osten ,  Aiko Ruprecht ,  Sven Schönfelder

    发明人： Peter Lehmann ,  Peter Lücke ,  Jürgen Mohr ,  Carlos Javier Moran-Iglesias ,  Wolfgang Osten ,  Aiko Ruprecht ,  Sven Schönfelder

    IPC分类号： G01J3/00

    CPC分类号： G01B11/24 ,  G01B2210/50

    摘要： A measuring head (4) according to the invention comprises the combination of a zone lens (26), which is preferably a diffractive lens, with a hemispherical lens (23) or a GRIN lens (33). This represents a concept capable of miniaturization, resulting in very slender measuring heads (4) having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.

    摘要翻译： 根据本发明的测量头（4）包括优选为衍射透镜的区域透镜（26）与半球形透镜（23）或GRIN透镜（33）的组合。 这表示能够小型化的概念，导致具有高数值孔径的非常细长的测量头（4），并因此导致最佳分辨能力。 这样的测量头对于测量头对被测量表面的取向或相对于测量头的光轴的倾斜定位而对角度误差不敏感。

    Optical measuring head
    2.
    发明申请
    Optical measuring head 有权
    光学测头

    公开(公告)号：US20070046935A1

    公开(公告)日：2007-03-01

    申请号：US11514538

    申请日：2006-09-02

    申请人： Peter Lehmann ,  Peter Lucke ,  Jurgen Mohr ,  Carlos Moran-Iglesias ,  Wolfgang Osten ,  Aiko Ruprecht ,  Sven Schonfelder

    发明人： Peter Lehmann ,  Peter Lucke ,  Jurgen Mohr ,  Carlos Moran-Iglesias ,  Wolfgang Osten ,  Aiko Ruprecht ,  Sven Schonfelder

    IPC分类号： G01J3/28 ,  G01N21/00

    CPC分类号： G01B11/24 ,  G01B2210/50

    摘要： A measuring head (4) according to the invention comprises the combination of a zone lens (26), which is preferably a diffractive lens, with a hemispherical lens (23) or a GRIN lens (33). This represents a concept capable of miniaturization, resulting in very slender measuring heads (4) having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.

    摘要翻译： 根据本发明的测量头（4）包括优选为衍射透镜的区域透镜（26）与半球形透镜（23）或GRIN透镜（33）的组合。 这表示能够小型化的概念，导致具有高数值孔径的非常细长的测量头（4），并因此导致最佳分辨能力。 这样的测量头对于测量头对被测量表面的取向或相对于测量头的光轴的倾斜定位而对角度误差不敏感。

    Measurement of the Positions of Centres of Curvature of Optical Surfaces of a Multi-Lens Optical System
    5.
    发明申请
    Measurement of the Positions of Centres of Curvature of Optical Surfaces of a Multi-Lens Optical System 有权
    多透镜光学系统光学表面曲率中心位置的测量

    公开(公告)号：US20120133924A1

    公开(公告)日：2012-05-31

    申请号：US13302697

    申请日：2011-11-22

    申请人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    发明人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    IPC分类号： G01B11/14 ,  G01B9/00

    CPC分类号： G01M11/0221

    摘要： A method measures the positions of centres of curvature of optical surfaces of a multi-lens optical system. The spacings between the surfaces are measured along a reference axis using an interferometer. Subsequently the centres of curvature of the surfaces are measured using an optical angle-measuring device. In the course of the measurement of the position of the centre of curvature of a surface situated within the optical system, the measured positions of the centres of curvature of the surfaces situated between this surface and the angle-measuring device and the previously measured spacings between the surfaces are taken into consideration computationally. In this way, a particularly high accuracy of measurement is achieved, because desired spacings do not have to be fallen back upon.

    摘要翻译： 一种方法测量多透镜光学系统的光学表面的曲率中心的位置。 使用干涉仪沿着参考轴测量表面之间的间距。 随后，使用光学角度测量装置测量表面的曲率中心。 在测量位于光学系统内的表面的曲率中心的位置的过程中，位于该表面和角度测量装置之间的表面的曲率中心的测量位置和之前测量的间隔在 在计算上考虑表面。 以这种方式，由于所需的间隔不必下降，所以实现了特别高的测量精度。

    Method and apparatus for measuring spacings between optical surfaces of an optical system
    6.
    发明授权
    Method and apparatus for measuring spacings between optical surfaces of an optical system 有权
    用于测量光学系统的光学表面之间的间隔的方法和装置

    公开(公告)号：US08760666B2

    公开(公告)日：2014-06-24

    申请号：US13302675

    申请日：2011-11-22

    申请人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    发明人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    IPC分类号： G01B11/02

    CPC分类号： G01B9/0209 ,  G01B9/02025 ,  G01B11/14 ,  G01B11/272 ,  G01M11/0221

    摘要： A method for measuring spacings between optical surfaces of a multi-lens optical system includes detecting the centring state of the optical system by taking into consideration all optical surfaces of the optical system. Then the optical system is adjusted in such a way, taking the centring state into consideration, that the optical axis of the optical system is aligned as far as possible with a reference axis. In a next step the spacings between the optical surfaces are determined with the aid of a short-coherence interferometer. The measuring-light ray directed onto the optical system for this purpose runs likewise along the reference axis.

    摘要翻译： 用于测量多透镜光学系统的光学表面之间的间隔的方法包括通过考虑光学系统的所有光学表面来检测光学系统的对中状态。 然后，以考虑到定心状态的方式调整光学系统，使得光学系统的光轴尽可能与参考轴对准。 在下一步骤中，借助于短相干干涉仪来确定光学表面之间的间距。 为此目的，指向光学系统的测量光线同样沿着参考轴线运行。

    Method and Apparatus for Measuring Spacings Between Optical Surfaces of an Optical System
    7.
    发明申请
    Method and Apparatus for Measuring Spacings Between Optical Surfaces of an Optical System 有权
    用于测量光学系统的光学表面之间的间隔的方法和装置

    公开(公告)号：US20120133951A1

    公开(公告)日：2012-05-31

    申请号：US13302675

    申请日：2011-11-22

    申请人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    发明人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    IPC分类号： G01B11/02

    CPC分类号： G01B9/0209 ,  G01B9/02025 ,  G01B11/14 ,  G01B11/272 ,  G01M11/0221

    摘要： A method for measuring spacings between optical surfaces of a multi-lens optical system includes detecting the centring state of the optical system by taking into consideration all optical surfaces of the optical system. Then the optical system is adjusted in such a way, taking the centring state into consideration, that the optical axis of the optical system is aligned as far as possible with a reference axis. In a next step the spacings between the optical surfaces are determined with the aid of a short-coherence interferometer. The measuring-light ray directed onto the optical system for this purpose runs likewise along the reference axis.

    摘要翻译： 用于测量多透镜光学系统的光学表面之间的间隔的方法包括通过考虑光学系统的所有光学表面来检测光学系统的对中状态。 然后，以考虑到定心状态的方式调整光学系统，使得光学系统的光轴尽可能与参考轴对准。 在下一步骤中，借助于短相干干涉仪来确定光学表面之间的间距。 为此目的，指向光学系统的测量光线同样沿着参考轴线运行。

    Measurement of the positions of centres of curvature of optical surfaces of a multi-lens optical system
    8.
    发明授权
    Measurement of the positions of centres of curvature of optical surfaces of a multi-lens optical system 有权
    多透镜光学系统的光学表面的曲率中心位置的测量

    公开(公告)号：US08913234B2

    公开(公告)日：2014-12-16

    申请号：US13302697

    申请日：2011-11-22

    申请人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    发明人： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

    IPC分类号： G01N21/00 ,  G01M11/02

    CPC分类号： G01M11/0221

    摘要： A method measures the positions of centers of curvature of optical surfaces of a multi-lens optical system. The spacings between the surfaces are measured along a reference axis using an interferometer. Subsequently the centers of curvature of the surfaces are measured using an optical angle-measuring device. In the course of the measurement of the position of the center of curvature of a surface situated within the optical system, the measured positions of the centers of curvature of the surfaces situated between this surface and the angle-measuring device and the previously measured spacings between the surfaces are taken into consideration computationally. In this way, a particularly high accuracy of measurement is achieved, because desired spacings do not have to be fallen back upon.

    摘要翻译： 一种方法测量多透镜光学系统的光学表面的曲率中心的位置。 使用干涉仪沿着参考轴测量表面之间的间距。 随后，使用光学角度测量装置测量表面的曲率中心。 在测量位于光学系统内的表面的曲率中心的位置的过程中，位于该表面和角度测量装置之间的表面的曲率中心的测量位置和之前测量的间隔在 在计算上考虑表面。 以这种方式，由于所需的间隔不必下降，所以实现了特别高的测量精度。