摘要:
An interferometric confocal method and assembly for terabyte volume optical data memories couples two-beam spectral interferometry to chromatic confocal technology and permits a longitudinal splitting of foci in the memory volume, with the foci having limited diffraction. A spectrometer is located downstream of the interferometer with confocal discrimination in the beam path. A diffractive optical zone lens (DOZE) with a usage of the first diffraction order is introduced into the interferometric beam path to achieve longitudinal chromatic splitting. The interferometer can be a fiber-coupled interferometer with a retroreflector in the fiber-coupled reference arm and with wavelength-dependent optical path difference modification by dispersion or diffraction. The optical path difference in the interferometer is set so that easily detectable wavelets are formed from detectable interferograms by spectral analysis.
摘要:
An interferometric confocal method and assembly for terabyte volume optical data memories couples two-beam spectral interferometry to chromatic confocal technology and permits a longitudinal splitting of foci in the memory volume, with the foci having limited diffraction. A spectrometer is located downstream of the interferometer with confocal discrimination in the beam path. A diffractive optical zone lens (DOZE) with a usage of the first diffraction order is introduced into the interferometric beam path to achieve longitudinal chromatic splitting. The interferometer can be a fibre-coupled interferometer with a retroreflector in the fibre-coupled reference arm and with wavelength-dependent optical path difference modification by dispersion or diffraction. The optical path difference in the interferometer is set so that easily detectable wavelets are formed from detectable interferograms by spectral analysis.
摘要:
A chromatic confocal technique and apparatus for the rapid three-dimensional measurement of an object shape, particularly of a tooth in a patient's jaw, using an array of polychromatic point light sources, a planar detector matrix, a beam splitter for lateral spectral separation, and an objective for illuminating and recording the object. Spectral defined reference light bundles are generated, injected into the detection beam path via a reference beam path and, following spectral splitting, are focused on the detector matrix as reference image points, wherein laterally shifted sub-matrices are numerically defined on the detector matrix for spectral analysis of the object light, which sub-matrices are implemented as spectral cells for three-dimensional measurement of the shape of the object.
摘要:
A measuring head (4) according to the invention comprises the combination of a zone lens (26), which is preferably a diffractive lens, with a hemispherical lens (23) or a GRIN lens (33). This represents a concept capable of miniaturization, resulting in very slender measuring heads (4) having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.
摘要:
The invention relates to an improved encoding disk for an optical rotation angle sensor or a rotary encoder, an optical rotation sensor or rotary encoder comprising an improved encoding disk, and a method for optically correcting or compensating for an angle measuring error of a rotary encoder, in particular an angle measuring error which is contingent on a displacement or decentralization of the encoding disk. The encoding disk (20) comprises at least one measuring track (22) and at least one compensating track (24), wherein the measuring track (22) is in a first radial region of the encoding disk (20); and the compensating track (24) is centered with regard to the measuring track (22) on a second radial region of the encoding disk (20) so that the center of the measuring track (22) coincides with the center of the compensating track (24). The compensating track (24) is preferably designed such that at least one part of the light incident on a region of the compensating track is deflected by the compensating track (24) radially in the direction of the axis through the common center of the compensating track (24) and the measuring track (22). The direction of the readout light which is deflected by the compensating track preferably intersects the axis through the common center of the compensating track and the measuring track, wherein the distance between the compensating track and said intersection corresponds to the length of the light path between the compensating track and the measuring track. The readout light can be coherent or incoherent. The radius of the compensating track can be less than, greater than, or equal to the radius of the measuring track. The compensating track (24) preferably has a diffractive structure.
摘要:
A measuring head (4) according to the invention comprises the combination of a zone lens (26), which is preferably a diffractive lens, with a hemispherical lens (23) or a GRIN lens (33). This represents a concept capable of miniaturization, resulting in very slender measuring heads (4) having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.
摘要:
The invention relates to a method and arrangement for short coherence holography for distance measurement, for profile detection and/or for 3D detection of one or more object elements and/or object areas and/or objects or for readout of holographic volume memories with a holographic interferometer and with at least one short coherence light source. For each optically detected object element in the hologram the holographic interferometer has an optical path difference clearly unequal to zero. At least one spectrally integrally detecting, rastered detector is arranged. The short coherence light source with frequency comb is designed with the optical delay length Y1. Detected holograms are digitally reconstructed. Relative distances of object elements are digitally calculated from the hologram reconstructions, so that a 3D point cloud of object elements and/or object areas and/or objects is produced. Data can be read out optically in parallelized form from holographic volume memories or three-dimensionally structured signatures.
摘要:
The invention relates to an improved encoding disk for an optical rotation angle sensor or a rotary encoder, an optical rotation sensor or rotary encoder comprising an improved encoding disk, and a method for optically correcting or compensating for an angle measuring error of a rotary encoder, in particular an angle measuring error which is contingent on a displacement or decentralization of the encoding disk. The encoding disk (20) comprises at least one measuring track (22) and at least one compensating track (24), wherein the measuring track (22) is in a first radial region of the encoding disk (20); and the compensating track (24) is centered with regard to the measuring track (22) on a second radial region of the encoding disk (20) so that the center of the measuring track (22) coincides with the center of the compensating track (24). The compensating track (24) is preferably designed such that at least one part of the light incident on a region of the compensating track is deflected by the compensating track (24) radially in the direction of the axis through the common center of the compensating track (24) and the measuring track (22). The direction of the readout light which is deflected by the compensating track preferably intersects the axis through the common center of the compensating track and the measuring track, wherein the distance between the compensating track and said intersection corresponds to the length of the light path between the compensating track and the measuring track. The readout light can be coherent or incoherent. The radius of the compensating track can be less than, greater than, or equal to the radius of the measuring track. The compensating track (24) preferably has a diffractive structure.
摘要:
An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.
摘要:
An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.