摘要:
Exemplary systems and methods for generating data associated with at least one portion of a sample can be provided. For example, according to one exemplary embodiment of such systems and methods, it is possible to provide a particular radiation using at least one first arrangement. The particular radiation can include at least one first electro-magnetic radiation directed to at least one sample and at least one second electro-magnetic radiation directed to a reference arrangement. The first radiation and/or the second radiation can comprise a plurality of wavelengths. The first electro-magnetic radiation can be spectrally dispersed along at least one portion of the sample. The second electro-magnetic radiation measured at two or more different lengths of the reference arrangement with respect to the first arrangement. Data can be generated which is associated with the first and second electro-magnetic radiations obtained at the two different lengths using at least one second arrangement which comprises a spectrometer arrangement.
摘要:
A differential filtering chromatic confocal microscopic system comprises a chromatic dispersion objective for receiving and axially dispersing a broadband light from a light source and projecting dispersed lights onto an object thereby forming an object light reflected therefrom; an optical modulation module for dividing the object light into a first and a second object lights; a pair of optical intensity sensing module, respectively having a spatial filter with a different pinhole diameter or a slit width from each other, for detecting the first and second object lights, thereby obtaining a plurality of first and second optical intensity signals; and a signal processor for respectively processing the plurality of first and second optical intensity signals thereby obtaining a plurality of differential rational values of optical intensity and determining a corresponding object depth associated with each differential rational value according to a relation between signal intensity ratio and object surface depth.
摘要:
An apparatus for performing low coherence ranging of a sample with high transverse resolution and large depth of focus, comprising an optical ranging system comprising a light source, a means for directing light from the light source to the sample, a means for directing reflected light from the sample to a detector, at least one detector, a means for processing light data received by the detector and which generates an image; and an optical element having a transverse resolution defined as .Δris less than or equal to about 5 μm, and a depth of focus Δz of at least about 50 μm.
摘要:
Apparatus and methods are described for optically analyzing an object having a plurality of layers, without needing to use a reference mirror. An extended broadband light source produces light, and directs the light toward the object, such as to create respective images of the light source on the respective layers of the object. An imaging system gathers light that is reflected from a point of the object into a conjugate point in the detector. The detector determines the thicknesses of the plurality of layers at the point of the object by analyzing, within the gathered light, interference between light reflected from the plurality of layers of the object at the point. Other applications are also described.
摘要:
A differential filtering chromatic confocal microscopic system comprises a chromatic dispersion objective for receiving and axially dispersing a broadband light from a light source and projecting dispersed lights onto an object thereby forming an object light reflected therefrom; an optical modulation module for dividing the object light into a first and a second object lights; a pair of optical intensity sensing module, respectively having a spatial filter with a different pinhole diameter or a slit width from each other, for detecting the first and second object lights, thereby obtaining a plurality of first and second optical intensity signals; and a signal processor for respectively processing the plurality of first and second optical intensity signals thereby obtaining a plurality of differential rational values of optical intensity and determining a corresponding object depth associated with each differential rational value according to a relation between signal intensity ratio and object surface depth.
摘要:
A method and an arrangement are provided for scalable confocal interferometry for distance measurement, for 3-D detection of an object, for OC tomography with an object imaging interferometer and at least one light source. The interferometer has an optical path difference not equal to zero at each optically detected object element. Thus, the maxima of a sinusoidal frequency wavelet, associated with each detected object element, each have a frequency difference Δf_Objekt. At least one spectrally integrally detecting, rastered detector is arranged to record the object. The light source preferably has a frequency comb, and the frequency comb differences Δf_Quelle are changed in a predefined manner over time in a scan during measuring. In the process, the frequency differences Δf_Quelle are made equal to the frequency difference Δf_Objekt or equal to an integer multiple of the frequency differences Δf_Objekt at least once for each object element.
摘要:
An interferometric confocal method and assembly for terabyte volume optical data memories couples two-beam spectral interferometry to chromatic confocal technology and permits a longitudinal splitting of foci in the memory volume, with the foci having limited diffraction. A spectrometer is located downstream of the interferometer with confocal discrimination in the beam path. A diffractive optical zone lens (DOZE) with a usage of the first diffraction order is introduced into the interferometric beam path to achieve longitudinal chromatic splitting. The interferometer can be a fibre-coupled interferometer with a retroreflector in the fibre-coupled reference arm and with wavelength-dependent optical path difference modification by dispersion or diffraction. The optical path difference in the interferometer is set so that easily detectable wavelets are formed from detectable interferograms by spectral analysis.
摘要:
A material-working device with working beams of a beam generator and with in-situ measurement of a working distance between the beam generator and a workpiece, the material-working device including a working laser; a laser scanner for the working laser, the laser scanner including a two-dimensional deflecting device with scanner mirrors and a variable refocusing device at varying working distances; and a sensor device including a spectrometer and at least one sensor light source, wherein measuring beams together scan a working area of the workpiece by the laser scanner and an objective lens while gathering the working distance, and the measuring beams of at least two of the light sources of the sensor device being linearly polarized and being coupled into a working beam path of the laser scanner of the material-working device by an optical coupling element in a collimated state with crossed polarization directions.
摘要:
A method and an arrangement are provided for scalable confocal interferometry for distance measurement, for 3-D detection of an object, for Optical Coherence Tomography (OCT) tomography with an object imaging interferometer and at least one light source. The interferometer has an optical path difference not equal to zero at each optically detected object element. Thus, the maxima of a sinusoidal frequency wavelet, associated with each detected object element, each have a frequency difference Δf_Object. At least one spectrally integrally detecting, rastered detector is arranged to record the object. The light source preferably has a frequency comb, and the frequency comb differences Δf_Source are changed in a predefined manner over time in a scan during measuring. In the process, the frequency differences Δf_Source are made equal to the frequency difference Δf_Object or equal to an integer multiple of the frequency differences Δf_Object at least once for each object element.
摘要:
A material-working device with working beams of a beam generator and with in-situ measurement of a working distance between the beam generator and a workpiece, the material-working device including a working laser; a laser scanner for the working laser, the laser scanner including a two-dimensional deflecting device with scanner mirrors and a variable refocusing device at varying working distances; and a sensor device including a spectrometer and at least one sensor light source, wherein measuring beams together scan a working area of the workpiece by the laser scanner and an objective lens while gathering the working distance, and the measuring beams of at least two of the light sources of the sensor device being linearly polarised and being coupled into a working beam path of the laser scanner of the material-working device by an optical coupling element in a collimated state with crossed polarisation directions.