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公开(公告)号：US20180031686A1
公开(公告)日：2018-02-01
申请号：US15782750
申请日：2017-10-12
发明人： Nai-Kuei Kuo , Kostadin Dimitrov Djordjev , Ranjith Ranganathan , Nao Sugawara Chuei , Ashish Hinger , David William Burns
CPC分类号： G01S7/52017 , G01S15/02 , G06K9/0002
摘要： Techniques describe structures and methods for generating larger output signals and improving image quality of ultrasonic sensors by inclusion of an acoustic cavity in the sensor stack. In some embodiments, an ultrasonic sensor unit may be tuned during manufacturing or during a provisioning phase to work with different thicknesses and materials. In some embodiments, a standing wave signal may be generated using an acoustic cavity in the ultrasonic sensor unit for capturing an ultrasonic image of an object placed on a sensor surface. In some implementations, the ultrasonic sensor may include an ultrasonic transmitter, a piezoelectric receiver, a thin film transistor (TFT) layer and a TFT substrate positioned between the transmitter and the receiver, one or more adhesive layers, and optional cover materials and coatings. The thickness, density and speed of sound of the sensor materials and associated adhesive attachment layers may be used to attain the desired acoustic cavity and improved performance.
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公开(公告)号：US11798308B2
公开(公告)日：2023-10-24
申请号：US17448037
申请日：2021-09-17
发明人： Jessica Liu Strohmann , Hrishikesh Vijaykumar Panchawagh , Nai-Kuei Kuo , Yipeng Lu , Ali Lopez , Kostadin Dimitrov Djordjev
CPC分类号： G06V40/1306 , B06B1/0688 , H10K59/65 , B06B2201/70
摘要： Some disclosed implementations include an ultrasonic sensor stack and an acoustic resonator. The acoustic resonator may be configured to enhance ultrasonic waves transmitted by the ultrasonic sensor stack in an ultrasonic frequency range that is suitable for ultrasonic fingerprint sensors. In some examples, the acoustic resonator may include one or more low-impedance layers residing between a first higher-impedance layer and a second higher-impedance layer. Each of the one or more low-impedance layers may have a lower acoustic impedance than an acoustic impedance of the first higher-impedance layer or an acoustic impedance of the second higher-impedance layer. At least one low-impedance layer may have a thickness corresponding to a multiple of a half wavelength at a peak frequency of the acoustic resonator. The peak frequency may be within a frequency range from 1 MHz. to 20 MHz.
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公开(公告)号：US10001552B2
公开(公告)日：2018-06-19
申请号：US14883583
申请日：2015-10-14
发明人： Hrishikesh Vijaykumar Panchawagh , Hao-Yen Tang , Yipeng Lu , Kostadin Dimitrov Djordjev , Suryaprakash Ganti , David William Burns , Ravindra Vaman Shenoy , Jon Bradley Lasiter , Nai-Kuei Kuo , Firas Sammoura
IPC分类号： H01L41/09 , H01L41/113 , B06B1/06 , G01S7/52 , H01L41/047 , G10K11/34 , G06F3/041 , G06F3/043 , G06K9/00 , G10K11/26 , G01S7/521 , G01S15/04 , G01S15/89 , H01L41/08 , B06B1/02
CPC分类号： G01S7/5208 , B06B1/0207 , B06B1/0607 , B06B1/0644 , B06B1/0666 , B06B2201/20 , B06B2201/55 , G01S7/521 , G01S15/04 , G01S15/89 , G01S15/8915 , G06F3/0412 , G06F3/0416 , G06F3/043 , G06F3/0436 , G06F2203/04101 , G06K9/0002 , G06K9/00335 , G10K11/26 , G10K11/34 , G10K11/341 , G10K11/346 , H01L41/047 , H01L41/08
摘要： A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.
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公开(公告)号：US20160350573A1
公开(公告)日：2016-12-01
申请号：US15115058
申请日：2015-03-05
发明人： Jack Conway Kitchens, II , John Keith Schneider , Ashish Hinger , Ranjith Ranganathan , Nai-Kuei Kuo , Kostadin Dimitrov Djordjev , Stephen Michael Gojevic , David William Burns , Nao Sugawara Chuei , Eliza Yingzi Du , Ming Yu Chen , Kwokleung Chan , Jin Gu , Esra Vural
CPC分类号： G06K9/0002 , G01S15/8952 , G06K9/00067 , G06K9/00114 , G06K9/6289
摘要： Systems and methods for multi-spectral ultrasonic imaging are disclosed. In one embodiment, a finger is scanned at a plurality of ultrasonic scan frequencies. Each scan frequency provides an image information set describing a plurality of pixels of the finger including a signal-strength indicating an amount of energy reflected from a surface of a platen on which a finger is provided. For each of the pixels, the pixel output value corresponding to each of the scan frequencies is combined to produce a combined pixel out put value for each pixel. Systems and methods for improving the data capture of multi-spectral ultrasonic imaging are also disclosed.
摘要翻译： 公开了用于多光谱超声成像的系统和方法。 在一个实施例中，以多个超声波扫描频率扫描手指。 每个扫描频率提供描述手指的多个像素的图像信息集，其包括指示从其上提供手指的台板的表面反射的能量的信号强度。 对于每个像素，对应于每个扫描频率的像素输出值被组合以产生每个像素的组合像素输出值。 还公开了用于改进多光谱超声成像的数据捕获的系统和方法。
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公开(公告)号：US20150165479A1
公开(公告)日：2015-06-18
申请号：US14569256
申请日：2014-12-12
发明人： Jon Bradley Lasiter , Ravindra Vaman Shenoy , Evgeni Petrovich Gousev , Hrishikesh Panchawagh , David William Burns , Nai-Kuei Kuo , Jonathan Charles Griffiths , Suryaprakash Ganti
CPC分类号： B06B1/0666 , G06F3/0412 , G06F3/043 , G06F3/0436 , G06K9/0002 , G06K9/00335 , G10K9/125 , H01L41/0973 , H01L41/22 , H01L41/31 , Y10T29/42
摘要： A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on a substrate. The multilayer stack may include an anchor structure disposed over the substrate, a piezoelectric layer stack disposed over the anchor structure, and a mechanical layer disposed proximate to the piezoelectric layer stack. The piezoelectric layer stack may be disposed over a cavity. The mechanical layer may seal the cavity and, together with the piezoelectric layer stack, is supported by the anchor structure and forms a membrane over the cavity, the membrane being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.
摘要翻译： 压电微机械超声换能器（PMUT）包括设置在基板上的多层堆叠。 多层堆叠可以包括设置在衬底上的锚结构，设置在锚结构上的压电层堆叠，以及靠近压电层堆叠设置的机械层。 压电层堆叠可以设置在空腔上。 机械层可以密封空腔，并且与压电层堆叠一起由锚结构支撑并且在空腔上形成膜，该膜被配置为当PMUT接收或传输时经历挠曲运动和振动中的一个或两个 超声信号。
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公开(公告)号：US10274590B2
公开(公告)日：2019-04-30
申请号：US15782750
申请日：2017-10-12
发明人： Nai-Kuei Kuo , Kostadin Dimitrov Djordjev , Ranjith Ranganathan , Nao Sugawara Chuei , Ashish Hinger , David William Burns
摘要： Techniques describe structures and methods for generating larger output signals and improving image quality of ultrasonic sensors by inclusion of an acoustic cavity in the sensor stack. In some embodiments, an ultrasonic sensor unit may be tuned during manufacturing or during a provisioning phase to work with different thicknesses and materials. In some embodiments, a standing wave signal may be generated using an acoustic cavity in the ultrasonic sensor unit for capturing an ultrasonic image of an object placed on a sensor surface. In some implementations, the ultrasonic sensor may include an ultrasonic transmitter, a piezoelectric receiver, a thin film transistor (TFT) layer and a TFT substrate positioned between the transmitter and the receiver, one or more adhesive layers, and optional cover materials and coatings. The thickness, density and speed of sound of the sensor materials and associated adhesive attachment layers may be used to attain the desired acoustic cavity and improved performance.
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公开(公告)号：US09817108B2
公开(公告)日：2017-11-14
申请号：US14589783
申请日：2015-01-05
CPC分类号： G01S7/52017 , G01S15/02 , G06K9/0002
摘要： Techniques describe structures and methods for generating larger output signals and improving image quality of ultrasonic sensors by inclusion of an acoustic cavity in the sensor stack. In some embodiments, an ultrasonic sensor unit may be tuned during manufacturing or during a provisioning phase to work with different thicknesses and materials. In some embodiments, a standing wave signal may be generated using an acoustic cavity in the ultrasonic sensor unit for capturing an ultrasonic image of an object placed on a sensor surface. In some implementations, the ultrasonic sensor may include an ultrasonic transmitter, a piezoelectric receiver, a thin film transistor (TFT) layer and a TFT substrate positioned between the transmitter and the receiver, one or more adhesive layers, and optional cover materials and coatings. The thickness, density and speed of sound of the sensor materials and associated adhesive attachment layers may be used to attain the desired acoustic cavity and improved performance.
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公开(公告)号：US20160107194A1
公开(公告)日：2016-04-21
申请号：US14883583
申请日：2015-10-14
发明人： Hrishikesh Vijaykumar Panchawagh , Hao-Yen Tang , Yipeng Lu , Kostadin Dimitrov Djordjev , Suryaprakash Ganti , David William Burns , Ravindra Vaman Shenoy , Jon Bradley Lasiter , Nai-Kuei Kuo , Firas Sammoura
IPC分类号： B06B1/06 , H01L41/047 , H01L41/053 , H01L41/04
CPC分类号： G01S7/5208 , B06B1/0207 , B06B1/0607 , B06B1/0644 , B06B1/0666 , B06B2201/20 , B06B2201/55 , G01S7/521 , G01S15/04 , G01S15/89 , G01S15/8915 , G06F3/0412 , G06F3/0416 , G06F3/043 , G06F3/0436 , G06F2203/04101 , G06K9/0002 , G06K9/00335 , G10K11/26 , G10K11/34 , G10K11/341 , G10K11/346 , H01L41/047 , H01L41/08
摘要： A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.
摘要翻译： 压电微机械超声换能器（PMUT）包括设置在空腔上方的隔膜，所述隔膜包括压电层堆叠，所述压电层堆叠包括压电层，与收发器电路电耦合的第一电极和与所述收发器电路电耦合的第二电极。 第一电极可以设置在隔膜的第一部分中，并且第二电极可以设置在隔膜的第二，分离的部分中。 第一和第二电极中的每一个设置在压电层的第一表面上或其附近，第一表面与空腔相对。 PMUT被配置为在第一时间段期间通过第一电极传输第一超声波信号，并且在第二时间段期间通过第二电极接收第二超声波信号，第一时间段和第二时间段至少是 部分重叠。
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公开(公告)号：US11823483B2
公开(公告)日：2023-11-21
申请号：US17448031
申请日：2021-09-17
发明人： Jessica Liu Strohmann , Hrishikesh Vijaykumar Panchawagh , Nai-Kuei Kuo , Yipeng Lu , Ali Lopez , Kostadin Dimitrov Djordjev
CPC分类号： G06V40/1306 , G06F21/32 , H03H9/17
摘要： Some disclosed implementations include an ultrasonic sensor stack and an acoustic resonator. The acoustic resonator may be configured to enhance ultrasonic waves transmitted by the ultrasonic sensor stack in an ultrasonic frequency range that is suitable for ultrasonic fingerprint sensors. In some examples, the acoustic resonator may include one or more low-impedance layers residing between a first higher-impedance layer and a second higher-impedance layer. Each of the one or more low-impedance layers may have a lower acoustic impedance than an acoustic impedance of the first higher-impedance layer or an acoustic impedance of the second higher-impedance layer. At least one low-impedance layer may have a thickness corresponding to a multiple of a half wavelength at a peak frequency of the acoustic resonator. The peak frequency may be within a frequency range from 1 MHz. to 20 MHz.
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公开(公告)号：US10478858B2
公开(公告)日：2019-11-19
申请号：US14569256
申请日：2014-12-12
发明人： Jon Bradley Lasiter , Ravindra Vaman Shenoy , Evgeni Petrovich Gousev , Hrishikesh Panchawagh , David William Burns , Nai-Kuei Kuo , Jonathan Charles Griffiths , Suryaprakash Ganti
摘要： A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on a substrate. The multilayer stack may include an anchor structure disposed over the substrate, a piezoelectric layer stack disposed over the anchor structure, and a mechanical layer disposed proximate to the piezoelectric layer stack. The piezoelectric layer stack may be disposed over a cavity. The mechanical layer may seal the cavity and, together with the piezoelectric layer stack, is supported by the anchor structure and forms a membrane over the cavity, the membrane being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.
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