-
公开(公告)号：US20150048514A1
公开(公告)日：2015-02-19
申请号：US13967243
申请日：2013-08-14
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Hairong Tang , Yaoling Pan , Tsengyou Syau
IPC: H01L23/48 , H01L21/768
CPC classification number: H01L23/481 , B81B2207/07 , B81C1/00095 , H01L21/768 , H01L21/76801 , H01L21/76838 , H01L23/5226 , H01L2924/0002 , H01L2924/00
Abstract: This disclosure provides systems, methods and apparatus for a stacked via having a top via structure and a bottom via structure. In one aspect, the bottom via structure includes a bottom dielectric layer and a bottom via extending through the bottom dielectric layer. The bottom via includes a bottom metal formed on the bottom dielectric layer, where the bottom via is substantially filled by a dielectric material. The top via structure includes a top dielectric layer over the bottom metal and a top via extending to a top plane of the bottom via in the top dielectric layer. The top via includes a top metal formed on the top dielectric layer, where the top metal is in electrical contact with the bottom metal at a peripheral area of the bottom via structure.
Abstract translation: 本公开提供了具有顶部通孔结构和底部通孔结构的堆叠通孔的系统，方法和装置。 一方面，底部通孔结构包括底部电介质层和延伸通过底部电介质层的底部通孔。 底部通孔包括形成在底部电介质层上的底部金属，其中底部通孔基本上由介电材料填充。 顶部通孔结构包括在底部金属上的顶部电介质层和顶部通孔，其在顶部电介质层中延伸到底部通孔的顶部平面。 顶部通孔包括形成在顶部电介质层上的顶部金属，其中顶部金属在底部通孔结构的外围区域与底部金属电接触。
-
公开(公告)号：US20150277099A1
公开(公告)日：2015-10-01
申请号：US14564851
申请日：2014-12-09
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： John Hyunchul Hong , Jian Jim Ma , Bing Wen , Tallis Young Chang , Edward Keat Leem Chan , Brandon John Hong , Kristopher Andrew Lavery , Yaoling Pan , Cheonhong Kim
CPC classification number: G02B26/001 , G06T1/20 , G09G3/2003 , G09G3/346 , G09G3/3466 , G09G5/003
Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.
Abstract translation: 本公开提供了具有一个或多个柔性支撑柱的机电系统（EMS）装置的装置，系统和方法。 一方面，EMS装置包括衬底，衬底上的固定电极，衬底上的一个或多个柔性支撑柱以及固定电极上的可移动电极，并由一个或多个柔性支撑柱支撑。 可移动电极构造成在静电致动时跨越可移动电极和固定电极之间的间隙移动，其中一个或多个柔性支撑柱包括第一有机材料，并且可构造成压缩以允许可移动电极跨越 间隙。
-
公开(公告)号：US09477076B2
公开(公告)日：2016-10-25
申请号：US14564851
申请日：2014-12-09
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： John Hyunchul Hong , Jian Jim Ma , Bing Wen , Tallis Young Chang , Edward Keat Leem Chan , Brandon John Hong , Kristopher Andrew Lavery , Yaoling Pan , Cheonhong Kim
CPC classification number: G02B26/001 , G06T1/20 , G09G3/2003 , G09G3/346 , G09G3/3466 , G09G5/003
Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.
Abstract translation: 本公开提供了具有一个或多个柔性支撑柱的机电系统（EMS）装置的装置，系统和方法。 一方面，EMS装置包括衬底，衬底上的固定电极，衬底上的一个或多个柔性支撑柱以及固定电极上的可移动电极，并由一个或多个柔性支撑柱支撑。 可移动电极构造成在静电致动时跨越可移动电极和固定电极之间的间隙移动，其中一个或多个柔性支撑柱包括第一有机材料，并且可构造成压缩以允许可移动电极跨越 间隙。
-
公开(公告)号：US20160299332A1
公开(公告)日：2016-10-13
申请号：US14682588
申请日：2015-04-09
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Tallis Young Chang , John Hyunchul Hong , Yaoling Pan
IPC: G02B26/00
CPC classification number: G02B26/001 , B81B7/0041 , B81C2203/0145 , G09G3/3466
Abstract: This disclosure provides systems, methods and apparatus for packaging an array of electromechanical systems (EMS) devices such as interferometric modulators (IMODs). In one aspect, a backplate including an aperture can be sealed to a substrate supporting an array of unreleased EMS devices to form a package. A release etch may be performed through the aperture after sealing the backplate to the substrate. By performing the release etch after sealing the backplate to the substrate, the effect on the array of EMS devices of the formation and outgassing of the sealant material can be reduced.
Abstract translation: 本公开提供了用于封装诸如干涉式调制器（IMOD）的机电系统（EMS）装置阵列的系统，方法和装置。 在一个方面，包括孔的背板可以被密封到支撑未发行的EMS装置的阵列的基板上以形成封装。 在将背板密封到基底之后，可以通过孔进行释放蚀刻。 通过在将背板密封到基板上之后执行释放蚀刻，可以减少对密封材料的形成和除气的EMS装置阵列的影响。
-
公开(公告)号：US20160231471A1
公开(公告)日：2016-08-11
申请号：US14616476
申请日：2015-02-06
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Jian Jim Ma , Yaoling Pan , Jyothi Karri , Sapna Patel
CPC classification number: G02B3/0037 , G02B5/0221
Abstract: An apparatus may include a first layer having a range of first layer indices of refraction. The range of first layer indices of refraction may include at least two indices of refraction. The apparatus may include a second layer proximate the first layer. The second layer may have a second index of refraction that is outside (e.g., lower than) the range of first layer indices of refraction. An interface between the first layer and the second layer may include an array of microlenses of substantially randomized sizes. The microlenses may include sections of features that are substantially spherical, polygonal, conical, etc. According to some implementations, the first and second layers may be disposed between an array of display device pixels and a substantially transparent substrate, such as a glass substrate, a polymer substrate, etc.
Abstract translation: 装置可以包括具有第一层折射率范围的第一层。 第一层折射率的范围可以包括至少两个折射率。 该装置可以包括靠近第一层的第二层。 第二层可以具有在第一层折射率的范围之外（例如，低于）的第二折射率。 第一层和第二层之间的界面可以包括基本上随机化的尺寸的微透镜阵列。 微透镜可以包括基本上是球形，多边形，圆锥形等的特征部分。根据一些实现方式，第一和第二层可以设置在显示装置像素阵列和基本上透明的基板（例如玻璃基板）之间， 聚合物基材等
-
Patent Agency Ranking
公开(公告)号：US20160149516A1
公开(公告)日：2016-05-26
申请号：US14554612
申请日：2014-11-26
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： John Hyunchul Hong , Tallis Young Chang , Edward Keat Leem Chan , Isak Clark Reines , Bing Wen , Yaoling Pan
CPC classification number: B81B3/0086 , B81B3/0072 , B81B2201/047 , B81B2203/0109 , B81B2203/0163
Abstract: This disclosure provides systems, methods and apparatus for forming electromechanical devices having a gap between a movable layer and a fixed layer. In one aspect, the movable layer may be supported by hinge structures, and the design of the hinge structure may be controlled to provide a desired amount of flexure, providing electromechanical devices with a desired gap height. The height of the gap may be larger than the thickness a sacrificial material used during the fabrication process. In another aspect, the design of the hinge structure may be used to control threshold voltages of electromechanical devices.
Abstract translation: 本公开提供了用于形成在可移动层和固定层之间具有间隙的机电装置的系统，方法和装置。 在一个方面，可移动层可以由铰链结构支撑，并且可以控制铰链结构的设计以提供所需量的挠曲，为机电装置提供期望的间隙高度。 间隙的高度可以大于在制造过程中使用的牺牲材料的厚度。 在另一方面，铰链结构的设计可用于控制机电装置的阈值电压。
-
公开(公告)号：US20150277098A1
公开(公告)日：2015-10-01
申请号：US14564846
申请日：2014-12-09
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： John Hyunchul Hong , Jian Jim Ma , Bing Wen , Tallis Young Chang , Edward Keat Leem Chan , Brandon John Hong , Kristopher Andrew Lavery , Yaoling Pan , Cheonhong Kim
CPC classification number: G02B26/001 , G06T1/20 , G09G3/2003 , G09G3/346 , G09G3/3466 , G09G5/003
Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material.
Abstract translation: 本公开提供了具有非电活性吸收体的机电系统（EMS）装置的装置，系统和方法。 一方面，EMS装置包括在基板上的固定电极，固定电极上方的电介质层，介电层上的吸收体和吸收体上的可动电极。 可移动电极构造成移动到吸收体和可动电极之间的多个位置，以限定多个间隙高度。 此外，吸收体包括非电活性材料。 在一些实施方案中，吸收器可以包括在电绝缘材料中具有多个颗粒的光学层。
-
8.发明申请公开(公告)号：US20160274436A1
公开(公告)日：2016-09-22
申请号：US14662031
申请日：2015-03-18
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Tallis Young Chang , Yaoling Pan , Bing Wen , Edward Keat Leem Chan
IPC: G02F1/21
CPC classification number: G02F1/21 , G02B26/001
Abstract: Various implementations described herein involve interferometric modulators (IMODs), which may be single-mirror IMODs (SMIs). Such IMODs may include an absorber stack and a mirror stack. The absorber stack and the mirror stack may define a gap therebetween and may be capable of being positioned in a plurality of positions relative to one another to form a plurality of gap heights. A hinge area may physically connect the mirror stack and an anchor area. Some such IMODs have hinge areas without any metal layer. However, the hinge area may be capable of forming an electrical connection with at least one metal layer of the mirror stack. For example, such IMODs may have a hinge area that includes a non-metal conductor.
Abstract translation: 本文描述的各种实施方案涉及干涉式调制器（IMOD），其可以是单镜像IMOD（SMI）。 这样的IMOD可以包括吸收体堆叠和反射镜堆叠。 吸收体堆叠和反射镜叠层可在其间形成间隙，并且可以相对于彼此定位在多个位置以形成多个间隙高度。 铰链区域可以物理地连接镜子堆叠和锚定区域。 一些这样的IMOD具有没有任何金属层的铰链区域。 然而，铰链区域可以能够与反射镜叠层的至少一个金属层形成电连接。 例如，这样的IMOD可以具有包括非金属导体的铰链区域。
-
公开(公告)号：US20160232858A1
公开(公告)日：2016-08-11
申请号：US14619991
申请日：2015-02-11
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Yaoling Pan , Victor Louis Arockiaraj Pushparaj , John Hong , Edward Chan
CPC classification number: G09G3/3466 , B81B3/00 , B81B3/0072 , B81B2201/047 , B81B2203/0163 , B81B2203/053 , C23C14/0042 , G02B5/0875 , G02B26/001 , G02B26/02
Abstract: This disclosure provides devices, systems, and methods for improving creep resistance and mechanical strength of a MEMS display device. The MEMS display device can include a movable reflective structure connected and supported by a support structure. The movable reflective structure can include at least a transition metal layer sandwiched between two aluminum or aluminum alloy layers. The aluminum or aluminum alloy layers can be doped with the transition metal upon annealing. The transition metal layer between the aluminum or aluminum alloy layers can control the mechanical, optical, and electrical properties of the MEMS display device.
Abstract translation: 本公开提供了用于改善MEMS显示装置的抗蠕变性和机械强度的装置，系统和方法。 MEMS显示装置可以包括由支撑结构连接和支撑的可移动反射结构。 可移动反射结构可以包括夹在两个铝或铝合金层之间的至少一个过渡金属层。 铝或铝合金层可以在退火时掺杂过渡金属。 铝或铝合金层之间的过渡金属层可以控制MEMS显示装置的机械，光学和电学性质。
-
公开(公告)号：US20150277097A1
公开(公告)日：2015-10-01
申请号：US14564835
申请日：2014-12-09
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： John Hyunchul Hong , Jian Jim Ma , Bing Wen , Tallis Young Chang , Edward Keat Leem Chan , Brandon John Hong , Kristopher Andrew Lavery , Yaoling Pan , Cheonhong Kim
CPC classification number: G02B26/001 , G06T1/20 , G09G3/2003 , G09G3/346 , G09G3/3466 , G09G5/003
Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device made of organic materials. In one aspect, the EMS device includes a stationary electrode over a substrate and a movable electrode over the stationary electrode, where the movable electrode is configured to move across a gap between the movable electrode and the stationary electrode by electrostatic actuation. One or more layers between the movable electrode and the stationary electrode may be made of polymer material. One or more layers in the EMS device may include an optical layer made of polymer material and configured to attenuate energy of light corresponding to one or more wavelength ranges. In some implementations, the optical layer may include a plurality of absorber particles in a host material that is electrically insulating.
Abstract translation: 本公开提供了由有机材料制成的机电系统（EMS）装置的装置，系统和方法。 一方面，EMS装置包括在基板上的固定电极和位于固定电极上方的可动电极，其中可动电极构造成通过静电驱动而跨越可移动电极和固定电极之间的间隙移动。 可动电极和固定电极之间的一层或多层可以由聚合物材料制成。 EMS装置中的一个或多个层可以包括由聚合物材料制成并被配置为衰减对应于一个或多个波长范围的光的能量的光学层。 在一些实施方案中，光学层可以包括电绝缘的主体材料中的多个吸收剂颗粒。
-
-
-
-
-
-
-
-
-
Search Results
10
records
(took 0.024 seconds)
