-
公开(公告)号:US09816801B2
公开(公告)日:2017-11-14
申请号:US15072756
申请日:2016-03-17
Applicant: RAMOT AT TEL-AVIV UNIVERSITY LTD.
Inventor: Pinhas Girshovitz , Natan Tzvi Shaked
IPC: G01B9/02 , G01B9/04 , G02B21/00 , G02B21/14 , G03H1/26 , G01B11/06 , G02B5/12 , G02B17/08 , G02B27/10 , G02B27/28 , G03H1/04
CPC classification number: G01B9/0203 , G01B9/02011 , G01B9/02027 , G01B9/02028 , G01B9/02041 , G01B9/02047 , G01B9/02085 , G01B9/02097 , G01B9/04 , G01B11/06 , G02B5/12 , G02B17/08 , G02B21/0056 , G02B21/14 , G02B27/106 , G02B27/283 , G03H1/0443 , G03H1/265 , G03H2001/0445 , G03H2001/0456 , G03H2001/046
Abstract: The present invention provides a sample inspection and quantitative imaging system and method for performing off-axis interferometric imaging while enabling to record off-axis holograms in an extended field of view (FOV) than possible using a given camera and imaging setup, and thus to enlarge (e.g. double, triple, or even more than this) the interferometric FOV, without changing the imaging parameters, such as the magnification and the resolution.
-
公开(公告)号:US09910256B2
公开(公告)日:2018-03-06
申请号:US15378494
申请日:2016-12-14
Applicant: RAMOT AT TEL-AVIV UNIVERSITY LTD.
Inventor: Natan Tzvi Shaked , Pinhas Girshovitz
CPC classification number: G02B21/0056 , G01B9/02024 , G01B9/02032 , G01B9/02042 , G01B9/02049 , G01B9/02054 , G01B9/02057 , G01B9/02075 , G01B9/02097 , G01B9/04 , G01B11/06 , G01B2290/50 , G02B21/0008 , G02B21/0016 , G02B21/008 , G02B21/0088
Abstract: The present invention provides a novel simple, portable, compact and inexpensive approach for interferometric optical thickness measurements that can be easily incorporated into an existing microscope (or other imaging systems) with existing cameras. According to the invention, the interferometric device provides a substantially stable, easy to align common path interferometric geometry, while eliminating a need for controllably changing the optical path of the beam. To this end, the inexpensive and easy to align interferometric device of the invention is configured such that it applies the principles of the interferometric measurements to a sample beam only, being a single input into the interferometric device.
-
公开(公告)号:US10337851B2
公开(公告)日:2019-07-02
申请号:US15089691
申请日:2016-04-04
Applicant: Ramot at Tel-Aviv University Ltd.
Inventor: Pinhas Girshovitz , Natan Tzvi Shaked
Abstract: Techniques for extracting phase data of off-axis interferogram images are disclosed. At least one sample-related interferogram image associated with a sample is spectrally decomposed to obtain a set of frequency components thereof, and a portion of the set of frequency components is used to generate at least one complex image having a reduced size being smaller in size than the sample-related interferogram image and being indicative of the phase data of the at least one sample-related interferogram image. The reduced size complex image is then used to generate a phase image of the least one sample-related interferogram image.
-
公开(公告)号:US20150049343A1
公开(公告)日:2015-02-19
申请号:US14386031
申请日:2013-03-14
Applicant: RAMOT AT TEL-AVIV UNIVERSITY LTD.
Inventor: Natan Tzvi Shaked , Pinhas Girshovitz
CPC classification number: G02B21/0056 , G01B9/02024 , G01B9/02032 , G01B9/02042 , G01B9/02049 , G01B9/02054 , G01B9/02057 , G01B9/02075 , G01B9/02097 , G01B9/04 , G01B11/06 , G01B2290/50 , G02B21/0008 , G02B21/0016 , G02B21/008 , G02B21/0088
Abstract: The present invention provides a novel simple, portable, compact and inexpensive approach for interferometric optical thickness measurements that can be easily incorporated into an existing microscope (or other imaging systems) with existing cameras. According to the invention, the interferometric device provides a substantially stable, easy to align common path interferometric geometry, while eliminating a need for controllably changing the optical path of the beam. To this end, the inexpensive and easy to align interferometric device of the invention is configured such that it applies the principles of the interferometric measurements to a sample beam only, being a single input into the interferometric device.
Abstract translation: 本发明提供了一种用于干涉光学厚度测量的新型简单,便携,紧凑和便宜的方法,其可以容易地结合到具有现有照相机的现有显微镜(或其他成像系统)中。 根据本发明,干涉测量装置提供了基本上稳定的,容易对准的共同路径干涉几何,同时消除了对可控地改变光束的光路的需要。 为此,本发明的便宜且易于对准的干涉测量装置被配置为使得其仅将干涉测量的原理应用于仅用于干涉测量装置的单个输入的采样光束。
-
公开(公告)号:US09574868B2
公开(公告)日:2017-02-21
申请号:US14386031
申请日:2013-03-14
Applicant: RAMOT AT TEL-AVIV UNIVERSITY LTD.
Inventor: Natan Tzvi Shaked , Pinhas Girshovitz
CPC classification number: G02B21/0056 , G01B9/02024 , G01B9/02032 , G01B9/02042 , G01B9/02049 , G01B9/02054 , G01B9/02057 , G01B9/02075 , G01B9/02097 , G01B9/04 , G01B11/06 , G01B2290/50 , G02B21/0008 , G02B21/0016 , G02B21/008 , G02B21/0088
Abstract: The present invention provides a novel simple, portable, compact and inexpensive approach for interferometric optical thickness measurements that can be easily incorporated into an existing microscope (or other imaging systems) with existing cameras. According to the invention, the interferometric device provides a substantially stable, easy to align common path interferometric geometry, while eliminating a need for controllably changing the optical path of the beam. To this end, the inexpensive and easy to align interferometric device of the invention is configured such that it applies the principles of the interferometric measurements to a sample beam only, being a single input into the interferometric device.
Abstract translation: 本发明提供了一种用于干涉光学厚度测量的新型简单,便携,紧凑和便宜的方法,其可以容易地结合到具有现有照相机的现有显微镜(或其他成像系统)中。 根据本发明,干涉测量装置提供了基本上稳定的,容易对准的共同路径干涉几何,同时消除了对可控地改变光束的光路的需要。 为此,本发明的便宜且易于对准的干涉测量装置被配置为使得其仅将干涉测量的原理应用于仅用于干涉测量装置的单个输入的采样光束。
-
-
-
-