Fast phase processing of off-axis interferograms

    公开(公告)号:US10337851B2

    公开(公告)日:2019-07-02

    申请号:US15089691

    申请日:2016-04-04

    Abstract: Techniques for extracting phase data of off-axis interferogram images are disclosed. At least one sample-related interferogram image associated with a sample is spectrally decomposed to obtain a set of frequency components thereof, and a portion of the set of frequency components is used to generate at least one complex image having a reduced size being smaller in size than the sample-related interferogram image and being indicative of the phase data of the at least one sample-related interferogram image. The reduced size complex image is then used to generate a phase image of the least one sample-related interferogram image.

    PORTABLE INTERFEROMETRIC DEVICE
    4.
    发明申请
    PORTABLE INTERFEROMETRIC DEVICE 有权
    便携式干涉仪

    公开(公告)号:US20150049343A1

    公开(公告)日:2015-02-19

    申请号:US14386031

    申请日:2013-03-14

    Abstract: The present invention provides a novel simple, portable, compact and inexpensive approach for interferometric optical thickness measurements that can be easily incorporated into an existing microscope (or other imaging systems) with existing cameras. According to the invention, the interferometric device provides a substantially stable, easy to align common path interferometric geometry, while eliminating a need for controllably changing the optical path of the beam. To this end, the inexpensive and easy to align interferometric device of the invention is configured such that it applies the principles of the interferometric measurements to a sample beam only, being a single input into the interferometric device.

    Abstract translation: 本发明提供了一种用于干涉光学厚度测量的新型简单,便携,紧凑和便宜的方法,其可以容易地结合到具有现有照相机的现有显微镜(或其他成像系统)中。 根据本发明,干涉测量装置提供了基本上稳定的,容易对准的共同路径干涉几何,同时消除了对可控地改变光束的光路的需要。 为此,本发明的便宜且易于对准的干涉测量装置被配置为使得其仅将干涉测量的原理应用于仅用于干涉测量装置的单个输入的采样光束。

    Portable interferometric device
    5.
    发明授权
    Portable interferometric device 有权
    便携式干涉仪

    公开(公告)号:US09574868B2

    公开(公告)日:2017-02-21

    申请号:US14386031

    申请日:2013-03-14

    Abstract: The present invention provides a novel simple, portable, compact and inexpensive approach for interferometric optical thickness measurements that can be easily incorporated into an existing microscope (or other imaging systems) with existing cameras. According to the invention, the interferometric device provides a substantially stable, easy to align common path interferometric geometry, while eliminating a need for controllably changing the optical path of the beam. To this end, the inexpensive and easy to align interferometric device of the invention is configured such that it applies the principles of the interferometric measurements to a sample beam only, being a single input into the interferometric device.

    Abstract translation: 本发明提供了一种用于干涉光学厚度测量的新型简单,便携,紧凑和便宜的方法,其可以容易地结合到具有现有照相机的现有显微镜(或其他成像系统)中。 根据本发明,干涉测量装置提供了基本上稳定的,容易对准的共同路径干涉几何,同时消除了对可控地改变光束的光路的需要。 为此,本发明的便宜且易于对准的干涉测量装置被配置为使得其仅将干涉测量的原理应用于仅用于干涉测量装置的单个输入的采样光束。

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