Data collecting system and data transmitting method
    6.
    发明申请
    Data collecting system and data transmitting method 审中-公开
    数据采集​​系统和数据传输方法

    公开(公告)号:US20050131617A1

    公开(公告)日:2005-06-16

    申请号:US10985967

    申请日:2004-11-12

    CPC分类号: G08C15/06

    摘要: A data collecting system includes a data collecting device and plural data processing devices connected to the data collecting device by a cascade connection. For example, each of the data processing devices individually executes an A/D conversion and other data process, and adds data obtained by the data process to a data transmitting signal to transmit it to the subsequent cascade-connection data processing device in sequence. The data processing device at the head of the cascade connection generates the data transmitting signal including a data processing period and a communication period, and transmits it to the subsequent data processing device. Each of the data processing devices executes the data process in the data processing period, and transmits data obtained by the data process to the subsequent data processing device in the communication period on the basis of the data transmitting signal.

    摘要翻译: 数据采集​​系统包括数据采集装置和通过级联连接连接到数据采集装置的多个数据处理装置。 例如,每个数据处理装置分别执行A / D转换和其他数据处理,并且将通过数据处理获得的数据附加到数据发送信号,以将其依次发送到后续级联连接数据处理装置。 级联连接头部的数据处理装置生成包含数据处理期间和通信期间的数据发送信号,发送给后续的数据处理装置。 数据处理装置中的每一个在数据处理期间执行数据处理,并且根据数据发送信号将通过数据处理获得的数据发送到通信期间的后续数据处理装置。

    Semiconductor device
    7.
    发明授权
    Semiconductor device 失效
    半导体器件

    公开(公告)号:US06633069B2

    公开(公告)日:2003-10-14

    申请号:US09081613

    申请日:1998-05-20

    IPC分类号: H01L2976

    CPC分类号: H01L21/8249 H01L29/41708

    摘要: A bipolar transistor has metal silicide as a base lead-out electrode instead of conventional polysilicon, and the metal silicide film extends to an edge of an etching stopper layer, to reduce an emitter resistance and restrain an occurrence of an emitter plug effect. Such bipolar transistor can be utilized in a CMOS semiconductor device. In this case, (1) commonly using a process of providing an active base region, a base lead-out electrode and a collector lead-out electrode of the bipolar transistor and a process of providing gate electrodes a MOS field effect transistor, (2) commonly using a process of adding a p-type impurity into the active base region and the base lead-out electrode and a process of executing an ion-implantation for providing high-concentration impurity diffused layers of pMOS transistors, (3) commonly using a process of providing an etching stopper layer and a process of providing side wall insulating films of gate electrodes, and (4) commonly using a silicidation process of the base lead-out electrode and the collector lead-out electrode and a silicidation process of electrodes of MOS transistors. In other embodiment of the bipolar transistor, a single insulating film exist between the base layer and the emitter electrode in the peripheral of the emitter opening. By this construction, the etching stopper film is not necessary resulting in reducing the base resistance.

    摘要翻译: 双极晶体管具有金属硅化物作为基极引出电极而不是常规的多晶硅,并且金属硅化物膜延伸到蚀刻停止层的边缘,以降低发射极电阻并抑制发射极插塞效应的发生。 这种双极晶体管可以用在CMOS半导体器件中。 在这种情况下,(1)通常使用提供有源基极区域的工艺,双极晶体管的基极引出电极和集电极引出电极以及提供栅电极MOS场效应晶体管的工艺(2 )通常使用将p型杂质添加到有源基极区域和基极引出电极中的过程以及执行用于提供pMOS晶体管的高浓度杂质扩散层的离子注入的过程,(3)通常使用 提供蚀刻停止层的工艺和提供栅电极的侧壁绝缘膜的工艺,以及(4)通常使用基极引出电极和集电极引出电极的硅化工艺和电极的硅化工艺 的MOS晶体管。 在双极晶体管的另一个实施例中,在发射极开口周边的基极层和发射极之间存在单个绝缘膜。 通过这种结构,不需要蚀刻阻挡膜,导致降低基极电阻

    Semiconductor device and manufacturing method thereof

    公开(公告)号:US06566713B2

    公开(公告)日:2003-05-20

    申请号:US09963426

    申请日:2001-09-27

    申请人: Hideaki Nii

    发明人: Hideaki Nii

    IPC分类号: H01L2701

    摘要: A semiconductor device comprises an SOI substrate formed with a mono-crystalline semiconductor layer through an embedded insulating layer on a first conductivity type semiconductor substrate; a MIS type field-effect transistor provided within a device region defined by isolating said mono-crystalline semiconductor layer with a device isolation region and having a gate electrode; an opening formed penetrating said device isolation region and said embedded insulating layer and reaching said semiconductor substrate; and a substrate electrode provided covering said opening and taken out up to the surface flush with said gate electrode. And a method of manufacturing a semiconductor device, comprises providing a device isolation region for defining a device region on a mono-crystalline semiconductor layer of an SOI substrate formed with a mono-crystalline semiconductor layer through an embedded insulation payer on a semiconductor substrate of a first conductivity type; forming an opening penetrating said device isolation region and said embedded insulation layer and reaching said semiconductor substrate; depositing polysilicon on said SOI substrate and within said opening and providing a gate electrode and a substrate electrode of said MIS type field-effect transistor by executing the patterning thereon; and implanting impurities into said gate electrode and said substrate electrode.

    Method for manufacturing a lateral bipolar transistor
    10.
    发明授权
    Method for manufacturing a lateral bipolar transistor 失效
    横向双极晶体管的制造方法

    公开(公告)号:US06174779B1

    公开(公告)日:2001-01-16

    申请号:US09267775

    申请日:1999-03-15

    IPC分类号: H01L218228

    摘要: In a lateral bipolar transistor, its emitter region, base region, link base region, and so forth, are made in self alignment with side walls of masks by using partly overlapping two mask patterns. Therefore, not relying on the mask alignment accuracy, these regions are made in a precisely controlled positional relation. Thus, the lateral bipolar transistor, thus obtained, is reduced in parasitic resistance of the base and parasitic junction capacitance between the emitter and the base, and alleviated in variance of characteristics caused by fluctuation of the length of a link base region, length of the emitter-base junction and relative positions of the emitter and the collector, and can be manufactured with a high reproducibility.

    摘要翻译: 在横向双极晶体管中,通过使用部分重叠的两个掩模图案,其发射极区域,基极区域,链路基极区域等与掩模的侧壁自对准。 因此,不依赖于掩模对准精度,这些区域被精确控制位置关系。 因此,如此获得的横向双极晶体管的基极的寄生电阻和发射极与基极之间的寄生结电容减小,并且由于链路基极区域的长度的波动引起的特性的变化减轻, 发射极 - 基极结和发射极和集电极的相对位置,并且可以以高再现性制造。