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    TUNABLE SPECTRAL FILTER COMPRISING FABRY-PEROT INTERFEROMETER
    7.
    发明申请
    TUNABLE SPECTRAL FILTER COMPRISING FABRY-PEROT INTERFEROMETER 审中-公开
    包含FABRY-PEROT干涉仪的TUNNABLE光谱滤波器

    公开(公告)号：US20120206813A1

    公开(公告)日：2012-08-16

    申请号：US13503372

    申请日：2010-10-24

    Applicant: Naveh Bahat ,  Renald Leykin ,  Raviv Erlich

    Inventor： Naveh Bahat ,  Renald Leykin ,  Raviv Erlich

    IPC: G02B5/28

    CPC classification number: G01J3/26 ,  G02B26/001

    Abstract: Tunable spectral filter includes a Fabry-Pérot interferometer (FPI), at least three actuators, at least three respective spring elements, and at least three respective sensors. The FPI includes two optical elements each having a partially reflective surface, with an optical cavity defining an optical gap between the two surfaces. The actuators, spring elements and sensors are disposed along the periphery of the optical elements. Multi-wavelength incident light enters the first optical element toward the optical cavity. Each actuator applies a selective force to move the optical element surfaces relative to each other, as the respective spring element applies an opposing force, thereby establishing an optical gap width, while maintaining the optical element surfaces substantially in parallel. Each sensor continuously detects the optical gap width and the planar parallelism, and provides a feedback signal to the actuators to apply selective forces to adjust the optical gap width or planar parallelism, if necessary.

    Abstract translation: 可调谐光谱滤波器包括Fabry-Pérot干涉仪（FPI），至少三个致动器，至少三个相应的弹簧元件和至少三个相应的传感器。 FPI包括两个各自具有部分反射表面的光学元件，光学腔在两个表面之间限定光学间隙。 致动器，弹簧元件和传感器沿着光学元件的周边设置。 多波长入射光朝向光腔进入第一光学元件。 每个致动器施加选择力以使光学元件表面相对于彼此移动，因为相应的弹簧元件施加相反的力，从而在保持光学元件表面基本平行的同时建立光学间隙宽度。 每个传感器连续地检测光学间隙宽度和平面平行度，并且如果需要，则向致动器提供反馈信号以施加选择力以调整光学间隙宽度或平面平行度。

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