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公开(公告)号:US09261363B2
公开(公告)日:2016-02-16
申请号:US12303443
申请日:2007-06-06
申请人: Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人: Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号: G01C19/56 , G01C19/5762 , G01C19/5747
CPC分类号: G01C19/5762 , G01C19/5747
摘要: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.
摘要翻译: 偏航率传感器包括驱动质量元件,该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动,沿着沿表面延伸的第一轴线振动,具有检测质量元件,该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线,并且具有检测装置,通过该检测装置可以检测到检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置,横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。
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公开(公告)号:US20100000321A1
公开(公告)日:2010-01-07
申请号:US12303443
申请日:2007-06-06
申请人: Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Udo-Martin Gomez , Kersten Kehr
发明人: Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Udo-Martin Gomez , Kersten Kehr
IPC分类号: G01C19/56
CPC分类号: G01C19/5762 , G01C19/5747
摘要: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.
摘要翻译: 偏航率传感器包括驱动质量元件,该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动,沿着沿表面延伸的第一轴线振动,具有检测质量元件,该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线,并且具有检测装置,通过该检测装置可以检测检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置,横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。
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公开(公告)号:US20140326070A1
公开(公告)日:2014-11-06
申请号:US14334407
申请日:2014-07-17
申请人: Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人: Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号: G01P3/44 , F16F1/02 , G01C19/574
CPC分类号: G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译: 具有基板和多个可移动子结构的偏转速率传感器,其安装在所述基板的表面上,所述可移动子结构联接到共享的,特别是中心的弹簧元件,所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡,具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转,第一科里奥利元件用于检测围绕 第一轴线,第二科里奥利元件被提供用于检测围绕第二轴线的横摆率,所述第二轴线垂直于所述第一轴线定向。
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公开(公告)号:US20120060604A1
公开(公告)日:2012-03-15
申请号:US12734228
申请日:2008-10-02
申请人: Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人: Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
CPC分类号: G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译: 具有基板和多个可移动子结构的偏转速率传感器,其安装在所述基板的表面上,所述可移动子结构联接到共享的,特别是中心的弹簧元件,所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡,具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转,第一科里奥利元件用于检测围绕 第一轴线,第二科里奥利元件被提供用于检测围绕第二轴线的横摆率,所述第二轴线垂直于所述第一轴线定向。
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公开(公告)号:US09081027B2
公开(公告)日:2015-07-14
申请号:US12734228
申请日:2008-10-02
申请人: Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人: Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号: G01C19/56 , G01P3/44 , G01C19/574 , F16F1/02
CPC分类号: G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译: 具有衬底和多个可移动子结构的偏转速率传感器,其安装在衬底的表面上,可移动子结构耦合到共享的,特别是中心弹簧元件,其中可移动子结构可激发成耦合振荡 在平行于衬底的表面延伸的平面中,具有科里奥利元件的可移动子结构,其中可检测科里奥利力引起的科里奥利元件的偏转,第一科里奥利元件用于检测围绕第一轴线的偏航率, 提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件,所述第二轴线垂直于所述第一轴线定向。
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公开(公告)号:US07313958B2
公开(公告)日:2008-01-01
申请号:US10471635
申请日:2002-09-25
申请人: Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人: Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号: G01C19/00
CPC分类号: G01C19/5747
摘要: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.
摘要翻译: 提出了具有基板和科里奥利元件的旋转速率传感器,科里奥利元件位于基板的表面上方; 提供了一种驱动装置,通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置,通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。
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公开(公告)号:US07316161B2
公开(公告)日:2008-01-08
申请号:US10471832
申请日:2002-09-25
申请人: Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人: Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号: G01C19/00
CPC分类号: G01C19/5747
摘要: A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.
摘要翻译: 提出了具有基板和科里奥利元件的旋转速率传感器,科里奥利元件位于基板的表面之上; 所述科里奥利元件能够被诱导以平行于第一轴线(X)振动; 基于在第二轴线(Y)上的科里奥利力,基本上垂直于第一轴线(X)提供可检测的科里奥利元件的偏移; 所述第一和第二轴线(X,Y)平行于所述基板的表面设置,其中设置有力传递装置,所述装置被提供以在所述基板和所述科里奥利元件之间传递动态力效应。
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公开(公告)号:US20070234803A1
公开(公告)日:2007-10-11
申请号:US10577743
申请日:2004-08-13
申请人: Udo-Martin Gomez , Reinhard Neul , Kersten Kehr , Marko Rocznik
发明人: Udo-Martin Gomez , Reinhard Neul , Kersten Kehr , Marko Rocznik
IPC分类号: G01C19/56
CPC分类号: G01C19/5755
摘要: The yaw rate sensor of the present invention has force-conveying means. The central idea of the invention is that the force action conveyed by this arrangement has a frequency such that the frequency of the conveyed force action is an integral multiple of the frequency of the oscillation of the drive element parallel to the X-axis.
摘要翻译: 本发明的偏航率传感器具有力传递装置。 本发明的中心思想是通过这种布置传递的力作用具有这样的频率,使得所输送的力作用的频率是与驱动元件平行于X轴的振荡频率的整数倍。
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公开(公告)号:US06705164B2
公开(公告)日:2004-03-16
申请号:US10258336
申请日:2003-03-19
申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号: G01C1900
CPC分类号: G01C19/5747
摘要: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
摘要翻译: 一种偏转速率传感器,包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力,科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在 在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。
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公开(公告)号:US06691571B2
公开(公告)日:2004-02-17
申请号:US10258218
申请日:2003-05-29
申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号: G01C1900
CPC分类号: G01C19/5747
摘要: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.
摘要翻译: 描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。 诱导科里奥利元件平行于第一轴振荡。 响应于科里奥利力,科里奥利元件在垂直于第一轴线的第二轴线上偏转。 提供证明元件以证明偏转。
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