Yaw rate sensor
    1.
    发明授权
    Yaw rate sensor 有权
    偏航率传感器

    公开(公告)号:US09261363B2

    公开(公告)日:2016-02-16

    申请号:US12303443

    申请日:2007-06-06

    CPC分类号: G01C19/5762 G01C19/5747

    摘要: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

    摘要翻译: 偏航率传感器包括驱动质量元件,该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动,沿着沿表面延伸的第一轴线振动,具有检测质量元件,该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线,并且具有检测装置,通过该检测装置可以检测到检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置,横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

    YAW RATE SENSOR
    2.
    发明申请
    YAW RATE SENSOR 有权
    YAW RATE传感器

    公开(公告)号:US20100000321A1

    公开(公告)日:2010-01-07

    申请号:US12303443

    申请日:2007-06-06

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5762 G01C19/5747

    摘要: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

    摘要翻译: 偏航率传感器包括驱动质量元件,该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动,沿着沿表面延伸的第一轴线振动,具有检测质量元件,该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线,并且具有检测装置,通过该检测装置可以检测检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置,横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

    YAW-RATE SENSOR
    3.
    发明申请
    YAW-RATE SENSOR 审中-公开
    YAW-RATE传感器

    公开(公告)号:US20140326070A1

    公开(公告)日:2014-11-06

    申请号:US14334407

    申请日:2014-07-17

    IPC分类号: G01P3/44 F16F1/02 G01C19/574

    摘要: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译: 具有基板和多个可移动子结构的偏转速率传感器,其安装在所述基板的表面上,所述可移动子结构联接到共享的,特别是中心的弹簧元件,所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡,具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转,第一科里奥利元件用于检测围绕 第一轴线,第二科里奥利元件被提供用于检测围绕第二轴线的横摆率,所述第二轴线垂直于所述第一轴线定向。

    YAW-RATE SENSOR
    4.
    发明申请
    YAW-RATE SENSOR 有权
    YAW-RATE传感器

    公开(公告)号:US20120060604A1

    公开(公告)日:2012-03-15

    申请号:US12734228

    申请日:2008-10-02

    IPC分类号: G01P3/44 F16F3/00

    摘要: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译: 具有基板和多个可移动子结构的偏转速率传感器,其安装在所述基板的表面上,所述可移动子结构联接到共享的,特别是中心的弹簧元件,所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡,具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转,第一科里奥利元件用于检测围绕 第一轴线,第二科里奥利元件被提供用于检测围绕第二轴线的横摆率,所述第二轴线垂直于所述第一轴线定向。

    Rotational rate sensor
    6.
    发明授权
    Rotational rate sensor 有权
    转速传感器

    公开(公告)号:US07313958B2

    公开(公告)日:2008-01-01

    申请号:US10471635

    申请日:2002-09-25

    IPC分类号: G01C19/00

    CPC分类号: G01C19/5747

    摘要: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

    摘要翻译: 提出了具有基板和科里奥利元件的旋转速率传感器,科里奥利元件位于基板的表面上方; 提供了一种驱动装置,通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置,通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

    Yaw Rate Sensor
    8.
    发明申请
    Yaw Rate Sensor 审中-公开
    偏航率传感器

    公开(公告)号:US20070234803A1

    公开(公告)日:2007-10-11

    申请号:US10577743

    申请日:2004-08-13

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5755

    摘要: The yaw rate sensor of the present invention has force-conveying means. The central idea of the invention is that the force action conveyed by this arrangement has a frequency such that the frequency of the conveyed force action is an integral multiple of the frequency of the oscillation of the drive element parallel to the X-axis.

    摘要翻译: 本发明的偏航率传感器具有力传递装置。 本发明的中心思想是通过这种布置传递的力作用具有这样的频率,使得所输送的力作用的频率是与驱动元件平行于X轴的振荡频率的整数倍。