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公开(公告)号：US09479139B2
公开(公告)日：2016-10-25
申请号：US12769791
申请日：2010-04-29
Applicant: Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
Inventor： Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
CPC classification number: H03H9/131 , H03H3/04 , H03H9/02102 , H03H9/173 , H03H9/175
Abstract: An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.
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公开(公告)号：US07800457B2
公开(公告)日：2010-09-21
申请号：US11950644
申请日：2007-12-05
Applicant: Mark A. Unkrich , Richard C. Ruby , Wei Pang
Inventor： Mark A. Unkrich , Richard C. Ruby , Wei Pang
IPC: H03B5/32
Abstract: A self-calibrating temperature compensated oscillator includes a monolithic structure having a first resonator, a second resonator, and a heating element to heat the first and second resonators. The temperature coefficient of the second resonator is substantially greater than the temperature coefficient of the first resonator. A first oscillator circuit operates with the first resonator and outputs a first oscillator output signal having a first oscillating frequency. A second oscillator circuit operates with the second resonator and outputs a second oscillator output signal having a second oscillating frequency. A temperature determining circuit determines the temperature of the first resonator using the second oscillating frequency. A temperature compensator provides a control signal to the first oscillator in response to the determined temperature to adjust the first oscillating frequency and maintain it at a desired operating frequency.
Abstract translation: 自校准温度补偿振荡器包括具有第一谐振器，第二谐振器和加热元件的单片结构，以加热第一和第二谐振器。 第二谐振器的温度系数基本上大于第一谐振器的温度系数。 第一振荡器电路与第一谐振器一起工作并输出具有第一振荡频率的第一振荡器输出信号。 第二振荡器电路与第二谐振器一起工作并输出具有第二振荡频率的第二振荡器输出信号。 温度确定电路使用第二振荡频率确定第一谐振器的温度。 温度补偿器响应于所确定的温度向第一振荡器提供控制信号，以调整第一振荡频率并将其保持在期望的工作频率。
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公开(公告)号：US20090146746A1
公开(公告)日：2009-06-11
申请号：US11950644
申请日：2007-12-05
Applicant: Mark A. Unkrich , Richard C. Ruby , Wei Pang
Inventor： Mark A. Unkrich , Richard C. Ruby , Wei Pang
IPC: H03L1/04
Abstract: A self-calibrating temperature compensated oscillator includes a monolithic structure having a first resonator, a second resonator, and a heating element to heat the first and second resonators. The temperature coefficient of the second resonator is substantially greater than the temperature coefficient of the first resonator. A first oscillator circuit operates with the first resonator and outputs a first oscillator output signal having a first oscillating frequency. A second oscillator circuit operates with the second resonator and outputs a second oscillator output signal having a second oscillating frequency. A temperature determining circuit determines the temperature of the first resonator using the second oscillating frequency. A temperature compensator provides a control signal to the first oscillator in response to the determined temperature to adjust the first oscillating frequency and maintain it at a desired operating frequency.
Abstract translation: 自校准温度补偿振荡器包括具有第一谐振器，第二谐振器和加热元件的单片结构，以加热第一和第二谐振器。 第二谐振器的温度系数基本上大于第一谐振器的温度系数。 第一振荡器电路与第一谐振器一起工作并输出具有第一振荡频率的第一振荡器输出信号。 第二振荡器电路与第二谐振器一起工作并输出具有第二振荡频率的第二振荡器输出信号。 温度确定电路使用第二振荡频率确定第一谐振器的温度。 温度补偿器响应于所确定的温度向第一振荡器提供控制信号，以调整第一振荡频率并将其保持在期望的工作频率。
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公开(公告)号：US20080079516A1
公开(公告)日：2008-04-03
申请号：US11540413
申请日：2006-09-28
Applicant: Richard C. Ruby , Wei Pang
Inventor： Richard C. Ruby , Wei Pang
IPC: H03H9/58
Abstract: An oscillator including a high tone bulk acoustic resonator (HBAR), a film bulk acoustic resonator (FBAR) filter and a method of fabrication are described.
Abstract translation: 描述了包括高音体积声共振器（HBAR），薄膜体声波谐振器（FBAR）滤波器和制造方法的振荡器。
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5.发明授权Resonator device including electrode with buried temperature compensating layer 有权谐振器器件包括具有埋入温度补偿层的电极公开(公告)号：US08436516B2
公开(公告)日：2013-05-07
申请号：US13404095
申请日：2012-02-24
Applicant: Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
Inventor： Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
IPC: H01L41/08
CPC classification number: H03H9/131 , H03H3/04 , H03H9/02102 , H03H9/173 , H03H9/175
Abstract: An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.
Abstract translation: 声谐振器装置包括在基板上的复合第一电极，复合电极上的压电层和压电层上的第二电极。 第一电极包括具有正温度系数的掩埋温度补偿层。 压电层具有负温度系数，因此温度补偿层的正温度系数抵消压电层的负温度系数的至少一部分。
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Patent Agency Ranking
公开(公告)号：US07508286B2
公开(公告)日：2009-03-24
申请号：US11540413
申请日：2006-09-28
Applicant: Richard C. Ruby , Wei Pang
Inventor： Richard C. Ruby , Wei Pang
IPC: H03H9/00
Abstract: An oscillator comprises a substrate and a high tone bulk acoustic resonator (HBAR), which includes a portion of the substrate. The oscillator also comprises a film bulk acoustic resonator (FBAR) filter disposed over the substrate. The filter comprises a plurality of FBAR devices. The oscillator also comprises a plurality of acoustic isolators disposed in the substrate, wherein one of the isolators is disposed beneath each of the FBAR devices. A method of fabricating an oscillator is also disclosed.
Abstract translation: 振荡器包括衬底和高音量体声波谐振器（HBAR），其包括衬底的一部分。 振荡器还包括设置在衬底上的膜体声波谐振器（FBAR）滤波器。 滤波器包括多个FBAR装置。 振荡器还包括设置在基板中的多个隔声器，其中一个隔离器设置在每个FBAR装置的下方。 还公开了一种制造振荡器的方法。
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公开(公告)号：US09154103B2
公开(公告)日：2015-10-06
申请号：US13361724
申请日：2012-01-30
Applicant: Richard C. Ruby
Inventor： Richard C. Ruby
CPC classification number: H03H9/172 , H03H3/02 , H03H9/02102 , H03H9/08 , H03H9/54
Abstract: An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.
Abstract translation: 声谐振器装置包括环形声谐振器，加热器线圈和热传感器。 环形声谐振器位于形成在声谐振器装置的衬底中的沟槽之上。 加热器线圈围绕环形声谐振器的周边设置，加热器线圈包括被配置为接收加热器电流的电阻器。 热传感器被配置为响应于加热器线圈的温度来调节加热器电流。
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8.发明授权公开(公告)号：US07714684B2
公开(公告)日：2010-05-11
申请号：US12115666
申请日：2008-05-06
Applicant: Richard C. Ruby , Ronald S. Fazzio , Hongjun Feng , Paul D. Bradley
Inventor： Richard C. Ruby , Ronald S. Fazzio , Hongjun Feng , Paul D. Bradley
CPC classification number: H03H9/02086 , H03H3/02 , H03H9/02149 , H03H9/13 , H03H9/132 , H03H9/173 , H03H2003/0428
Abstract: Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
Abstract translation: 公开了一种包括基板，第一电极，压电材料层，第二电极和交替框架区域的声共振器。 第一电极与衬底相邻，并且第一电极具有外周边。 压电层与第一电极相邻。 第二电极邻近压电层，第二电极具有外周。 交替的框架区域在第一和第二电极之一上。
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公开(公告)号：US20090079514A1
公开(公告)日：2009-03-26
申请号：US11860107
申请日：2007-09-24
Applicant: Tiberiu Jamneala , Martha Small , Richard C. Ruby
Inventor： Tiberiu Jamneala , Martha Small , Richard C. Ruby
Abstract: A hybrid acoustic resonator filter and a communication device with a hybrid acoustic resonator filter is described.
Abstract translation: 描述了一种混合声学谐振滤波器和具有混合声谐振滤波器的通信装置。
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10.发明授权Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method 有权通过减去实施该方法的方法和装置在同一基板上制造具有不同频率的薄膜体声共振器（FBAR）的方法公开(公告)号：US06874211B2
公开(公告)日：2005-04-05
申请号：US09799205
申请日：2001-03-05
Applicant: Paul D. Bradley , John D. Larson, III , Richard C. Ruby
Inventor： Paul D. Bradley , John D. Larson, III , Richard C. Ruby
CPC classification number: H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , Y10T29/42
Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by reducing mass from a top electrode layer. For a substrate having multiple resonators, mass is reduced from only selected resonator to provide resonators having different resonance frequencies on the same substrate.
Abstract translation: 公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。 通过减少从顶部电极层的质量而在衬底上制造FBAR。 对于具有多个谐振器的衬底，仅从所选择的谐振器减小质量，以在同一衬底上提供具有不同谐振频率的谐振器。
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