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公开(公告)号：US20100110419A1
公开(公告)日：2010-05-06
申请号：US12570527
申请日：2009-09-30
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。
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2.发明申请SYSTEM AND METHOD FOR CONTROLLING LIGHT SCATTERED FROM A WORKPIECE SURFACE IN A SURFACE INSPECTION SYSTEM 有权用于控制表面检查系统中工件表面散射的光的系统和方法公开(公告)号：US20080304057A1
公开(公告)日：2008-12-11
申请号：US12142850
申请日：2008-06-20
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.
摘要翻译： 在一个实施例中，表面分析器系统包括将辐射束对准到表面上的辐射瞄准组件; 以及收集从表面散射的辐射的散射的辐射收集组件。 辐射瞄准组件产生主光束和次光束。 从主波束和次波束的反射中收集的数据可以单独使用或者与功率衰减程序组合在动态范围扩展程序中使用。
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公开(公告)号：US20100265518A1
公开(公告)日：2010-10-21
申请号：US12570465
申请日：2009-09-30
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
摘要翻译： 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统具有设置在后四分之一圆周的入射平面外部的后收集器，用于收集从工件表面散射的光。 背部收集器相对于归因于缺陷散射部分的散射光部分的雾度部分的散射光部分相对最小设置，或者在瑞利散射中相对最小。
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4.发明授权System and method for controlling light scattered from a workpiece surface in a surface inspection system 失效用于控制表面检查系统中从工件表面散射的光的系统和方法公开(公告)号：US07417722B2
公开(公告)日：2008-08-26
申请号：US11311904
申请日：2005-12-17
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features masking positioned in the collection and detection subsystem arranged to selectively prevent a portion of scattered light from passing through. Also included is a scatter absorbing system having a series of scatter absorbing elements for minimizing unrelated to the scatter associated with a desired location on the surface.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有位于收集和检测子系统中的掩蔽，该收集和检测子系统布置成选择性地防止一部分散射光通过。 还包括具有一系列散射吸收元件的散射吸收系统，用于最小化与与表面上的期望位置相关联的散射无关。
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5.发明授权System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece 有权通过分析工件上方的前四分之三区域中的散射光来检查工件表面的系统和方法公开(公告)号：US07605913B2
公开(公告)日：2009-10-20
申请号：US11311919
申请日：2005-12-17
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。
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6.发明授权System and method for inspection of a workpiece surface using multiple scattered light collectors 有权使用多个散射光收集器检测工件表面的系统和方法公开(公告)号：US08497984B2
公开(公告)日：2013-07-30
申请号：US11311943
申请日：2005-12-17
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 这些部件中的一些，最明显的是光束源子系统，光束扫描子系统和光学收集和检测子系统是模块化的，用于现场更换和/或维护。 光学收集和检测系统在后四分之一的四分之一区域中具有翼收集器和后收集器，用于从工件表面散射的收集的光。 这可以大大提高系统的测量能力。 还包括使用翼收集器和后收集器检测不对称缺陷的方法。
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公开(公告)号：US08330947B2
公开(公告)日：2012-12-11
申请号：US12570465
申请日：2009-09-30
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
摘要翻译： 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统的特征在于后置收集器，其设置在入射平面外侧的后四分之一圈中，用于收集从工件表面散射的光。 后收集器相对于归因于缺陷散射部分的散射光部分的雾度部分的散射光部分相对最小设置，或者在瑞利散射中相对最小。
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8.发明授权System and method for controlling light scattered from a workpiece surface in a surface inspection system 有权用于控制表面检查系统中从工件表面散射的光的系统和方法公开(公告)号：US07659974B2
公开(公告)日：2010-02-09
申请号：US12142850
申请日：2008-06-20
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.
摘要翻译： 在一个实施例中，表面分析器系统包括将辐射束对准到表面上的辐射瞄准组件; 以及收集从表面散射的辐射的散射的辐射收集组件。 辐射瞄准组件产生主光束和次光束。 从主波束和次波束的反射中收集的数据可以单独使用或者与功率衰减程序组合在动态范围扩展程序中使用。
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9.发明授权System and method for controlling a beam source in a workpiece surface inspection system 有权用于控制工件表面检查系统中的光束源的系统和方法公开(公告)号：US07557910B2
公开(公告)日：2009-07-07
申请号：US11311924
申请日：2005-12-17
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变扫描速度波束扫描子系统，优选地使用声光偏转器，具有光束补偿，使得可以实现可变扫描速度。 还包括用于通过使用散射减少补充来改善信噪比的方法和系统，以及用于选择性地和重复扫描表面上的感兴趣区域以便提供感兴趣区域的附加观察的系统和方法。
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公开(公告)号：US20100110420A1
公开(公告)日：2010-05-06
申请号：US12604052
申请日：2009-10-22
申请人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
发明人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。
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